Claims
- 1. A process for preparing a non-thermal plasma reactor substrate comprising:
disposing electrical vias and alignment apertures on first and second ceramic plates when said first and second ceramic plates are in the green stage; disposing conductive media on said first ceramic plate to form an electrode plate having a main electrode portion and a terminal lead for electrically connecting said main electrode portion to said electrical vias; filling electrical vias on said first and second ceramic plates with conductive material; disposing conductive material around said vias on said first and second ceramic plate to form via cover pads; drying said conductive material; laminating said electrode plate and said second ceramic plate together, said electrode being sandwiched between said electrode plate and said second ceramic plate to form a laminated embedded-conductor element, co-firing said laminated embedded-conductor element; stacking a plurality of said laminated co-fired embedded-conductor elements to form a multi-cell stack of alternating polarity laminated co-fired embedded-conductor elements, said filled electrical vias aligning in said stack to provide an electrical bus for interconnecting alternating elements in said stack; and disposing spacers with matching vias and via cover pads between adjacent pairs of said laminated co-fired embedded-conductor elements to form exhaust gas passages thereby providing a laminated co-fired embedded-conductor non-thermal plasma reactor multi-cell substrate.
- 2. The process of claim 1, wherein said first and second ceramic plates comprise cast ceramic tapes or roll compacted ceramic plates.
- 3. The process of claim 1, further comprising:
disposing error-proofing features on said first and second ceramic plates when said first and second ceramic plates are in the green stage.
- 4. The process of claim 1, wherein said first and second ceramic plates have tapered edges for facilitating exhaust flow.
- 5. The process of claim 1, further comprising:
disposing a first conductive material on said first ceramic plate to form said main electrode portion; drying said first conductive material; disposing a second conductive material on said first ceramic plate to form said terminal lead and an overlap area at the interface between said main electrode portion and said terminal lead wherein said first and second conductive materials overlap.
- 6. The process of claim 1, wherein said laminated embedded-conductor element comprises an I-shaped element, a C-shaped element, an E-shaped element, or a double H-shaped element.
- 7. The process of claim 1, wherein said stacking comprises stacking said plurality of laminated, co-fired elements with edge connectors disposed on opposite sides of said elements;
said edge connectors comprising a backplane and a plurality of tines protruding along at least one major surface of said backplane, said plurality of tines being spaced apart from one another at regular intervals so as to form pockets between adjacent tines; and wherein said elements are disposed within said pockets of said edge connectors in an alternating polarity arrangement with said pockets compliantly engaging opposite ends of said elements.
- 8. A process for preparing a non-thermal plasma reactor substrate comprising:
disposing alignment apertures on first and second ceramic plates when said first and second ceramic plates are in the green stage; disposing conductive material on said first ceramic plate to form an electrode plate; said conductive material forming a main electrode portion and at least one terminal lead extending over a side edge of said electrode plate; drying said conductive material; laminating said electrode plate and said second ceramic plate together, said electrode being sandwiched between said electrode plate and said second ceramic plate to form a laminated embedded-conductor element, disposing conductive material along side edges of said electrode plate to provide a side terminal connecting to said at least one terminal lead; drying said conductive material; co-firing said laminated embedded-conductor element; stacking a plurality of said laminated co-fired embedded-conductor elements to form a multi-cell stack of alternating polarity laminated co-fired embedded-conductor elements; disposing spacers between adjacent pairs of said laminated co-fired embedded-conductor elements to form exhaust gas passages thereby providing a laminated co-fired embedded-conductor non-thermal plasma reactor multi-cell substrate.
- 9. The process of claim 8, wherein said at least one terminal lead comprises first and second terminal leads extending to opposite side edges of said electrode plate and extending over said opposite sides of said electrode plate.
- 10. The process of claim 8, wherein said disposing conductive media further comprises:
forming a castellation feature on said terminal leads adjacent said side edge of said electrode plate; forming bus lines along a side of said multi-cell stack for electrically connecting said laminated co-fired embedded-conductor elements; and filling said castellation feature with dielectric encapsulent.
- 11. The process of claim 10, wherein said bus lines comprise a metal buss bar or a conductive material extending along a side of said multi-cell stack.
- 12. The process of claim 8, wherein said first and second ceramic plates have tapered edges for facilitating exhaust flow.
- 13. The process of claim 8, further comprising:
disposing error-proofing features on said first and second ceramic plates when said first and second ceramic plates are in the green stage.
- 14. The process of claim 8, wherein said laminated embedded-conductor element comprises an I-shaped element, a C-shaped element, an E-shaped element, or a double H-shaped element.
- 15. The process of claim 8, wherein said stacking comprises stacking said plurality of laminated, co-fired elements with edge connectors disposed on opposite sides of said elements;
said edge connectors comprising a backplane and a plurality of tines protruding along at least one major surface of said backplane, said plurality of tines being spaced apart from one another at regular intervals so as to form pockets between adjacent tines; and wherein said elements are disposed within said pockets said edge connectors in an alternating polarity arrangement with said pockets compliantly engaging opposite ends of said elements.
- 16. A process for preparing a non-thermal plasma reactor substrate comprising:
disposing electrical vias and alignment apertures on first and second ceramic plates when said first and second ceramic plates are in the green stage; filling said electrical vias on said first and second ceramic plates with conductive material prior to or after laminating the entire substrate stack; disposing conductive media on said first ceramic plate to form an electrode plate having a main electrode portion and a terminal lead for electrically connecting said main electrode portion to said electrical vias; disposing electrical vias and alignment apertures on spacers when said spacers are is in the green stage; filling the electrical vias on said spacers with conductive material prior to or after laminating the entire substrate stack; drying said conductive material; stacking said electrode plate and said second ceramic plate together, said electrode being sandwiched between said electrode plate and said second ceramic plate to form a sandwiched embedded-conductor element; stacking a plurality of said sandwiched embedded-conductor elements to form a multi-cell stack of alternating polarity laminated-embedded conductor elements, said filled electrical vias aligning in said stack to provide an electrical bus for connecting alternating polarity laminated-embedded conductor elements; inserting temporary supports or fugitive material between adjacent laminated embedded-conductor elements; disposing a plurality of green ceramic spacers having matching vias and via cover pads between adjacent pairs of said laminated embedded-conductor elements to form exhaust gas passages between adjacent pairs of said laminated embedded-conductor elements in said multi-cell stack; laminating said multi-cell stack; removing said temporary supports; and co-firing said multi-cell stack to form a laminated co-fired embedded-conductor non-thermal plasma reactor multi-cell substrate;
- 17. The process of claim 16, wherein said first and second ceramic plates comprise cast ceramic tapes or roll compacted ceramic plates.
- 18. The process of claim 16, further comprising:
disposing error-proofing features on said first and second ceramic plates when said first and second ceramic plates are in the green stage.
- 19. The process of claim 16, wherein said first and second ceramic plates have tapered edges for facilitating exhaust flow.
- 20. The process of claim 16, further comprising:
disposing a first conductive material on said first ceramic plate to form said main electrode portion; drying said first conductive material; disposing a second conductive material on said first ceramic plate to form said via cover pads and an overlap area at the interface between said main electrode portion and said via cover pad wherein said first and second conductive materials overlap.
- 21. A laminated co-fired embedded-conductor element non-thermal plasma reactor multi-cell substrate comprising:
a plurality of laminated co-fired embedded-conductor elements arranged to provide a multi-cell stack of alternating polarity laminated embedded-conductor elements; and spacers disposed between adjacent pairs of said laminated co-fired embedded-conductor elements to form exhaust gas passages thereby providing a laminated co-fired embedded-conductor element non-thermal plasma reactor multi-cell substrate.
- 22. The laminated embedded-conductor element non-thermal plasma reactor multi-cell substrate of claim 21, wherein said laminated co-fired embedded-conductor element comprises a first ceramic electrode plate having an electrode disposed thereon and a second ceramic plate,
said first ceramic plate and said second ceramic plate being laminated together with said electrode sandwiched between said first and second electrode plates to provide said laminated co-fired embedded-conductor element.
- 23. The laminated co-fired embedded-conductor element non-thermal plasma reactor multi-cell substrate of claim 21, wherein said first and second ceramic plates have aligning electrical vias filled with conductive media to provide an electrical bus for connecting alternating elements in said multi-cell substrate.
- 24. The laminated co-fired embedded-conductor element non-thermal plasma reactor multi-cell substrate of claim 22, wherein said first and second ceramic plates comprise cast ceramic tapes or roll compacted ceramic plates.
- 25. The laminated co-fired embedded-conductor element non-thermal plasma reactor multi-cell substrate of claim 22, wherein said first and second ceramic plates have tapered edges for facilitating exhaust flow.
- 26. The laminated embedded-conductor element non-thermal plasma reactor multi-cell substrate of claim 23, wherein conductive pads are disposed around perimeter portions of said electrical vias to enhance electrical contact between adjacent laminated embedded-conductor elements and provide compliant contact between adjacent laminated co-fired embedded-conductor elements.
- 27. The laminated co-fired embedded-conductor element non-thermal plasma reactor multi-cell substrate of claim 22, wherein said electrode plate comprises:
a main electrode portion comprising a first conductive material; a via cover pad comprising a second conductive material; and a terminal lead overlap area at the interface between said main electrode portion and said via cover pad wherein said first and second conductive materials overlap.
- 28. The laminated co-fired embedded-conductor element non-thermal plasma reactor multi-cell substrate of claim 21, wherein said laminated co-fired embedded-conductor element comprises an I-shaped element, a C-shaped element, an E-shaped element, or a double H-shaped element.
- 29. The laminated co-fired embedded-conductor element non-thermal plasma reactor multi-cell substrate of claim 21, wherein said spacers comprise edge connectors disposed on opposite sides of said elements;
said edge connectors comprising a backplane and a plurality of tines protruding along at least one major surface of said backplane, said plurality of tines being spaced apart from one another at regular intervals so as to form pockets between adjacent tines; and wherein said elements are disposed within said pockets of said edge connectors in an alternating polarity arrangement with said pockets compliantly engaging opposite ends of said elements.
- 30. The laminated embedded-conductor element non-thermal plasma reactor multi-cell substrate of claim 22, wherein conductive media is disposed on said first ceramic plate forming a main electrode portion and at least one terminal lead extending to a side edge of said electrode plate.
- 31. The laminated embedded-conductor element non-thermal plasma reactor multi-cell substrate of claim 30, further comprising:
a castellation feature provided on said at least one terminal lead adjacent said side edge of said electrode plate.
- 32. The laminated embedded-conductor element non-thermal plasma reactor multi-cell substrate of claim 30, further comprising:
a conductive material extending from said terminal lead over a side of said electrode plate to provide electrical interconnection between adjacent elements.
- 33. The laminated embedded-conductor element non-thermal plasma reactor multi-cell substrate of claim 30, wherein said at least one terminal lead comprises first and second bus leads extending to opposite side edges of said electrode plate and extending over said opposite sides of said electrode plate.
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] The present application claims priority to U.S. Provisional Application No. 60,286,611 (Attorney Docket No. DP-305132), of Bob X. Li, et al., filed Apr. 25, 2001, entitled “Laminated Co-Fired Sandwiched Element for Non-Thermal Plasma Reactor,” which is hereby incorporated by reference herein in its entirety.
Provisional Applications (1)
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Number |
Date |
Country |
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60286611 |
Apr 2001 |
US |