LASER APPARATUS AND PRODUCTION METHOD OF LASER APPARATUS

Abstract

Provided are a laser apparatus into which a large current can be injected and a production method which enables easy production of the apparatus. A laser apparatus includes a light-emitting region on a substrate, and a periodic refractive index structure containing an i-type material provided at a periphery of the light-emitting region. Another laser apparatus includes a light-emitting region between a first electrode and a second electrode on a substrate, wherein at least one of the first and the second electrodes includes a periodic refractive index structure.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic cross-sectional view illustrating the configuration of a laser apparatus according to first Embodiment of the present invention.

FIG. 2 is a schematic plane view illustrating a configuration example of the laser apparatus using an i-type three dimensional photonic crystal according to first Embodiment of the present invention.

FIG. 3 is a schematic cross-sectional view illustrating the configuration of a laser apparatus according to second Embodiment of the present invention.

FIG. 4 is a schematic plane view illustrating a configuration example of the laser apparatus using an i-type three dimensional photonic crystal according to first Embodiment of the present invention.

FIGS. 5A, 5B, 5C, 5D, 5E, 5F, 5G, 5H and 5I are schematic cross-sectional views illustrating a production method of a laser apparatus according to third Embodiment and Example 1 of the present invention.

FIGS. 6A, 6B, 6C and 6D are schematic cross-sectional views illustrating a formation method of an active portion in Example 1 of the present invention.

FIG. 7 is a perspective view illustrating a conventional three dimensional photonic crystal with a woodpile structure disclosed in U.S. Pat. No. 5,335,240.

FIG. 8 is a cross-sectional view illustrating a conventional semiconductor laser device disclosed in Japanese Patent Application Laid-Open No. 2001-247425.

Claims

1. A laser apparatus comprising a light-emitting region on a substrate, and a periodic refractive index structure comprising an i-type material provided at a periphery of the light-emitting region.

2. The laser apparatus according to claim 1, wherein the i-type material is i-type titanium oxide.

3. The laser apparatus according to claim 1, wherein the periodic refractive index structure is formed of a three dimensional photonic crystal.

4. The laser apparatus according to claim 1, wherein a layer comprising the light-emitting region and the periodic refractive index structure has an electrode of a three dimensional photonic crystal comprised of a p-type titanium oxide material on one side of an upper side and a lower side of the layer, and an electrode of a three dimensional photonic crystal comprised of an n-type titanium oxide material on the other side of the layer.

5. A laser apparatus comprising a light-emitting region between a first electrode and a second electrode on a substrate, wherein at least one of the first and the second electrodes comprises a periodic refractive index structure.

6. The laser apparatus according to claim 5, wherein both the first and the second electrodes comprises a periodic refractive index structure.

7. The laser apparatus according to claim 6, wherein one of the first and the second electrodes which is located on the side from which laser light is output by the laser has a transparency with respect to the output laser light.

8. The laser apparatus according to claim 5, wherein a region which surrounds the light-emitting region between the first and the second electrodes is formed of an i-type three dimensional photonic crystal.

9. A method of producing a laser apparatus, comprising: forming a first layer comprising a three dimensional periodic refractive index structure;forming a second layer with a periodic structure region on the first layer;forming a recess in the second layer and forming an active portion for generating light in the recess; andforming a third layer comprising a three dimensional periodic refractive index structure on the second layer containing the active portion.

10. The production method according to claim 9, wherein the second layer is formed of an i-type material.

11. The production method according to claim 9, further comprising providing a waveguide for extracting light outside, in the three dimensional periodic refractive index structure of at least one of the first and the third layers.

12. The production method according to claim 9, wherein the three dimensional periodic refractive index structure of at least one of the first and the third layers is formed of a material which is transparent with respect to visible light.

13. The production method according to claim 12, wherein the material which is transparent to visible light comprises any one of titanium oxide (TiO2), gallium nitride (GaN), zinc oxide (ZnO), and indium tin oxide (ITO) as a main component.

14. The production method according to claim 9, wherein the active portion comprises a material which generates visible laser light.