Number | Name | Date | Kind |
---|---|---|---|
3067366 | Hofman | Dec 1962 | A |
3091717 | Rutherford et al. | May 1963 | A |
3231175 | Zaphiropoulos | Jan 1966 | A |
3416722 | Helmer | Dec 1968 | A |
3994625 | Welch | Nov 1976 | A |
4334829 | Harbaugh | Jun 1982 | A |
4937545 | Chaillout et al. | Jun 1990 | A |
5262028 | Manley | Nov 1993 | A |
6004104 | Rutherford | Dec 1999 | A |
Number | Date | Country |
---|---|---|
0 161 782 | Apr 1985 | EP |
Entry |
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Publication Draft International Standard ISO/DIS 3556-1.2 entitled “Sputter-Ion Pumps—Measurement fo Performance Characteristics” published by International Organization for Standardization, 1992. |