1. Field of Disclosure
The present disclosure relates generally to optimizing an integrated circuit layout, and more specifically to optimizing the integrated circuit layout to provide substantially uniform stress patterns to improve performance of the integrated circuit.
2. Related Art
An integrated circuit is designed to have stress, also referred to as strain, applied to its semiconductor devices during their fabrication to improve performance. One type of stress imposes a mechanical stress or strain onto channel regions of the semiconductor devices to increase carrier or hole mobility to improve their speed. For example, a tensile mechanical strain and a compressive mechanical stress can be imposed on a p-type metal-oxide-semiconductor (PMOS) device and an n-type metal-oxide-semiconductor (NMOS) device, respectively, to improve their speed. New complementary metal-oxide-semiconductor (CMOS) nodes, such as 20 nm and below, apply the stress during their fabrication to diffusion layers, polysilicon layers, metal layers, and/or interconnections between layers of the semiconductor devices to improve performance.
Typically, the integrated circuit is usually constructed using configurations and arrangements of semiconductor devices that are selected from a predefined library of standard cells. A standard cell represents one or more semiconductor devices as well as their interconnection structures that are configured and arranged to provide a Boolean logic function, such as AND, OR, XOR, XNOR, or NOT to provide some examples, or a storage function, such as a flipflop or a latch to provide some examples. The simplest standard cells are direct representations of the elemental NAND, NOR, XOR, or NOT Boolean logic functions, although standard cells of much greater complexity are commonly used, such as a 2-bit full-adder to provide an example. The standard cells are defined in terms of planar geometric shapes which correspond to diffusion layers, polysilicon layers, metal layers, and/or interconnections between layers.
Conventionally, active diffusion regions, also referred to as oxide diffusion (OD) regions or thin oxide regions, within diffusion layers which form transistors of one standard cell are separated from active diffusion regions within diffusion layers of another standard cell by a physical active diffusion region gap. The physical active diffusion region gap causes discontinuities in the diffusion layer, often referred to as edge effects, which lead to non-uniform stress patterns when stress is applied to the semiconductor devices during fabrication. This non-uniform stress pattern can significantly reduce the performance of the integrated circuit, and is particularly acute for newer CMOS nodes, such as 20 nm.
Embodiments of the disclosure are described with reference to the accompanying drawings. In the drawings, like reference numbers indicate identical or functionally similar elements. Additionally, the left most digit(s) of a reference number identifies the drawing in which the reference number first appears.
The disclosure will now be described with reference to the accompanying drawings. In the drawings, like reference numbers generally indicate identical, functionally similar, and/or structurally similar elements. The drawing in which an element first appears is indicated by the leftmost digit(s) in the reference number.
The following Detailed Description refers to accompanying drawings to illustrate exemplary embodiments consistent with the disclosure. References in the Detailed Description to “one exemplary embodiment,” “an exemplary embodiment,” “an example exemplary embodiment,” etc., indicate that the exemplary embodiment described can include a particular feature, structure, or characteristic, but every exemplary embodiment can not necessarily include the particular feature, structure, or characteristic. Moreover, such phrases are not necessarily referring to the same exemplary embodiment. Further, when a particular feature, structure, or characteristic is described in connection with an exemplary embodiment, it is within the knowledge of those skilled in the relevant art(s) to affect such feature, structure, or characteristic in connection with other exemplary embodiments whether or not explicitly described.
The exemplary embodiments described herein are provided for illustrative purposes, and are not limiting. Other exemplary embodiments are possible, and modifications can be made to the exemplary embodiments within the spirit and scope of the disclosure. Therefore, the Detailed Description is not meant to limit the disclosure. Rather, the scope of the disclosure is defined only in accordance with the following claims and their equivalents.
The following Detailed Description of the exemplary embodiments will so fully reveal the general nature of the disclosure that others can, by applying knowledge of those skilled in relevant art(s), readily modify and/or adapt for various applications such exemplary embodiments, without undue experimentation, without departing from the spirit and scope of the disclosure. Therefore, such adaptations and modifications are intended to be within the meaning and plurality of equivalents of the exemplary embodiments based upon the teaching and guidance presented herein. It is to be understood that the phraseology or terminology herein is for the purpose of description and not of limitation, such that the terminology or phraseology of the present specification is to be interpreted by those skilled in relevant art(s) in light of the teachings herein.
Conventional Integrated Circuit Layout
The standard cells 102 and 104 can represent any suitable standard cells that are selected from the predefined library of standard cells. Although these standard cells are illustrated as being conventional integrated circuit layouts of conventional inverters, this is for illustrative purposes only. The standard cells 102 and 104 can be implemented using any convectional integrated circuit layouts that are configured and arranged to provide Boolean logic functions, such as AND, OR, XOR, XNOR, or NOT to provide some examples, or storage functions, such as a flipflop or a latch to provide some examples.
Conventionally, the standard cells 102 and 104 include semiconductor devices that are defined in terms of planar geometric shapes which correspond to first active diffusion regions 108.1 and 108.2 and second active diffusion regions 110.1 and 110.2 within one or more diffusion layers, polysilicon regions 112 within one or more polysilicon layers, metal regions 114 within one or more metal layers and/or one or more interconnections 116, such as contacts or vias to provide some examples, between the regions. The active diffusion regions 108 and 110, illustrated using hashing in
The metal regions 114, illustrated using solid gray shading in
The one or more interconnections 116, illustrated as a squared “x” in
As illustrated in
Conventional Integrated Circuit Layout
Overview
The following Detailed Description describes an integrated circuit that has substantially continuous active diffusion regions within its diffusion layers throughout the integrated circuit. Active regions of semiconductor devices can be fabricated using portions of these substantially continuous active diffusion regions. Stress can be applied to these semiconductor devices during their fabrication which leads to uniform stress patterns throughout the integrated circuit. The substantially uniform stress patterns can significantly improve performance of the integrated circuit when compared to the conventional integrated circuit 100 and/or the conventional integrated circuit 200.
First Integrated Circuit Layout
The first standard cell 302 and the second standard cell 304 can represent any standard cells that are selected from the predefined library of standard cells in a substantially similar manner as the standard cells 102 and 104. The first standard cell 302 and the second standard cell 304 can be implemented using any integrated circuit layouts that are configured and arranged to provide Boolean logic functions, such as AND, OR, XOR, XNOR, or NOT to provide some examples, or storage functions, such as a flipflop or a latch to provide some examples. The simplest implementations for the first standard cell 302 and the second standard cell 304 are direct representations of the elemental NAND, NOR, XOR, or NOT Boolean logic functions, although implementations of much greater complexity can be used.
The first standard cell 302 and the second standard cell 304 include semiconductor devices that are defined in terms of planar geometric shapes which correspond to the polysilicon regions 112 within the one or more polysilicon layers, the metal regions 112 within the one or more metal layers, the one or more interconnections 116, and a first active diffusion region 308 and a second active diffusion region 310 within one or more diffusion layers. The first active diffusion region 308 and the second active diffusion region 310, illustrated using hashing in
The coupling cell 306 couples the first active diffusion region portion 308.1 to the third active diffusion region portion 308.3 and the first active diffusion region portion 310.1 to the third active diffusion region portion 310.3 to provide substantially continuous active diffusion regions within the integrated circuit 300. Specifically, the coupling cell 306 provides a substantially continuous transition of the first active diffusion region portion 308.1 to the third active diffusion region portion 308.3 and a substantially continuous transition of the first active diffusion region portion 310.1 to the third active diffusion region portion 310.3. Accordingly, there are no physical active diffusion region gaps between the first active diffusion region portion 308.1 and third active diffusion region portion 308.3 and between the first active diffusion region portion 310.1 and third active diffusion region portion 310.3. These substantially continuous transitions of the first active diffusion region 308 and the second active diffusion region 310 provide for substantially uniform stress patterns throughout the integrated circuit 300 when stress is applied to the semiconductor devices during their fabrication.
For example, as illustrated in
Although the coupling cell 306, as well as other coupling cells to be described below, is described in terms of connecting standard cells, those skilled in the relevant art(s) will recognize that the disclosure can be applied naturally and usually to complete standard cells rows and regions by inserting a coupling cell between many or all standard cells. Typically, the coupling cell would be added between all neighboring standard cells which are speed critical. It can be used for any subset of the cells depending on the designer's requirements.
Additionally, to ensure that the p-type stressing transistor 312 and the n-type stressing transistor 314 do not adversely affect operation of the first standard cell 302, the p-type stressing transistor 312 and the n-type stressing transistor 314 can be biased to be continuously inactive or turned “OFF.” These continuously inactive semiconductor transistors, as well other continuously inactive semiconductor transistors to be described below, can be referred to as “dummy” transistors. The p-type stressing transistor 312 is biased to be continuously inactive by continuously applying a voltage that is greater than its threshold voltage between its gate and its source. Typically, the threshold voltage of the p-type stressing transistor 312 is a negative voltage; therefore, applying this voltage between its gate and its source inactivates the p-type stressing transistor 312. Likewise, n-type stressing transistor 314 is biased to be continuously inactive by continuously applying a voltage that is less than its threshold voltage between its gate and its source. Typically, the threshold voltage of the n-type stressing transistor 314 is a positive voltage; therefore, applying this voltage between its gate and its source inactivates the n-type stressing transistor 314. For example, a source and the gate of the p-type stressing transistor 312 and a source and the gate of the n-type stressing transistor 314 are coupled to the supply voltage VDD and supply voltage VSS, respectively, as illustrated in a circuit diagram 320 for the integrated circuit 300.
In this example, coupling of the source and the gate of the p-type stressing transistor 312 to the supply voltage VDD ensures that voltage between its gate and its source is greater than the threshold voltage and coupling of the source and the gate of the n-type stressing transistor 314 to the supply voltage VSS ensures that voltage between its gate and its source is less than the threshold voltage. As a result of the voltage between the gate and the source of the p-type stressing transistor 312 being greater than the threshold voltage and the voltage between the gate and the source of the n-type stressing transistor 314 being less than the threshold voltage, the p-type stressing transistor 312 and the n-type stressing transistor 314 are continuously inactive. Typically, the supply voltage VDD represents a voltage that corresponds to a logical one and the supply voltage VSS represents a voltage that corresponds to a logical zero or ground.
Alternatively, to ensure that the p-type stressing transistor 312 and the n-type stressing transistor 314 do not adversely affect operation of the first standard cell 302, the p-type stressing transistor 312 and the n-type stressing transistor 314 can be biased to be temporarily inactive or turned “OFF,” For example, the gate of the p-type stressing transistor 312 and the gate of the n-type stressing transistor 314 are coupled to various control signals that are configured to bias the gate of the p-type stressing transistor 312 and the gate of the n-type stressing transistor 314 to make these transistors temporarily inactive. These various control signals can be provided by an output of another gate, a flipflop, a latch, a register, another standard cell or another semiconductor device to provide some examples. In an exemplary embodiment, these control signals can be provided through one or more outputs of one or more registers which are set-up to a correct value to bias the gate of the p-type stressing transistor 312 and the gate of the n-type stressing transistor 314 to make these transistors temporarily inactive at boot-up or before operation of the first standard cell 302 and the second standard cell 304.
Second Integrated Circuit Layout
As shown in
Third Integrated Circuit Layout
As illustrated in
The first standard cell 502 and the second standard cell 504 can represent any standard cells that are selected from the predefined library of standard cells in a substantially similar manner as the first standard cell 502 and the second standard cell 504, respectively. However, the first active diffusion region 508 can be characterized as being a combination of a first active diffusion region portion 508.1 having a first width w1 within the first standard cell 502, a second active diffusion region portion 508.2 between the first standard cell 502 and the second standard cell 504, and a third active diffusion region portion 508.3, having a second width w2 that is different from the first width w1, within the second standard cell 502. The second active diffusion region 510 can be characterized in a substantially similar manner as the first active diffusion region 508.
The coupling cell 506 couples the first active diffusion region portion 508.1 to the third active diffusion region portion 508.3 and the first active diffusion region portion 510.1 to the third active diffusion region portion 510.3 to provide substantially continuous active diffusion regions throughout the integrated circuit 500. Specifically, the coupling cell 506 provides a substantially continuous transition of the first active diffusion region portion 508.1 to the third active diffusion region portion 508.3 and a substantially continuous transition of the first active diffusion region portion 510.1 to the third active diffusion region portion 510.3. These substantially continuous transitions of the first active diffusion region 508 and the second active diffusion region 510 present a substantially continuous active diffusion region throughout the integrated circuit 500.
As shown in
These linear transitions and/or non-linear transitions can be modeled using Electronic Design Automation (EDA) software, such as SPICE to provide an example, to determine which transition leads to substantially uniform stress patterns throughout the integrated circuit 500 when stress is applied to the transistors of the integrated circuit 500. The EDA software represents a category of computer aided design tools for designing, simulating, and/or producing integrated circuit layouts. The EDA software can select among various widths w1 through wk, linear transitions and/or non-linear transitions, and/or any other suitable integrated circuit layout parameter of the integrated circuit 500 that will be apparent to those skilled in the relevant art(s) to determine which integrated circuit layout leads to substantially uniform stress patterns throughout the integrated circuit 500 when stress is applied to the transistors of the integrated circuit 500.
The coupling cell 506 includes a p-type stressing transistor 512 and an n-type stressing transistor 514. The p-type stressing transistor 512 and the n-type stressing transistor 514 are substantially similar to the p-type stressing transistor 312 and the n-type stressing transistor 314, respectively. However, a first standard cell 502 and the second standard cell 504 can be mirrored images, such as shown in
It is to be appreciated that the Detailed Description section, and not the Abstract section, is intended to be used to interpret the claims. The Abstract section can set forth one or more, but not all exemplary embodiments, of the disclosure, and thus, are not intended to limit the disclosure and the appended claims in any way.
The disclosure has been described above with the aid of functional building blocks illustrating the implementation of specified functions and relationships thereof. The boundaries of these functional building blocks have been arbitrarily defined herein for the convenience of the description. Alternate boundaries can be defined so long as the specified functions and relationships thereof are appropriately performed.
It will be apparent to those skilled in the relevant art(s) that various changes in form and detail can be made therein without departing from the spirit and scope of the disclosure. Thus the disclosure should not be limited by any of the above-described exemplary embodiments, but should be defined only in accordance with the following claims and their equivalents.
The present application claims the benefit of U.S. Provisional Patent Appl. No. 61/684,655, filed Aug. 17, 2012, which is incorporated herein by reference in its entirety.
Number | Date | Country | |
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61684655 | Aug 2012 | US |