Filing Document | Filing Date | Country | Kind |
---|---|---|---|
PCT/JP00/04741 | WO | 00 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO02/07225 | 1/24/2002 | WO | A |
Number | Name | Date | Kind |
---|---|---|---|
4139880 | Ulmer et al. | Feb 1979 | A |
Number | Date | Country |
---|---|---|
54-60550 | May 1979 | JP |
5-115179 | May 1993 | JP |
6-204468 | Jul 1994 | JP |
8-251925 | Sep 1996 | JP |
10-210751 | Aug 1998 | JP |
Entry |
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N. Takeda; “Ball Semiconductor Technology and Its Application to MEMS”; 2000 IEEE; pp. 11-16. |
H. Nakano et al; “Ball Semiconductor Technology and Its Future”; 1999; Ball Semiconductor Incorporated; pp. 1-8. |
Design News; “Chip Making Gets On The Ball”, Apr. 19, 1999; pp. 85-86. |
Microfilm of the specification and drawings annexed to the request of Japanese Utility Model Appln. No. 81001/1981 (Laid-open No. 193243/1982) (Hitachi Ltd.) Jun. 3, 1981. |