Number | Name | Date | Kind |
---|---|---|---|
4224615 | Penz | Sep 1980 | |
4290061 | Serrano | Sep 1981 | |
4363029 | Piliavin et al. | Dec 1982 | |
4529968 | Hilsum et al. | Jul 1985 | |
4893071 | Miller | Jan 1990 | |
4893115 | Blanchard | Jan 1990 | |
5083118 | Kazama | Jan 1992 | |
5159323 | Mase et al. | Oct 1992 | |
5300927 | Arai et al. | Apr 1994 | |
5337353 | Boie et al. | Aug 1994 | |
5353135 | Edwards | Oct 1994 | |
5534892 | Tagawa | Jul 1996 | |
5550659 | Fujieda et al. | Aug 1996 | |
5568292 | Kim | Oct 1996 | |
5592197 | Tagawa | Jan 1997 | |
5606194 | Lebrum et al. | Feb 1997 | |
5677744 | Yoneda et al. | Oct 1997 |
Number | Date | Country |
---|---|---|
0622754 | Apr 1994 | EPX |
2134760 | Feb 1984 | GBX |
Entry |
---|
"Lithography", by D.A. McGillis, Chapter Seven, pp. 267-301, VLSI Technology, 1983 by Bell Telephone Laboratories, Incorporated, edited by S.M. Sze. |