This application claims priority to Chinese Invention Patent Application No. 202111436929.5, filed on Nov. 29, 2021.
The disclosure relates to a light-emitting device, and more particularly to a semiconductor light-emitting device.
Light-emitting diodes (LEDs) are solid-state semiconductor devices that convert electrical energy into visible light through the combination of holes provided by a p-type semiconductor and electrons provided by an n-type semiconductor. LEDs may emit light of various different colors. Compared to traditional light sources, LEDs have the advantage of longevity, good light efficiency, no ionizing radiation, low power consumption, and low emissions. LEDs have primarily been applied to display screens, indicator lights, and backlighting.
Currently most sub-micron sized flip-chip LED devices have problems such as uneven current spreading, and low anti-electrostatic discharge capabilities that have contributed to low light-emission efficiency and low reliability in conventional flip-chip LED devices. The issues discussed above have limited the application and adoption of flip chip LED devices.
Therefore, an object of the disclosure is to provide a light-emitting device that can alleviate at least one of the drawbacks of the prior art.
According to an aspect of the disclosure, the light-emitting device includes a semiconductor structure, a first contact electrode, and a second contact electrode. The semiconductor structure has a first semiconductor layer, an active layer, and a second semiconductor layer that are stacked sequentially. The second semiconductor layer and the active layer are formed on a top surface of the first semiconductor layer and exposing a portion of the top surface that constitutes a mesa structure. The first contact electrode is located on top of the mesa structure and electrically connected to the first semiconductor layer. The second contact electrode is located on top of and electrically connected to the second semiconductor layer. The first contact electrode and the second contact electrode are strip electrodes. When the first and second semiconductor layer, the first contact electrode, and the second contact electrode are projected on an imaginary plane below the semiconductor structure and viewed from above, two parallel first lines, that respectively contact two opposite first ends of the first contact electrode and that perpendicularly intersect a straight second line connecting between two opposite second ends of the second contact electrode, define on the straight second line a length (L2) which does not extend beyond a distance (L1) between the two opposite second ends of the second contact electrode, and a ratio of the length (L2) to the distance (L1) ranges from 0.5 to 1.
According to another aspect of the disclosure, a light-emitting device includes a semiconductor structure having a first semiconductor layer, an active layer, and a second semiconductor layer that are stacked sequentially. The second semiconductor layer and the active layer are formed on a top surface of the first semiconductor layer and expose a portion of the top surface that constitutes a mesa structure. A first contact electrode is located on top of the mesa structure and electrically connected to the first semiconductor layer. A second contact electrode is located on top of and electrically connected to the second semiconductor layer. The second contact electrode includes a second dot-like portion, an initial extending portion, and two auxiliary extending portions, the initial extending portion extends from said second dot-like portion, and the two auxiliary extending portions extend from one end of the initial extending portion distal to the second dot-like portion toward two opposite sides of the semiconductor structure and each having a tip. When the semiconductor structure, the first contact electrode and the second contact electrode are projected on an imaginary plane below the first semiconductor structure and viewed from above, two parallel first lines, that respectively contact two opposite ends of the first contact electrode and that perpendicularly intersect a straight second line connecting between the tips of the auxiliary extending portions, define on the straight second line a length (d2) which does not extend beyond a distance (d1) between the tips of the auxiliary extending portions, and a ratio of the length (d2) to the distance (d1) ranges from 0.3 to 1.
A third aspect of the disclosure is of a display device using the light-emitting device.
Other features and advantages of the disclosure will become apparent in the following detailed description of the embodiment(s) with reference to the accompanying drawings. It is noted that various features may not be drawn to scale.
Before the disclosure is described in greater detail, it should be noted that where considered appropriate, reference numerals or terminal portions of reference numerals have been repeated among the figures to indicate corresponding or analogous elements, which may optionally have similar characteristics.
It should be noted herein that for clarity of description, spatially relative terms such as “top,” “bottom,” “upper,” “lower,” “on,” “above,” “over,” “downwardly,” “upwardly” and the like may be used throughout the disclosure while making reference to the features as illustrated in the drawings. The features may be oriented differently (e.g., rotated 90 degrees or at other orientations) and the spatially relative terms used herein may be interpreted accordingly.
Referring to
The light-emitting device may be a standard-sized LED chip, and may have a horizontal cross-section with an area that is no less than 90,000 μm2 and no greater than 2,000,000 μm2.
The light-emitting device may be a miniature LED chip or microscale LED with a size that is less than 300 μm when measured lengthwise.
The light-emitting device may be classified as an even smaller sized micro LED chip having a horizontal cross-section with an area that is no more than 10000 μm2.
Referring to
The bonding layer 60 includes an insulating material or a conducting material. The insulating material may be, including but not limited to, aluminum oxide (Al2O3), silicon carbide (SiOx), titanium oxide (TiO2), tantalum oxide (Ta2O5), silicon nitride (SiNx), or spin on glass (SOG). The conducting material may be including, but not limited to, indium tin oxide (ITO), chromium titanium oxide (CTO), antimony tin oxide (ATO), aluminum zinc oxide (AZO), zinc tin oxide (ZTO), zinc oxide (ZnO), indium zinc oxide (IZO), a diamond like carbon (DLC) thin film, or gallium doped zinc oxide (GZO).
Referring to
The first semiconductor layer 21 and the second semiconductor layer 23 are doped to be different types that either provide electrons or holes depending upon the dopant used. In this case, the first semiconductor layer 21 is a first conductivity type, and the second semiconductor layer 23 is a second conductivity type which is different from the first conductivity type. In some embodiments, the first semiconductor layer 21 is an n-type semiconductor and the second semiconductor layer 23 is a p-type semiconductor. Electrons in the n-type semiconductor recombine with electron holes in the p-type semiconductor under a drive current and light is produced in the active layer 22 in an electroluminescence process.
In this embodiment, the first semiconductor layer 21 includes a III-V compound semiconductor material such as gallium arsenide (GaAs), gallium nitride (GAN), aluminum nitride (AlN), indium nitride (InN), indium gallium nitride (InGaN), aluminum gallium nitride (AlGaN), or indium gallium aluminum nitride (InGaAlN). The first semiconductor layer 21 may include dopants such as magnesium (Mg), and carbon (C); however, this is not a limitation of the disclosure and other dopants may be used. In some variations of the embodiment, the first semiconductor layer 21 may be a single layered structure or a multilayered structure.
In this embodiment, the second semiconductor layer 23 includes a II-VI compound semiconductor material such as zinc selenide (ZnSe) or a III-V compound semiconductor material with one of the elements of the compound belonging to the pnictogen group such as gallium arsenide (GaAs), gallium nitride (GaN), aluminum nitride (AlN), indium nitride (InN), indium gallium nitride (InGaN), aluminum gallium nitride (AlGaN), indium gallium aluminum nitride (InGaAlN). The second semiconductor layer 23 may include a dopant such as silicon (Si) or germanium (Ge); however, this is not a limitation of the disclosure and other dopants may be used. In some variations of the embodiment, the second semiconductor layer 23 may be a single layered structure or a multilayered structure.
In this embodiment, the active layer 22 is a gallium arsenide (GaAs) based semiconductor material. More specifically, when gallium arsenide (GaAs) or aluminum gallium indium phosphide (AlGaInP) is used as a base material of the active layer 22, the light-emitting device may produce red light, orange light or yellow light. On the other hand, when indium gallium aluminum nitride (InGaAlN) is used, blue or green light may be produced. In some variations of the embodiment, the active layer 22 may include an un-doped semiconductor layer or at least one low-doped layer. In some embodiments of the disclosure, the active layer 22 may be a single heterostructure (SH), a double heterostructure (DH), a double-sided double heterostructure (DDH), or a multi quantum well structure (MQW); however, the disclosure is not limited to the above examples.
It should be noted that the light-emitting device is not limited to only having one semiconductor structure 20; in some variations of the embodiment, the light-emitting device may have multiple semiconductor structures 20 on the substrate 10 that may be connected in series, in parallel or both.
The second semiconductor layer 23 and the active layer 22 is formed on a top surface of the first semiconductor layer 21, and removal of a portion of the second semiconductor layer 23 and the active layer 22 exposes a portion of the top surface that constitutes a mesa structure. The mesa structure is constituted to allow the first contact electrode 31 and the second contact electrode 32 to be located on the same side of the semiconductor structure 20, and the portion of the semiconductor layer 23 and the active layer 22 that is removed to constitute the mesa structure is usually around 1 to 2 μm in total thickness.
The first contact electrode 31 is located on top of the mesa structure and is electrically connected to the first semiconductor layer 21 in an ohmic contact. The second contact electrode 32 is located on top of and electrically connected to the second semiconductor layer 23 in an ohmic contact.
In this embodiment, the first contact electrode 31 is a p-type electrode, and the second contact electrode 32 is an n-type electrode. The first contact electrode 31 and the second contact electrode 32 are made of a metal material such as nickel (Ni), gold (Au), chromium (Cr), titanium (Ti), platinum (Pt), palladium (Pd), rhodium (Rh), iridium (Ir), aluminum (Al), tin (Tn), indium (In), tantalum (Ta), copper (Cu), cobalt (Co), iron (Fe), ruthenium (Ru), zirconium (Zr), tungsten (W), and molybdenum (Mo), or any combination or combinations of the above.
In some embodiments, the first and second contact electrodes 31, 32 may each include a contact layer, a reflective layer, a barrier layer, and a top adhesion layer (not shown). In some embodiments of the disclosure, the contact layers are preferably made of chromium (Cr), the reflective layers are preferably made of aluminum (Al), the barrier layers are preferably made of titanium (Ti), nickel (Ni) or platinum (Pt), or an alloy thereof. The top adhesion layer are preferably made of titanium (Ti) which may facilitate adhesion with the insulating layer 40.
The insulating layer 40 covers top surface and side walls of the semiconductor structure 20, and is located above the first contact electrode 31, and the second contact electrode 32.
The insulating layer 40 may provide different effects according to its location. For example, the portion of the insulating layer 40 that is covering the side walls of the semiconductor structure 20 may prevent undesirable electrical connections forming between the first and second semiconductor layers 21, 23.
In this embodiment, the insulating layer 40 includes non-conducting materials. The non-conducting material is preferably an inorganic material or a dielectric material. The inorganic material may include silicone or glass, and the dielectric material may include aluminum oxide (Al2O3), silicon nitride (SiNx), silicon oxide (SiOx), titanium oxide (TiOx), or magnesium fluoride (MgFx). The insulating layer 40 may also be an electrically insulating material such as silicon dioxide, silicon nitride, titanium oxide, tantalum oxide, niobium oxide, barium titanate, or any combination or combinations of the above. For example, the insulating layer 40 may be assembled from two of the above listed electrically insulating materials formed in alternating stacks to create a distributed Bragg reflector (DBR).
Referring to
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It should be noted that the light-emitting device according to the present disclosure may be a flip-chip LED, and the first electrode pad 51 and the second electrode pad 52 may be attached to a printed circuit board via reflow soldering with a tin soldering material to form a light-emitting module such as a display backlight or an RGB display.
When an electrical current is applied to the first electrode pad 51 and the second electrode pad 52, the current will flow toward the first electrode pad 51 from the second electrode pad 52 through the semiconductor structure 20, and be horizontally distributed in the epitaxial structure of the semiconductor structure 20 so that photons are generated through electroluminescence. The active layer 22 may be manufactured with different materials and manufacturing processes to emit light at various different wavelengths and produce various colors.
The light-emitting device of the first embodiment is manufactured by the method described below:
Firstly, the second semiconductor layer 23, the active layer 22 and the first semiconductor layer 21 are sequentially deposited on a growth substrate (not shown in
Next the first surface of the first semiconductor layer 21 is subjected to a roughening process to create a roughened surface on the first semiconductor layer 21. The roughening process may be a type of etching or mechanical planarization; however, it is not limited to these examples and other methods of treating the semiconductor layer may be used to obtain the roughened surface.
After the roughened surface is created on the first semiconductor layer 21, a bonding layer 60 is deposited on the roughened surface and subsequently polished; the semiconductor structure 20 is then bonded to the substrate 10 via the bonding layer 60, and the growth substrate (not shown) is subsequently removed to expose the second semiconductor layer 23.
A portion of the second semiconductor layer 23 and the active layer 22 is removed via photolithography to expose a portion of a top surface of the first semiconductor layer 21 that constitutes a mesa structure. A first contact electrode 31 and a second contact electrode 32 are respectively disposed on the mesa structure and the second semiconductor layer 23. Subsequently, a portion of the semiconductor structure 20 is removed to reveal the bonding layer 60 and form scribe lines. An insulating layer 40 is deposited on the top surface and side walls of the semiconductor structure 20 and the scribe lines.
A first through hole 41 and a second through hole 42 are respectively formed on the areas of the insulating layer 40 that are registered with the first contact electrode 31 and the second contact electrode 32. Subsequently, the first electrode pad 51 is filled into the first through hole 41 to form an electrical connection with the first contact electrode 31, and the second electrode pad 52 is filled in the second through hole 42 to form an electrical connection with the second contact electrode 32.
In this embodiment, the bonding layer 60 is an insulating material such as aluminum oxide (Al2O3), titanium dioxide (TiO2), silicon dioxide (SiO2), or silicon nitride (SiN), and has a thickness that that ranges from 1 μm to 5 μm.
The scribe lines (not shown) are formed by etching away parts of the semiconductor structure 20, and have a width of no less than 15 μm.
The method of manufacturing the variation of the first embodiment is described in detail below:
First, the first semiconductor layer 21, the active layer 22 and the second semiconductor layer 23 are sequentially deposited on a growth substrate (i.e., the substrate 10 shown in
A first contact electrode 31 and a second contact electrode 32 are respectively disposed on the mesa structure and the second semiconductor layer 23.
Next, an insulating layer 40 is formed over the upper surface and the side walls of the semiconductor structure 20, the first contact electrode 31, the second contact electrode 32, and areas of the substrate 10 surrounding the semiconductor structure 20.
A first through hole 41 and a second through hole 42 are formed on areas of the insulating layer 40 that respectively register with the first contact electrode 31 and the second contact electrode 32. The first electrode pad 51 is then filled into the first through hole 41 to be electrically connected to the first contact electrode 31. The second electrode pad 52 is then filled in the second through hole 42 to be electrically connected to the second contact electrode 32.
Referring to
More specifically, the first dot-like starting section 31a of the first contact electrode 31 is electrically connected to the first electrode pad 51 via the first through hole 41 that passes through the insulating layer 40. The second dot-like starting section 32b of the second contact electrode 32 is electrically connected to the second electrode pad 52 via the second through hole 42 that passes through the insulating layer 40.
A widthwise cross section of at least one of the first extension section 31b and the second extension section 32b has a bottom width that ranges from 5 μm to 15 μm. In this embodiment, both the widthwise cross sections of the first extension section 31b and the second extension section 32b ranges from 5 μm to 15 μm, and the shape of the cross section is trapezoidal. However, in other embodiments, the cross sections may have a different shape. At least one of the first extension section 31b and the second extension section 32b has a tip with a rounded face. When viewed from above the light-emitting diode, at least one of the dot-like starting section 31a and the second dot-like starting section 32a has a circular, horseshoe or oval shape. A widthwise cross section of at least one of the first dot-like starting section 31a and the second dot-like starting section 32a has a bottom width that ranges from 10 μm to 20 μm.
By designing the first contact electrode 31 and the second contact electrode 32 to be strip electrodes, electric current may be facilitated to flow to the first semiconductor layer 21 and the second semiconductor layer 23 and be spread evenly to prevent current crowding effect. Referring to
In this embodiment, the two first lines (N2) intersect the second line (N1) of the second contact electrode 32 at two points that are respectively a distance (L3) and a distance (L4) away from corresponding nearest ones of the two opposite second ends of the second contact electrode 32. The distances (L3) and (L4) are designed to prevent electrostatic discharge (ESD) occurring at the tips of the strip electrodes which may cause failure of the light-emitting device. The distances (L3) and (L4) each ranges from 0 μm to 30 μm, and may be equal to or different from each other.
In this embodiment, the first contact electrode 31 and the second contact electrode 32 are straight and are parallel to each other. A minimum distance (L9) between the first extension section 31b of the first contact electrode 31 and the second extension section 32b of the second contact electrode 32 ranges from 20 μm to 100 μm. By designing the light-emitting device to have a minimum separation distance between the first and second contact electrodes 31, 32 and controlling the distance to be within a specified range, the light emission efficiency and the anti-EDS capabilities of the light-emitting device are improved.
In general, strip electrodes are made lengthier to provide better current spreading and anti-EDS capabilities, and the tips of the strip electrodes are situated so as to avoid being placed too close to a nearest boundary edge of the semiconductor structure 20 (i.e., the nearest boundary edge of the first semiconductor layer 21 or the second semiconductor layer 23). Therefore, some embodiments of the light-emitting device are particularly designed in view of the aforementioned concerns. In the embodiment shown in
Referring to
In some embodiments, the first contact electrode 31 and the second contact electrode 32 may have a curvature that is conducive for uniform current spreading. For example, in some embodiments, the curvatures of the first contact electrode 31 and the second contact electrode 32 are constant along their respective lengths. Or, in other embodiments, the curvature of the first contact electrode 31 and the second contact electrode 32 may have curvatures that increase in magnitude along their respective lengths.
In some embodiments, each of the first and second contact electrodes 31, 32 forms an arc of a circle. The curvature of the first contact electrode 31 is concentric with that of the second contact electrode 32 on the imaginary plane where the first and second contact electrode 31, 32 are projected. In this case, an absolute value of a difference between radiuses of curvatures of the first and second contact electrodes is 20 μm to 100 μm.
Referring to
In some embodiments, at least one of the first and second contact electrodes 31, 32 is designed to have a tip with a curved end face, in order to decrease current crowding occurring at the tip of the strip-shaped first or second electrodes 31, 32. When the first or second electrode 31, 32 is a straight electrode, the curvature of the curved end face of the tip of the straight electrode has a radius equal to the width of the straight electrode.
Referring to
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In this embodiment, a projection of the second dot-like portion (32c) of the second contact electrode 32 has a length (d4) that is 10 μm to 20 μm, a projection of two opposite ends of the initial extending portion (32d) of the second contact electrode 32 has a distance (d3) that is 0 μm to 60 μm, and a distance between the tips of the two auxiliary extending portions (32e) is greater than 30 μm.
Referring to
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In some embodiments, a minimum distance between the first contact electrode 31 and the second contact electrode 32 is 20 μm to 100 μm. By virtue of controlling the minimum distance between the first contact electrode 31 and the second contact electrode 32 within the specified parameters, the light-emitting diode may have improved light emitting efficiency and anti-ESD characteristics.
In order to increase the anti-electrostatic discharge characteristics of the light-emitting device, it is preferable for the electrodes (in this case the first and second electrodes 31, 32) not to be too close to the corresponding nearest boundary edge of the semiconductor structure 20 (i.e., the nearest boundary edge of the first and second semiconductor layers 21, 23). In some embodiments, a minimum distance (L5) between the first contact electrode 31 and a boundary edge of the first semiconductor layer 21 ranges from 3 μm to 8 μm, and a minimum distance (L6/L7/L8) between the second contact electrode 32 and a boundary edge of the second semiconductor layer 23 ranges from 5 μm to 10 μm.
In some embodiments, the second dot-like portion (32c), the initial extending portion (32d), and the two auxiliary extending portions (32e) may have widthwise cross sections that are trapezoidal. In this case, the second dot-like portion (32c) has a widthwise cross section with a bottom width of 10 μm to 20 μm, the two initial extending portion (32d) has a widthwise cross section with a bottom width of 5 μm to 10 μm, and the two auxiliary extending portions (32e) has a widthwise cross section with a bottom width of 5 μm to 20 μm.
Referring to
The sixth embodiment of the light-emitting device according to the present disclosure is a display device (not shown) that uses the light-emitting device as described in any of the previous embodiments (embodiments 1 to 5). The display device may be a backlit display device, or an RGB display such as a TV, a mobile phone display, a computer monitor, a display screen, or an outdoor display etc.
An experiment was conducted using three comparative test samples against a light-emitting device according to the first embodiment of the present disclosure. The three comparative test samples (i.e., sample 1, 2 and 3) have a similar structure to the first embodiment, with the only variable being the ratio between the length (L2) to the distance (L1). More specifically, the ratio between the length (L2) that is between the opposite first ends of the first contact electrode 31 and the distance (L1) that is between the opposite second ends of the second contact electrode 32. The three comparative test samples have ratios of 1.1, 1.4 and 1.6 respectively; while the first embodiment has a ratio of 0.69. The first embodiment and the three comparative test samples underwent ESD tests conducted with a Weiming ESD electrostatic discharge simulator under HBM (human-body model) mode, and the test results are shown in Table 1.
The results from Table 1. show that the light-emitting device of the first embodiment of the present disclosure surpasses all the three comparative test samples in anti-ESD capability. Therefore, it can be deduced from the experiment that the larger the length (L2) between the opposite first ends of the first contact electrode (31) compared to the distance (L1) between the opposite second ends of the second contact electrode (32), the worse the anti-ESD capability of the device. This phenomenon becomes especially apparent when the ratio of the (L2) to (L1) is greater than 1. Under such circumstances, the electric field on the opposite second ends of the second contact electrode 32 become much more dense and electric charge becomes crowded around the opposite second ends so that when a large voltage is passed through the light-emitting device, electrostatic discharge will occur at the opposite second ends and cause the light-emitting device to leak electricity.
In summary of the above, the light-emitting device according the disclosure has the following advantages when compared to the conventional light-emitting device: By virtue of stipulating that the two parallel first lines (N2), that respectively contact two opposite first ends of the first contact electrode 31 and that perpendicularly intersect a straight second line (N1) connecting between two opposite second ends of the second contact electrode 32, define on the straight second line (N1) a length (L2), which does not extend beyond a distance (L1) between the two opposite second ends of the second contact electrode 32, and that a ratio of the length (L2) to the distance (L1) ranges from 0.5 to 1, the current spreading characteristics and the anti-ESD capability of the light emitting device is improved. Therefore, the light emitting device according to the present disclosure may have more stable saturation current, and may emit light more evenly, thereby ensuring that the light emitting device has a higher luminous efficacy and superior reliability.
In the description above, for the purposes of explanation, numerous specific details have been set forth in order to provide a thorough understanding of the embodiment(s). It will be apparent, however, to one skilled in the art, that one or more other embodiments may be practiced without some of these specific details. It should also be appreciated that reference throughout this specification to “one embodiment,” “an embodiment,” an embodiment with an indication of an ordinal number and so forth means that a particular feature, structure, or characteristic may be included in the practice of the disclosure. It should be further appreciated that in the description, various features are sometimes grouped together in a single embodiment, figure, or description thereof for the purpose of streamlining the disclosure and aiding in the understanding of various inventive aspects; such does not mean that every one of these features needs to be practiced with the presence of all the other features. In other words, in any described embodiment, when implementation of one or more features or specific details does not affect implementation of another one or more features or specific details, said one or more features may be singled out and practiced alone without said another one or more features or specific details. It should be further noted that one or more features or specific details from one embodiment may be practiced together with one or more features or specific details from another embodiment, where appropriate, in the practice of the disclosure.
While the disclosure has been described in connection with what is(are) considered the exemplary embodiment(s), it is understood that this disclosure is not limited to the disclosed embodiment(s) but is intended to cover various arrangements included within the spirit and scope of the broadest interpretation so as to encompass all such modifications and equivalent arrangements.
Number | Date | Country | Kind |
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202111436929.5 | Nov 2021 | CN | national |