Intrinsically Absorbing Polymers for Anti-Reflective CoatingApplications

Information

• NSF Award
• 9204220

Owner

• BREWER SCIENCE, INC.

• Award Id

  9204220

• Award Effective Date

  8/15/1992 - 32 years ago

• Award Expiration Date

  1/31/1995 - 30 years ago

• Award Amount

  $ 249,345.00

• Award Instrument

  Standard Grant

Phases II research will provide a knowledge base for developing new generation anti-reflective coating products using intrinsically absorbing polymer materials. It will establish how molecular structure affects the optical, physical, processibility properties of the polymers in real life lithographic conditions. Intrinsically absorbing polymer films for anti-reflective coatings (ARC) applications is a significant technological advance over dyed polymer systems. By increasing optical density and eliminating resist mixing problems, this new approach allows ARC technology to be extended into I-line and DUV lithography.

• Program Officer

  Ritchie B. Coryell

• Min Amd Letter Date

  8/28/1992 - 32 years ago

• Max Amd Letter Date

  8/28/1992 - 32 years ago

• ARRA Amount

• Name

  Brewer Science Incorporated

• City

  ROLLA

• State

  MO

• Country

  United States

• Address

  2401 BREWER DR

• Postal Code

  654017003

• Phone Number

  5733640300

• First Name

  Tony

• Last Name

  Flaim

• Email Address

  tflaimQbrewerscience.com

• Start Date

  8/15/1992 12:00:00 AM

• Name

  Telecommunications

• Code

  206000

• Name

  Engineering-Electrical

• Code

  55