Instrument for transferring boats for thermal treatment of semiconductor wafers

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Information

Patent Grant
D323173

References
Source

Patent Number
D323,173
Date Filed
Wednesday, January 25, 1989
35 years ago
Date Issued
Tuesday, January 14, 1992
32 years ago

Inventors
- Katsumi Ishii
- Mitsuo Katoh
Original Assignees
- Tel Sagami Limited
Examiners
- Dunkins; Bruce W.
- Davis; Antoine D.
Agents
- Oblon, Spivak, McClelland, Maier & Neustadt

US Classifications
- D15 - Machines not elsewhere specified
Field of Search
- US
- D15 144
- D15 199
- 219 390
- 219 411
- 414 222
- 414 225
- 414 226
- 414 433
- 432 6
- 432 33
- 432 153
- 432 239
- 432 253
- 432 258-261
- Term of Grant
  14Years

Information

Abstract

Description

Claims

The ornamental design for an instrument for transferring boats for thermal treatment of semiconductor wafers, as shown and described.

Priority Claims (1)

Number	Date	Country	Kind
63-29831	Jul 1988	JPX

US Referenced Citations (3)

Number	Name	Date	Kind
D210208	Frelin	Feb 1968
3961877	Johnson	Jun 1976
4041278	Boah	Aug 1977