LASER ETCHING APPARATUS AND LASER ETCHING METHOD USING THE SAME

Abstract

A laser etching method include performing a first emission process by emitting a laser beam from a laser module toward a substrate fastened to a chuck in a laser etching chamber, moving a protection window between the chuck and the laser module in a first direction by a first distance after the performing the first emission process, performing a second emission process by emitting a laser beam from the laser module after the moving the protection window in the first direction by the first distance, moving the protection window in an opposite direction of the first direction by a second distance after the performing the second emission process, and performing a third emission process by emitting a laser beam from the laser module after the moving the protection window in the opposite direction of the first direction by the second distance.

Description

Claims

1. A laser etching method, comprising: performing a first emission process by emitting a laser beam from a laser module toward a substrate fastened to a chuck in a laser etching chamber;moving a protection window between the chuck and the laser module in a first direction by a first distance after the performing the first emission process;performing a second emission process by emitting a laser beam from the laser module after the moving the protection window in the first direction by the first distance;moving the protection window in an opposite direction of the first direction by a second distance after the performing the second emission process; andperforming a third emission process by emitting a laser beam from the laser module after the moving the protection window in the opposite direction of the first direction by the second distance.

2. The laser etching method of claim 1, wherein the second distance is equal to the first distance, anda relative position between the laser module and the protection window in the first emission process is equal to a relative position between the laser module and the protection window in the third emission process.

3. The laser etching method of claim 1, wherein the second distance is smaller than the first distance.

4. The laser etching method of claim 3, wherein the second distance is half of the first distance.

5. The laser etching method of claim 3, further comprising: moving the protection window in the opposite direction of the first direction by a third distance after the performing the third emission process; andperforming a fourth emission process by emitting a laser beam from the laser module after the moving the protection window in the opposite direction of the first direction by the third distance,wherein the third distance is the same as the first distance.

6. The laser etching method of claim 1, wherein the first distance is in a range from about 1 mm to about 10 mm.

7. The laser etching method of claim 1, further comprising: replacing the protection window after an emission of the laser beam from the laser module is executed a predetermined number of times.

8. The laser etching method of claim 1, further comprising: unloading the substrate fastened to the chuck, before the moving the protection window in the first direction by the first distance and after the performing the first emission process.

9. The laser etching method of claim 1, further comprising: measuring a power of the laser beam emitted from the laser module, before the performing the first emission process.

10. A laser etching method, comprising: loading a substrate in a laser etching apparatus;performing a first emission process by emitting a laser beam from a laser module toward the substrate; andmoving a protection window between the substrate and the laser module, during the performing the first emission process.

11. The laser etching method of claim 10, wherein the moving the protection window comprises: moving the protection window in a first direction; andmoving the protection window in an opposite direction of the first direction, when the protection window is moved in the first direction by a specific distance.

12. The laser etching method of claim 11, wherein the specific distance is in a range from about 40 mm to about 120 mm.

13. The laser etching method of claim 10, further comprising: stopping an emission of the laser beam after the performing the first emission process.

14. The laser etching method of claim 13, wherein the moving the protection window is finished after the performing the first emission process such that the protection window is at rest during the stopping the emission of the laser beam.

15. The laser etching method of claim 13, wherein the moving the protection window is continued after the first emission process such that the protection window is ceaselessly moved during the stopping the emission of the laser beam.

16. A laser etching apparatus, comprising: a laser etching chamber;a chuck disposed in the laser etching chamber;a laser module which emits a laser beam toward the chuck;a protection window between the chuck and the laser module;a tray which supports the protection window;a linear motion unit which moves the tray in a first direction; anda position sensor which senses a position of the protection window.

17. The laser etching apparatus of claim 16, wherein the laser module is placed below the protection window.

18. The laser etching apparatus of claim 16, wherein the linear motion unit comprises a steel belt which extends in the first direction.

19. The laser etching apparatus of claim 16, further comprising: a control unit which controls the laser module and the linear motion unit,wherein the control unit controls the linear motion unit to move the protection window in the first direction or an opposite direction of the first direction, between processes of emitting the laser beam from the laser module.

20. The laser etching apparatus of claim 16, further comprising: a control unit which controls the laser module and the linear motion unit,wherein the control unit controls the linear motion unit to move the protection window in the first direction or an opposite direction of the first direction, during a process of emitting the laser beam from the laser module.