The disclosure relates to a light emitting device, a light emitting element film, a light emitting display, and a method of manufacturing a light emitting device.
Conventionally, there has been proposed a light emitting display including a plurality of LEDs (Light Emitting Diodes) arranged two-dimensionally (see Patent Reference 1, for example). This light emitting display is referred to also as a micro-LED display. However, the manufacturing process for integrating some millions of LEDs on a panel, for example, takes a long time. In such a circumstance, there has been known a method in which a plurality of LEDs formed on a base material substrate are bonded in a lump onto an LED array substrate having through vias and back side electrodes (bumps) and the LED array substrate is mounted on a mounting substrate by flip-chip bonding. Patent Reference 1 is Japanese Patent Application Publication No. 2013-171942.
However, the flip-chip bonding requires a process of heating and pressurizing the bumps of the LED array substrate in a state of having been placed on electrode pads of the mounting substrate, and there is a problem in that this process can cause failure to the LEDs.
An object of the disclosure, which has been made to resolve the above-described problem, is to provide a light emitting device, a light emitting element film and a light emitting display to which failure is unlikely to occur, and a method of manufacturing a light emitting device that is unlikely to cause failure to the light emitting device.
A light emitting device according to an aspect of the disclosure includes a substrate including electrodes, a film member, light emitting elements arranged on the film member, and conductive members that electrically connect the light emitting elements and the electrodes to each other. The film member has through holes formed at positions corresponding to the electrodes. The conductive member includes a first conductive part extending from the light emitting element to the through hole and a second conductive part connecting the first conductive part and the electrode to each other via the through hole.
According to the disclosure, an advantage is obtained in that failure is unlikely to occur to the light emitting device.
In the drawings,
A light emitting device, a light emitting element film, a light emitting display, and a method of manufacturing a light emitting device according to embodiments will be described below with reference to drawings. The following embodiments are just examples and a variety of modifications are possible within the scope of the present invention.
The mounting substrate 110 includes electrode pads 111 and 112 as electrodes. Further, the mounting substrate 110 includes wiring connected to the electrode pads 111 and 112. The mounting substrate 110 may include a drive circuit for driving the LEDs 140. The mounting substrate 110 is, for example, a PCB (Printed Circuit Board), FPC (Flexible Printed Circuits) or the like.
The film member 130 has a first surface on which the LEDs 140 are arranged and a second surface as a surface on a side opposite to the first surface. In the first embodiment, the second surface is bonded to the mounting substrate 110 by the bonding layer 120. The bonding layer 120 is a layer including a bonding agent, for example. The bonding layer 120 is a layer made of material such as glass epoxy-based resin, polyimide-based resin or silicone-based resin, for example, and film thickness of the bonding layer 120 is approximately 1 μm to 30 μm.
The film member 130 has through holes 131 and 132 as openings formed at positions corresponding to the electrode pads 111 and 112. The film member 130 is formed with an organic film or an inorganic film. As the organic film, it is possible to use a film made of material such as polyimide, polyamide, polyethylene terephthalate (PET) or polyethylene naphthalate (PEN), for example. As the inorganic film, it is possible to use a film made of material such as SiO2, Si or Al2O3, for example. Film thickness of the film member 130 is approximately 0.5 μm to 20 μm, for example.
The LED 140 includes a cathode layer 141 made of a semiconductor of the N-type as a first conductivity type and an anode layer 142 made of a semiconductor of the P-type as a second conductivity type. While the anode layer 142 is arranged on the cathode layer 141 in
The LED 140 is obtained by placing a semiconductor epitaxial film, as a thin-film semiconductor layer formed on a growth substrate (not shown) by epitaxial growth, on the film member 130. Film thickness of the LED 140 is approximately 1 μm to 5 μm, for example. In the first embodiment, the pixel 180 as the unit pixel is formed by three LEDs 140 (R1, G1 and B1 in
The conductive member 151 includes a wiring layer 151a as a first conductive part extending from the anode layer 142 of the LED 140 to the through hole 131 (in the illustrated example, to the rim of the through hole 131) and a wiring layer 151b as a second conductive part connecting the wiring layer 151a and the electrode pad 111 to each other via the inside of the through hole 131. Put another way, in the first embodiment, the whole of the conductive member 151 is a wiring layer. The conductive member 152 includes a wiring layer 152a as a first conductive part extending from the cathode layer 141 of the LED 140 to the through hole 132 (in the illustrated example, to the rim of the through hole 132) and a wiring layer 152b as a second conductive part connecting the wiring layer 152a and the electrode pad 112 to each other via the inside of the through hole 132. Put another way, in the first embodiment, the whole of the conductive member 152 is a wiring layer. The wiring layer is, for example, a single layer of gold, copper, aluminum or the like, an alloy of two or more of these metals, or a multilayer structure of two or more of these metals and alloys.
The electrode pads 111 and 112 are formed on the mounting substrate 110, while the through holes 131 and 132 are formed through the film member 130 corresponding to the electrode pads 111 and 112. The film member 130 is bonded onto the mounting substrate 110 by using the bonding layer 120. The LEDs 140 are formed on the film member 130, and the LEDs 140 are connected to the electrode pads 111 and 112 for connection by the conductive members 151 and 152. The pixel 180 as the unit pixel is formed by the LEDs 140 (R1, G1 and B1) for R, G and B. Therefore, the anode layers of the LEDs 140 (R1, G1 and B1) are respectively connected to electrode pads 112 different from each other via through holes 132 different from each other. Further, in each unit pixel, the cathode layers of the plurality of LEDs 140 are connected to a common electrode pad 111 via a common through hole 131.
It is possible to make a particular LED emit light by making the cathode driver 174 on the mounting substrate 110 set a particular cathode line 172 alone in an ON state and making the anode driver 173 inject electric current exclusively into an anode line 171 connected to the LED being desired to emit light. Displaying an image is made possible by making the cathode driver 174 successively change the selected cathode line 172 and making the anode driver 173 perform the current injection in sync with the operation of the cathode driver 174.
The outline of the method of manufacturing the light emitting device 100 will be described below. The manufacture of the light emitting device 100 according to the first embodiment includes steps S11 to S14 of forming an intermediate structure (shown in
A concrete example of the method of manufacturing the light emitting device 100 will be described below. First, the film member 130 is formed on a support substrate 400 (S11), and the through holes 131 and 132 are formed at prescribed positions (the positions corresponding to the electrode pads 111 and 112) in the film member 130 (S12). Subsequently, the LEDs 140 as thin-film semiconductors formed on a growth substrate (not shown) are stuck on the film member 130 (S13). Incidentally, it is also possible to execute the step S12 after the step S13. Subsequently, this film member 130 is peeled off from the support substrate 400, moved, and bonded to the mounting substrate 110 provided with the bonding layer 120 (S14). Openings have previously been formed in parts of the bonding layer 120 corresponding to the electrode pads 111 and 112.
Subsequently, the conductive members 151 and 152 as wiring layers extending from the LEDs 140 to the electrode pads 111 and 112 through the through holes 131 and 132 are formed (S15).
As described above, in the first embodiment, the LEDs 140 and the electrode pads 111 and 112 are connected to each other by the conductive members 151 and 152 as the wiring layers extending from the LEDs 140 to the electrode pads 111 and 112 via the top of the film member 130 and inner surfaces of the through holes 131 and 132. As above, the process of heating and pressurizing the film member 130 in the state of having been bonded to the mounting substrate 110 is unnecessary and the temperature and the pressure at the time of bonding can be made low, and thus failure is unlikely to occur to the LEDs 140.
Further, the LEDs 140 have been formed on the film member 130, and by thinning down the bonding layer 120, all the conductive members 151 and 152 can be formed by only a wiring process (e.g., sputtering, vapor deposition or the like) and that enables simplification of the manufacturing process.
The light emitting device 200 according to the second embodiment differs from the light emitting device 100 according to the first embodiment in the structure of the conductive members 251 and 252. In the second embodiment, the film member 130 has a first surface on which the LEDs 140 are arranged and a second surface as a surface on the side opposite to the first surface, and the second surface is bonded to the mounting substrate 110. The conductive member 251 includes a first conductive part 251a as a wiring layer extending from the LED 140 to the through hole 131 (in the illustrated example, to the rim of the through hole 131) and a second conductive part 251b formed of a member made of conductive paste and filling in the through hole 131. The conductive member 252 includes a first conductive part 252a as a wiring layer extending from the LED 140 to the through hole 132 (in the illustrated example, to the rim of the through hole 132) and a second conductive part 252b formed of a member made of the conductive paste and filling in the through hole 132. The conductive paste is silver ink, for example, and can be injected into an intended region by the ink jet method.
First, the outline of the method of manufacturing the light emitting device 200 will be described below. The method of manufacturing the light emitting device 200 according to the second embodiment includes steps (S21 to S25) of forming an intermediate structure (shown in
Next, a concrete example of the method of manufacturing the light emitting device 200 will be described below with reference to
As described above, in the second embodiment, the LEDs 140 and the electrode pads 111 and 112 are connected to each other by forming wiring from the LEDs 140 to the through holes 131 and 132 via the top of the film member 130 by the first conductive parts 251a and 252a as the wiring layers and forming the second conductive parts 251b and 252b made of the conductive paste inside the through holes 131 and 132 and in the openings of the bonding layer 120. As above, the process of heating and pressurizing the film member 130 in the state of having been bonded to the mounting substrate 110 is unnecessary and the temperature and the pressure at the time of bonding can be made low, and thus failure is unlikely to occur to the LEDs 140.
Incidentally, except for the features described above, the second embodiment is the same as the first embodiment.
In the light emitting device 300 according to the third embodiment, the film member 130 has a first surface on which the LEDs 140 are arranged and a second surface as a surface on the side opposite to the first surface, and the first surface is bonded to the mounting substrate 110. In other words, while the LEDs 140 on the film member 130 were on a side opposite to the mounting substrate 110 in the above-described second embodiment, the LEDs 140 in the third embodiment are situated between the film member 130 and the mounting substrate 110.
Further, the light emitting device 300 according to the third embodiment differs from the light emitting devices 100 and 200 according to the first and second embodiments in the structure of the conductive members 351 and 352. The conductive member 351 includes a first conductive part 351a as a wiring layer extending from the LED 140 to the through hole 131 (in the illustrated example, to the rim of the through hole 131) and a second conductive part 351b formed of a member made of the conductive paste and filling in the through hole 131. The conductive member 352 includes a first conductive part 352a as a wiring layer extending from the LED 140 to the through hole 132 (in the illustrated example, to the rim of the through hole 132) and a second conductive part 352b formed of a member made of the conductive paste and filling in the through hole 132.
First, the outline of the method of manufacturing the light emitting device 300 will be described below. The method of manufacturing the light emitting device 300 according to the third embodiment includes steps (S31 to S35) of forming an intermediate structure (shown in
Next, a concrete example of the method of manufacturing the light emitting device 300 will be described below based on
As described above, in the third embodiment, the LEDs 140 and the electrode pads 111 and 112 are electrically connected to each other by forming the first conductive parts 351a and 352a as the wiring layers from the LEDs 140 to the through holes 131 and 132 via a surface of the film member 130 and forming the inside of the through holes 131 and 132 with the second conductive parts 351b and 352b made of the conductive paste. As above, the process of heating and pressurizing the film member 130 in the state of having been bonded to the mounting substrate 110 is unnecessary and the temperature and the pressure at the time of bonding can be made low, and thus failure is unlikely to occur to the LEDs 140.
As described above, in the third embodiment, the LEDs 140 are arranged between the film member 130 and the mounting substrate 110, by which undulations of the LEDs are eliminated from the surface of the device in comparison with the second embodiment, which makes it possible to inhibit damage to the LEDs caused by external factors.
Further, the possibility of current leakage can be reduced since it is unnecessary to make the conductive paste as the material of the second conductive parts 351b and 352b overflow from the holes at the top of the film member 130.
Incidentally, except for the features described above, the third embodiment is the same as the first or second embodiment.
Suppose that failure of an LED 140 (B1) is detected in a manufacturing stage, the wiring of the LED 140 (B2) is formed without forming the wiring of the LED 140 (B1). Without forming the wiring of the LED 140 (B1) means, for example, without carrying out the filling in with the conductive paste of the second conductive parts 251b and 252b in
Except for the features described above, the fourth embodiment is the same as any one of the first to third embodiments.
As described above, according to the fourth embodiment, the unit pixel is formed with a plurality of sets (combinations) of LEDs 140 for R, G and B (two sets in
100, 200, 300: light emitting device, 110: mounting substrate (substrate), 111, 112: electrode pad, 120, 320: bonding layer, 130: film member, 131, 132: through hole, 140: LED (light emitting element), 141: cathode layer, 142: anode layer, 151, 152, 251, 252, 351, 352: conductive member, 151a, 152a, 251a, 252a, 351a, 352a: wiring layer (first conductive part), 151b, 152b: wiring layer (second conductive part), 251b, 252b, 351b, 352b: conductive paste (second conductive part), 170: light emitting display, 400: support substrate.
Number | Date | Country | Kind |
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2020-126076 | Jul 2020 | JP | national |