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3152006 | Basche | Oct 1964 | |
3676343 | Dietz | Jul 1972 | |
4642271 | Rice | Feb 1987 | |
4772304 | Nakae et al. | Sep 1988 | |
5032551 | Tashiro et al. | Jul 1991 | |
5275844 | Moore | Jan 1994 | |
5324690 | Gelatos et al. | Jun 1994 |
Number | Date | Country |
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2097417 | Sep 1988 | JPX |
Entry |
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M. Maeda and T. Makino; "Low Dielectric Constant Amorphous SiBN Ternary Films Prepared by Plasma Enhanced Deposition"; Jap. Journal Applied Physics; vol. 26 No. 5 pp. 660-665 (1987). |