Claims
- 1. A ink jet recording head comprising:a spacer comprising a silicon single-crystal substrate and having pressurizing chambers at a predetermined pitch in at least one array, ink supply ports and a common ink chamber, all formed by anisotropic etching of said silicon single-crystal substrate; a nozzle plate having nozzle openings at the same predetermined pitch as said pressurizing chambers, said nozzle plate being attached to one face of said spacer; an elastic plate for selectively expanding and contracting said pressurizing chambers, said elastic plate being attached to an opposite face of said spacer, wherein said spacer is further comprised of first recesses which correspond to said nozzle openings and are formed by half etching of said silicon single-crystal substrate on said one face of said spacer, second recesses which correspond to said pressurizing chambers and are formed by half etching of said silicon single-crystal substrate on said opposite face of said spacer, and nozzle communicating holes, wherein said first recesses and said second recesses are respectively communicated with each other, and said first recesses and said second recesses include said ink supply ports which are respectively communicated with said common ink chamber.
Priority Claims (5)
Number |
Date |
Country |
Kind |
7-251787 |
Sep 1995 |
JP |
|
7-269191 |
Sep 1995 |
JP |
|
7-260587 |
Oct 1995 |
JP |
|
7-306622 |
Oct 1995 |
JP |
|
8-170605 |
Jun 1996 |
JP |
|
Parent Case Info
This application is a continuation of Ser. No. 08/708,675 filed Sep. 5, 1996, now U.S. Pat. No. 6,139,132.
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Continuations (1)
|
Number |
Date |
Country |
Parent |
08/708675 |
Sep 1996 |
US |
Child |
09/556587 |
|
US |