The disclosure relates to semiconductor technology, and more particularly to a light-emitting device and a light-emitting apparatus.
In a light-emitting diode, which includes a light-emitting material, electrons and holes are recombined, thereby generating energy that is then converted to light emitted by the light-emitting device. Compared to a conventional electrical lighting method, the light-emitting diode offers advantages including high luminous intensity, high efficiency, small size, and long lifespan, and therefore is one of the light sources having the most potential. The light-emitting diode is widely used in areas such as lighting, signal display, backlighting, vehicle headlights, and large screen display.
Currently, in the light-emitting diode, an etched angle of a wall of an insulation layer 960 which defines a through hole is not optimal, and the wall is not even, thereby generating a gap between the insulation layer 960 and a pad electrode 932, 942 which is formed in the through hole. Referring to
Therefore, an object of the disclosure is to provide a light-emitting device that can alleviate at least one of the drawbacks of the prior art.
According to the disclosure, the light-emitting device includes a semiconductor epitaxial unit, a first contact electrode, and a second contact electrode.
The semiconductor epitaxial unit has a first surface and a second surface that are opposite to each other, and includes a first semiconductor layer, a second semiconductor layer, and an active layer that is disposed between the first semiconductor layer and the second semiconductor layer.
The first contact electrode and the second contact electrode are disposed on the first surface of the semiconductor epitaxial unit, and are electrically connected to the first semiconductor layer and the second semiconductor layer, respectively.
The first contact electrode includes an ohmic contact layer, and a first electrode barrier layer disposed on the ohmic contact layer of the first contact electrode.
The second contact electrode includes an ohmic contact layer, and a second electrode barrier layer disposed on the ohmic contact layer of the second contact electrode.
The ohmic contact layer of the first contact electrode includes a first ohmic contact layer.
The ohmic contact layer of the second contact electrode includes a second ohmic contact layer. The second contact electrode further includes another first ohmic contact layer disposed between the second ohmic contact layer and the second electrode barrier layer.
Other features and advantages of the disclosure will become apparent in the following detailed description of the embodiment(s) with reference to the accompanying drawings. It is noted that various features may not be drawn to scale.
Before the disclosure is described in greater detail, it should be noted that where considered appropriate, reference numerals or terminal portions of reference numerals have been repeated among the figures to indicate corresponding or analogous elements, which may optionally have similar characteristics.
It should be noted herein that for clarity of description, spatially relative terms such as “top,” “bottom,” “upper,” “lower,” “on,” “above,” “over,” “downwardly,” “upwardly” and the like may be used throughout the disclosure while making reference to the features as illustrated in the drawings. The features may be oriented differently (e.g., rotated 90 degrees or at other orientations) and the spatially relative terms used herein may be interpreted accordingly.
Referring to
The light-emitting device may be a light-emitting chip of a conventional size that has a horizontal cross-sectional area ranging from 90,000 μm2 approximately to 2,000,000 μm2 approximately.
The light-emitting device may also be a light-emitting chip of a small size that has a horizontal cross-sectional area smaller than 90,000 μm2 approximately. For example, the light-emitting device may have a length and/or a width ranging from 100 μm to 300 μm, and a thickness ranging from 40 μm to 100 μm.
The light-emitting device may even be a light-emitting chip of yet an even smaller size that has a horizontal cross-sectional area smaller than 10,000 μm2 approximately. For example, the light emitting device may have a length and/or a width ranging from 2 μm to 100 μm, and a thickness ranging from 2 μm to 100 μm. The embodiment of the light-emitting device may have any of the horizontal cross-sectional areas and the thicknesses as described above, so it may be easily applied to small and micro light-emitting apparatus in an electronic device.
Referring again to
The first semiconductor layer 21 and the second semiconductor layer 23 have different conductivity types, electrical properties, polarities, and doping elements for providing electrons or holes, i.e., the first semiconductor layer 21 has a first conductivity type, the second semiconductor layer 23 has a second conductivity type, and the first conductivity type differs from the second conductivity type. For example, the first semiconductor layer 21 may be an n-type semiconductor layer, and the second semiconductor layer 23 may be a p-type semiconductor layer. Under an applied current, electrons from the n-type semiconductor layer and holes from the p-type semiconductor layer are recombined, thereby converting electrical energy into light energy, which is then emitted.
In this embodiment, the semiconductor epitaxial unit 20 includes a gallium arsenide (GaAs)-based material. The first semiconductor layer 21 is doped with an n-type dopant, and the second semiconductor layer 23 is doped with a p-type dopant.
In some embodiments, the first semiconductor layer 21 includes II-VI semiconductor materials (e.g., zinc selenide (ZnSe)) or Ill-V semiconductor materials (e.g., gallium arsenide (GaAs), gallium nitride (GaN), aluminum nitride (AlN), indium nitride (InN), indium gallium nitride (InGaN), aluminum gallium nitride (AlGaN), or aluminum indium gallium nitride (AlInGaN)). The first semiconductor layer 21 may also include a dopant such as silicon (Si), germanium (Ge), etc, but is not limited thereto. In other embodiments, the first semiconductor layer 21 has a single-layered structure or a multilayered structure.
In some embodiments, the second semiconductor layer 23 includes III-V semiconductor materials (e.g., gallium arsenide (GaAs), gallium nitride (GaN), aluminum nitride (AlN), indium nitride (InN), indium gallium nitride (InGaN), aluminum gallium nitride (AlGaN), or aluminum indium gallium nitride (AlInGaN)). The second semiconductor layer 23 may also include a dopant such as magnesium (Mg), carbon (C), etc, but is not limited thereto. In other embodiments, the second semiconductor layer 23 has a single-layered structure or a multilayered structure.
In this embodiment, the active layer 22 includes a gallium arsenide (GaAs)-based semiconductor material, an aluminum indium gallium phosphide (AlGaInP)-based material or an aluminum gallium indium nitride (AlGaInN)-based material. Specifically, when the active layer 22 includes the aluminum indium gallium phosphide (AlGaInP)-based material or the gallium arsenide (GaAs)-based material, the active layer 22 may emit red light, orange light, or yellow light. When the active layer 22 includes the aluminum gallium indium nitride (AlGaInN), the active layer 22 may emit blue light or green light. In some embodiments, the active layer 22 includes at least an un-doped semiconductor layer or at least a low-doped layer. In some embodiments, the active layer 22 may have a single heterostructure (SH), a double heterostructure (DH), a double-sided double heterostructure (DDH), or a multilayer quantum well structure (MQW), but is not limited thereto.
Referring again to
It should be noted that the light-emitting device is not limited to include only one semiconductor epitaxial unit 20, but may include a plurality of semiconductor epitaxial units 20 on the supporting substrate 10. The plurality of semiconductor epitaxial units 20 may be electrically connected to each other in a series, in parallel, or in series-parallel combination through a conducting structure (e.g., wires).
Referring back to
The bonding layer 70 may be made of an insulating material and/or a conductive material. The insulating material may include, but not limited to, polyimide (PI), benzocyclobutene (BCB), perflurocyclobutane (PFCB), magnesium oxide (MgO), Su8, epoxy, acrylic resin, cyclic olefin copolymer (COC), polymethylmethacrylate (PMMA), polyethylene terephthalate (PET), polycarbonate (PC), polyetherimide, fluorocarbon polymer, glass, aluminum oxide (Al2O3), silicon oxide (SiOx), titanium oxide (TiO2), tantalum oxide (Ta2O5), silicon nitride (SiNx), or Spin-on Glass (SoG). The conductive material may include, but not limited to, indium tin oxide (ITO), indium oxide (InO), tin oxide (SnO), cadmium tin oxide (CTO), antimony tin oxide (ATO), aluminum zinc oxide (AZO), zinc tin oxide (ZTO), zinc oxide (ZnO), indium zinc oxide (IZO), diamond-like carbon film (DLC), or gallium zinc oxide (GZO). When the bonding layer 70 is the conductive material and is in contact with the second semiconductor layer 23, it may function as a current spreading layer, thereby improving current spreading and enhancing uniformity of current distribution.
In some embodiments, the second surface 20b of the semiconductor epitaxial unit 20 that is proximate to the supporting substrate 10 may be a roughened surface that reduces total reflection of the light emitted from the active layer 22 and passing through the second surface 20b and the bonding layer 70.
In some embodiments, a refractive index of the bonding layer 70 ranges between a refractive index of the second semiconductor layer 23 and a refractive index of the supporting substrate 10. For example, the refractive index of the second semiconductor layer 23 is n1, the refractive index of the bonding layer 70 is n2, the refractive index of the supporting substrate 10 is n3, and n1>n2>n3. In certain embodiments, the refractive index of the bonding layer 70 ranges from 1.2 to 3.
Referring to
In some embodiments, the bonding layer 70 has a gradient refractive index. A refractive index m1 of the first bonding layer 71 proximate to the second semiconductor layer 23 is different from a refractive index m2 of the second bonding layer 72 distal from the second semiconductor layer 23. In other words, the refractive indices of the second semiconductor layer 23, the bonding layer 70, and the supporting substrate 10 exhibit a continuous or stepwise change from the refractive index n1, the refractive index m1, the refractive index m2, the refractive index n2, to the refractive index n3. By virtue of varying the refractive indices, a travelling path of the light emitted from the active layer 23 to the substrate 10 changes, thereby reducing a likelihood of total reflection and avoiding the light being trapped inside the light-emitting device.
To dispose the first contact electrode 31 and the second contact electrode 41 on the first semiconductor layer 21 and the second semiconductor layer 23 at a same side of the semiconductor epitaxial unit 20, the second semiconductor layer 23 is disposed on the first semiconductor layer 21 in such a manner that a portion of the first semiconductor layer 21 is exposed from the second semiconductor layer 23, or the first semiconductor layer 21 is disposed on the second semiconductor layer 23 in such a manner that a portion of the second semiconductor layer 23 is exposed from the first semiconductor layer 21. For example, referring again to
The light-emitting device includes at least one first contact electrode 31 that is disposed on the first semiconductor layer 21 and that is electrically connected to the first semiconductor layer 21 directly or indirectly, and at least one second contact electrode 41 that is disposed on the second semiconductor layer 23 and that is electrically connected to the second semiconductor layer 23 directly or indirectly. In the case where the first semiconductor layer 21 is the n-type semiconductor layer, the first contact electrode 31 is an n-type contact electrode; in the case where the first semiconductor layer 21 is the p-type semiconductor layer, the first contact electrode 31 is a p-type contact electrode. The first contact electrode 31 and the second contact electrode 41 are opposite to each other in conductivity types.
For example, in some embodiments, when pad electrodes (to be described below) of the light-emitting device do not include tin, and a solder paste is used in packaging, due to strong mobility of the tin (i.e., tin flows easily), the tin in the solder paste may easily enter through gaps between an insulation layer 60 (to be described later) and the pad electrodes and erode ohmic electrodes (i.e., the first contact electrode 31 and the second contact electrode 41) having Au, Sn, or In beneath, thereby affecting reliability of the light-emitting device. In other embodiments, when the pad electrodes include tin, the tin may enter through the gaps between the insulation layer 60 and the pad electrodes and erode the ohmic electrodes having Au, Sn, or In beneath, thereby affecting the reliability of the light-emitting device.
Each of the first contact electrode 31 and the second contact electrode 41 may be made of metals, e.g., nickel, gold, chromium, titanium, germanium, beryllium, platinum, palladium, rhodium, iridium, aluminum, tin, indium, tantalum, copper, cobalt, iron, ruthenium, zirconium, tungsten, molybdenum, zinc, or combinations thereof.
To solve the technical problem of tin (Sn) eroding the ohmic electrodes having gold generally, which may affect the reliability of the light-emitting device, in some embodiments, the first contact electrode 31 includes an ohmic contact layer and a first electrode barrier layer 51 disposed on the ohmic contact layer of the first contact electrode 31. The ohmic contact layer of the first contact electrode 31 includes a first ohmic contact layer 31a. In some embodiments, the first contact electrode 31 is the n-type contact electrode. The first electrode barrier layer 51 includes Ti, Pt, Cr or combinations thereof, but is not limited thereto. In some embodiments, the first electrode barrier layer 51 is an alloy layer including Ti, Pt, Cr, or combinations thereof. In other embodiments, the first electrode barrier layer 51 is a stacked layer structure including Ti, Pt, Cr, or combinations thereof. The first electrode barrier layer 51 may also be made of other metals, alloys of these other metals, or stacked layer structures of these other metals that do not react with tin (Sn).
The second contact electrode 41 includes an ohmic contact layer and a second electrode barrier layer 52 disposed on the ohmic contact layer of the second contact electrode 41. The ohmic contact layer of the second contact electrode 41 includes a second ohmic contact layer 41a. When the first ohmic contact layer 31a or another first ohmic contact layer 31a is an Au/Ge alloy layer, an Au/Ni alloy layer, an Au/Ge/Ni alloy layer, an Au/Ge stacked layer structure, an Au/Ni stacked layer structure, or an Au/Ge/Ni stacked layer structure, and when the second ohmic contact layer 41a is an Au/Be alloy layer, an Au/Zn alloy layer, an Au/Be/Zn alloy layer, an Au/Be stacked layer structure, an Au/Zn stacked layer structure, or an Au/Be/Zn stacked layer structure, due to the second ohmic contact layer 41a having Au and Be and/or Zn, fusion temperature of the second contact electrode 41 is over 500° C., and an electrode barrier layer thereof (i.e., the second electrode barrier layer 52) may not withstand such a high temperature; therefore, it is not possible to directly deposit the electrode barrier layer (i.e., the second electrode barrier layer 52) on the second ohmic contact layer 41a which is not yet fused. Instead, fusion of the second ohmic contact layer 41a needs to be completed first before vapor deposition of the electrode barrier layer thereon. Hence, the second contact electrode 41 includes the another first ohmic contact layer 31a disposed on the second ohmic contact layer 41a because fusion temperature of the another first ohmic contact layer 31a is lower. The another first ohmic contact layer 31a is formed after fusion of the second ohmic contact layer 41a, and covers the second ohmic contact layer 41a while being formed.
To further solve the technical problem of tin (Sn) eroding the ohmic electrodes having gold, which may affect the reliability of the light-emitting device, in this embodiment, the second contact electrode 41 includes the ohmic contact layer and the second electrode barrier layer 52 disposed on the ohmic contact layer of the second contact electrode 41. The second electrode barrier layer 52 includes Ti, Pt, Cr, or combinations thereof. In some embodiments, the second electrode barrier layer 52 is an alloy layer including Ti, Pt, Cr, or combinations thereof. In other embodiments, the second electrode barrier layer 52 is a stacked layer structure including Ti, Pt, Cr, or combinations thereof. The second electrode barrier layer 52 may also be made of other metals, alloys of these other metals, or stacked layer structures of these other metals that do not react with tin (Sn). In addition, in this embodiment, the first electrode barrier layer 51 and the second electrode barrier layer 52 are made of a same material, but are not limited thereto. The first electrode barrier layer 51 and the second electrode barrier layer 52 may also be made of different materials.
A thickness of the ohmic contact layer of the second contact electrode 41 is greater than a thickness of the ohmic contact layer of the first contact electrode 31. A thickness of each of the first electrode barrier layer 51 and the second electrode barrier layer 52 ranges from 0.1 μm to 1 μm. If the thicknesses of the first electrode barrier layer 51 and the second electrode barrier layer 52 are too small, the first electrode barrier layer 51 and the second electrode barrier layer 52 may be etched off during subsequent etching of the insulation layer 60, thereby losing their functions. If the thicknesses of the first electrode barrier layer 51 and the second electrode barrier layer 52 are too large, manufacturing costs may be increased.
Referring to the enlarged portions A and B in
Referring again to the enlarged portion A in
The thickness of each of the first ohmic contact layer 31a and the another first ohmic contact layer 31a ranges from 0.1 μm to 2 μm. When the thickness of each of the first ohmic contact layer 31a and the another first ohmic contact layer 31a is too small, ohmic contact is difficult to be formed. When the thickness of each of the first ohmic contact layer 31a and the another first ohmic contact layer 31a is too large, it is difficult for the corresponding one of the first electrode barrier layer 51 and the second electrode barrier layer 52 to cover thereon. Each of the first ohmic contact layer 31a and the another first ohmic contact layer 31 may include Au, Ge, Ni, alloy combinations thereof, or stacked layer structures thereof. In this embodiment, each of the first ohmic contact layer 31a and the another first ohmic contact layer 31 is an Au/Ge/Ni stacked layer. In other embodiments, each of the first ohmic contact layer 31a and the another first ohmic contact layer 31 is a metallic layer having gold (Au) or an alloy layer having gold, but is not limited thereto. Each of the first ohmic contact layer 31a and the another first ohmic contact layer 31 may include Au and Ge or Ni, alloy combinations thereof, or stacked layer structures thereof, but is not limited thereto. Each of the first ohmic contact layer 31a and the another first ohmic contact layer 31 may also be made of other metals, alloys of these other metals, or stacked layer structures of these other metals that react with tin (Sn).
A thickness of the second ohmic contact layer 41a ranges from 0.1 μm to 2 μm. When the thickness of the second ohmic contact layer 41a is too small, ohmic contact is difficult to be formed. When the thickness of the second ohmic contact layer 41a is too large, it is difficult for the second electrode barrier layer 52 to cover the second ohmic contact layer 41a. The second ohmic contact layer 41a may include Au, Be, Zn, alloy combinations thereof, or stacked layer structures thereof. In this embodiment, the second ohmic contact layer 41a is an Au/Be stacked layer structure. In other embodiments, the second ohmic contact layer 41a is an Au/Zn stacked layer structure. In yet some other embodiments, the second ohmic contact layer 41a is a metallic layer having gold (Au) or an alloy layer having gold, but is not limited thereto. The second ohmic contact layer 41a may also include Au and Be or Zn, alloy combinations thereof, or stacked layer structures thereof, but is not limited thereto. The second ohmic contact layer 41a may also be made of other metals, alloys of these other metals, or stacked layer structures of these other metals that may react with tin (Sn).
The insulation layer 60 is disposed on a top surface (i.e., the first surface 20a) of the semiconductor epitaxial unit 20, covers at least a peripheral region and a sidewall of the semiconductor epitaxial unit 20, and includes a first through hole 61 and a second through hole 62. The insulation layer 60 also covers the first contact electrode 31 and the second contact electrode 41. At the same time, the insulation layer 60 may extend and partially cover a top surface of the bonding layer 70 that is exposed at the peripheral region of the semiconductor epitaxial unit 20. In such way, the insulation layer 60 may be connected to the top surface of the supporting substrate 10, thereby covering the sidewall of the semiconductor epitaxial unit 20 more securely.
The insulation layer 60 covering most of the top surface and the sidewall of the semiconductor epitaxial unit 20 may include a distributed Bragg reflector that reflects light, thereby increasing light-emitting efficiency of the light-emitting device. In addition, the insulation layer 60 extends from the semiconductor epitaxial unit 20 to partially cover the top surface of the bonding layer 70, and partially expose the top surface of the bonding layer 70. That is to say, a peripheral portion of the top surface of the supporting substrate 10 is not covered with the insulation layer 60. In such way, in a process of dicing a wafer to form a plurality of light-emitting devices, damage (e.g., peeling, cracking, etc.) to the insulation layer 60 caused by a laser or the like is prevented when dividing the supporting substrate 10 (e.g., dividing the supporting substrate 10 by cutting, scoring, and/or breaking). In particular, in the case where the insulation layer 60 includes the distributed Bragg reflector, when the insulation layer 60 is damaged, light reflectivity is reduced and electrical leakage is likely to occur. Configuration of the insulation layer 60 in this embodiment may prevent a decrease in the light-emitting efficiency and abnormality of the light-emitting device.
The embodiment of the light-emitting device further includes a first pad electrode 32 and a second pad electrode 42. The first pad electrode 32 is disposed on the insulation layer 60, and is electrically connected to the first contact electrode 31 via the first through hole 61. The second pad electrode 42 is disposed on the insulation layer 60, and is electrically connected to the second contact electrode 41 via the second through hole 62. Referring to
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Each of the first through hole 61 and the second through hole 62 may have a tilted side surface. The tilted side surface of the first through hole 61 forms a first angle (θ1) with an upper surface of the first contact electrode 31, and the tilted side surface of the second through hole 62 forms a second angle (θ2) with an upper surface of the second contact electrode 41. The first angle (θ1) and the second angle (θ2) are formed outside the first through hole 61 and the second through hole 62, respectively. Each of the first angle (θ1) and the second angle (θ2) is no greater than 80°, thereby preventing the insulation layer 60 from breaking at the tilted side surfaces of the first through hole 61 and the second through hole 62.
The light-emitting device as described above is capable of emitting light having a wavelength ranging from 580 nm to 1000 nm.
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A light-emitting apparatus including the light-emitting device as described above is also provided.
In the description above, for the purposes of explanation, numerous specific details have been set forth in order to provide a thorough understanding of the embodiment(s). It will be apparent, however, to one skilled in the art, that one or more other embodiments may be practiced without some of these specific details. It should also be appreciated that reference throughout this specification to “one embodiment,” “an embodiment,” an embodiment with an indication of an ordinal number and so forth means that a particular feature, structure, or characteristic may be included in the practice of the disclosure. It should be further appreciated that in the description, various features are sometimes grouped together in a single embodiment, figure, or description thereof for the purpose of streamlining the disclosure and aiding in the understanding of various inventive aspects; such does not mean that every one of these features needs to be practiced with the presence of all the other features. In other words, in any described embodiment, when implementation of one or more features or specific details does not affect implementation of another one or more features or specific details, said one or more features may be singled out and practiced alone without said another one or more features or specific details. It should be further noted that one or more features or specific details from one embodiment may be practiced together with one or more features or specific details from another embodiment, where appropriate, in the practice of the disclosure.
While the disclosure has been described in connection with what is(are) considered the exemplary embodiment(s), it is understood that this disclosure is not limited to the disclosed embodiment(s) but is intended to cover various arrangements included within the spirit and scope of the broadest interpretation so as to encompass all such modifications and equivalent arrangements.
Number | Date | Country | Kind |
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202111416529.8 | Nov 2021 | CN | national |
This application is a continuation-in-part (CIP) of International Application No. PCT/CN2022/127918, filed on Oct. 27, 2022, which claims priority to Chinese Invention Patent Application No. 202111416529.8, filed on Nov. 26, 2021. The aforesaid applications are incorporated by reference herein in their entirety.
Number | Date | Country | |
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Parent | PCT/CN2022/127918 | Oct 2022 | WO |
Child | 18667346 | US |