Claims
- 1. An ink-jet printhead comprising:a pressure chamber forming unit in which pressure chambers for ink storage composed of multiple concave parts on one surface; and a piezoelectric actuator arranged on one surface of said pressure chamber forming unit and for generating pressure in each said pressure chamber selectively; and a vibration layer arranged on said one surface of said pressure chamber forming unit covering each pressure chamber, a lower electrode layer formed of conduction materials laminated on said vibration layer; a first piezoelectric layer laminated on said lower electrode layer, formed of piezoelectric materials polarized in the direction of its thickness having the size to cover multiple said pressure chambers; and an upper electrode layer formed of conduction materials laminated on said first piezoelectric layer, wherein: at least either said upper electrode layer or said lower electrode layer is formed of multiple electrodes separated and formed corresponding to each pressure chamber of the pressure chamber forming unit; wherein said vibration layer comprises a second piezoelectric layer formed of piezoelectric materials laminated under said lower electrode layer.
- 2. An ink-jet printhead as defined in claim 1,wherein said vibration layer of the piezoelectric actuator comprises an electrode layer formed of conduction materials laminated under said second piezoelectric layer.
- 3. A ink-jet printhead as defined in claim 1, wherein:said vibration layer, said lower electrode layer, said first piezoelectric layer and said upper electrode layer are successively laminated and formed by using the predetermined multi-layer plate manufacturing process.
- 4. A ink-jet printhead as defined in claim 1, wherein:one surface side of the first piezoelectric layer on which electrode layer is laminated and formed is separated corresponding respectively to each said electrode of the upper electrode layer and/or the lower electrode layer.
- 5. A ink-jet printhead as defined in claim 1, wherein said vibration layer is comprised of a part of said lower electrode layer.
- 6. An ink-jet printhead comprising:a pressure chamber forming unit in which pressure chambers for ink storage composed of multiple concave parts on one surface; and a piezoelectric actuator arranged on one surface of said pressure chamber forming unit and for generating pressure in each said pressure chamber selectively; and a vibration layer arranged on said one surface of said pressure chamber forming unit covering each pressure chamber, a lower electrode layer formed of conduction materials laminated on said vibration layer; a first piezoelectric layer laminated on said lower electrode layer, formed of piezoelectric materials polarized in the direction of its thickness having the size to cover multiple said pressure chambers; and an upper electrode layer formed of conduction materials laminated on said first piezoelectric layer, wherein: at least either said upper electrode layer or said lower electrode layer is formed of multiple electrodes separated and formed corresponding to each pressure chamber of the pressure chamber forming unit; wherein said vibration layer of the piezoelectric actuator comprises a ceramic layer formed of ceramic materials laminated under said lower electrode layer.
- 7. A ink-jet printhead as defined in claim 6, wherein:said vibration layer, said lower electrode layer, said first piezoelectric layer and said upper electrode layer are successively laminated and formed by using the predetermined multi-layer plate manufacturing process.
- 8. A ink-jet printhead as defined in claim 6, wherein:one surface side of the first piezoelectric layer on which electrode layer is laminated and formed is separated corresponding respectively to each said electrode of the upper electrode layer and/or the lower electrode layer.
- 9. A ink-jet printhead as defined in claim 6, wherein said vibration layer is comprised of a part of said lower electrode layer.
Priority Claims (3)
Number |
Date |
Country |
Kind |
P10-036156 |
Feb 1998 |
JP |
|
P10-036157 |
Feb 1998 |
JP |
|
P10-038616 |
Feb 1998 |
JP |
|
Parent Case Info
This is a divisional of application Ser. No. 09/423,793 filed Nov. 10, 1999 which is a continuation of PCT/JP99/00699 filed Feb. 18, 1999.
US Referenced Citations (2)
Number |
Name |
Date |
Kind |
6174051 |
Sakaida |
Jan 2001 |
B1 |
6431691 |
Tanikawa et al. |
Aug 2002 |
B1 |
Continuations (1)
|
Number |
Date |
Country |
Parent |
PCT/JP99/00699 |
Feb 1999 |
US |
Child |
09/423793 |
|
US |