Laser marking system for dice carried in trays and method of operation

Information

  • Patent Grant
  • 6417484
  • Patent Number
    6,417,484
  • Date Filed
    Monday, December 21, 1998
    26 years ago
  • Date Issued
    Tuesday, July 9, 2002
    23 years ago
Abstract
A laser marking system for IC packages including a tray input shuttle assembly, a tray transport borne by a transport actuator for moving a cooperatively configured tray carrier carrying a tray of unmarked packaged ICs received from the tray input shuttle assembly to a tray output shuttle assembly over a transport actuator path extending under an open-bottomed enclosure of a laser marking station. The tray input shuttle assembly, laser marking station and tray output shuttle assembly each has associated therewith a sliding wedge-type lift mechanism for raising and lowering the tray carrier vertically with respect to the transport so as to facilitate tray loading of the tray carrier from a stack of trays on the tray input shuttle assembly, insertion and withdrawal of the tray carrier bearing a tray of packaged ICs for marking into and out of the marking station and unloading of a tray of marked packaged ICs from the tray carrier onto a stack of trays on the output shuttle assembly. The lift mechanisms and tray shuttle assemblies may each be driven by air cylinders. A method of operation of the laser marking system is also disclosed.
Description




BACKGROUND OF THE INVENTION




This invention relates generally to marking of semiconductor dice bearing integrated circuits (ICs) and, more specifically, to a system for laser-marking exterior surfaces of dice carried in large groups on trays and a method of system operation.




Since the first packaged integrated circuits (ICs) became commercially available, manufacturers have often found it necessary to identify packaged ICs by marking each IC or packaged assembly of ICs with the manufacturer's name, a part or serial number, or other identifying information such as a lot number or a wafer and/or die location. As the majority of ICs are packaged individually in a transfer-molded filled polymer compound, most current marking systems have been developed for this type of IC packaging.




Manufacturers initially marked packaged ICs using mechanical ink transferring devices, such as stamps or rollers, with or without stencils, to transfer ink to the surface of an IC. One example of an ink-marking apparatus is disclosed in U.S. Pat. No. 5,226,361 to Grant et al. Because of the mechanical nature of the process and the drying time associated with ink, ink stamping systems are relatively slow and the applied ink susceptible to smudging. Also, the quality of ink-stamped marks on packaged ICs can vary substantially over time and from IC to IC due to variations in the quality and quantity of ink applied, ambient temperature and humidity, and the condition and finish of the surface of the stamp and the package.




Because of the deficiencies associated with ink stamping, manufacturers have in recent years switched to using a laser beam to mark the surface of a packaged IC. Unlike ink stamping, laser marking is very fast, requires no curing time, produces a consistently high quality mark, and can take place at any point in the manufacturing process.




Various machines and methods have been developed for marking ICs with a laser. As illustrated in U.S. Pat. No. 5,357,077 to Tsuruta, U.S. Pat. No. 4,945,204 to Nakamura et al., U.S. Pat. No. 4,638,144 to Latta, Jr., and U.S. Pat. No. 4,375,025 to Carlson, a packaged IC is placed in a position where a laser beam, such as that produced by a carbon dioxide or neodymium-yttrium-aluminum garnet laser, inscribes various characters or other information on a package surface. The laser beam burns away a small amount of material on the surface of the IC package so that the area where the characters are to appear has a different reflectivity from the rest of the package surface. By holding the packaged IC at a proper angle to a light source, the characters inscribed on the device by the laser can be read.




U.S. patent application Ser. No. 08/590,919 filed Jan. 24, 1996 by one of the present inventors, assigned to the assignee of the present invention and hereby incorporated herein by this reference, discloses yet another laser marking system which is operable at high throughput volumes and makes substantially constant use of a marking laser by use of a multi-track IC feed, marking and inspection procedure. While highly successful, the laser marking system of the '919 application feeds singulated, packaged ICs from tubular magazines along two parallel, inclined tracks to a marking zone, after which the marked devices are then automatically inspected and either discarded or reloaded into other tubular magazines at the output ends of the tracks.




Recently developed IC packages, however, are now much-reduced in size, thickness and dimensions of individual features, such as leads for external connection to higher-level packaging. One example of such state-of-the-art IC packages is a thin plastic package configuration identified as a Thin Small Outline Package, or TSOP. Another is a Thin Quad Flat Pack, or TQFP. By way of comparison, such packages are dimensioned with a total package thickness, excluding lead fingers, of less than about one-half the thickness of a conventional plastic Small Outline J-lead package, or SOJ, such as would be marked in the above-described system of the '919 application. These newer IC packages, with their smaller dimensions and more fragile components, are much more susceptible to inadvertent damage in handling than prior package designs and, at best, are only marginally robust enough for handling in tubular magazines and by singulated feed-through processing equipment. As a result, the industry has gravitated to processing such relatively delicate IC packages in batches carried in recesses of rectangular trays, one example of which is so-called JEDEC trays. Other, even smaller IC packages under current development and most recently introduced to the market include so-called “chip scale” IC packages. These packages, having dimensions approximating those of a bare IC die itself and employing extremely minute external connection elements, also are desirably handled in trays. It is contemplated that such chip scale packages may be desirably laser marked on the bare, or thinly coated, backside of the die itself in instances where packaging is largely intended to protect and seal the active surface at the die sides and primarily extends over the sides and active (front) surface of the die. Accordingly, as used herein, the terms “IC package”, “packaged IC” or “IC” include not only conventional polymer-encapsulated dice but any dice incorporating sufficient structure to effect operative connection to a higher level package such as a circuit card, or to another die.




In addition to the aforementioned difficulties with marking thin, reduced-dimension IC packages using tubular magazines and inclined tracks, feeding and marking singulated IC packages, even when grouped for marking, are time-consuming and fraught with potential for workpiece jamming somewhere on the tracks. Further, such an approach requires numerous sensors to verify passage of individual IC packages, location of individual IC packages for marking and inspection, and counting of IC packages to ensure full output magazines, but not magazine overfilling and jamming of the handling equipment for same. Further, movable stops are required to locate and release the IC packages at numerous locations and so, along with the proliferation of sensors, necessitate a somewhat complex and relatively expensive control apparatus for reliable system operation.




Another disadvantage of conventional laser marking systems lies in a safety requirement that the IC packages be enclosed in a laser light-secure enclosure to prevent injury to personnel from the laser beam. Such conventional laser marking systems employ a workpiece path extending in a single plane through the marking station, thus requiring movable access shutters which must be manipulated, resulting in additional system cost and reducing throughput due to the time lost in opening and closing the shutters for entry and exit of groups of IC packages as well as adding another timed operation to the sequence of events in the marking process.




While trays facilitate moving large batches of packaged ICs while minimizing the risk of physical damage from handling, a problem with using trays to carry IC packages for marking is the need to deal with a wide range of tray-to-part tolerances. Thus, it would be necessary to orient the IC packages in the tray recesses to a common corner of each tray pocket to obtain a repeatable marking of all the IC packages in the tray. It would also be necessary to ensure that trays carrying IC packages are received in various handling and processing mechanisms in the correct orientation, so that the IC packages themselves will be properly oriented.




Accordingly, there is a need in the art for a mechanically and electrically straightforward, tray-based laser marking system which provides high, reliable throughput.




BRIEF SUMMARY OF THE INVENTION




The present invention includes a tray-based laser marking system providing input and output tray singulation, pin one and part in tray verification, a laser-safe enclosure housing a laser marking device, mark presence verification and consistent IC package orientation.




In one embodiment, the laser marking system of the present invention includes a tray input shuttle assembly, and a tray transport borne by a transport actuator for moving a tray carrier carrying a tray of unmarked packaged ICs received from the tray input shuttle assembly to a tray output shuttle assembly over a transport actuator path extending under an opened-bottomed enclosure of a laser marking station. The tray input shuttle, the laser marking station and the tray output shuttle each have respectively associated therewith a lift mechanism for raising and lowering a tray or the tray carrier vertically with respect to the transport so as to facilitate loading of the tray carrier with a tray from a stack of trays on the tray input shuttle assembly, insertion and withdrawal of a tray carrier bearing a tray of unmarked packaged ICs for marking within the enclosure of the laser marking station and unloading of a tray of marked IC packages from the tray carrier onto a stack of trays on the output shuttle assembly. The unloaded tray carrier is then returned on the tray transport by the transport actuator to the tray input shuttle assembly to receive another tray of unmarked packaged ICs.




In another embodiment, the present invention includes a shuttle assembly suitable for delivering trays to, or receiving trays from, a transport. The shuttle assembly is configured to manipulate trays in a vertically stacked arrangement through the use of a frame defining a rectangular tray stack volume and supporting a tray support element initiator proximate each corner of the tray stack volume. The tray support element initiators may be controlled in common, each initiator driving a tray support element which may be spring-biased toward an extended position intersecting a boundary of the tray stack volume. When a stack of trays is supported proximate its corners by location of the extended tray support elements under the lowermost tray, it may be removed from the shuttle assembly by extension of a lift structure of a lift mechanism into supporting contact under the lowermost tray, whereupon the tray support elements may be retracted, the tray stack lowered the depth or thickness of one tray, the tray support elements re-extended, and the lift structure with lowermost tray further lowered onto a tray carrier for horizontal movement by a transport actuator out from under the tray stack. Similarly, when a tray carrier bearing a tray enters a tray stack volume of a shuttle assembly, a tray may be lifted off the tray carrier into supporting contact with a lowermost tray of a stack by extension of a lift structure of a lift mechanism, the tray support elements retracted and the lifted tray with supported stack of trays lifted the depth or thickness of a single tray, the tray support elements then being re-extended to support all of the trays of the stack.




Yet another embodiment of the invention includes a wedge-type lift mechanism suitable for controlled raising and lowering of a tray or tray carrier within the horizontal boundaries of a tray stack volume. The lift mechanism includes a horizontally movable drive wedge element having an upper inclined surface and a slave wedge element having a lower inclined surface slidingly supported on the drive wedge element upper inclined surface. Horizontal movement of the slave wedge element is constrained while vertical movement is permitted, so that horizontal movement of the drive wedge element raises or lowers the slave wedge element. A lift structure extending upwardly from the slave wedge element may be employed to engage a tray supported by the tray carrier for lowering or raising one or more trays with respect to the tray carrier such as, for example, when loading or unloading trays at a shuttle. The lift mechanism is also suitable for effecting controlled vertical movement of the tray carrier off of and back onto a tray transport such as, for example, to move the tray carrier respectively into and out of an enclosure at a laser marking station.




Still another embodiment of the invention includes self-aligning, cooperative tray carrier and tray transport configurations to ensure precise, repeatable alignment of the tray carrier with the tray transport through gravity alone when a tray carrier which has been raised off the transport is again lowered into supporting contact therewith. Another, optional, feature of the mutually cooperative configurations of the tray carrier and tray transport permits the tilting of the tray carrier while still supported on the transport so as to effect precise alignment of IC packages carried in rectangular recesses on a tray on the tray carrier with respect to common alignment points (i.e., the same corner of each tray recess) to facilitate repeatability of the IC package surface location being marked on each IC package borne by the tray. Such alignment may be further enhanced by vibration or tapping of the tray carrier while in a tilted orientation.




An additional embodiment of the invention includes a laser marking station housing a laser marking head within a walled, substantially bottomless enclosure defining an opening into which a tray carrier bearing a tray of IC packages to be marked may be raised to place the tray at correct laser focal length and effect complete (laser) light containment within the enclosure using the tray carrier to effect closure of the opening.




Yet another embodiment of the invention includes a method of operation of the laser marking system of the invention.











BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS





FIG. 1

of the drawings comprises a perspective view of a laser marking system according to one embodiment of the present invention;





FIG. 2

comprises an enlargement of a central portion of

FIG. 1

;





FIG. 3

is an enlarged perspective view of a tray shuttle according to one embodiment of the present invention;





FIGS. 4-6

are side elevations of the tray shuttle assembly of

FIG. 3

in various positions;





FIGS. 7-9

are side, partial sectional elevations of a wedge-type lift mechanism according to one embodiment of the present invention in various positions;





FIG. 10

is a top perspective view of a tray carrier and cooperating tray transport according to one embodiment of the present invention;





FIG. 11

is a vertically exploded view of

FIG. 10

;





FIG. 12

is a bottom, exploded perspective view of the tray carrier and cooperating tray transport of

FIG. 10

;





FIG. 13

is a perspective view of a tray carrier and cooperating tray transport of the present invention in a position for tilting of the tray carrier with respect to the tray transport;





FIG. 14

is a perspective view of the tray carrier of

FIG. 13

, tilted with respect to the tray transport;





FIG. 15

is a side elevation of a laser marking station with a doorless enclosure according to one embodiment of the present invention and a lift mechanism according to the invention positioned to lift a tray carrier into the enclosure;





FIG. 16

is an enlarged side elevation of the apparatus depicted in

FIG. 15

with the tray carrier lifted into the enclosure of the laser marking station to effect complete light containment in cooperation therewith;





FIGS. 17A-D

are schematic representations of tray input cycle positions of a wedge-type lift mechanism according to one embodiment of the invention; and





FIGS. 18A-D

are schematic representations of tray output cycle positions of a wedge-type lift mechanism according to one embodiment of the present invention.











DETAILED DESCRIPTION OF THE INVENTION




Referring now to

FIGS. 1 and 2

of the drawings, laser marking system


10


includes an input shuttle assembly


12


, an output shuttle assembly


14


and a transport actuator


16


extending horizontally therebetween. The transport actuator


16


extends under laser marking station


18


. Three lift mechanisms


20


are located respectively in vertical alignment with input shuttle assembly


12


, laser marking station


18


, and output shuttle assembly


14


.




A plurality of vertically stacked trays


200


is depicted at both input shuttle assembly


12


and output shuttle assembly


14


, the structure and operation of each shuttle assembly being described in more detail below. Also depicted (see

FIG. 2

) is tray carrier


22


, on which a singulated tray


200


carrying a plurality of packaged ICs


202


(also referred to as IC packages) in a rectangular array of recesses


204


(only some shown for clarity) comprising rows and columns may be moved on a tray transport


24


(see

FIGS. 4-8

) of transport actuator


16


from input shuttle assembly


12


to output shuttle assembly


14


. Tray transport


24


may be precisely rotationally aligned with the longitudinal path defined by transport actuator


16


using Allen-type T-nuts, which secure tray transport


24


to the carriage of transport actuator


16


.




A downwardly aimed inspection camera


30


as shown on the upstream side of laser marking station


18


may be employed to verify pin one location and thus proper orientation for the packaged ICs


202


in a tray


200


passing thereunder on tray carrier


22


, as well as part in tray verification to ensure that each tray


200


is fully loaded with packaged ICs


202


for marking. A similar camera


30


on the downstream side of laser marking station


18


may be employed to verify the presence of laser markings on each packaged IC


202


of a tray


200


which has been processed in laser marking station


18


. A tray


200


is preferably stopped twice (and moved a half-tray length between stops) under downstream camera


30


for mark inspection, as packaged ICs


202


in each longitudinal half of each tray


200


are substantially concurrently marked in a separate laser field by a different, separately (different circuit) controlled laser head of laser marking station


18


. Most preferably, marking of the last IC package in each field is checked on the logical premise that satisfactory marking of the last package would not take place if any failure in the laser or beam control circuitry had previously occurred. This sampling approach to inspection achieves the required quality assurance for the marking process with a substantial time savings over inspecting every marked IC package. High-intensity lights (not shown) may be provided at the two camera locations to facilitate inspection.




Transport actuator


16


preferably comprises an IAI Corporation Model 12EX-35-100 Intelligent Actuator, a 1000 mm programmable stepper. Transport actuator


16


may be programmed (by way of example only and not limitation) for use with laser marking system


10


to six (6) positions: tray input, tray check (pin one location and tray full load verification), marking, dual mark check (one for each half of the tray, as described above) and tray output. This particular approach to transporting a tray carrier


22


was selected due to the precise longitudinal positional accuracy provided at each position. Other, alternative approaches to tray transport providing equivalent positional accuracy may be employed instead.




Input shuttle assembly


12


and output shuttle assembly


14


as depicted in

FIGS. 1 and 2

are substantially identical.

FIG. 3

shows an enlargement of the portion of

FIG. 2

depicting input shuttle assembly


12


, and with transport actuator


16


removed for clarity. Input shuttle assembly


12


includes a frame


40


comprising four frame members


42




a-d


, each having a vertically extending notch


44


facing a rectangular tray stack volume


46


shown in broken lines. Frame members


42




a


and


42




b


extend upwardly a greater distance than frame members


42




c


and


42




d


, and define the uppermost preferred vertical height limit for a stack of trays


200


, two of which trays


200


being shown. As can readily be seen in

FIG. 3

, a distance or depth from a corner of tray stack volume


46


defined by a notch


44


to a laterally inward edge of each of frame members


42




a


and


42




c


is smaller than a distance or depth from a corner of tray stack volume


46


defined by notch


44


to a laterally inward edge of each of frame members


42




b


and


42




d


. Further, there is a laterally extending gap


43


between frame members


42




a


and


42




b


, and a like-sized gap


43


between frame members


42




c


and


42




d


. Protrusions


201


at each end of trays


200


are sized and located on each end of the trays


200


to lie within gaps


43


when a tray


200


is located in tray stack volume


46


so that the input shuttle assembly


12


is “keyed” to only accept trays


200


in the proper rotational orientation. In other words, the frame will not accept a tray


200


placed “backward” in tray stack volume


46


. Thus, the packaged ICs


202


in each tray


200


will be in a proper orientation for marking. Each frame member


42




a-d


supports a tray support element actuator


47


on a height-adjustable bracket


48


. Tray support element actuators


47


preferably comprise air (pneumatic) cylinders which, when actuated, retract a tab-like tray support element


50


which is otherwise spring-biased inwardly to intersect a boundary of tray stack volume


46


, the tray support elements


50


each being located in their extended positions to enter one of four downwardly facing notches


206


in the side


208


of a tray


200


proximate a tray corner


210


. Thus, one or more trays


200


may be supported at four locations within tray stack volume


46


. Further, if air pressure to tray support element actuators


47


is lost, any trays


200


within tray stack volume


46


above tray support elements


50


are kept from falling. Tray support element actuators


47


may comprise Myotoku Ltd. TKY-H-8X4 air cylinders. Tray carrier


22


is depicted under tray stack volume


46


in

FIG. 3

in position to receive a tray


200


lowered thereon.

FIGS. 4-6

depict a tray unload sequence, wherein (

FIG. 4

) a tray transport


24


bearing a tray carrier


22


is located initially under tray stack volume


46


of input shuttle assembly


12


out of contact with lowermost tray


200


, and parallel side plates


80


of a lift structure


78


(

FIG. 5

) of a wedge-type lift mechanism


60


as described below are vertically extended through elongated side notches


132


of tray carrier


22


to supportingly engage the bottom of lowermost tray


200


and support all of the trays in tray stack volume


46


. At this point, tray support element actuators


47


are initiated to withdraw tray support elements


50


. In

FIG. 5

, lowermost tray


200


has been lowered on side plates


80


of lift structure


78


a vertical distance (for example, 0.25 inch) equal to the thickness of each tray


200


, tray support element actuators


47


deactivated to extend tray support elements


50


into downwardly facing notches


206


of the next highest tray


200


, and then lowermost tray


200


further lowered onto tray carrier


22


. Tray carrier


22


carrying lowermost tray


200


is then moved horizontally out from under tray stack volume


46


on tray carrier


22


and tray transport


24


as shown in FIG.


6


and toward laser marking station


18


.




In unloading trays


200


from tray carrier


22


at output shuttle assembly


14


after passage through laser marking station


18


, side plates


80


of a lift structure


78


of a wedge-type lift mechanism


60


are vertically extended through elongated side notches


132


of a tray carrier


22


aligned with the tray stack volume


46


of output shuttle assembly


14


and carrying a tray


200


of marked packaged ICs


202


to raise that tray


200


into supporting contact with a lowermost (or only) tray


200


already in tray stack volume


46


and supported by tray support elements


50


of output shuttle assembly


14


. Tray support element actuators


47


are then initiated to retract tray support elements


50


, the stack of trays


200


lifted the thickness of one tray


200


(again, for example, 0.25 inch), and tray support element actuators


47


deactivated to extend tray support elements


50


into downwardly facing notches


206


of the lowermost tray


200


just lifted from tray carrier


22


and support the stack of trays


200


. Of course, if there are no trays at output shuttle assembly


14


when a tray carrier


22


bearing a tray


200


arrives, the sequence will be the same. After side plates


80


are vertically withdrawn below the level of tray carrier


22


on tray transport


24


, tray carrier


22


is returned on tray transport


24


to input shuttle assembly


12


to receive another tray


200


of unmarked packaged ICs


202


.




A significant feature of the laser marking system


10


is a particular wedge-type lift mechanism


60


(located as noted by reference numerals


20


on the previously referenced drawing figures) as depicted in various positions in

FIGS. 7-9

. In the preferred embodiment, lift mechanism


60


is employed with input shuttle assembly


12


, output shuttle assembly


14


and laser marking station


18


. Lift mechanism


60


includes a horizontally oriented stop dual-action (i.e., positive bidirectional actuation) air cylinder


62


, which may comprise a Parker Series S pneumatic cylinder. Shaft


64


of cylinder


62


is extendable and retractable under air pressure to selectively provide a stop for dual-action, pneumatically actuated drive block


66


riding on dual parallel horizontal guide shafts


68


. Drive wedge element


70


carried on drive block


66


and secured thereto has an upper inclined surface


72


upon which is supported lower inclined surface


74


of slave wedge element


76


. Slave wedge element


76


is constrained against horizontal movement by attachment to a three-sided lift structure


78


comprising vertically extending side plates


80


and horizontal floor


82


, side plates


80


being contained and guided by linear bearings


86


so as to permit only vertical movement. As drive block


66


moves horizontally, such movement is translated into vertical movement of the lift structure


78


by movement of the inclined upper surface


72


of drive wedge element


70


against lower inclined surface


74


of slave wedge element


76


. Due to the angle of inclination of surfaces


72


and


74


, horizontal motion results in reduced vertical motion (by, for example, a 4:1 horizontal to vertical ratio) but increased force over the smaller vertical distance as well as a smoother vertical movement of lift structure


78


, reducing any shock of contact of lift structure


78


with a tray


200


. Furthermore, the control system for the lift mechanism


60


, since it involves control of only two dual-action air cylinders, is extremely simple compared to conventional stepper or servo controls. In the preferred embodiment, the lift mechanism


60


with air cylinder


62


and drive block


66


may be manipulated to move in a vertical increment equal to the thickness of trays


200


, as alluded to above. Such manipulation is possible due to the difference in travel between shaft


64


of air cylinder


62


, which may be either three inches or one inch in the disclosed embodiment as explained below, and drive block


66


, which is four inches in the disclosed embodiment. Further, air cylinder


62


is sized to generate substantially more force than drive block


66


, so that actuation of air cylinder


62


in opposition to drive block


66


precludes further movement of drive block


66


upon contact with shaft


64


. Stated alternatively, the shaft


64


of air cylinder


62


may be selectively extended to act as a stop to full horizontal travel of drive block


66


and thus provide lift mechanism


60


with a vertical position between fully extended and fully retracted.




The uppermost vertical position of lift structure


78


of the lift mechanism


60


may obviously be designed in light of the level to which a tray


200


must be lifted. For example, when used with both input shuttle assembly


12


and output shuttle assembly


14


, the uppermost vertical position of lift structure


78


(in this instance, 1.00 inch elevation) would be in supporting contact with the lowermost tray


200


in tray stack volume


46


. When used with input shuttle assembly


12


, the uppermost vertical position is used to supportingly engage the lowermost tray in tray stack volume


46


and support it to permit retraction of tray support elements


50


. When used with output shuttle assembly


14


, the uppermost vertical position of lift structure


78


would be the same (1.00 inch) as for input shuttle assembly


12


, that is, one tray thickness (i.e., 0.25 inch) higher than the bottom of the lowermost tray


200


in the tray stack volume, so that a tray


200


full of marked IC packages


202


may be raised into lifting contact with the lowermost tray of a stack (or, stated another way, so that notches


206


of the tray


200


being lifted by the lift structure


78


are above the tray support elements


50


) so that the tray


200


being lifted from the tray carrier


22


(and trays


200


thereabove in the stack) may be supported by extended tray support elements


50


Thus, tray transport


24


with tray carrier


22


may be returned to input shuttle assembly


12


to receive another tray


200


. When used with laser marking station


18


, the uppermost vertical position of lift structure


78


is also the same (1.00 inch) and is employed to place a tray


200


on tray carrier


22


within a substantially bottomless, laser light safe enclosure, as will be described in more detail below.




As shown in

FIGS. 7-9

with specific reference to a lift mechanism for an input shuttle assembly


12


, lift mechanism


60


as described may be programmed to one of several vertical positions over a total travel of 1.00 inch, including a zero elevation position wherein lift structure


78


is completely retracted out of contact with a tray


200


when the latter rests on tray carrier


22


on tray transport


24


carried by transport actuator


16


. For example, and with specific reference to

FIG. 7

, the lowermost vertical position of lift mechanism


60


(and therefore of lift structure


78


) is achieved when air cylinder


62


is actuated to withdraw shaft


64


to the left as shown in the drawing figure, while drive block


66


is similarly moved to the left so that slave wedge element


76


is substantially superimposed over drive wedge element


70


. In order to raise lift structure


78


to its uppermost vertical position as shown in

FIG. 8

to, for example, receive a tray


200


from input shuttle assembly


12


, drive block


66


is actuated to move its full horizontal travel (four inches) to the right, yielding 1.00 inch of lift travel. At the same time, or subsequently, air cylinder


62


may be actuated to drive shaft


64


its full horizontal travel (three inches) to the right in preparation for the next movement sequence of lift mechanism


60


. After tray


200


at the bottom of a tray stack in input shuttle assembly


12


is contacted by side plates


80


of lift structure


78


and tray support elements


50


retracted as previously described, drive block


66


is positively actuated to move to the left. However, contact with extended shaft


64


of air cylinder


62


as shown in

FIG. 9

prevents further, leftward movement of drive block


66


, resulting in a downward vertical movement of lift structure


78


of only 0.25 inch (one inch of horizontal travel of drive block


66


being reduced by a 1 to 4 ratio due to the angle of inclination of like-angled inclined surfaces


72


and


74


) to a 0.75 inch elevation. At this point, tray support elements


50


are again extended to support the next-lowermost tray


200


in the stack as shown in

FIG. 5

, and air cylinder


62


may then be actuated to positively drive shaft


64


to the left, followed by leftward movement of already-actuated drive block


66


to return lift structure


78


to its lowermost position as shown in

FIG. 7. A

complete tray input cycle sequence of positions of drive wedge element


70


, slave wedge element


76


, shaft


64


and drive block


66


of a wedge-type lift mechanism


60


usable with an input shuttle assembly


12


according to one embodiment of the present invention is schematically depicted in

FIGS. 17A-17D

. Lift mechanism


60


moves from its lowermost position (

FIG. 17A

) to its uppermost elevation of 1.00 inch (FIG.


17


B), moves downward 0.25 inch to a 0.75 inch elevation (

FIG. 17C

) and then moves back to its lowermost position (FIG.


17


D).




It should be noted that, while the elements of wedge-type lift mechanism


60


are the same when used with both input shuttle assembly


12


and output shuttle assembly


14


, air cylinder


62


is reversed in orientation due to space considerations and the travel of shaft


64


extending therefrom is abbreviated, as explained further below.




When lift mechanism


60


is employed with output shuttle assembly


14


, the initial raised position of lift structure


78


is at 0.75 inch, wherein the bottom of a stack of trays


200


is contacted in supporting relationship by a tray


200


of marked IC packages


202


. Then, tray support elements


50


are retracted to permit lift structure


78


movement to full vertical travel of 1.00 inch to lift the tray stack upwardly one tray thickness so that tray support elements


50


may be extended to support the stack by the newly added lowermost tray


200


just received from tray carrier


22


. A complete tray output cycle sequence of positions of drive wedge element


70


, slave wedge element


76


, shaft


64


and drive block


66


of a wedge-type lift mechanism


60


usable with an output shuttle assembly


14


according to one embodiment of the present invention is schematically depicted in

FIGS. 18A-18D

. As depicted in

FIGS. 18A-18D

, when used with an output shuttle assembly


14


, the lift mechanism


60


moves from a lowermost position (

FIG. 18A

) to a 0.75 inch elevation position (FIG.


18


B), wherein drive block


66


has moved from left to right, but its travel has been halted by contact with extended shaft


64


′ of air cylinder


62


, in this instance, placed to the right of drive block


66


rather than to the left. Since shaft


64


′, when extended, only travels one inch, the travel of drive block


66


to the right is halted at the 0.75 inch elevation of lift mechanism


60


. Shaft


64


′ is then retracted to the right, followed by drive block


66


, causing lift mechanism


60


to reach its full vertical travel of 1.00 inch (FIG.


18


C). Drive block


66


is then moved to the left (FIG.


18


D).




It may be desirable to include sensors in lift mechanism


60


to detect positions of drive block


66


and shaft


64


or


64


′. For example, drive block position may be sensed using magnetic proximity sensors, while the extension or retraction of shaft


64


or


64


′ may be inductively sensed. Other types of sensors, for example, optical sensors or contact switches, might also be employed in this capacity.




In use with laser marking station


18


, only drive block


66


is required in lift mechanism


60


, since only two vertical positions are required. The first position of lift structure


78


corresponds to that shown in

FIG. 7

, while the second, full vertical extension position of lift structure


78


corresponds to that shown in FIG.


8


. The second position extends a tray carrier


22


bearing a tray


200


into enclosure


120


(FIGS.


1


,


2


,


15


and


16


) of laser marking station


18


as will be more fully described below.




Yet another significant feature (see

FIGS. 10-12

) is a self-aligning, cooperative configuration of tray carrier


22


and tray transport


24


to ensure repeatable, precise positioning of a tray


200


borne by the tray carrier


22


with respect to input and output tray stack volumes


46


and laser marking station


18


. As noted previously, tray carrier


22


is lifted off of tray transport


24


by a lift structure


78


into the substantially bottomless enclosure


120


of laser marking station


18


and then returned therefrom for transport to output shuttle assembly


14


. It is imperative that tray carrier


22


be in a precise location and position when lifted from tray transport


24


and that it be returned to the same, precise location for reliable tray movement, to maintain the integrity of parts on the tray, and to ensure trouble-free operation when unloading and loading trays


200


at shuttle assemblies


12


and


14


. This precise orientational requirement, moreover, must be accommodated without physical connection of the tray carrier


22


to tray transport


24


. Therefore, the substantially planar lower surface


90


of tray carrier


22


is provided with a plurality of hemispherical recesses


92


which are of like radius and in the same positions as hemispherical bearings


94


projecting upwardly from substantially planar upper surface


96


of tray transport


24


. This cooperative recess and bearing configuration provides robust, repeatable, gravity-enhanced alignment when the two components are mated.




Referring to

FIG. 12

of the drawings, the reader will note the presence of an additional hemispherical recess


98


on lower surface


90


of tray carrier


22


offset from the four hemispherical recesses


92


. Additional recess


98


, when used with a longitudinally foreshortened (in comparison to tray carrier


22


) tray transport


24


as shown in

FIGS. 11-14

, permits the tilting of a tray


200


on tray carrier


22


(constrained against movement, of course, by corner stops


100


extending upwardly from substantially planar upper surface


101


of tray carrier


22


) by vertical extension of a shaft


102


of an air cylinder (not shown), shaft


102


being surmounted by a bearing cylinder supporting a spherical bearing


104


of like radius to bearings


94


and aligned with additional recess


98


. The two recesses


92


most distant from, and diagonally located with respect to, additional recess


98


, engaged by their cooperating bearings


94


of tray transport


24


, provide a tilt pivot point or fulcrum for tilting of tray carrier


22


and the tray


200


residing therein at an angle to the longitudinal axis of the normally superimposed tray carrier


22


and tray transport


24


, such tilting being further facilitated by diagonal truncation or cutout


106


of the nearby corner of tray transport


24


. Tilting results in movement of each IC package


202


in a tray borne by the tray carrier


22


toward the same corner of the tray recess


204


(

FIG. 2

) in which that IC package


202


is located. Also noteworthy in

FIGS. 13 and 14

is the presence of part movement facilitator


110


, which may comprise a vibrator, or an air cylinder actuated to “tap” the tray carrier


22


repeatedly to overcome any sliding friction preventing the IC packages from moving to their desired positions. The tray tilting location (with optional part movement facilitator


110


) may be at the position of tray transport


24


under the laser marking station


18


to effect precise alignment of IC packages


202


immediately before marking or may be located at the upstream side of laser marking station


18


where tray carrier


22


passes under inspection camera


30


, so that the position of each IC package


202


may be checked.




Yet another significant feature of the laser marking system of the present invention is the configuration of laser marking station


18


. Specifically, laser marking station


18


employs a substantially bottomless enclosure


120


having four sides and a roof (see

FIGS. 1

,


2


,


15


and


16


) which, unlike conventional marking stations previously referenced herein, does not require opening and closing of access shutters to admit a group of IC packages to be marked. Instead, a tray


200


of unmarked IC packages


202


positioned below enclosure


120


as shown in FIG.


15


and residing on carrier tray


22


, which in turn rests on tray transport


24


of transport actuator


16


(not shown in

FIGS. 15 and 16

for clarity), may be raised off of tray transport


24


into the opening


122


defined in the bottom of enclosure


120


when contacted by parallel extensions


124


at the tops of side plates


80


of lift structure


78


, the upper ends


126


of extensions


124


including notched edges


128


bracketing a central protrusion


130


sized and located to closely fit within elongated side notches


132


of tray carrier


22


. As shown in

FIGS. 10-14

, the lateral extent or width of tray transport


24


is less than that of tray carrier


22


so that side plates


80


pass outboard of tray transport


24


before extensions


124


engage elongated side notches


132


of tray carrier


22


. As shown in

FIG. 16

, when lift structure


78


of lift mechanism


60


is fully vertically extended, tray carrier


22


is substantially contained within enclosure


120


and the tray


200


is located completely within enclosure


120


at the proper focal length for laser marking with the assurance that laser light emitted from the marking heads will be completely contained within enclosure


120


. Further, tray carrier


22


is sized and shaped to act as a substantially light-tight closure to bottom opening


122


of enclosure


120


. Completion of the closure is effected by the presence of extensions


124


in elongated side notches


132


, extensions


124


being of adequate width to fill the width of notches


132


. Assurance of a light-tight enclosure


120


may be further provided with magnetic sensors on the interior of enclosure


120


which will confirm the proper location of tray carrier


22


in position responsive to the presence in the proper location within enclosure


120


of two magnets


134


(

FIGS. 10

,


11


,


13


and


14


) secured in tray carrier


22


.




It is preferred that two laser marking heads


140


, under control of separate electronics and powered from a single laser output beam divided by a beam splitter, are focused on separate portions of a marking field within enclosure


120


. Thus, a 6 inch by 12 inch marking field may be defined, affording the capability to mark IC packages


202


of an entire tray


200


without tray movement. A suitable laser marking device is the Model 1900, offered by General Scanning. To further ensure proper operation of the laser marking system


10


and provide additional assurance against premature actuation thereof, it may be appropriate to include sensors, such as optical or magnetic sensors, to sense the presence of a tray


200


in the laser marking field.




With respect to the tray handling aspects of the invention, it may also be desirable to provide sensors to sense when tray output shuttle assembly


14


is full of trays


200


and when a tray


200


has cleared the level of tray support elements


50


. Similarly, tray input shuttle assembly


12


may employ a tray presence sensor to confirm that a tray


200


is, in fact, loaded onto tray carrier


22


and a stack presence sensor to detect when there are no more trays


200


present to be loaded onto tray carrier


22


. Fiber-optic reflection-type sensors are one exemplary sensor technology which may be employed. In addition, such sensors may be employed to sense the position of the air cylinder shafts


64


and drive blocks


66


of lift mechanisms


60


.




While the present invention has been described in the context of an illustrated embodiment, those of ordinary skill in the art will recognize and appreciate that it is not so limited. Specifically and without limitation, additions or modifications to, or deletions from, the apparatus of the invention and its operation as described may be made without departing from the scope of the invention as defined by the claims appended hereto. In addition, various elements and subassemblies of the overall system of the present invention as disclosed also individually and in various combinations are included within the ambit of the present invention.



Claims
  • 1. A method of marking a plurality of IC packages carried in a tray, comprising:providing at least one tray carrying a plurality of discrete IC packages; lowering the at least one tray and the plurality of discrete IC packages carried thereby from a first position to a second position; moving the at least one tray and the plurality of discrete IC packages carried thereby horizontally to a third position; raising the at least one tray and the plurality of discrete IC packages carried thereby to a fourth position; marking the plurality of discrete IC packages carried by the at least one tray at the fourth position; lowering the at least one tray and the plurality of discrete IC packages carried thereby to the third position; moving the at least one tray and the plurality of discrete IC packages carried thereby horizontally to a fifth position; and raising the at least one tray and the plurality of discrete IC packages carried thereby to a sixth position.
  • 2. The method of claim 1, wherein the at least one tray comprises a plurality of vertically stacked trays at the first position and further comprising removing a lowermost tray from the plurality of stacked trays to lower the removed tray to the second position and proceed the removed tray therefrom through the third, fourth, fifth and sixth positions.
  • 3. The method of claim 2, further comprising raising the removed tray to the bottom of a vertical stack comprising a plurality of trays at the sixth position.
  • 4. The method of claim 1, further comprising raising the at least one tray and the plurality of discrete IC packages carried thereby into an enclosure at the fourth position and substantially concurrently sealing the enclosure against light leakage therefrom.
  • 5. The method of claim 1, wherein the marking is effected by laser light.
  • 6. The method of claim 5, wherein the marking is effected substantially simultaneously in two adjacent fields, each of the fields approximating one-half of an area of the at least one tray and containing approximately half of the plurality of discrete IC packages.
  • 7. The method of claim 6, further comprising inspecting a last discrete IC package carried by the at least one tray and marked in each of the two fields between the third and fifth positions.
  • 8. The method of claim 1, further comprising tilting the at least one tray and plurality of discrete IC packages carried thereby before the at least one tray reaches the fourth position.
  • 9. The method of claim 8, further comprising imparting force to the at least one, tilted tray to cause the plurality of discrete IC packages carried in recesses in the at least one, tilted tray to reach a substantially common alignment for marking.
CROSS-REFERENCE TO RELATED APPLICATIONS

This application is related to U.S. applications Ser. No. 09/219,501, now U.S. Pat. No. 6,241,459, Ser. No. 09/217,032, now U.S. Pat. No. 6,244,569, Ser. No. 09/217.029, now U.S. Pat. No. 6,287,029, and Ser. No. 09/217,039, now U.S. Pat. No. 6,262,388, by the same inventors, filed on even date herewith.

US Referenced Citations (157)
Number Name Date Kind
2357600 Pabst Sep 1944 A
2413767 Hyde Jan 1947 A
2454548 Brinkert Nov 1948 A
2495541 Nolan, Jr. Jan 1950 A
3239218 Reeves Mar 1966 A
3254776 Brown Jun 1966 A
3327889 Dore Jun 1967 A
3625384 Boerger et al. Dec 1971 A
3628672 Heinz Dec 1971 A
3774352 Weber Nov 1973 A
3799017 Halligan Mar 1974 A
3837510 McWilliams Sep 1974 A
3887997 Hartleroad et al. Jun 1975 A
3903934 Vizy Sep 1975 A
3917983 Kuronen Nov 1975 A
3937386 Hartleroad et al. Feb 1976 A
3969813 Minetti et al. Jul 1976 A
3973665 Giammanco Aug 1976 A
4024545 Dowling et al. May 1977 A
4030622 Brooks et al. Jun 1977 A
4058217 Vaughan et al. Nov 1977 A
4095095 Muraoka et al. Jun 1978 A
4097715 Frizzi Jun 1978 A
4123044 Petzi Oct 1978 A
4178531 Alig Dec 1979 A
4203486 Rubbright et al. May 1980 A
4323755 Nierenberg Apr 1982 A
4346284 Grollimund et al. Aug 1982 A
4352617 Sakai et al. Oct 1982 A
4353796 Kubo et al. Oct 1982 A
4354770 Block Oct 1982 A
4370542 Mills et al. Jan 1983 A
4375025 Carlson Feb 1983 A
4382580 Hellander May 1983 A
4403134 Klingel Sep 1983 A
4461073 Harringer et al. Jul 1984 A
4493767 Monteyne Jan 1985 A
4510673 Shils et al. Apr 1985 A
4517436 Lawrence May 1985 A
4534695 Stump et al. Aug 1985 A
4539878 Linker et al. Sep 1985 A
4543716 Damiano et al. Oct 1985 A
4552271 Kranz Nov 1985 A
4577563 Sidler Mar 1986 A
4610359 Muller Sep 1986 A
4616414 Cushman Oct 1986 A
4626656 Ootsuka et al. Dec 1986 A
4630513 Keller Dec 1986 A
4638144 Latta, Jr. Jan 1987 A
D288273 Gould Feb 1987 S
4644126 Schumacher Feb 1987 A
4665298 La Rocca May 1987 A
4677370 Tustaniwskyj et al. Jun 1987 A
4696096 Green et al. Sep 1987 A
4711334 Barry et al. Dec 1987 A
4718531 Bianchi et al. Jan 1988 A
4767984 Bakker Aug 1988 A
4772079 Douglas et al. Sep 1988 A
4790515 Pocci Dec 1988 A
4791267 Yokoyama et al. Dec 1988 A
4818835 Kuwabara et al. Apr 1989 A
4832612 Grabbe et al. May 1989 A
4884420 Finkel et al. Dec 1989 A
4891242 Ito et al. Jan 1990 A
4914269 Kinsman et al. Apr 1990 A
4916293 Cartlidge et al. Apr 1990 A
4926677 Waldner May 1990 A
4944492 Nonaka Jul 1990 A
4947981 Dorner et al. Aug 1990 A
4965927 Holzman Oct 1990 A
H906 Baggett et al. Apr 1991 H
5043657 Amazeen et al. Aug 1991 A
5090664 McCullough et al. Feb 1992 A
5102291 Hine Apr 1992 A
5113992 Sadamori May 1992 A
5117963 Thayer et al. Jun 1992 A
5127837 Shah et al. Jul 1992 A
5150797 Shibata Sep 1992 A
5177368 Kay Jan 1993 A
5204987 Klingel Apr 1993 A
5218894 College et al. Jun 1993 A
5219765 Yoshida et al. Jun 1993 A
5226361 Grant et al. Jul 1993 A
5245166 Shepard Sep 1993 A
5245900 Dojnik Sep 1993 A
5256578 Corley et al. Oct 1993 A
5260542 Ishiguro et al. Nov 1993 A
5263567 Costa Nov 1993 A
5279975 Devereaux et al. Jan 1994 A
5290134 Baba Mar 1994 A
5302798 Inagawa et al. Apr 1994 A
5307010 Chiu Apr 1994 A
5313156 Klug et al. May 1994 A
5315094 Lisy May 1994 A
5322173 Kay Jun 1994 A
5332463 Eberlein et al. Jul 1994 A
5357077 Tsuruta Oct 1994 A
5360747 Larson et al. Nov 1994 A
5365653 Padrun Nov 1994 A
5375320 Kinsman et al. Dec 1994 A
5379514 Okuda et al. Jan 1995 A
5399828 Riddle et al. Mar 1995 A
5402563 Satoh et al. Apr 1995 A
5427349 Obrecht Jun 1995 A
5458158 Kawanabe Oct 1995 A
5463227 Stern et al. Oct 1995 A
5465470 Vongfuangfoo et al. Nov 1995 A
5466908 Hosoya et al. Nov 1995 A
5467023 Takeyama Nov 1995 A
5479694 Baldwin Jan 1996 A
5481202 Frye, Jr. Jan 1996 A
5487471 Marchek et al. Jan 1996 A
5498851 Hayashi et al. Mar 1996 A
D371021 Pine et al. Jun 1996 S
5566414 Nonaka Oct 1996 A
5566840 Waldner et al. Oct 1996 A
5587094 Yoshida et al. Dec 1996 A
5588797 Smith Dec 1996 A
5600150 Stern et al. Feb 1997 A
5605641 Chiba et al. Feb 1997 A
5629484 Liska May 1997 A
5632083 Tada et al. May 1997 A
5632915 Schnetzer et al. May 1997 A
5638958 Sanchez Jun 1997 A
5643477 Gullo et al. Jul 1997 A
5653900 Clement et al. Aug 1997 A
5654204 Anderson Aug 1997 A
5665609 Mori Sep 1997 A
5691544 Stern et al. Nov 1997 A
5717162 Matsuoka Feb 1998 A
5719372 Togari et al. Feb 1998 A
5722639 Nonaka Mar 1998 A
5761301 Oshima et al. Jun 1998 A
5793051 Stern et al. Aug 1998 A
5808268 Balz et al. Sep 1998 A
5821497 Yamazaki et al. Oct 1998 A
5829115 Speller, Jr. et al. Nov 1998 A
5838431 Hara et al. Nov 1998 A
5870820 Arakawa et al. Feb 1999 A
5875544 Chou Mar 1999 A
5909706 Jin et al. Jun 1999 A
5911461 Sauter et al. Jun 1999 A
5932119 Kaplan et al. Aug 1999 A
5937270 Canella Aug 1999 A
5942136 Mori et al. Aug 1999 A
5946791 Baldwin Sep 1999 A
5966307 Lin Oct 1999 A
5985377 Corbett Nov 1999 A
5986235 Canella Nov 1999 A
5991245 Yoshimura Nov 1999 A
5999252 Greisz Dec 1999 A
6008476 Neiconi et al. Dec 1999 A
6023042 Hensel et al. Feb 2000 A
6031202 Arakawa et al. Feb 2000 A
6062119 Overgaard May 2000 A
6070731 Kobayashi et al. Jun 2000 A
6138542 Overgaard Oct 2000 A
Foreign Referenced Citations (17)
Number Date Country
843232 Jun 1970 CA
243 798 Mar 1987 DE
0 653 791 Oct 1994 EP
0 653 791 May 1995 EP
1.284.603 Jan 1961 FR
57-53955 Mar 1982 JP
61-297047 Dec 1986 JP
62-244591 Oct 1987 JP
63171714 Jul 1988 JP
63-202521 Aug 1988 JP
1-100677 Apr 1989 JP
2-205281 Aug 1990 JP
466416 Mar 1992 JP
5-69164 Mar 1993 JP
6-226472 Aug 1994 JP
06314899 Nov 1994 JP
6-326203 Nov 1994 JP
Non-Patent Literature Citations (7)
Entry
Pending Patent Application, “An Apparatus for Actuating the Retaining Locks of a Cassette” (without claims or abstract), Ser. No. 08/923,359, filed Sep. 8, 1997.
Pending Patent Application, “Integrated Circuit Chip Handling Apparatus and Method” (without claims or abstract), Ser. No. 09/307,498, filed May 7, 1999.
Pending Patent Application “Automated Multi-Chip Module Handler, Method of Module Handling, and Module Magazine” (without claims or abstract), Ser. No. 09/065,799, filed Apr. 23, 1998.
Pending Patent Application “Method of Efficiently Laser Marking Singulated Semiconductor Devices” (without claims or abstract), Ser. No. 08/590,919, filed Jan. 24, 1996.
Pending Patent Application, “Shuttle Assembly for Tray Handling” (without claims or abstract), Serial. No. 09/219,501, filed Dec. 21, 1998.
Pending Patent Application, “Controlled Motion Lift Mechanism” (without claims or abstract), Serial No. 09/217,032, filed Dec. 21, 1998.
Pending Patent Application, “Self-Aligning Tray Carrier Apparatus with Tilt Feature” (without claims or abstract), Ser. No. 09/217,029, filed Dec. 21, 1998.