Claims
- 1. The method of forming a solid body of substantially isotropic boron nitride comprising vapor deposition of boron nitride upon a substrate resulting from the reaction of ammonia and an organic boron compound at a temperature in the range of 1200.degree.-2300.degree. C and a pressure of less than about 100 torr, said organic boron compound being selected from the group consisting of dimethyl boronic acid, trimethyl triborine trioxane, and compounds of the form B(OR).sub.3, B.sub.2 (OR).sub.4, HB.sub.2 (OR).sub.3, H.sub.2 B.sub.2 (OR).sub.2, or B(OR).sub.2 X, where R is an aromatic or aliphatic hydrocarbon and X is a halogen.
- 2. The method according to claim 1 wherein said step of forming said solid body of boron nitride comprises vapor deposition of boron nitride crystals producing substantial random orientation of said crystals.
- 3. The method according to claim 1 wherein said vapor deposition comprises:
- co-mingling vapors of ammonia and said organic boron compound; and
- directing the co-mingled vapors onto said substrate.
- 4. The method according to claim 3 wherein said substrate is heated to said temperature range of 1200.degree.-2300.degree. C.
- 5. The method according to claim 1 wherein said organic boron compound is selected from the group consisting of trimethyl borate, dimethyl borinic acid, triethyl borate, trimethyl triborine trioxane, and tetramethoxydiborane.
- 6. The method of forming a solid body of substantially isotropic boron nitride comprising vapor deposition of boron nitride crystals on a substrate with a random orientation of said crystals, said deposition resulting from the reaction of ammonia and an organic boron compound at a temperature in the range of 1200.degree.-2300.degree. C and a pressure of less than about 100 torr, said organic boron compound being selected from the group consisting of dimethyl borinic acid, trimethyl triborine trioxane, and compounds of the form B(OR).sub.3, B.sub.2 (OR).sub.4, HB.sub.2 (OR).sub.3, H.sub.2 B.sub.2 (OR).sub.2, or B(OR).sub.2 X, where R is an aromatic or aliphatic hydrocarbon and X is a halogen.
- 7. The method according to claim 6 wherein said vapor deposition comprises pyrolytic reaction at the surface of said substrate.
- 8. The method according to claim 6 wherein said vapor deposition comprises:
- co-mingling vapors of ammonia and said organic boron compound; and
- directing the co-mingled vapors onto said substrate.
- 9. The method according to claim 8 wherein said substrate is heated to said temperature range of 1200.degree.-2300.degree. C.
- 10. The method according to claim 6 wherein said organic boron compound is selected from the group consisting of trimethyl borate, dimethyl borinic acid, triethyl borate, trimethyl triborine trioxane, and tetramethoxydiborane.
CROSS REFERENCE TO RELATED APPLICATIONS
This is a continuation of application Ser. No. 417,020 filed Nov. 19, 1973, (now abandoned), which is a continuation of application Ser. No. 196,843 filed Nov. 8, 1971 (now abandoned), which is a continuation of application Ser. No. 878,966 filed Dec. 4, 1969 (now abandoned), which is a continuation of application Ser. No. 582,686 filed Sept. 28, 1966 (now abandoned).
US Referenced Citations (6)
Continuations (4)
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Number |
Date |
Country |
Parent |
417020 |
Nov 1973 |
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Parent |
196843 |
Nov 1971 |
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Parent |
878966 |
Dec 1969 |
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Parent |
582686 |
Sep 1966 |
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