The present invention relates generally to light emitting devices and more particularly to light emitting diodes with enhanced light extraction efficiency.
The light extraction efficiency of a light emitting diode (LED) is defined as the ratio of the LED's external quantum efficiency to the LED's internal quantum efficiency. Typically, the light extraction efficiency of a packaged LED is substantially less than one, i.e., much of the light generated in the LED's active region never reaches the external environment.
Light extraction efficiency is reduced by total internal reflection at interfaces between the LED and surrounding material followed by reabsorption of the totally internally reflected light in the LED. For example, for a cubic geometry LED on a transparent substrate encapsulated in epoxy, the refractive index (n) at the emission wavelength changes from a value of, for example, nsemi˜3.5 in the LED semiconductor to nepoxy˜1.5 in the epoxy. The corresponding critical angle for total internal reflection of light incident on the epoxy encapsulant from the LED semiconductor of this example is θC=arcsin(nepoxy/nsemi)˜25°. Neglecting scattering and multiple reflections, light emitted over 4π steradians from a point in the active region of the cubic LED crosses a semiconductor/epoxy encapsulant interface only if it is emitted into one of six narrow light cones, one for each interface, with each light cone having a half angle equal to the critical angle. Additional losses due to total internal reflection can occur at the epoxy/air interface. Consequently, an efficient conventional geometry (for example, rectangular parallelepiped) transparent substrate AlInGaP LED encapsulated in epoxy, for example, may have an external quantum efficiency of only ˜40%, despite having an internal quantum efficiency of nearly 100%.
The effect of total internal reflection on the light extraction efficiency of LEDs is further discussed in U.S. Pat. Nos. 5,779,924; 5,793,062; and 6,015,719 incorporated herein by reference.
In one approach to improving light extraction efficiency, LEDs are ground into hemispherical shapes. Light emitted from a point in the active region of a hemispherically shaped LED intersects the hemispherical interface at near normal incidence. Thus, total internal reflection is reduced. However, this technique is tedious and wasteful of material. In addition, defects introduced during the grinding process may compromise the reliability and performance of the LEDs.
In another approach, LEDs are encapsulated (encased) in a material with a dome or hemispherically shaped surface. For example, the epoxy encapsulant of the above example may be dome shaped to reduce losses due to total internal reflection at the epoxy encapsulant/air interface. However, shaping the surface of a low refractive index encapsulant such as epoxy does not reduce losses due to total internal reflection at the semiconductor/low index encapsulant interface. Moreover, epoxy encapsulants typically have coefficients of thermal expansion that poorly match those of the semiconductor materials in the LED. Consequently, the epoxy encapsulant subjects the LED to mechanical stress upon heating or cooling and may damage the LED. LEDs are also encapsulated in dome shaped high index glasses, which increase the critical angle for the semiconductor/encapsulant interface. Unfortunately, optical absorption in high index glasses and mechanical stress typically degrade the performance of an LED encapsulated in such glass.
What is needed is a method for increasing the light extraction efficiency of light emitting diodes which does not suffer from the drawbacks of previous methods.
Light emitting devices with improved light extraction efficiency are provided. The light emitting devices have a stack of layers including semiconductor layers comprising an active region. The stack is bonded to a transparent lens.
The shape of the lens is, for example, a Weierstrass sphere, a hemisphere, a portion of a sphere less than a hemisphere, an ellipsoid, or a portion of an ellipsoid. In one implementation, the lens is a Fresnel lens. The lens is formed, for example, from optical glass, III-V semiconductors, II-VI semiconductors, group IV semiconductors and compounds, metal oxides, metal fluorides, diamond, sapphire, zirconium oxide, yttrium aluminum garnet, or combinations thereof. The refractive index of the lens for light emitted from the active region is preferably greater than about 1.5, more preferably greater than about 1.8.
In one embodiment, the transparent lens is directly bonded to at least one of the semiconductor layers of the stack. In another embodiment, the transparent lens is directly bonded to a transparent superstrate disposed above the semiconductor layers. The transparent superstrate preferably has a refractive index for light emitted from the active region greater than about 1.8.
In other embodiments, the light emitting device includes a transparent bonding layer disposed between the lens and a surface of the stack. The transparent bonding layer bonds the lens to the surface of the stack. In one embodiment, the surface includes a surface of one of the semiconductor layers. In another embodiment, the surface includes a surface of a transparent superstrate layer disposed above the semiconductor layers. The transparent bonding layer is formed, for example, from metals, phosphide compounds, arsenide compounds, antimonide compounds, nitride compounds, or any of the materials listed above for the transparent lens. In one embodiment, the transparent bonding material has an index of refraction for light emitted from the active region greater than about 1.5, preferably greater than about 1.8.
A method of bonding a transparent lens to a light emitting device having a stack of layers including semiconductor layers comprising an active region is provided. The method includes elevating a temperature of the lens and the stack and applying a pressure to press the lens and the stack together. In one embodiment, the method also includes disposing a layer of a transparent bonding material between the stack and the lens.
Bonding a high refractive index lens to a light emitting device improves the light extraction efficiency of the light emitting device by reducing loss due to total internal reflection. Advantageously, this improvement can be achieved without the use of an encapsulant.
The term “transparent” is used herein to indicate that an optical element so described, such as a “transparent lens,” a “transparent bonding layer,” a “transparent substrate,” or a “transparent superstrate” transmits light at the emission wavelengths of the LED with less than about 50%, preferably less than about 10%, single pass loss due to absorption or scattering. The emission wavelengths of the LED may lie in the infrared, visible, or ultraviolet regions of the electromagnetic spectrum. One of ordinary skill in the art will recognize that the conditions “less than 50% single pass loss” and “less than 10% single pass loss” may be met by various combinations of transmission path length and absorption constant.
LED die 4 illustrated in
Semiconductor layers 8 and 10 and active region 12 are formed from III-V semiconductors including but not limited to MN, AlP, AlAs, AlSb, GaN, GaP, GaAs, GaSb, InN, InP, InAs, InSb, II-VI semiconductors including but not limited to ZnS, ZnSe, CdSe, CdTe, group IV semiconductors including but not limited to Ge, Si, SiC, and mixtures or alloys thereof These semiconductors have indices of refraction ranging from about 2.4 to about 4.1 at the typical emission wavelengths of LEDs in which they are present. For example, III-Nitride semiconductors such as GaN have refractive indices of about 2.4 at 500 nm, and III-Phosphide semiconductors such as InGaP have refractive indices of about 3.7 at 600 nm.
Contacts 14 and 16 are, in one implementation, metal contacts formed from metals including but not limited to gold, silver, nickel, aluminum, titanium, chromium, platinum, palladium, rhodium, rhenium, ruthenium, tungsten, and mixtures or alloys thereof In another implementation, one or both of contacts 14 and 16 are formed from transparent conductors such as indium tin oxide.
Although
In one embodiment, a layer of bonding material is applied to a top surface 18 of LED die 4 (
In an alternative embodiment, transparent bonding layer 6 is formed on substantially flat surface 22 of lens 2 or on the surface of metallization layer 20 and optionally patterned with, for example, conventional photolithographic and etching techniques to permit electrical contact between contact 14 and metallization layer 20. In another embodiment transparent bonding layers such as bonding layer 6 are formed on both surface 18 of LED die 4 and surface 22 of lens 2. In other embodiments, contact 14 is not separately provided, and bonding layer 6 is patterned to permit electrical contact between metallization layer 20 and n-layer 8. In the embodiment shown in
Though the following discussion assumes that bonding layer 6 is formed on LED die 4 rather than on surface 22 of lens 2 or on both LED die 4 and surface 22, the process described below can be simply modified to implement the latter embodiments.
In one implementation, the bonding material from which transparent bonding layer 6 is formed is a high index optical glass, i.e., an optical glass having a refractive index greater than about 1.5 in the range of wavelengths emitted by active region 12. Preferably, the refractive index is greater than about 1.8. Transparent bonding layer 6 is formed, for example, from Schott glass SF59, a dense flint glass which has refractive index (n)˜1.95 at ˜600 nanometers (nm) and a glass transition temperature (TG)˜362° C. Alternatively, transparent bonding layer 6 is formed from high index optical glasses including but not limited to Schott glass LaSF 3, with n˜1.81 at ˜600 nm and TG 630° C.; Schott glass LaSF N18, with n˜1.91 at ˜600 nm and TG 660° C.; and mixtures thereof These glasses are available from Schott Glass Technologies Incorporated, of Duryea, Pa. Bonding layer 6 may also be formed from a high index chalcogenide glass, such as (Ge,Sb,Ga)(S,Se) chalcogenide glasses, for example.
In other implementations, bonding layer 6 is formed from III-V semiconductors including but not limited to GaP (n˜3.3 at 600 nm), InGaP (n˜3.7 at 600 nm), GaAs (n˜3.4 at 500 nm), and GaN (n˜2.4 at 500 nm); II-VI semiconductors including but not limited to ZnS (n˜2.4 at 500 nm), ZnSe (n˜2.6 at 500 nm), ZnTe (n˜3.1 at 500 nm), CdS (n˜2.6 at 500 nm), CdSe (n˜2.6 at 500 nm), and CdTe (n˜2.7 at 500 nm); group IV semiconductors and compounds including but not limited to Si (n˜3.5 at 500 nm), and Ge (n˜4.1 at 500 nm); organic semiconductors, metal oxides including but not limited to tungsten oxide, titanium oxide (n˜2.9 at 500 nm), nickel oxide (n˜2.2 at 500 nm), zirconium oxide (n˜2.2 at 500 nm), indium tin oxide, and chromium oxide; metal fluorides including but not limited to magnesium fluoride (n˜1.4 at 500 nm) and calcium fluoride (n˜1.4 at 500 nm); metals including but not limited to Zn, In, Mg, and Sn; yttrium aluminum garnet (YAG), phosphide compounds, arsenide compounds, antimonide compounds, nitride compounds, high index organic compounds; and mixtures or alloys thereof.
Bonding layer 6 includes, in one implementation, luminescent material that converts light of wavelengths emitted by active region 12 to other wavelengths. The luminescent material includes, for example, conventional phosphor particles, organic semiconductors, II-VI or III-V semiconductors, II-VI or III-V semiconductor quantum dots or nanocrystals, dyes, polymers, and materials such as GaN that luminesce from defect centers. If bonding layer 6 includes conventional phosphor particles, then bonding layer 6 should be thick enough to accommodate particles typically having a size of about 5 microns to about 50 microns.
In one implementation, bonding layer 6 is formed from a high index material (refractive index at the LED's emission wavelengths greater than about 1.5, preferably greater than about 1.8) having a refractive index less than that of the top layer of LED die 4, for example, semiconductor layer 8. Hence, a critical angle exists for total internal reflection of light incident on the semiconductor layer 8/bonding layer 6 interface from inside LED die 4. This critical angle is increased compared to the critical angle for an interface between LED die 4 and epoxy or air, however, and more light is extracted through surface 18 into bonding layer 6 than would be extracted into an epoxy encapsulant or air. In another implementation, the refractive index of bonding layer 6 (for example, ZnS or ZnSe) is greater than or equal to that of semiconductor layer 8 (for example, GaN), and none of the light incident on bonding layer 6 from inside LED die 4 is totally internally reflected. Neglecting Fresnel reflection losses, which can be minimized by approximately matching the refractive indices of bonding layer 6 and the top layer of LED die 4, in the latter case also more light is extracted through surface 18 into bonding layer 6 than would be extracted into an epoxy encapsulant or air.
In another implementation, transparent bonding layer 6 is formed from a low index bonding material, i.e., a bonding material having a refractive index less than about 1.5 at the LED's emission wavelengths. Magnesium fluoride, for example, is one such bonding material. Low index optical glasses, epoxies, and silicones may also be suitable low index bonding materials. One of ordinary skill in the art will recognize that efficient transmission of light from LED die 4 across transparent bonding layer 6, formed from a low index material, to lens 2 can be achieved if bonding layer 6 is sufficiently thin. Accordingly, in this implementation losses due to total internal reflection at the LED die 4/bonding layer 6 interface are reduced by making the thickness of bonding layer 6 less than about 500 Å, preferably less than about 100 Å. Lens 2 might bond poorly to LED die 4 if the roughness of surface 18 or surface 22 or typical height of irregularities on surface 18 or surface 22 exceed the thickness of bonding layer 6. In this embodiment, surfaces 18 and 22 are optionally polished to achieve a surface roughness of magnitude less than or equal to the thickness of bonding layer 6.
If LED die 4 includes material that absorbs light emitted by active region 12, and if bonding layer 6 is formed from a low index material but is not thin as described above, then a large portion of the light emitted by active region 12 will typically be trapped in LED die 4 and lost to absorption even if bonding layer 6 is itself nonabsorbing. In contrast, a bonding layer 6 formed from a high index material will typically couple a larger fraction of light emitted by active region 12 out of LED die 4 into lens 2, even if the high index bonding material is a material such as a chalcogenide glass, for example, which absorbs a portion of the emitted light.
After transparent bonding layer 6 is applied to LED die 4, the substantially flat surface 22 of lens 2 is placed against bonding layer 6. The temperature of bonding layer 6 is then raised to a temperature between about room temperature and about 1000° C., and lens 2 and LED die 4 are pressed together for a period of time of about one second to about 6 hours at a pressure of about 1 pound per square inch (psi) to about 6000 psi. The inventors believe that in this process lens 2 is bonded to LED die 4 by a bond effected between lens 2 and bonding layer 6 (formed on LED die 4) by, for example, material transfer via shear stress, evaporation-condensation, liquification (or melting or softening) followed by solidification, diffusion, or alloying. The inventors believe that in other implementations lens 2 is bonded to LED die 4 by a bond similarly effected by, for example, material transfer between bonding layers formed on each of lens 2 and LED die 4 or between bonding layer 6 (formed on lens 2) and LED die 4. Thus, a bonded interface characterized by material transfer may be disposed between lens 2 and LED die 4. In one implementation, for example, surface 18 at the interface of n-layer 8 and bonding layer 6 is such a bonded interface. In another implementation, an interface of bonding layers formed on each of lens 2 and LED die 4 is a bonded interface. In another implementation, an interface of lens 2 and bonding layer 6 is a bonded interface.
If transparent bonding layer 6 is formed on LED die 4 from an optical glass, for example, then in one implementation the temperature of bonding layer 6 is raised to about the strain point temperature of the optical glass. The strain point temperature, which is near to but less than the glass transition temperature (TG), is the temperature at which the optical glass has a viscosity of about 1014.5 poises. The strain point temperature also corresponds to the first nonlinearity in a plot of expansion versus temperature for the optical glass, and thus represents the lower limit of the annealing range. The resulting flexibility and lowered surface tension of the optical glass in layer 6 at temperatures near or above the strain point temperature allow the optical glass to microscopically conform to surface 22 and to effect a bond between lens 2 and bonding layer 6.
The process of bonding lens 2 to LED die 4 described above may be performed with devices disclosed in U.S. Pat. Nos. 5,502,316 and 5,376,580, incorporated herein by reference, previously used to bond semiconductor wafers to each other at elevated temperatures and pressures. The disclosed devices may be modified to accommodate LED dice and lenses, as necessary. Alternatively, the bonding process described above may be performed with a conventional vertical press.
Transparent lens 2 is formed, for example, from SiC (n˜2.7 at 500 nm), aluminum oxide (sapphire, n˜1.8 at 500 nm), diamond (n˜2.4 at 500 nm), or any of the materials listed above for use as bonding materials in transparent bonding layer 6, excluding the metals. A severe mismatch between the thermal expansion coefficients of lens 2 and LED die 4 to which lens 2 is bonded can cause lens 2 to detach from LED die 4 upon heating or cooling. Also, approximately matching thermal expansion coefficients reduces the stress induced in LED die 4 by bonding layer 6 and lens 2. Hence, in one implementation lens 2 is formed from a material having a thermal expansion coefficient approximately matching the thermal expansion coefficient of LED die 4 to which lens 2 is bonded.
In one embodiment, transparent lens 2 has a shape and a size such that light entering lens 2 from LED die 4 will intersect surface 24 of lens 2 at angles of incidence near normal incidence. Total internal reflection at the interface of surface 24 and the ambient medium, typically air, is thereby reduced. In addition, since the range of angles of incidence is narrow, Fresnel reflection losses at surface 24 can be reduced by applying a conventional antireflection coating 25 to surface 24. The shape of lens 2 is, for example, a portion of a sphere such as a hemisphere, a Weierstrass sphere (truncated sphere), or a portion of a sphere less than a hemisphere. Alternatively, the shape of lens 2 is a portion of an ellipsoid such as a truncated ellipsoid. The angles of incidence at surface 24 for light entering lens 2 from LED die 4 more closely approach normal incidence as the size of lens 2 is increased. Hence, the smallest ratio of a length of the base of transparent lens 2 to a length of the surface 18 of LED die 4 is preferably greater than about 1, more preferably greater than about 2.
One of ordinary skill in the art will recognize that the maximum size for which a lens 2 of a particular material continues to be transparent as defined above is determined by the absorption constant of the lens material at the emission wavelengths of the LED. In one implementation, lens 2 is a Fresnel lens. Fresnel lenses are typically thinner than, for example, spherical lenses of comparable focal lengths, and hence are less absorptive.
In another implementation, lens 2 is a graded index lens having, for example, a refractive index decreasing in the direction perpendicular to surface 22 or decreasing radially from a maximum near a center of surface 22.
Lens 2 includes, in one implementation, luminescent material that converts light of wavelengths emitted by active region 12 to other wavelengths. In another implementation, a coating on surface 22, for example, includes luminescent material. The luminescent material includes, for example, conventional phosphor particles, organic semiconductors, II-VI or III-V semiconductors, II-VI or III-V semiconductor quantum dots or nanocrystals, dyes, polymers, and materials such as GaN that luminesce from defect centers. Alternatively, a region of lens 2 near surface 22 is doped, for example, with a luminescent material.
The magnitudes of the refractive indices of lens 2 (nlens), bonding layer 6 (nbond), and the top layer of LED die 4 (nLED) can be ordered in six permutations. If nLED≦nbond≦nlens or nLED≦nlens≦nbond, then losses due to total internal reflection are eliminated, but Fresnel losses may occur. In particular, if nLED=nbond=nlens, then light enters lens 2 from LED die 4 without losses due to Fresnel or total internal reflection. Alternatively, if nbond≦nLED≦nlens but either nbond>nepoxy or bonding layer 6 is thin as described above, then, neglecting Fresnel reflection losses, more light is extracted into lens 2 than would be extracted into an epoxy encapsulant or air. Similarly, if nbond≦nlens≦nLED but either nbond>nepoxy or bonding layer 6 is thin as described above and nlens>nepoxy, then, neglecting Fresnel reflection losses, more light is extracted into lens 2 than would be extracted into an epoxy encapsulant or air. If nlens≦nbond≦nLED or nlens≦nLED≦nbond but nlens>nepoxy, then, neglecting Fresnel reflection losses, more light is extracted into lens 2 than would be extracted into an epoxy encapsulant or air. Thus, transparent lens 2 preferably has a refractive index at the emission wavelengths of LED die 4 greater than about 1.5, more preferably greater than about 1.8. A similar analysis applies if the ambient medium is air (nair˜1) rather than an epoxy encapsulant, with nair substituted for nepoxy.
If bonding layer 6 includes phosphor particles and the refractive index of the bonding material, preferably a high index chalcogenide glass, approximately matches the refractive index of the phosphor particles, then scattering by the phosphor particles of light emitted by the active region or by the phosphor particles will be negligible. Preferably, the refractive indices of the phosphor particles, the bonding material, the top layer (for example n-layer 8) of LED die 4, and the lens are all about equal. This is the case if the top layer of LED die 4 is InGaN, the phosphor particles are SrS:Eu and/or SrGaS:Eu, and the lens is ZnS.
Referring to
For lens 2 directly bonded to LED die 4, if nLED≦nlens or if nlens<nLED but nlens>nepoxy, then, neglecting Fresnel reflection losses, more light is extracted into lens 2 than would be extracted into an epoxy encapsulant. A similar analysis applies if the ambient medium is air (nair˜1) rather than an epoxy encapsulant, with nair substituted for nepoxy.
Transparent lens 2 is directly bonded to LED die 4 at temperatures and pressures as described above for the bonding process utilizing bonding layer 6. In one implementation, surface 18 of LED die 4 or surface 22 of lens 2 is doped with a material exhibiting a high diffusivity such as, for example, Zn or Si. Such doping can be accomplished during materials growth by MOCVD, VPE, LPE or MBE, for example, or after materials growth by, for example, implantation. In another implementation, a thin layer of a high diffusivity material is disposed between lens 2 and LED die 4 by deposition on at least one of surfaces 18 and 22. Deposition can be accomplished, for example, by conventional means such as evaporation or sputtering. The inventors believe that during the bonding process the high diffusivity material diffuses across the interface between lens 2 and LED die 4 and enhances material transfer between lens 2 and LED die 4. The amount of high diffusivity material used should be sufficiently low to maintain the transparency of, for example, lens 2 and the top layer of LED die 4.
It is advantageous to bond LED die 4 to lens 2 rather than to conventionally encase LED die 4 in an encapsulant. For example, the light extraction efficiency through surface 18 of LED die 4 bonded to lens 2 with or without bonding layer 6, as described above, is improved compared to a conventional epoxy encapsulated LED. In addition, LED die 4 need not be subject to the damaging stress experienced by epoxy encapsulated (encased) LEDs. Moreover, in the absence of epoxy encapsulants, which degrade at relatively low temperatures, LED die 4 can be run at higher temperatures. Consequently, the light output of LED die 4 can be increased by running the LED at higher current densities.
If desired, however, LED die 4 bonded to lens 2 could be additionally encapsulated in, for example, epoxy or silicone. Such encapsulation of LED die 4 bonded to lens 2 would not effect the light extraction efficiency through surface 18 of LED die 4 into lens 2. Total internal reflection at the interface of surface 24 and the encapsulant would be minimized, as described above, by the shape and size of lens 2.
In some implementations, LED die 4 includes, for example, metallization for electrical contacts that degrades at elevated temperatures. In other implementations, LED die 4 is bonded to a submount, not shown, with solders or silver bearing die-attach epoxies that degrade at high temperatures. (Note that die-attach epoxy is to be distinguished from an epoxy encapsulant.) Consequently, in one implementation the process of bonding lens 2 to LED die 4, with or without a bonding layer 6, occurs at temperatures less than about 500° C. in order to avoid, for example, degrading the metallization or the die-attach epoxy. In another implementation, lens 2 is bonded to an incomplete LED die, for example, an LED die missing some or all metallization. In the latter implementation, fabrication of the LED die is completed after the lens bonding process.
As
In the embodiment of
Beveled sides 26 and 28 reflect light emitted from active region 12 toward bonding layer 6. Light that might otherwise have been trapped in LED die 4 or lost out the sides of the die is thereby advantageously extracted through bonding layer 6 and lens 2. In one embodiment, LED die 4 is surrounded by a low refractive index medium such as air, and a portion of the light incident on beveled sides 26 and 28 from active region 12 is totally internally reflected toward bonding layer 6. In another embodiment, beveled sides 26 and 28 are coated with a reflective coating, in one implementation a metal layer and in another implementation a dielectric layer, that reflects light toward bonding layer 6.
In one embodiment, contact 16 is highly reflective. Accordingly, in this embodiment light incident on contact 16 is reflected toward bonding layer 6 and lens 2 either directly or after additional reflection from side 26 or side 28. The light extraction efficiency of LED die 4 is consequently increased.
In the embodiments illustrated in
Contact 14 and contact 16 are disposed on the same side of LED die 4 in the “flip chip” embodiments illustrated in
In one implementation of the embodiments illustrated in
In the embodiments illustrated in
In the embodiments of
While the present invention is illustrated with particular embodiments, the invention is intended to include all variations and modifications falling within the scope of the appended claims.
This application is a Division of U.S. patent application Ser. No. 11/868,903, filed on Oct. 8, 2007, now U.S. Pat. No. 8,049,234, which is a Continuation of U.S. patent application Ser. No. 10/938,237, filed on Sep. 10, 2004, now U.S. Pat. No. 7,279,345, which is a Division of U.S. patent application Ser. No. 09/880,204, filed on Jun. 12, 2001, now U.S. Pat. No. 7,064,355, which is a Continuation-In-Part of U.S. patent application Ser. No. 09/660,317 filed on Sep. 12, 2000, now U.S. Pat. No. 7,053,419. Each of U.S. patent application Ser. No. 10/938,237, U.S. Pat. No. 7,064,355, and U.S. Pat. No. 7,053,419 is incorporated herein by reference.
Number | Name | Date | Kind |
---|---|---|---|
3676668 | Collins et al. | Jul 1972 | A |
3769536 | Antypas et al. | Oct 1973 | A |
3932881 | Mita et al. | Jan 1976 | A |
3964157 | Kuhn et al. | Jun 1976 | A |
4109054 | Burgyan | Aug 1978 | A |
4391683 | Buckley et al. | Jul 1983 | A |
4675058 | Plaster | Jun 1987 | A |
4689652 | Shimada et al. | Aug 1987 | A |
4727457 | Thillays | Feb 1988 | A |
4783347 | Doin et al. | Nov 1988 | A |
4815084 | Scifres et al. | Mar 1989 | A |
4983009 | Musk | Jan 1991 | A |
4988579 | Tomomura et al. | Jan 1991 | A |
5040868 | Waitl et al. | Aug 1991 | A |
5055892 | Gardner et al. | Oct 1991 | A |
5130531 | Ito et al. | Jul 1992 | A |
5132430 | Gaudiana et al. | Jul 1992 | A |
5181220 | Yagi | Jan 1993 | A |
5255171 | Clark | Oct 1993 | A |
5255333 | Althaus et al. | Oct 1993 | A |
5300788 | Fan et al. | Apr 1994 | A |
5317170 | Paoli | May 1994 | A |
5376580 | Kish et al. | Dec 1994 | A |
5394430 | Huang | Feb 1995 | A |
5418384 | Yamana et al. | May 1995 | A |
5502316 | Kish et al. | Mar 1996 | A |
5528057 | Yanagase et al. | Jun 1996 | A |
5537000 | Alivisatos et al. | Jul 1996 | A |
5553089 | Seki et al. | Sep 1996 | A |
5661316 | Kish et al. | Aug 1997 | A |
5698452 | Goossen | Dec 1997 | A |
5724376 | Kish, Jr. et al. | Mar 1998 | A |
5779924 | Krames et al. | Jul 1998 | A |
5793062 | Kish, Jr. et al. | Aug 1998 | A |
5813753 | Vriens et al. | Sep 1998 | A |
5837561 | Kish, Jr. et al. | Nov 1998 | A |
5847507 | Butterworth | Dec 1998 | A |
5875205 | Spaeth et al. | Feb 1999 | A |
5898185 | Bojarczuk, Jr. et al. | Apr 1999 | A |
5917201 | Ming-Jiunn et al. | Jun 1999 | A |
5925898 | Spath | Jul 1999 | A |
5966399 | Jiang et al. | Oct 1999 | A |
6015719 | Kish, Jr. et al. | Jan 2000 | A |
6066861 | Hohn et al. | May 2000 | A |
6075627 | Feldman et al. | Jun 2000 | A |
6091020 | Fairbanks et al. | Jul 2000 | A |
6091694 | Spath | Jul 2000 | A |
6155699 | Miller et al. | Dec 2000 | A |
6165911 | Calveley | Dec 2000 | A |
6214733 | Sickmiller | Apr 2001 | B1 |
6233267 | Nurmikko et al. | May 2001 | B1 |
6258699 | Chang et al. | Jul 2001 | B1 |
6294800 | Duggal et al. | Sep 2001 | B1 |
6319619 | Yamamoto et al. | Nov 2001 | B1 |
6329676 | Takayama et al. | Dec 2001 | B1 |
6412971 | Wojnarowski et al. | Jul 2002 | B1 |
6429462 | Shveykin | Aug 2002 | B1 |
6469785 | Duveneck et al. | Oct 2002 | B1 |
6472765 | Sano et al. | Oct 2002 | B1 |
6473554 | Pelka et al. | Oct 2002 | B1 |
6483196 | Wojnarowski et al. | Nov 2002 | B1 |
6495862 | Okazaki et al. | Dec 2002 | B1 |
6598998 | West et al. | Jul 2003 | B2 |
6608439 | Sokolik et al. | Aug 2003 | B1 |
6709883 | Yang et al. | Mar 2004 | B2 |
7053419 | Camras et al. | May 2006 | B1 |
7064355 | Camras et al. | Jun 2006 | B2 |
7078732 | Reeh et al. | Jul 2006 | B1 |
7279345 | Camras et al. | Oct 2007 | B2 |
7332746 | Takahashi et al. | Feb 2008 | B1 |
7682848 | Shimizu et al. | Mar 2010 | B2 |
20020030194 | Camras et al. | Mar 2002 | A1 |
20020141006 | Pocius et al. | Oct 2002 | A1 |
20030227249 | Mueller et al. | Dec 2003 | A1 |
20040051106 | Baur et al. | Mar 2004 | A1 |
20050269582 | Mueller et al. | Dec 2005 | A1 |
20100206362 | Flood | Aug 2010 | A1 |
20100309669 | Guzzini et al. | Dec 2010 | A1 |
20110297912 | Samachisa et al. | Dec 2011 | A1 |
Number | Date | Country |
---|---|---|
2209194 | Aug 1973 | DE |
2209194 | Aug 1973 | DE |
08090304 | Nov 1997 | EP |
0926744 | Jun 1999 | EP |
1119058 | Jul 2001 | EP |
53080988 | Jul 1978 | JP |
35505473 | May 1980 | JP |
06151972 | May 1994 | JP |
07169994 | Jul 1995 | JP |
08076697 | Mar 1996 | JP |
0915645 | Jun 1997 | JP |
09167515 | Jun 1997 | JP |
09172229 | Jun 1997 | JP |
10151794 | Sep 1998 | JP |
11509687 | Aug 1999 | JP |
20000058913 | Feb 2000 | JP |
9704491 | Feb 1997 | WO |
9902026 | Jan 1999 | WO |
0069000 | Nov 2000 | WO |
0070687 | Nov 2000 | WO |
0180322 | Apr 2001 | WO |
0141219 | Jun 2001 | WO |
0141225 | Jun 2001 | WO |
0237578 | May 2002 | WO |
Entry |
---|
Patent Abstracts of Japan, Publication No. 09-153645, Date of Publication, Oct. 6, 1997, inventors Asami Shinya et al. |
WO 00/6900, Translation From German, World Organization of Intellectual Property. |
WO 00/70687, Translation From German, World Organization of Intellectual Property. |
WO 01/80322A2, Translation From German, World Organization of Intellectual Property. |
WO 02/37578 A21, Translation From German, World Organization of Intellectual Property. |
Joshua Israelsohn, “Switching the Light Fantastic” Techtrends, EDN, October 26, 2000. |
Boris A. Matveey et al, “III-V Optically Pumped MID-IR LEDs” Light Emitting Diodes, Research Manufacturing and Applications, Proceedings of SPIE vol. 4278, (2001, pp. 186-196). |
Thomas R. Anthony “Dielectric Isolation of Silicon by Anodic Bonding” J. Appl. Phys. vol. 58, No. 3, Aug. 1985 p. 1240-1247. |
Aluminum Oxide, A 1203 for Optical Coating, Cerac Inc. Technical Publications. p. 1-4. |
Babic et al “Room Temperature Continuious-Wave Operation of 1-54UM Vertical Cavity Lasers” IEEE Photonics Technology Letters, vol. 7, No. 11, Nov. 1995, pp. 1225-1227. |
Bulk Measurement, Sairon Technology, Inc. pp. 1-3. |
Carr, “Photometric Figures of Merit for Semiconductor Luminescent Sources Operating in Spontanious Mode” Infrared Physics, 1966, vol. 6., pp. 1-19. |
Chua et al, “Dielectrically-Bonded Long Wavelength Vertical Cavity Laser on GaAs Substrates Using Strain-Compensated Multiple Quantum Wells” IEEE Photonics Technology Letters, vol. 6, No. 12, Dec. 1994, p. 1400-1402. |
Chiu et al “High Efficiency AlGainP Light-Emitting Diodes” Semiconductor and Semimetals, vol. 64, Chapter 2, pp. 49-128. |
Fischer et al, “Highly Refractive Glasses to Improve Electroluminescent Diode Efficiencies” Journal of the Electomechanical Society Solid State Science Dec. 1969, pp. 171801722. |
J.W. Osenbach et al Low Cost/High Volume Laser Modules Using Silicon Optical Bench Technology, 1998, Electronic Components and Technology Conference, pp. 581-587. |
Joseph S. Hayden, Passive and Active Characterization of Hybrid Glass Substrates for Telecommunicatin Applications, 8 Pages. |
Mary T. Strzelecki et al, “Low Temperature Bonding of Glasses and Glass Ceramics” 8 Pages. |
Robert D. Simpson et al, “Hybrid Glass Structures for Telecommunication Applications” 8 Pages. |
Number | Date | Country | |
---|---|---|---|
20120021543 A1 | Jan 2012 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 11868903 | Oct 2007 | US |
Child | 13252398 | US | |
Parent | 09880204 | Jun 2001 | US |
Child | 10938237 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 10938237 | Sep 2004 | US |
Child | 11868903 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 09660317 | Sep 2000 | US |
Child | 09880204 | US |