Number | Date | Country | Kind |
---|---|---|---|
53/76457 | Jun 1978 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3670198 | Lehovec | Jun 1972 | |
3943218 | Dietze | Mar 1976 | |
4141764 | Authier | Feb 1979 |
Entry |
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"Electrical and Optical Properties of Amorphous Silicon Carbide, Silicon Nitride and Germanium Carbide Prepared by Glow Discharge", Philosophical Magazine, vol. 35, pp. 1-16 (1977). |
M. Le Contellec, et al., "Effects of the Si/C and the H Content of Amorph. S. C. Thin Films Prepared by Reactive Sputtering", Thin Solid Films, 58 (1979) pp. 407-411. |