The present invention relates to an optical scanning device; more particularly, to a device in which scanning is performed by reciprocating linear or continuous rotary movement of a ray-deflecting element.
Optical scanning is well-known in which an image produced by an optical system is moved across an image plane typically including a photodetector. Optical scanning has many civilian as well as military uses. Present optical scanners include galvanometer-based devices. In the galvanometer based devices, the scanning movement is produced by a beam-deflecting element such as a flat mirror, which is angularly deflected, oscillating about an axis perpendicular to the optical axis by a galvanometer-type drive (e.g. moving-coil, moving-magnet drive). In these scanners, also known as galvo-based scanners, the oscillating mirror usually constitutes a pupil of the optical scanning system. Consequently there is substantial beam excursion across the system aperture, causing optical aberrations such as coma, distortion and field curvature. Therefore, these optical systems usually are substantially larger than diameters of scanned beams and are complex in order reduce the different optical aberrations. To compensate for these aberrations one or more of the following is required: an additional optical element, such as an F-θ (theta) objective lens or a flattening lens; an axial movement of imaging lens for field curvature compensation and non-linear scanning. An F-theta lens satisfies the condition that the image height equals the product of the focal length of the objective and the scanning angle θ (theta). A flattening lens is usually located close to the scanned plane and corrects field curvature relative to the required flat field. These optical systems typically require several aspherical surfaces (increasing cost) and provide at best no more than average resolution. A second known disadvantage of the galvo-based scanners is the relatively large mass, especially for large beam diameters, and, consequently, large inertia of the oscillating system, which, especially with wide beams, strictly limits the scanning frequency. Owing to the fact that the scanning mirror mass is directly proportional to the cube of aperture, effective scanning can be performed only at small apertures. Therefore, additional optical systems (telescopes for infinite conjugate and lens systems for finite conjugate) are usually utilized for transforming large apertures of incident beams into narrow parallel beams for purposes of angular scanning.
Rotating reflecting polygons are usually utilized for continuous light beam scanning. The use of polygons has an advantage of high angular scanning velocity. However, as in galvanometer-based scanning, there is the substantial beam excursion across the system aperture, since the rotating mirror usually constitutes a pupil of the optical scanning system. Therefore, these optical systems usually are substantially larger than diameters of scanned beams, even more than galvanometric-based scanning systems, and complicated for purposes of different optical aberrations compensation (e.g. spherical aberration, coma, distortion, field curvature aberration). Additional drawbacks of polygon-based scanning systems are low scanning efficiency and pupil's wandering, both due to polygon geometry.
U.S. Pat. No. 6,429,423 discloses a device for optical scanning, including a Porro prism or equivalent intersecting mirrors whereby an incident beam of light undergoes two reflections, and an optical system i.e. an objective capable of forming an image of an object. An optical axis, passing through a Porro prism, is rotated by 180° and exits in the opposite direction offset from its entrance point. The two reflections cause two ninety degree folds of the optical axis so that the incident and exit optical axes are parallel (or collinear) on the same side of the Porro prism. An additional optical element is required to unfold at least one of the incident or exit optical axes. Furthermore in order to separate the entrance and exit beams a relatively long optical path is required inside the Porro prism, hence a Porro prism does not support a large numerical aperture.
There is thus a need for, and it would be highly advantageous, to have an optical scanner which overcomes the disadvantages of prior art optical scanners and specifically an optical scanner in which the optical path is small allowing high numerical aperture with small optical elements and without additional optical elements required to separate the incident and exit beams.
The term “pre-objective” scanning system as used herein refers to an optical system in which a scanning element is placed before the focusing objective lens e.g. F-theta scan lens A flat focal plane is preferably obtained at the focus position of the objective lens. The pre-objective scanning system is advantageous in terms of scanning speed, while both scanning field size and spot size are limited heavily by the lens design.
The term “post-objective” scanning system as used herein refers to an optical system in which a scanning element is placed after the focusing lens. The post-objective optical scanner employs a focusing lens typically having a simple design; however the point of focus, in general, is on a curved surface. Accordingly, the curvature of image must be corrected when the post-objective optical scanner is employed.
The term “telecentric” or “telecentricity” as used herein is a property of certain multi-element lens designs in which the chief rays for all points across the object or image are collimated. For example, telecentricity occurs when the chief rays are parallel to the optical axis, in object and/or image space. Another way of describing telecentricity is to state that the entrance pupil and/or exit pupil of the system is located at infinity.
The term “numerical aperture” referring to a lens or an optical system as used herein is n·sin θ, where n is index of refraction of the medium and θ is the half-angle of the maximum cone of light that can enter or exit the lens. In general, θ is the angle of the real marginal ray in the system. The term “high numerical aperture” as used herein refers to a numerical aperture greater than 0.4 or greater than 0.5.
The term “roof prism” as used herein refers to a prism with two reflecting faces, the two reflecting faces mutually perpendicular or intersecting at ninety degrees, wherein the incident beam to the roof prism and the exit beam from the roof prism are not parallel or, if parallel, the entrance beam and exit beam are on different sides of the roof prism or the incident beam to the roof prism and the exit beam from the roof prism are angularly separated by a substantial angle. A Porro prism used in U.S. Pat. No. 6,429,423 is not a “roof prism” as used herein, because the incident and exit beams to a Porro prism are parallel (rotated by 180 degrees) and are on the same side of the Porro prism.
The term “mirror roof structure” as used herein refers to either a “roof prism” or to two reflecting mirror faces disposed at a ninety degree angle, so that a light ray incident on one of the mirrors undergoes reflection from both mirrors and the incident ray and the exit ray are angularly separated by a substantial angle.
The term “angularly separated” is used herein refers to entrance and exit beams to a prism or other optical system. An entrance beam and an exit beam are “angularly separated” when the incident beam and the exit beam are not parallel or if parallel the entrance beam and exit beam are on different sides of the roof prism. The term “parallel” as used herein includes “anti-parallel” or 180 degree rotation. Angularly separated by a “substantial angle” refers to an exit beam angularly separated from the exit beam by ±30 to ±90 degrees. The term “dimension” of a roof prism as used herein is substantially equal to the length of the physical path within the roof prism. Although there are no incident and exit surfaces in “mirror roof structure”, the “dimension” of a mirror roof structure including two mirror faces disposed at ninety degrees is similar to the physical path (not optical path) of light through its equivalent “roof prism”. “Roof prisms” and mirror roof structures with the same “dimension” have different equivalent optical paths owing to the different indices of refraction.
The term “plane of symmetry” or “plane of bilateral symmetry” as used herein referring to a mirror roof structure or roof prism is a plane of bilateral symmetry including the line of intersection of the two reflecting faces forming the “roof” of the prism or the mirror surfaces of mirror roof structure. The “plane of symmetry” is equivalent to or coplanar with the plane formed by the incident and exiting optical axes.
The term “multi-dimensional scanning” as used herein includes linear scanning in more than one dimension, particularly linear scanning over area and volume. The term “lateral” as in “lateral direction” of scanning as used herein refers to scanning in a plane (such as in x and y Cartesian directions) and the term “longitudinal” as in “longitudinal” direction refers to scanning (such as in the z Cartesian direction) perpendicular to the plane of lateral scanning.
The terms “incident” and “entrance” are used herein interchangeably when referring to a beam entering an optical system.
According to the present invention there is provided a device for linear scanning including a mirror roof structure. The mirror roof structure includes a roof prism with at least two reflecting surfaces or at least two mirror surfaces. The reflecting surfaces of the roof prism or the two mirror surfaces are mutually perpendicular reflecting surfaces intersecting in a line of intersection. A scanning mechanism moves the mirror roof structure in a direction perpendicular to a plane of bilateral symmetry of the mirror roof structure. The line of intersection is included in the plane of bilateral symmetry; and an incident beam entering the mirror roof structure and an exit beam exiting the mirror roof structure are angularly separated by a substantial angle. Preferably, the scanning mechanism generates periodic motion or rotational motion of the mirror roof structure with a radius of motion greater than a dimension of the mirror roof structure. The mirror roof structure is preferably one of multiple mirror roof structures mounted on a disk and the scanning mechanism rotates the disk about the center of the disk. The radius of the disk is much greater than a dimension of the mirror roof structure. Preferably, the roof prism is an Amici roof prism or one of Abbe Type A, Abbe Type B, Leman, Penta, Schmidt, Frankford Arsenal prisms, Delta, Pechan, and Abbe-Koenig. Preferably, a second mirror roof structure is oriented perpendicularly to the mirror roof structure and the plane of bilateral symmetry of the second mirror roof structure is perpendicular to the plane of bilateral symmetry of the first mirror roof structure. A second scanning mechanism moves the second mirror roof structure in a direction perpendicular to the plane of bilateral symmetry of the second mirror roof structure, and motion of the first mirror roof structure and the motion of the second mirror roof structure are perpendicular. An objective lens preferably of high numerical aperture images a source, and the mirror roof structure is located between the objective lens and an image. Preferably, a relay lens relays the image to a second image and the objective lens or the relay lens is telecentric. Preferably, an intermediate image is located between first and second roof prisms. Preferably, the numerical aperture is greater than 0.3 and the mirror roof structure has a dimension of less than ten millimeters. Preferably, the objective lens is part of an optical system which includes a z-scan mechanism which is used to modify focusing depth of the optical system. Preferably, the z-scan mechanism moves at least one lens of the optical system along an incident optical axis. Preferably, a transparent optical medium is depth scanned in the z direction by using the z-scan mechanism. When the transparent optical medium causes significant spherical aberration the optical system is optimized to cancel the spherical aberration for the entire range of transparent optical medium depth.
According to the present invention there is provided a method for linear scanning. A roof mirror structure is provided and located between an object and an image plane. The mirror roof structure includes either a roof prism including two reflective surfaces or at least two mirror surfaces. The reflective surfaces or mirror surfaces are mutually perpendicular and intersecting in a line of intersection. The mirror roof structure is scanned in a lateral direction substantially perpendicular to a plane of bilateral symmetry of the mirror roof structure. The plane of bilateral symmetry includes the line of intersection. The scanning causes a point in the image plane to move substantially in the lateral direction.
A second mirror roof structure oriented perpendicularly to said mirror roof structure is optionally provided and oriented so the plane of bilateral symmetry of the second mirror roof structure is substantially perpendicular to the plane of bilateral symmetry of the (first) mirror roof structure. The second mirror roof structure is scanned in a direction substantially perpendicular to the second plane of bilateral symmetry of the second mirror roof structure. Motion of the (first) mirror roof structure and motion of the second mirror roof structure are substantially perpendicular.
According to the present invention there is provided an item scanned and/or a scan report, according the methods disclosed herein.
The invention is herein described, by way of example only, with reference to the accompanying drawings, wherein like reference numbers are used to refer to like elements in all the drawings unless otherwise indicated:
a illustrates the path direction of the light rays reflected by the Amici prism;
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the like elements throughout. The embodiments are described below to explain the present invention by referring to the figures.
It should be noted that although the drawings herein explicitly illustrate imaging of a light source as an object onto one or more image planes, that the present invention includes embodiments with the direction of the optical rays reversed. Such equivalence results in generating new pre-objective and post-objective embodiments of the present invention. It should further be noted that although the drawings herein as well as the description herein explicitly illustrate and describe embodiments of the present invention using a roof prism. One skilled in the art of optical design would be able to replace the roof prism with a mirror roof structure of two mirrors disposed at ninety degrees. Optical design using the mirror surfaces is substantially equivalent to an optical design using the roof prism and may be achieved by replacing the roof surfaces of the roof prism by metallic mirrors and setting the index of refraction of the optical material of the roof prism at 1.00.
Before explaining embodiments of the invention in detail, it is to be understood that the invention is not limited in its application to the details of design and the arrangement of the components set forth in the following description or illustrated in the drawings. The invention is capable of other embodiments or of being practiced or carried out in various ways. Also, it is to be understood that the phraseology and terminology employed herein is for the purpose of description and should not be regarded as limiting.
By way of introduction, principal intentions of the present invention are to:
(1) provide in pre-objective linear scanning systems, scanning of the rays from the object in diverging rays is performed by a mirror roof structure (e.g. Amici prism or two mirror surfaces disposed at ninety degrees, perpendicular to the optical axis direction, in close vicinity to the object or to the element for producing light;
(2) provide in post-objective linear scanning systems, scanning of the scene image in converging rays is performed by a mirror roof structure (e.g. Amici type prism or two mirror surfaces disposed at ninety degrees), perpendicular to the optical axis direction, in close vicinity to the image plane or to the light-detecting element for detecting the incident beam of light;
(3) provide, in reciprocating beam-deflecting element, a telecentric objective system. Pre-objective linear scanning performs telecentric ray-tracing in the pre-objective space, and post-objective linear scanning systems perform telecentric ray-tracing in the post-objective space;
(4) provide, in a continuously rotating beam-deflecting element, a substantially telecentric objective system. Pre-objective linear scanning performs telecentric ray-tracing in the pre-objective space, post-objective linear scanning systems performs telecentric ray-tracing in the post-objective space.
Due to a relatively short equivalent optical path through the mirror roof structure, objectives with high numerical aperture are provided, allowing the creation of a high resolution system.
It should be noted that while the discussion herein is directed to scanning, using an Amici roof prism, the principles of the present invention may be adapted for use with other roof prisms. Most prisms have reflective surfaces, which could be transformed into a “roof” and used according to the teachings of the present invention. Lateral translation of the “roof” (in a direction perpendicular to a plane of symmetry including the roof intersection) shifts the rays on twice distance, exactly as in using an Amici roof prism. Prisms which may be used with a “roof” in different embodiments of the present invention include (but not limited to: Abbe Type A, Abbe Type B, Leman, Penta, Schmidt, Frankford Arsenal prisms, Delta, Pechan, and Abbe-Koenig.
Further the mechanism used to periodically move the scanning mirror roof structure may be of any such mechanisms known in the art including mechanical, piezoelectric or electromagnetic mechanisms.
The present invention in different embodiments is applicable (but not limited) to: three dimensional microscopy, laser beams deflection and positioning in three dimensions, industrial laser material processing, laser TV, medical and biomedical technology including surgery, optical characters recognition, microlithography, optical switching, printing and inspection, “laser show” and entertainment business. Different embodiments of the present invention may be applied to oscillatory “galvo”-type linear scanning or continuous rotating scanning. Similar different embodiments of the present invention may be applied to both pre-objective and post-objective scanning systems.
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An additional embodiment 80 of the present invention is illustrated in
Two discrete positions of lens 143 and 143′ are shown in
Possible application of embodiment 80 are reading and writing of information in three dimensions. In embodiments of the present invention when F-number is low (or numerical aperture is high) of the scanning optical system, then the depth of focus inside transparent medium 147 is incredibly short. For example, if the optical system has F-number of 1, equivalent depth of focus for air (for λ/4 wave front deformation) is +/−2.44λ, meaning for visible light depth of focus is about ±1.2 micron. So, layers of information could be written in depth intervals of few microns. The information could be written by means modulation of amplitude, phase, spectrum, etc.
With respect to the above description then, it is to be realized that the optimum dimensional relationships for the parts of the invention, to include variations in size, materials, shape, form, function and manner of operation, assembly and use, are deemed readily apparent and obvious to one skilled in the art, and all equivalent relationships to those illustrated in the drawings and described in the specification are intended to be encompassed by the present invention.
Therefore, the foregoing is considered as illustrative only of the principles of the invention. Further, since numerous modifications and changes will readily occur to those skilled in the art, it is not desired to limit the invention to the exact construction and operation shown and described, and accordingly, all suitable modifications and equivalents may be resorted to, falling within the scope of the invention.
While the invention has been described with respect to a limited number of embodiments, it will be appreciated that many variations, modifications and other applications of the invention may be made.
The present application is a continuation-in-part application of co-pending U.S. patent application Ser. No. 11/444,352 filed Jun. 1, 2006, now allowed. The disclosure of that application is hereby expressly incorporated by reference in its entirety and is hereby expressly made a portion of this application.
Number | Date | Country | |
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Parent | 11444352 | Jun 2006 | US |
Child | 12240332 | US |