Number | Date | Country | Kind |
---|---|---|---|
4019729 | Jun 1990 | DEX |
Number | Name | Date | Kind |
---|---|---|---|
3814983 | Weissfloch et al. | Jun 1974 | |
4381453 | Cuomo et al. | Apr 1983 | |
4629940 | Gagne et al. | Dec 1986 | |
4795880 | Hayes et al. | Jan 1989 | |
4849675 | Muller | Jul 1989 | |
4894510 | Nakanishi et al. | Jan 1990 |
Number | Date | Country |
---|---|---|
2004839 | Nov 1974 | DEX |
3632340 | Mar 1988 | DEX |
Entry |
---|
"Deposition of Tantalum and Tantalum Oxide by Superimposed RF and D-C Sputtering", by F. Vratny, pp. 505-508, Journal Electrochem. Society May 1967. |