Number | Name | Date | Kind |
---|---|---|---|
3485771 | Horvath | Dec 1969 | |
3941630 | Larrabee | Mar 1976 | |
4108751 | King | Aug 1978 | |
4179401 | Garnett et al. | Dec 1979 | |
4204980 | Pasha et al. | May 1980 | |
4309315 | Nakamura | Jan 1982 | |
4376709 | Johnson et al. | Mar 1983 | |
4376792 | Angelini et al. | Mar 1983 | |
4432889 | Garnett et al. | Feb 1984 | |
4469628 | Simmons et al. | Sep 1984 | |
4591455 | Macedo et al. | May 1986 | |
4632778 | Lehto et al. | Dec 1986 | |
4659512 | Macedo et al. | Apr 1987 |
Number | Date | Country |
---|---|---|
0131964 | Jul 1985 | JPX |
Entry |
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Banks, et al., 1982, Ion Beam Sputter-Deposited Diamondlike Films, J. Vac. Sci. Technol., 21(3):807-814. |