Claims
- 1. A linear encoder for use in a machine for manufacturing workpieces having a coefficient of thermal expansion approximately between 2.5.times.10.sup.-6 K.sup.-1 and 3.5.times.10.sup.-6 K.sup.-1, the machine having two movable relative to each other objects, said linear encoder being designed for measuring a relative position of the two objects, and said linear encoder comprising a scale having a coefficient of thermal expansion approximately between 2.5.times.10.sup.-6 K.sup.-1 and 3.5.times.10.sup.-6 K.sup.-1, selected to substantially correspond to the coefficient of thermal expansion of the workpieces to be manufactured on the machine, said scale being attachable to one of the two objects, and a device for scanning said scale and attachable to another of the two objects.
- 2. A linear encoder as set forth in claim 1, wherein the scale is formed of one of monocrystaline silicium, glass, and glass-ceramics.
- 3. A linear encoder as set forth in claim 1, wherein the scale comprises a unit formed of a scale carrier and a scale carrier element.
- 4. A linear encoder as set forth in claim 3, wherein the scale carrier is attached to the scale carrier element with a highly elastic glue.
- 5. A linear encoder as set forth in claim 3, wherein the scale carrier is fixedly attached to the scale carrier element at one point.
- 6. A linear encoder as set forth in claim 3, further comprising a tensioning device for connecting one end of the scale carrier to the scale carrier element.
Priority Claims (1)
Number |
Date |
Country |
Kind |
43 20 728.6 |
Jun 1993 |
DEX |
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Parent Case Info
This is a continuation of application Ser. No. 08/264,538, filed Mar. 23, 1994 now abandoned.
US Referenced Citations (8)
Foreign Referenced Citations (3)
Number |
Date |
Country |
0118607 |
Sep 1984 |
EPX |
0202630 |
Nov 1986 |
EPX |
1176382 |
Aug 1964 |
DEX |
Continuations (1)
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Number |
Date |
Country |
Parent |
264538 |
Mar 1994 |
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