This is a division of application Ser. No. 06/776,553, filed 9/16/85 now U.S. Pat. No. 4,947,227.
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4299024 | Piotrowski | Nov 1981 | |
4416050 | Sarace | Jan 1983 | |
4507158 | Kamins et al. | Mar 1985 | |
4570330 | Cogan | Feb 1986 | |
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4685199 | Jastrzebski | Aug 1987 | |
4814287 | Takemoto et al. | Mar 1989 | |
4879585 | Usami | Nov 1989 |
Number | Date | Country |
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58-192364 | Nov 1983 | JPX |
60-136330 | Jul 1985 | JPX |
Entry |
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Sabine, K. A. et al., IEEE Electron Device Letters, vol. EDL-6, No. 1, Jan. 1985, pp. 43-46. |
Kamins, T. I., et al., IEEE Electron Device Letters, vol. EDL-6, No. 12, Dec. 1985, pp. 617-619. |
Ghandhi, S. K., VLSI Fabrication Principles, John Wiley, 1983, pp. 358-362, 432-435, 476-500. |
Number | Date | Country | |
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Parent | 776553 | Sep 1987 |