| Number | Name | Date | Kind |
|---|---|---|---|
| 4224615 | Penz | Sep 1980 | |
| 4290061 | Serrano | Sep 1981 | |
| 4363029 | Piliavin et al. | Dec 1982 | |
| 4529968 | Hilsum et al. | Jul 1985 | |
| 4893071 | Miller | Jan 1990 | |
| 4893115 | Blanchard | Jan 1990 | |
| 5083118 | Kazama | Jan 1992 | |
| 5159323 | Mase et al. | Oct 1992 | |
| 5300927 | Arai et al. | Apr 1994 | |
| 5337353 | Boie et al. | Aug 1994 | |
| 5353135 | Edwards | Oct 1994 | |
| 5534892 | Tagawa | Jul 1996 | |
| 5550659 | Fujieda et al. | Aug 1996 | |
| 5568292 | Kim | Oct 1996 | |
| 5592197 | Tagawa | Jan 1997 | |
| 5606194 | Lebrum et al. | Feb 1997 | |
| 5677744 | Yoneda et al. | Oct 1997 |
| Number | Date | Country |
|---|---|---|
| 0622754 | Apr 1994 | EPX |
| 2134760 | Feb 1984 | GBX |
| Entry |
|---|
| "Lithography", by D.A. McGillis, Chapter Seven, pp. 267-301, VLSI Technology, 1983 by Bell Telephone Laboratories, Incorporated, edited by S.M. Sze. |