TREA

Instrument for transferring boats for thermal treatment of semiconductor wafers

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Information

  • Patent Grant
  • D327078
  • Patent Number
    D327,078
  • Date Filed
    Wednesday, January 25, 1989
    35 years ago
  • Date Issued
    Tuesday, June 16, 1992
    32 years ago
  • US Classifications
    Field of Search
    • US
    • D15 144
    • D15 199
    • 219 390
    • 219 411
    • 414 222
    • 414 225
    • 414 226
    • 414 483
    • 432 6
    • 432 153
    • 432 239
    • 432 253
    • 432 258-261
    • Term of Grant
      14Years
Information
Abstract
Description
Claims
  • The ornamental design for an instrument for transferring boats for thermal treatment of semiconductor wafers, as shown.
Priority Claims (1)
Number Date Country Kind
63-29835 Jul 1988 JPX
US Referenced Citations (5)
Number Name Date Kind
D150358 Hobart et al. Jul 1948
3604694 Muller Sep 1971
3737282 Hearn et al. Jun 1973
3744650 Henebry et al. Jul 1973
4761134 Foster Aug 1988
Foreign Referenced Citations (1)
Number Date Country
17213 Jan 1888 GBX