Number | Name | Date | Kind |
---|---|---|---|
3873371 | Wolf | Mar 1975 | |
4013484 | Boleky et al. | Mar 1977 | |
4023195 | Richman | May 1977 | |
4027380 | Deal et al. | Jun 1977 | |
4178191 | Flatley | Dec 1979 | |
4253229 | Yeh et al. | Mar 1981 | |
4417385 | Temple | Nov 1983 | |
4466178 | Soclof | Aug 1984 | |
4554726 | Hillcnius et al. | Nov 1985 | |
4698899 | Kakihana | Oct 1987 | |
5045898 | Chen et al. | Sep 1991 | |
5100810 | Yoshimi et al. | Mar 1992 | |
5173438 | Sandhu | Dec 1992 | |
5240874 | Roberts | Aug 1993 |
Number | Date | Country |
---|---|---|
0006152 | Feb 1981 | JPX |
Entry |
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S. Wolfe, "Ion Implantation for VLSI", Silicon Processing for the VLSI Era, pp. 306-311. |