Patent Application
20220390740
The present application claims priority under 35 U.S.C. § 119 to Japanese Patent Application No. 2021-095861 filed on Jun. 8, 2021. The above application is hereby expressly incorporated by reference, in its entirety, into the present application.
The disclosed technology relates to a light scanning device and an image forming apparatus.
An image forming apparatus that draws an image on a screen or the like by irradiating a mirror device configured with micro electro mechanical systems (MEMS) with light has been known. The mirror device includes a movable mirror that swings about at least one axis.
The mirror device is accommodated in a package in which a vacuum or a negative pressure is created in order to decrease air resistance of the swinging movable mirror. In this case, laser light is incident on the mirror device from an outside through a glass window provided in the package.
In a case where the mirror device is accommodated in the package, a part of the laser light incident on the glass window may be reflected on a surface of the glass window, and this reflected light may be incident on a drawing region of an image for the mirror device as stray light. In this case, in a case where the stray light is incident on the drawing region, an unnecessary bright point occurs in the image.
In S. Gu-Stoppel et al., Advanced Manufacturing, Electronics and Microsystem s: TechConnect Briefs 2016, P.87-90, <https://briefs.techconnect.org/wp-content/volumes/TCB2016v4/pdf/364.pdf5, guiding the reflected light outside the drawing region by incl ining the glass window is suggested because while providing an anti-reflection film on the surface of the glass window is considered in order to suppress the reflected light, it is difficult to completely suppress the reflected light with the anti-reflection film.
However, in a case where the glass window is inclined as disclosed in S. Gu-Stoppel et al., Advanced Manufacturing, Electronics and Microsystems: TechConnect Briefs 2016, P.87-90, <https://briefs.techconnect.org/wp-content/volumes/TCB2016v4/pdf/364.pdf>, a problem arises in that a package size is increased because a thickness of the package is increased. In addition, a problem arises in that a manufacturing cost is increased because of the increase in package size.
An object of the disclosed technology is to provide a light scanning device and an image forming apparatus that can be provided in a small size at a decreased manufacturing cost without causing stray light to be incident on a drawing region.
In order to accomplish the above object, a light scanning device according to an aspect of the present disclosure is a light scanning device comprising a mirror device that includes a movable mirror which swings about at least one axis, and a package that has at least two or more light transmission surfaces not constituting the same plane and accommodates the mirror device, in which out of the two or more light transmission surfaces of the package, one light transmission surface is a light receiving surface for receiving an incidence ray on the movable mirror from an outside, and the other light transmission surface is a light extraction surface for extracting light reflected by the movable mirror to the outside.
It is preferable that a vacuum or a negative pressure is created inside the package.
It is preferable that a signal input terminal for receiving a driving signal for driving the movable mirror from the outside is provided in the package.
It is preferable that an optical element that guides light incident from the light receiving surface to the movable mirror by deflecting the light is provided inside the package.
It is preferable that the light receiving surface and the light extraction surface are configured with two light transmission surfaces that are not parallel.
It is preferable that an imaging apparatus and a signal output terminal for extracting an imaging signal output from the imaging apparatus to the outside are provided inside the package, and the light extraction surface guides a part of the light reflected by the movable mirror to the imaging apparatus by reflecting the part of the light.
An image forming apparatus according to another aspect of the present disclosure is an image forming apparatus comprising a light scanning device including a mirror device that includes a movable mirror which swings about at least one axis, and a package that has at least two or more light transmission surfaces not constituting the same plane and accommodates the mirror device, and a light emitting device that emits light, in which out of the two or more light transmission surfaces of the package, one light transmission surface is a light receiving surface for receiving an incidence ray on the movable mirror from an outside, and the other light transmission surface is a light extraction surface for extracting light reflected by the movable mirror to the outside, and the light emitted from the light emitting device is incident on the movable mirror through the light receiving surface.
According to the disclosed technology, a light scanning device and an image forming apparatus that can be provided in a small size at a decreased manufacturing cost without causing stray light to be incident on a drawing region can be provided.
Exemplary embodiments according to the technique of the present disclosure will be described in detail based on the following figures, wherein:
Hereinafter, embodiments according to the disclosed technology will be described in detail with reference to the drawings. As an example, in each of the following embodiments, a form of applying the disclosed technology to an image forming apparatus that forms an image on a projection surface by scanning laser light using a Lissajous method will be described.
The light emitting device 24 includes a laser driver 25 and a laser light source 27. The laser driver 25 of the present embodiment drives the laser light source 27 based on an intensity modulation signal supplied from the control device 20 and causes laser light for forming an image to be output from the laser light source 27. For example, the laser light source 27 outputs the laser light of three colors of red (R), green (G), and blue (B). The laser light is an example of “light” according to the embodiment of the disclosed technology.
The laser light output from the laser light source 27 is multiplexed by the multiplexing optical system 26. Then, the MEMS mirror 32 in the package 33 is irradiated with the multiplexed laser light through the collimator 28. The laser light condensed in the MEMS mirror 32 is reflected toward a projection surface 34 by the MEMS mirror 32. For example, the projection surface 34 is a screen for projecting the image, or a retina of an eye of a person. That is, the image forming apparatus 10 of the present embodiment is used for a projector, augmented reality (AR) glasses, and the like.
In the present embodiment, the projection surface 34 is not limited to a surface of an actual object such as the screen and includes an imaginary plane in a space.
The MEMS driver 22 drives the MEMS mirror 32 under control of the control device 20. In the MEMS mirror 32, a mirror portion 40 (refer to
The control device 20 of the present embodiment includes a field programmable gate array (FPGA) 20A and a memory 20B. For example, the memory 20B is a volatile memory and stores various information such as an image signal representing the image projected to the projection surface 34. For example, the memory 20B stores the image signal input from an outside of the image forming apparatus 10.
The mirror portion 40 has a reflecting surface 40A on which an incidence ray is reflected. For example, the reflecting surface 40A is formed with a thin metal film of gold (Au), aluminum (Al), silver (Ag), or a silver alloy. For example, a shape of the reflecting surface 40A is a circular shape.
The first support portion 41 is arranged outside the mirror portion 40 at each of positions that face with a second axis a2 interposed therebetween. The first support portions 41 are connected to the mirror portion 40 on a first axis a1 and support the mirror portion 40 in a swingable manner about the first axis a1.
The first movable frame 42 is a rectangular frame surrounding the mirror portion 40 and is connected to the mirror portion 40 through the first support portions 41 on the first axis a1. A piezoelectric element 50 is formed on the first movable frame 42 at each of positions that face with the first axis a1 interposed therebetween. In such a manner, a pair of first actuators 51 are configured by forming two piezoelectric elements 50 on the first movable frame 42.
The pair of first actuators 51 are arranged at positions that face with the first axis a1 interposed therebetween. The first actuators 51 cause the mirror portion 40 to swing about the first axis a1 by applying rotational torque about the first axis a1 to the mirror portion 40.
The second support portion 43 is arranged outside the first movable frame 42 at each of positions that face with the first axis a1 interposed therebetween. The second support portions 43 are connected to the first movable frame 42 on the second axis a2 and support the first movable frame 42 and the mirror portion 40 in a swingable manner about the second axis a2. In the present embodiment, the second support portions 43 are torsion bars that stretch along the second axis a2.
The second movable frame 44 is a rectangular frame surrounding the first movable frame 42 and is connected to the first movable frame 42 through the second support portions 43 on the second axis a2. The piezoelectric element 50 is formed on the second movable frame 44 at each of positions that face with the second axis a2 interposed therebetween. In such a manner, a pair of second actuators 52 are configured by forming two piezoelectric elements 50 on the second movable frame 44.
The pair of second actuators 52 are arranged at positions that face with the second axis a2 interposed therebetween. The second actuators 52 cause the mirror portion 40 to swing about the second axis a2 by applying rotational torque about the second axis a2 to the mirror portion 40 and the first movable frame 42.
The connecting portion 45 is arranged outside the second movable frame 44 at each of positions that face with the first axis a1 interposed therebetween. The connecting portions 45 are connected to the second movable frame 44 on the second axis a2.
The fixed frame 46 is a rectangular frame surrounding the second movable frame 44 and is connected to the second movable frame 44 through the connecting portions 45 on the second axis a2.
In the present embodiment, the first axis a1 and the second axis a2 are orthogonal to each other. In the following description, a direction parallel to the first axis a1 will be referred to as an X direction, a direction parallel to the second axis a2 will be referred to as a Y direction, and a direction orthogonal to the first axis a1 and the second axis a2 will be referred to as a Z direction.
In addition, a vacuum or a negative pressure is created inside the package 33. In such a manner, by creating a vacuum or a negative pressure inside the package 33, an energy loss at a time of the swing of the mirror portion 40 is reduced, and a large deflection angle can be implemented with a low driving voltage. The negative pressure means that a pressure inside the package 33 is lower than a pressure (that is, atmospheric pressure) outside the package 33.
The lid member 36 has four light transmission surfaces 37. The four light transmission surfaces 37 are configured with one upper surface and three side surfaces. In the present embodiment, the light transmission surface 37 as one side surface among the four light transmission surfaces 37 functions as a “light receiving surface” for receiving the incidence ray on the mirror portion 40 from the outside. In addition, the light transmission surface 37 as one upper surface among the four light transmission surfaces 37 functions as a “light extraction surface” for extracting the light reflected by the mirror portion 40 to the outside. That is, in the present embodiment, the light receiving surface and the light extraction surface are configured with two light transmission surfaces 37 that are not parallel.
The laser light L emitted from the light emitting device 24 is transmitted through a light receiving region 38 on the light receiving surface and is incident into the package 33. The laser light L incident into the package 33 is incident on the mirror portion 40 of the MEMS mirror 32. The laser light L reflected by the mirror portion 40 is transmitted through a light extraction region 39 on the light extraction surface and is extracted outside the package 33. The laser light L transmitted through the light extraction region 39 is incident on the projection surface 34 (refer to
A signal input terminal 62 for receiving a driving signal for driving the mirror portion 40 from the outside is provided in the substrate 35. For example, the signal input terminal 62 is electrically connected to the MEMS mirror 32 through a bonding wire 63. The MEMS driver 22 (refer to
As illustrated in
In the light scanning device 30 of the present embodiment, inclining a glass window in order to guide the stray light LS outside the drawing region as in the related art is not necessary. Thus, a thickness of the package 33 is not increased, and a package size can be decreased. Thus, according to the disclosed technology, the light scanning device 30 that can be provided in a small size at a decreased manufacturing cost without causing the stray light to be incident on the drawing region is implemented.
In the embodiment, while the entire package 33 is formed of a light transmission material such as glass, the package 33 may be partially formed of a light shielding member. For example, a part other than the light receiving region 38 and the light extraction region 39 in the package 33 may be formed of a light shielding member.
Next, a second embodiment will be described. While the laser light is received into the package 33 from one side surface of the lid member 36 in the first embodiment, the laser light is received into the package 33 from the substrate 35 in the second embodiment.
An optical element 70 is provided on the inner surface side of the lid member 36 at a position on which the laser light L is incident. The optical element 70 guides the laser light L incident from the light receiving region 38 to the mirror portion 40 of the MEMS mirror 32 by deflecting the laser light L. In the present embodiment, the optical element 70 is a reflecting film formed by sputtering or a vapor deposition method. The optical element 70 deflects the laser light L by specular reflection so that the laser light L is guided to the mirror portion 40.
In the present embodiment, the MEMS mirror 32 is directly fixed to the substrate 35 without using the support member 60 (refer to
As described above, in the second embodiment, the laser light L is received from a rear surface side of the package 33. Thus, the stray light LS caused by partial reflection of the laser light L on the light receiving surface is not incident on the drawing region. Accordingly, even in the second embodiment, since inclining the glass window in order to guide the stray light LS outside the drawing region as in the related art is not necessary, the light scanning device 30 that can be provided in a small size at a decreased manufacturing cost is implemented. In addition, since it is not necessary to incline the MEMS mirror 32 with respect to the substrate 35, the thickness of the package 33 can be further decreased.
The optical element 70 is not limited to a reflecting film and may be an optical element such as a grating or a hologram. A grating or a hologram can emit the laser light L at an emission angle different from an incidence angle. Thus, using an optical element such as a grating or a hologram as the optical element 70 improves a degree of design freedom of a position and the like for arranging the optical element 70.
Next, a third embodiment will be described. In the third embodiment, an imaging apparatus is provided inside the package 33. The imaging apparatus is used for correcting a light emission timing of the laser light L by the light emitting device 24.
The imaging apparatus 72 generates a captured image IP by imaging the laser light L reflected on the light extraction region 39 and outputs the generated captured image IP to the control device 20 (refer to
Image data DT that represents the image to be formed is input into the image input portion 80 from the outside. Hereinafter, the image corresponding to the image data DT input into the image input portion 80 may be referred to as an input image. As an example, in the present embodiment, the image data DT of colors represented by RGB signals is input into the image input portion 80. The image data DT input into the image input portion 80 is output to the information generation portion 81. The image data DT input into the image input portion 80 is not limited to the present embodiment and may be data corresponding to the image to be formed. For example, the image data DT may be binarized data that represents whether or not to output the laser light L. In addition, for example, the image data DT may be data that represents multiple values of an output amount.
The information generation portion 81 generates intensity information SI that represents a correspondence relationship between a scanning position of the laser light L by the MEMS mirror 32 and a signal intensity of the input image. In a case where the input image is a color image, the signal intensity represents an intensity of each of the RGB signals. The information storage portion 82 stores the intensity information SI generated by the information generation portion 81.
The MEMS driver 22 outputs first driving signals V1A and V1B illustrated in
The first zero cross signal ZC1 is a pulsed signal that represents points at which the first driving signals V1A and V1B become zero. Signals output to the first reference signal output portion 83A from the MEMS driver 22 are not limited to zero cross signals and may be signals having the same periods as the first driving signals V1A and V1B.
The MEMS driver 22 outputs second driving signals V2A and V2B illustrated in
The second zero cross signal ZC2 is a pulsed signal that represents points at which the second driving signals V2A and V2B become zero. Signals output to the second reference signal output portion 83B from the MEMS driver 22 are not limited to zero cross signals and may be signals having the same periods as the second driving signals V2A and V2B.
A frequency (hereinafter, referred to as a first driving frequency) of the first driving signals V1A and V1B and a frequency (hereinafter, referred to as a second driving frequency) of the second driving signals V2A and V2B have different frequency ratios. A frequency ratio of the first driving frequency and the second driving frequency is decided based on a shape of a Lissajous curve of light scanning performed by the MEMS mirror 32.
The first reference signal output portion 83A outputs a first reference signal PS1 to the light emission controller 84 by estimating a point in time when a deflection angle (hereinafter, referred to as a first deflection angle) θ1 of the mirror portion 40 about the first axis a1 becomes equal to a first reference angle. In the present embodiment, the first reference angle is set to 0°. The first reference signal output portion 83A generates the first reference signal PS1 by estimating the point in time when the first deflection angle θ1 becomes equal to the first reference angle, based on the first driving signals V1A and V1B.
Specifically, as illustrated in
The second reference signal output portion 83B outputs a second reference signal PS2 to the light emission controller 84 by estimating a point in time when a deflection angle (hereinafter, referred to as a second deflection angle) 02 of the mirror portion 40 about the second axis a2 becomes equal to a second reference angle. In the present embodiment, the second reference angle is set to 0°. The second reference signal output portion 83B generates the second reference signal PS2 by estimating the point in time when the second deflection angle θ2 becomes equal to the second reference angle, based on the second driving signals V2A and V2B.
Specifically, as illustrated in
A relationship among the delay time period D1, the temperature, and the humidity and a relationship among the delay time period D2, the temperature, and the humidity are recorded in advance in the LUT 86A. For example, these relationships are decided based on a past history.
The light emission controller 84 causes the light emitting device 24 to emit the laser light L based on the first reference signal PS1 and the second reference signal PS2. In a drawing mode in which the image based on the image data DT is drawn on the projection surface 34, the light emission controller 84 reads out the intensity information SI from the information storage portion 82 and causes the light emitting device 24 to emit the laser light L having an intensity decided based on the first reference signal PS1 and the second reference signal PS2 for each constant time period (for example, for each clock period).
In addition, in the present embodiment, a calibration mode for correcting the timings of the first reference signal PS1 and the second reference signal PS2 output by the first reference signal output portion 83A and the second reference signal output portion 83B, respectively, is performed. In the calibration mode, the light emission controller 84 causes the light emitting device 24 to emit the laser light L in accordance with the timing at which the first reference signal PS1 is output from the first reference signal output portion 83A, and the timing at which the second reference signal PS2 is output from the second reference signal output portion 83B. That is, in the calibration mode, the light emission controller 84 causes the light emitting device 24 to emit the laser light L at the point in time when the first deflection angle θ1 is estimated to become equal to the first reference angle (in the present embodiment, 0°), and the point in time when the second deflection angle θ2 is estimated to become equal to the second reference angle (in the present embodiment, 0°).
In the calibration mode, the imaging apparatus 72 images the laser light L reflected on the light extraction region 39 out of the laser light L that is emitted from the light emitting device 24 and is reflected by the mirror portion 40. The imaging apparatus 72 outputs the captured image IP generated by the imaging to the correction portion 85. A pattern drawn on the projection surface 34 is imaged in the captured image IP.
The correction portion 85 corrects the timings of the first reference signal PS1 and the second reference signal PS2 output by the first reference signal output portion 83A and the second reference signal output portion 83B, respectively, based on a shift amount of the pattern captured in the captured image IP from a predetermined shape.
In a case where the frequency ratio of the first driving frequency and the second driving frequency is set to make the Lissajous curve 90 more precise, the bright points P draw straight line patterns along the first reference line L1 and the second reference line L2.
The straight line L1A is a line that is irradiated with the laser light L on an advancing path of Lissajous scanning. The straight line L1B is a line that is irradiated with the laser light L on a returning path of the Lissajous scanning. In addition, the straight line L2A is a line that is irradiated with the laser light L on the advancing path of the Lissajous scanning. The straight line L2B is a line that is irradiated with the laser light L on the returning path of the Lissajous scanning. The advancing path refers to a path along which the first deflection angle θ1 is increased for the Y direction, and a path along which the second deflection angle θ2 is increased for the X direction. The returning path refers to a path along which the first deflection angle θ1 is decreased for the Y direction, and a path along which the second deflection angle θ2 is decreased for the X direction.
In such a manner, in a case where a shift occurs between the swing of the mirror portion 40 and the timings of the first reference signal PS1 and the second reference signal PS2, the first reference line L1 is separated into the straight line L1A and the straight line LIB, and the second reference line L2 is separated into the straight line L2A and the straight line L2B.
In a case where the frequency ratio of the first driving frequency and the second driving frequency is set to make the Lissajous curve 90 more precise, the bright points P draw straight line patterns along the straight line L1A, the straight line L1B, the straight line L2A, and the straight line L2B.
The correction amount calculation portion 92 derives a shift amount ΔY between the straight line L1A and the straight line L1B in the Y direction and a shift amount ΔX between the straight line L2A and the straight line L2B in the X direction based on the captured image IP. In addition, the correction amount calculation portion 92 derives a correction amount δ1 of the timing of the first reference signal PS1 for ΔX=0 and a correction amount δ2 of the timing of the second reference signal PS2 for ΔY=0 and outputs the derived correction amounts δ1 and δ2 to the signal correction portion 93. For example, the correction amount calculation portion 92 derives the correction amounts δ1 and δ2 based on a relationship between the shift amount ΔX and the correction amount δ1 and a relationship between the shift amount ΔY and the correction amount δ2 stored in advance. Each of the relationship between the shift amount ΔX and the correction amount δ1 and the relationship between the shift amount ΔY and the correction amount δ2 is an almost proportional relationship.
The correction amount calculation portion 92 derives the shift amounts ΔX and ΔY based on the captured image IP obtained in a state where the timings of the first reference signal PS1 and the second reference signal PS2 are not corrected (that is, a state of δ1=0 and δ2=0), and derives the correction amounts δ1 and δ2 based on the derived shift amounts ΔX and ΔY.
The signal correction portion 93 corrects the timing of the first reference signal PS1 output from the first reference signal output portion 83A based on the correction amount δ1 input from the correction amount calculation portion 92, and corrects the timing of the second reference signal PS2 output from the second reference signal output portion 83B based on the correction amount δ2 input from the correction amount calculation portion 92.
The signal correction portion 93 may be provided inside each of the first reference signal output portion 83A and the second reference signal output portion 83B. In this case, the first reference signal output portion 83A corrects the timing of the first reference signal PS1 based on the correction amount M input from the correction amount calculation portion 92. Similarly, the second reference signal output portion 83B corrects the timing of the second reference signal PS2 based on the correction amount δ2 input from the correction amount calculation portion 92.
For example, the calibration mode is executed for a predetermined period when the image forming apparatus 10 is started. After the calibration mode is finished, the first reference signal output portion 83A and the second reference signal output portion 83B continue the timing correction based on the correction amounts δ1 and δ2 in the drawing mode. The calibration mode may be periodically executed during execution of the drawing mode.
As described above, the image forming apparatus 10 according to the present embodiment can suppress distortion of the image drawn on the projection surface 34 by correcting the timings of the first reference signal PS1 and the second reference signal PS2 based on the imaging information acquired by the imaging apparatus 72.
In each of the embodiments, while the MEMS mirror 32 of two axes is used as the light scanning device, a MEMS mirror of one axis may be used as the light scanning device. Accordingly, the disclosed technology can also be applied to an image forming apparatus comprising a light scanning device of one axis in which a movable mirror swings about a first axis.
In the third embodiment, for example, the following various processors can be used as a hardware structure of a processing unit that executes various processing of the image input portion 80, the information generation portion 81, the information storage portion 82, the first reference signal output portion 83A, the second reference signal output portion 83B, the light emission controller 84, the correction portion 85, and the table holding portion 86. The various processors include, in addition to a central processing unit (CPU) that is a general-purpose processor functioning as various processing units by executing software (program), a programmable logic device (PLD) such as the FPGA that is a processor having a circuit configuration changeable after manufacturing, a dedicated electric circuit such as an application specific integrated circuit (ASIC) that is a processor having a circuit configuration dedicatedly designed to execute specific processing, and the like.
One processing unit may be configured with one of the various processors or may be configured with a combination of two or more processors of the same type or different types (for example, a combination of a plurality of FPGAs and/or a combination of a CPU and an FPGA). In addition, a plurality of processing units may be configured with one processor.
Examples of the plurality of processing units configured with one processor include, first, as represented by a computer such as a client and a server, a form in which one processor is configured with a combination of one or more CPUs and software, and the processor functions as the plurality of processing units. Second, as represented by a system on chip (SoC) or the like, a form of using a processor that implements functions of the entire system including the plurality of processing units by one integrated circuit (IC) chip is included. In such a manner, various processing units are configured using one or more of the various processors as a hardware structure.
Furthermore, more specifically, an electric circuit (circuitry) in which circuit elements such as semiconductor elements are combined can be used as the hardware structure of the various processors.
All documents, patent applications, and technical standards disclosed in the present specification are incorporated in the present specification by reference to the same extent as in a case where each of the documents, patent applications, technical standards are specifically and individually indicated to be incorporated by reference.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2021-095861 | Jun 2021 | JP | national |
