Patent Application
20250018447
The present disclosure claims priority to and the benefit of Chinese Patent Application No. 202221479231.1, filed on Jun. 14, 2022, the disclosure of which is incorporated herein by reference in its entirety.
The present disclosure relates to auxiliary equipment for cleaning a silicon wafer, and in particular, to lifting control apparatuses.
Related arts propose a throwing mechanism for lifting in which one end is suspended by two vertical wire ropes and can be moved up and down upon driven by powered another end. This kind of single-arm wire rope suspension is extremely unstable. The wire rope itself is a flexible member, which is easily shaken by vibration and is easily broken by wear. Once any one of the wire ropes is broken, the stability of the whole throwing will no longer exist, which directly affects the quality of cleaning silicon wafers, and even the silicon wafers may hit a basket containing them due to vibration, resulting in serious cracking of the silicon wafers.
In view of the above, an embodiment of the present disclosure provides a lifting control apparatus, which includes: a base for holding a basket containing silicon wafers; brackets provided on an outside of both ends of the base; and a driver provided on an outside of the brackets for driving the brackets to move up and down; wherein the driver is provided with a lead screw; the lead screw is connected with the bracket on a same side; the lead screw on one side is driven to rotate the lead screw on another side synchronously, and the lead screws on both sides are driven to move the brackets on both sides and the base between the brackets up and down together; or, the lead screws on both sides are driven to rotate synchronously, so that the lead screws on both sides drive the base between the brackets through the correspondingly brackets to move up and down together.
In some embodiments of the present disclosure, the driver is configured to drive the first lead screw to rotate to drive the second lead screw to rotate synchronously with the first lead screw, to drive the first bracket and the second bracket to move up and down.
In some embodiments of the present disclosure, the driver is configured to drive the first lead screw and the second lead screw to rotate synchronously, to drive the first bracket and the second bracket to move up and down.
In some embodiments of the present disclosure, the first bracket includes two first vertical rods disposed in paralle and a first transverse plate connecting the two first vertical rods; the second bracket includes two second vertical rods disposed in paralle and a second transverse plate connecting the two second vertical rods; one end of the first vertical rod is connected with one corner end of the base, and another end of the first vertical rod is connected with one end of the first transverse plate through an extended short rod; one end of the second vertical rod is connected with one corner end of the base, and another end of the second vertical rod is connected with one end of the second transverse plate through an extended short rod; the first transverse plate is disposed on an outside of the first vertical rod and at an upper end of the first vertical rod; and the second transverse plate is disposed on an outside of the second vertical rod and at an upper end of the second vertical rod.
In some embodiments of the present disclosure, the first lead screw is vertically disposed and located in a midline of the first transverse plate; the second lead screw is vertically disposed and located in a midline of the second transverse plate; the upper end of the first vertical rod is higher than a upper limit position of the first bracket and a lower end of the first vertical rod is lower than a lower limit position of the base; and the upper end of the second vertical rod is higher than a upper limit position of the second bracket and a lower end of the second vertical rod is lower than a lower limit position of the base.
In some embodiments of the present disclosure, the driver further comprises two first guide posts disposed on both sides of the first lead screw and disposed in parallel with the first lead screw, and both ends of the first guide post are fixedly disposed on a first fixing plate disposed in parallel with each other, and are integrally connected with the first lead screw on a same side through the first fixing plate; and the driver further comprises two second guide posts disposed on both sides of the second lead screw and disposed in parallel with the second lead screw, and both ends of the second guide post are fixedly disposed on a second fixing plate disposed in parallel with each other, and are integrally connected with the second lead screw on a same side through the second fixing plate.
In some embodiments of the present disclosure, a first sleeve is further provided on each of the first guide posts for engagement therewith, a first vertical plate is provided on one side of the first sleeve close to the first bracket, and the first vertical plate is connected with the first bracket; and a second sleeve is further provided on each of the second guide posts for engagement therewith, a second vertical plate is provided on one side of the second sleeve close to the second bracket, and the second vertical plate is connected with the second bracket.
In some embodiments of the present disclosure, the first lead screw and the second lead screw share a motor, and the first lead screw is connected directly with the motor; and the first lead screw and the second lead screw are connected through a driving belt.
In some embodiments of the present disclosure, the first lead screw and the second lead screw share a motor, and the second lead screw is connected directly with the motor; and the first lead screw and the second lead screw are connected through a driving belt.
In some embodiments of the present disclosure, a tensioning wheel is further provided on the driving belt.
In some embodiments of the present disclosure, an output end of the motor is connected with the first lead screw through a belt; and a connecting point between the first lead screw and the motor is located above a connecting point between the first lead screw and the driving belt.
In some embodiments of the present disclosure, an output end of the motor is connected with the second lead screw through a belt; and a connecting point between the second lead screw and the motor is located above a connecting point between the second lead screw and the driving belt.
In some embodiments of the present disclosure, the first lead screw and the second lead screw are disposed independently, and each of the first lead screw and the second lead screw is configured with a motor.
An embodiment of the present disclosure further provides a cleaner including the above-mentioned lifting control apparatus.
The present disclosure will now be further described with reference to the accompanying drawings and some embodiments.
This embodiment provides a lifting control apparatus, as shown in
In operation, the lead screw 31 on one side is driven by the driver 30, and the lead screw 31 on the other side can rotate synchronously following with the driving belt 33 disposed therebetween. The brackets 20 connected with the lead screws 31 on both sides and the base between the brackets 20 are driven to move up and down following with the lead screws 31, thus realizing the up and down movement of a tank under the action of lifting.
In this embodiment, two vertically mechanical brackets 20 are fixedly disposed at both ends of the base 10 on which a basket containing silicon wafers is placed. Meanwhile, a driver 30 with bilateral mechanical transmission structures are respectively used to pull the brackets 20 to vertically move up and down, so that the base 10 and the basket containing silicon wafers above the base 10 can be stably vertically moved up and down without causing a shaking phenomenon when a rope is suspended as in the related arts. Further, the fixing strength during the whole lifting and moving process is improved, so that the base 10 vertically moves up and down more stably without being easily damaged, and the service life is prolonged.
Further, in order to improve the safety of the whole lifting control apparatus, it is required that the transverse plate 22 on each side is disposed on an outside of the vertical rod 21 and at an upper end of the vertical rod 21.
Further, the lead screw 31 is vertically disposed in a midline of the transverse plate 22. In order to ensure the height of the whole base 10 and the tank above the base 10 and the cleaning quality of the silicon wafers in the basket containing silicon wafers, it is required that the height of the vertical rod 21 is higher than an upward movement height of the tank under the action of lifting, that is, an upper end of the vertical rod 21 is higher than an upper limit position of the bracket 20, and a lower end of the vertical rod 21 is lower than a lower limit position of the base 10. Meanwhile, the driving belt 33 is located below the lower limit of the base 10 to prevent the position of the driving belt 33 from interfering with the up and down movement of the base 10.
Further, the lead screw 31 on one side is directly connected with the motor 32, that is, the lead screws 31 on both sides share one motor 32, which can be connected with the lead screw 31 on either side, and the output end of the motor 32 is connected with the lead screw 31 through a belt.
Further, a connecting point between the lead screw 31 and the motor 32 is located above a connecting point between the lead screw 31 and the driving belt 33. That is, the force output by the motor 32 is transmitted bidirectionally through the lead screw 31, so that the lead screws 31 on both sides move synchronously and in the same direction.
Further, the driver 30 further includes guide posts 35 disposed on both sides of the lead screw 31 and disposed in parallel with the lead screw 31, and fixing plates 36. Both ends of the guide post 35 are fixedly disposed on the fixing plate 36 disposed in parallel with each other. An upper end face of the lead screw 31 is fixed on the fixing plates 36 at the uppermost end, and the fixing plate 36 at the lowermost end is penetrated by the lead screw 31. Two guide posts 35 are integrally connected to the lead screw 31 on the same side through the fixing plate 36.
Further, an sleeve 37 is further provided on each of the guide posts 35 for engagement therewith, and a vertical plate 38 is provided on one side of the sleeve 37 close to the bracket 20. In order to ensure the stability of the sleeve 37 sliding along the guide post 35, two sleeves 37 are provided on the same guide post 35 at intervals, and the two sleeves 37 are integrally connected by the vertical plate 38. Each vertical plate 38 is connected with the horizontal plate 22 in the bracket 20. The lead screw 31 is connected with the transverse plate 22 through a nut sleeved on it, and the transverse plate 22 is connected with the sleeve 37 through a vertical plate 38, so that the sleeve 37 can be vertically moved up and down in the height direction of the guide post 35 when the lead screw 31 drives the bracket 20 and the base 10 to move up and down as a whole, thereby ensuring the stability of the vertical up and down movement of the base 10.
Further, in order to ensure the stability and accuracy of the synchronous transmission of the two lead screws 31, a tensioning wheel 34 is further provided on the driving belt 33.
As shown in
A cleaning machine equipped with any one of the above-mentioned lifting control apparatus.
The slow lifting control apparatus designed by the present disclosure adopts a driver with bilateral mechanical structure, which is stable in the overall coordination, high in strength, consistent in throwing rhythm, and free from shaking, thus prolonging the service life of the whole throwing control apparatus.
Some embodiments of the present disclosure have been described in detail above, but are not intended to limit the scope of the present disclosure. All equivalent changes and modifications made in accordance with the present disclosure shall still fall within the scope of the present disclosure.
| Number | Date | Country | Kind |
|---|---|---|---|
| 202221479231.1 | Jun 2022 | CN | national |
| Filing Document | Filing Date | Country | Kind |
|---|---|---|---|
| PCT/CN2023/110441 | 7/31/2023 | WO |
