The present embodiments relate to light-emitting diodes (LEDs), packages including LEDs, and methods of making LED packages.
Light Emitting Diodes (LEDs), or laser diodes, are widely used for many applications. A semiconductor light emitting device includes an LED chip having one or more semiconductor layers. The layers are configured to emit coherent and/or incoherent light when energized. During manufacture, a large number of LED semiconductor dies are produced on a semiconductor wafer. The wafer is probed and tested to accurately identify particular color characteristics of each die, such as color temperature. Then, the wafer is singulated to cut the wafer into a plurality of chips. The LED chips are typically packaged to provide external electrical connections, heat sinking, lenses or waveguides, environmental protection, and/or other features. Conventional methods for making LED chip packages comprise processes such as die attach, wire bonding, encapsulating, testing, etc.
It is often desirable to incorporate a phosphor into the LED package, to enhance the emitted radiation in a particular frequency band and/or to convert at least some of the radiation to another frequency band. Conventionally, phosphors are included during the LED chip packaging process. In one technique, the phosphor may be suspended in the encapsulant provided in the LED package. In an alternative approach, the phosphor may be directly coated on the LED chip, after the steps of die attach and wire bonding, by dispensing or spray coating.
However, in the dispensing method it is difficult to control the thickness of phosphor. Variations in the phosphor thickness create color non-uniformity of the light output from the LED package. The spray coating method provides better thickness control, but is expensive due to phosphor waste, since the phosphor sometimes coats portions of the work piece other than those desired to be coated.
After the phosphor is added, another test may be performed to determine whether the light emission of the packaged LED chip with phosphor conforms to a desired color characteristic, such as color temperature. Any unsatisfactory packages may be discarded or reworked. Reworking typically involves manual removal of excessive phosphor or manual addition of extra phosphor to make up for a phosphor deficiency. Manual processes significantly increase manufacturing costs.
It has been proposed to apply a phosphor coating on a semiconductor LED wafer while exposing each die's bonding pads via a photopatternable film or by stencil printing. However, the photopatternable film requires an expensive photomask. Stencil printing does not allow selectively coating a very thin, typically under 100 μm, phosphor layer, which includes phosphor particles having a diameter of 5-15 μm.
The various embodiments of the present light-emitting diodes, packages, and methods of making have several features, no single one of which is solely responsible for their desirable attributes. Without limiting the scope of the present embodiments as expressed by the claims that follow, their more prominent features now will be discussed briefly. After considering this discussion, and particularly after reading the section entitled “Detailed Description,” one will understand how the features of the present embodiments provide the advantages described herein.
One aspect of the present embodiments includes the realization that it would be beneficial to have a simple and efficient way to selectively apply a phosphor coating on a semiconductor wafer, while allowing for wafer level color testing before proceeding to singulation and chip packaging.
One of the present embodiments comprises a light-emitting diode (LED) element. The LED element comprises an LED chip having a light emitting surface and at least one pad. The LED element further comprises a phosphor layer formed on the light emitting surface and exposing the at least one pad. The phosphor layer includes a plurality of phosphor particles and a matrix. At least some of the phosphor particles have a first portion embedded in the matrix and a second portion protruding from an outer surface of the matrix.
Another of the present embodiments comprises a light-emitting diode (LED) package. The LED package comprises a substrate and an LED element disposed on the substrate. The LED element comprises an LED chip having a light emitting surface and at least one pad. The LED element further comprises a phosphor layer formed on the light emitting surface and exposing the at least one pad. The phosphor layer includes a plurality of phosphor particles and a matrix. At least some of the phosphor particles have a first portion embedded in the matrix and a second portion protruding from an outer surface of the matrix. The LED package further comprises at least one electrical element electrically connecting the at least one pad of the LED chip to the substrate. The LED package further comprises an encapsulant encapsulating the LED chip and the electrical at least one electrical element.
Another of the present embodiments comprises a method of making a chip having a first surface and a plurality of pads disposed on the first surface. The method comprises providing a temporary substrate including a bonding surface and a plurality of protruding portions on the bonding surface. Locations of the protruding portions on the temporary substrate correspond to locations of the pads on the first surface of the chip. The method further comprises forming an adhesive layer on each of the protruding portions. The method further comprises bonding the temporary substrate to the chip such that the protruding portions are connected to respective ones of the pads via the adhesive layers. The bonding surface of the temporary substrate faces the first surface of the chip and a dispensing space is formed between the bonding surface and the first surface. The method further comprises filling the dispensing space with a glue to form a gel layer encapsulating the pads, the protruding portions. and the adhesive layers. The method further comprises removing the temporary substrate to separate the protruding portions and the adhesive layers from the pads to form a plurality of openings in the gel layer, the openings exposing respective ones of the pads.
Common reference numerals are used throughout the drawings and the detailed description to indicate the same elements. The present invention will be more apparent from the following detailed description taken in conjunction with the accompanying drawings.
Referring to
The LED chip 121 can comprise a light-emitting diode, a laser diode, or another device that may include one or more semiconductor layers. The semiconductor layers may comprise silicon, silicon carbide, gallium nitride, or any other semiconductor materials. The LED chip 121 may further comprise a substrate (not shown), which may be sapphire, silicon, silicon carbide, gallium nitride, or any other material. The LED chip 121 may further comprise one or more contact layers (not shown), which may comprise metal or any other conductive material.
The substrate 110 comprises an upper surface 110u having at least one electrical contact 111. The substrate may be a silicon interposer, a ceramic substrate. a printed circuit board, or any other type of substrate. The electrical contacts 111 may be pads, or any other type of contacts.
The LED chip 121 is disposed on the upper surface 110u of the substrate 110. In the illustrated embodiment, the LED chip 121 is disposed on the substrate 110 in a face-up manner and electrically connected to the substrate 110 with wires 130. The LED chip 121 has a light-emitting surface 121u, and comprises a plurality of pads 1211, each having an upper surface 1211u (inset A′ in
The phosphor layer 122 is formed on the light emitting surface 121u. The phosphor layer 122 has a plurality of cavities 122a that expose a plurality of pads 1211. In the illustrated embodiment, the phosphor layer 122 projects above upper surfaces 1211u of the pads 1211 (detail view A′ of
Many of the phosphor particles 1221 are completely embedded in the matrix 1222. However, as illustrated in A′ of
The phosphor particles 1221 may enhance the LED chip 121's emitted radiation in a particular frequency band and/or convert at least some of the emitted radiation to another frequency band. In one embodiment, the LED chip 121 may emit blue light and the phosphor particles 1221 may comprise Cerium doped Yttrium Aluminum Garnet (YAG:Ce) (e.g., (YGdTb)3(AlGa)5O12:Ce) which can convert part of the blue light into yellow light, producing white light.
Alternatively, the phosphor particles 1221 may comprise (SrBaCaMg)2SiO4:Eu, (Sr,Ba,CaMg)3SiO5:Eu, CaAlSiN3:Eu, CaScO4:Ce, Ca10(PO4)FCl:SbMn, M5(PO4)3Cl:Eu, BaBg2Al16O27:Eu, Ba, MgAl16O27:Eu, Mn, 3.5 MgO.0.5 MgF2.GeO2:Mn, Y2O2S:Eu, Mg6As2O11:Mn, Sr4Al14O25:Eu, (Zn,Cd)S:Cu, SrAl2O4:Eu, Ca10(PO4)6ClBr:Mn, Eu, Zn2GeO4:Mn, Gd2O2S:Eu or La2O2S:Eu, wherein, M is an alkali earth metal, e.g., Sr, Ca, Ba, Mg, or a combination thereof In certain embodiments, sizes of the phosphor particles 1221 may range between about 5-20 μm.
With reference to the detail view A′ of
With reference to
With continued reference to
The matrix 1222 and the encapsulant 140 may be the same material or different materials. For example, one or both may be a transparent polymer or translucent polymer, such as epoxy-based resin, a mixture thereof or any other suitable encapsulating agent. In one embodiment, the matrix 1222 or the encapsulant 140 may comprise an organic filler or an inorganic filler, such as, SiO2, TiO2, Al2O3, Y2O3, carbon black, sintered diamond powder, asbestos, glass, or a combination thereof.
A method of making a phosphor layer according to one of the present embodiments is described below with reference to
Then, with reference to
In one embodiment, the phosphor material 122′ may be cured during the stamping process to avoid sedimentation of the phosphor particles 1221 in the phosphor material 122 which, in turn, results in a non-uniform distribution of the phosphor particles 1221 in the phosphor material 122′. As discussed above, a uniform distribution of the phosphor particles 1221 in the phosphor material 122′ facilitates the light emitting color of the LED package 100 falling within the expected bin of the CIE coordinate system.
The phosphor material 122′ may be cured by any technique, such as heating the micro-imprint mold 150 to generate heat H transferred to the phosphor material 122 via the micro-imprint mold 150. Alternatively, the micro-imprint mold 150 may comprise a heating element (not illustrated), which provides the heat to the phosphor material 122′.
With reference to
In certain embodiments, the step of removing the first portions 1221′ may include an etching process and a residual particles cleaning process. The etching process may be a reactive ion etching (RIE) process. In some embodiments, the phosphor material 122′ may be etched by a wet etching process or other suitable etching process. In addition, a plasma atmosphere adopted in certain etching processes may be oxygen mixed with trifluoromethane (O2+CHF3) or oxygen mixed with tetrafluoromethane (OH2+CF4). A residual particles cleaning process may comprise washing the phosphor layer 122 with, for example, deionized water, to remove any detached phosphor particles 1221 and any residual etching agent.
With reference to FIG. 1A′, in the etching process the matrix material 1222′ at the outermost extent of the phosphor material 122′ is removed, such that some phosphor particles 1221 become partially exposed. The partially exposed phosphor particles 1221 form the rough outer surface 122s described above. The outer surface 122s may achieve different degrees of roughness by controlling the proportions of plasma gases in the etching process, for example.
As discussed above, the lateral surface 122s2 of the phosphor material 122′ may be inclined or sloped after being etched, but could instead be substantially perpendicular to the upper surface 1211u of the pads 1211. By properly controlling the manufacturing process, or adopting other etching process(es), the lateral surface 122s2 of the phosphor material 122′ can be given any desired orientation.
With reference to
Note that, before conducting the singulation step, the wafer 121′ shown in
A method of packaging an LED chip 121 having a phosphor layer 122 according to one of the present embodiments is described below with reference to
With reference to
In the above embodiment, the phosphor material 122′ (
A method of making a phosphor layer according to another of the present embodiments is described below with reference to
Referring to
The LED chip 121 includes a first, light-emitting surface 121u and a plurality of bonding pads 144 disposed on the first surface 121u. The bonding pads 144 of the LED chip 121 are connected to the substrate's pads 152 via electrical components 170, such as bonding wires. The gel layer 160 covers the first surface 121u, and includes a plurality of openings 164 exposing respective ones of the bonding pads 144. Each opening 164 includes a draft angle α, which results from the removal of a mold during a process of making the package 102, as described below. The draft angle α may be between about 3° and about 20° to facilitate easy removal of the mold while preserving a substantially uniform thickness of the gel layer 160. In certain embodiments, the draft angle α may be between about 5° and about 10°.
Materials for forming the gel layer 160 include, without limitation, transparent resins, such as transparent silicone. In addition, the gel layer 160 may include a plurality of phosphor particles 162. The diameter of the phosphor particles 162 may be between about 5 μm and about 20 μm. The phosphor particles 162 may enhance the LED chip's emitted radiation in a particular frequency band and/or convert at least some of the emitted radiation to another frequency band. Materials for forming the phosphor particles 162 may comprise any of those described above with reference to the phosphor particles 1221, or other materials.
With further reference to
A method of forming the gel layer 160 on the LED chip 121 according to one of the present embodiments is described below with reference to
With reference to
With reference to
Next, with reference to
Next, with reference to
Next, with reference to
Subsequently, with reference to
After filling the dispensing space S, the glue 160a is cured to form the gel layer 160. The curing process may comprise a pre-curing step performed when the temporary substrate 113 is attached to the chip 121 and a post-curing step performed after the temporary substrate 113 is separated from the chip 121. The curing process may be performed by any technique, such as using a heating element (not illustrated) to provide the heat to the glue 160a.
The openings 164 expose respective ones of the bonding pads 144 of the LED chip 121. The draft angle α of each opening 164 is slightly larger than the slant angle β of the side wall of the corresponding bump 114 since the glue 160a contracts slightly during the curing process. At this point, the dispensing method has formed the gel layer 160 on the LED chip 121.
In the present embodiments, since a substantially constant distance D separates the bonding surface 112 of the temporary substrate and the first surface 121u of the LED chip 121, the thickness of the gel layer 160 can be closely controlled. Furthermore, since the Gel layer 160 can be easily confined in the gap between the bonding surface 112 and the first surface 121u, little if any glue material 160a is wasted. In conventional spray-coating methods, a large quantity of glue is wasted, since it is deposited on the substrate in addition to the LED chip.
With reference to
Subsequently, with reference to
While the invention has been described and illustrated with reference to specific embodiments thereof, these descriptions and illustrations do not limit the invention. It should be understood by those skilled in the art that various changes may be made and equivalents may be substituted without departing from the true spirit and scope of the invention as defined by the appended claims. The illustrations may not necessarily be drawn to scale. There may be distinctions between the artistic renditions in the present disclosure and the actual apparatus due to manufacturing processes and tolerances. There may be other embodiments of the present invention which are not specifically illustrated. The specification and the drawings are to be regarded as illustrative rather than restrictive. Modifications may be made to adapt a particular situation, material, composition of matter, method, or process to the objective, spirit and scope of the invention. All such modifications are intended to be within the scope of the claims appended hereto. While the methods disclosed herein have been described with reference to particular operations performed in a particular order, it will be understood that these operations may be combined, sub-divided, or re-ordered to form an equivalent method without departing from the teachings of the invention. Accordingly, unless specifically indicated herein, the order and grouping of the operations are not limitations of the invention.