Number | Date | Country | Kind |
---|---|---|---|
4-006617 | Jan 1992 | JPX | |
4-130581 | May 1992 | JPX | |
4-343525 | Dec 1992 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4398152 | Leveson | Aug 1983 | |
4862490 | Karnezos et al. | Aug 1989 | |
5031199 | Cole, III et al. | Jul 1991 | |
5134640 | Hirokawa et al. | Jul 1992 |
Number | Date | Country |
---|---|---|
3711293 | Oct 1988 | DEX |
4117639 | Dec 1991 | DEX |
63-64253 | Mar 1988 | JPX |
63-273100 | Nov 1988 | JPX |
1-9400 | Jan 1989 | JPX |
1-276550 | Nov 1989 | JPX |
1-272399 | Nov 1990 | JPX |
2-272400 | Nov 1990 | JPX |
3-128499 | May 1991 | JPX |
3-251800 | Nov 1991 | JPX |
Entry |
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Rosser, Feder, Adams, Celliers & Speer "Nondestructive Single-shot Soft X-ray Lithography . . . " Applied Optics, Oct. 1, 1987. |