The present invention relates to a liquid atomizing device and a liquid atomizing method for atomizing liquid.
As conventional atomizing technique, there are a gas-liquid mix type (two-fluid type) technique, an ultrasound type technique, an extra-high voltage type (100 MPa to 300 MPa) technique, and a steaming type technique. According to a general two-fluid nozzle, gas and liquid are injected in the same injection direction, and liquid is miniaturized by a shear effect generated by accompanying flow of gas and liquid. Meanwhile, in fields of evaporation coating on a semiconductor wafer, medical equipment (e.g., suction machine), a liquid spray for cosmetic purposes, moisturizing liquid spray, and the like, it is required to atomize liquid with low energy.
As one example of a gas-liquid mix type two-fluid nozzle, an atomizing nozzle device for producing minute particle mist is known (patent document 1). This atomizing nozzle device includes a first nozzle portion and a second nozzle portion, atomized liquid from the first nozzle portion and atomized liquid from the second nozzle portion are made to collide with each other, and minute particle mist can be formed. However, since the atomizing nozzle device includes two two-fluid nozzle portions, the atomizing nozzle device becomes expensive and this is not suitable for miniaturization.
Patent Document 1: JP-A-2002-126587
It is an object of the present invention to provide a liquid atomization device capable of atomizing liquid with low gas energy without substantially applying pressure to the liquid using a new principle which is different from the micronizing principle of the above-described conventional technique.
A liquid atomizing device of the present invention includes a nozzle body including:
a first gas spray portion and a second gas spray portion for spraying two gas flows;
According to this configuration, it is possible to suck liquid and to atomize the liquid only with low gas energy source (e.g., air pump) without requiring an energy source (e.g., liquid pump) for atomizing liquid. That is, if gas is sent to the nozzle body, it is possible to suck liquid by a siphon effect and to form mist of low speed spray. If gas pressure (flow rate of gas) is increased more, a suction force of liquid becomes higher, a mist amount (spray amount of generated mist) increases, and micronizing performance can be enhanced.
First, a principle of the present invention will be described with reference to
Pressure Pa (MPa) of gas flow is in a range from 0.005 to 0.80, for example. A range of gas pressure Pa (MPa) of low energy is preferably 0.01 to 0.15, and more preferably 0.03 to 0.1. According to the present invention, it is possible to atomize liquid only with such low gas energy. The present invention can be used also when pressure of gas flow is for example in a range from 0.1 to 0.8 (MPa), preferably 0.15 to 0.7, more preferably 0.2 to 0.6, and even more preferably 0.25 to 0.5.
It is preferable that pressures of two gas flows are set equal to each other or substantially equal to each other, and it is preferable that flow rates of two gas flows are also set equal to each other or substantially equal to each other. A cross-sectional shape of gas flow sprayed from a gas spray portion is not especially limited, and examples of the cross-sectional shape include a circular shape, an elliptic shape, a rectangular shape, and a polygonal shape. The cross-sectional shape of the gas flow depends on a cross section of an orifice of the gas spray portion.
A cross-sectional shape of a liquid passage is not especially limited.
A spray direction of mist 62 is limited by the spray outlet 30 which surrounds the mist 62. The spray outlet 30 may integrally be formed together with members (gas spray portions 1 and 2) for forming a gas orifice, or may independently be formed.
As one embodiment of the invention, an intersection angle between a spray direction axis of the first gas spray portion and a spray direction axis of the second gas spray portion is in a range from 90° to 180°. An angle range of intersection between spray direction axes of the first gas spray portion 1 and the second gas spray portion 2 corresponds to a collision angle formed between gas sprayed from the first gas spray portion 1 and gas sprayed from the second gas spray portion 2.
As one embodiment of the invention, the liquid atomization device further includes at least one more passage possessed by the liquid passage. According to this configuration, it is possible to suck liquid from two passages by a siphon effect, and since a suction amount of liquid can be doubled, a spray amount can be enhanced. If three passages are provided, the suction amount can be tripled. On the other hand, if three or four passages are formed, a size of the nozzle body increases. If two or more passages are provided, a spray cross section of a spray pattern can be made circular having a spray angle of 20° to 30°.
As one embodiment of the invention, the liquid atomization device further includes a cover body for micronizing mist sprayed from the spray outlet while guiding the mist along a spray axial direction of the spray outlet,
the cover body including:
wherein the liquid accommodating portion is in communication with the liquid passage, and the liquid flows into the liquid passage.
According to this configuration, mist sprayed form the spray outlet of the nozzle body can further be micronized by the cover body, and the mist can be sprayed to outside of the device at low speed. Since it is possible to spray mist at low speed, it is possible to reduce cases where mist adheres to a wall surface of an interior of a cover portion and the mist becomes water drops. Since it is possible to configure such that liquid in the liquid accommodating portion flows into the liquid passage of the nozzle body, liquid can be set in the cover body. When mist is liquefied in the cover body, since liquid flows into the liquid accommodating portion through a wall surface of the interior of the cover body, it is also easy to reuse the liquid. Further, in order to reduce an adhesion amount of mist to wall surface in the cover body, it is preferable that the spray angle y of mist is set to 20° to 40°.
As one embodiment of the present invention, it is possible to employ a structure in which liquid flows from an exterior liquid tank into the liquid passage through a pipe or the like.
As one embodiment of the invention, the liquid atomization device further comprising a baffle portion provided in the cover body for guiding the mist along a spray axial direction of the spray outlet. Mist is guided into the baffle, and micronizing performance is enhanced.
As one embodiment of the invention, the baffle portion includes a long-circular, elliptic or rectangular guide port, a hollow internal space, and an opening outlet in which at least two openings are formed. Mist having elliptic or long-circular spray cross section (γ=20° to 40°) enters the guide port of the baffle having a cross-sectional shape suitable for the spray cross-sectional shape and then, the mist goes out from the opening outlet having the two openings through an interior space. The mist is further micronized by this baffle.
As one embodiment of the invention, the cover body includes:
According to this, it is possible to configure a small-sized cover body with a small number of simple parts which can be produced on a large scale. In this embodiment, the base portion, the first cover portion and the second cover portion may be configured using a single member, or they may be formed as independent members and they may be connected to each other. The first cover portion and the second cover portion may be configured using a single member, or they may be formed as independent members and they may be connected to each other. The second cover portion and the third cover portion may be configured using a single member, or they may be formed as independent members and they may be connected to each other. The base portion, the first cover portion, the second cover portion and the third cover portion may be configured using a single member, or they may be formed as independent members and they may be connected to each other.
As one embodiment of the invention, the outlet inclines with respect to a spray axial direction of the spray outlet at a predetermined angle. The “predetermined angle” is 30° to 150°, for example. For example,
As one embodiment of the invention, a gas passage through which the gas flows flow is formed in the base portion. The gas passage is connected to a gas pressure source (e.g., air pump).
The gas is not especially limited, and examples of the gas include air, clean air, nitrogen, inert gas, fuel mixture air, and oxygen. The gas can appropriately be set in accordance with intended use.
The liquid is not especially limited, but liquid having low viscosity is preferable. Examples of the liquid include water, ionized water, moisturizing liquid, beauty water, cosmetic liquid such as cosmetic water, medical liquid, sterilized liquid, medical liquid such as sterilization liquid, paint, fuel oil, coating agent, solvent, and resin.
A liquid atomization device 1 having a nozzle body and a cover body of this embodiment will be described with reference to the drawings.
The cover body 50 has a function for guiding mist sprayed from the spray outlet 30 along a spray axial direction of the spray outlet 30, and for micronizing the mist. The cover body 50 includes a base portion 51 connected to a lower portion of the nozzle body 10 and having the liquid accommodating portion 58, a first cover portion 52 connected to the base portion 51, a second cover portion 53 connected to the first cover portion 52, a suction cylinder 54 connected to the second cover portion 53 and having suction portions 541, and a third cover portion 55 connected to the suction cylinder 54 and formed with an outlet 56. The first cover portion 52, the suction cylinder 54 and the third cover portion 55 (which correspond to mist passages) upwardly guide mist sprayed from the nozzle body 10. A shape of the cover body 50 is not limited to that shown in
According to embodiment 2 shown in
Spray characteristics were evaluated using the liquid atomization devices having the configurations shown in embodiments 1 and 2. A diameter of a cross section of the liquid orifice 111 was φ0.28, a diameter of a cross section of the depression 111a was φ0.5 mm, a cross section of the groove 132 had a V-shape, a width of the liquid orifice 111 was 0.18 mm, and a cut depth of the liquid orifice 111 was 0.3 mm. A cross section of gas flow is smaller than that of liquid. Air was used as gas, and water was used as liquid. A spray angle sprayed from the spray outlet of the nozzle body was set to 30°. In embodiments 1 and 2, the baffle portion was not used, and an air amount Qa (NL/min) of gas spray, an effective fog amount Qf (spray amount of mist from cover outlet), and an average particle diameter (SMD) of mist sprayed form the outlet when air pressure Pa of gas spray was changed to 0.05, 0.07 (MPa) were evaluated. Results of evaluations are shown in Table 1. The average particle diameter (SMD) was measured by a laser diffraction measuring device. A measuring position was separated from the outlet by 20 mm.
In examples 3 and 4, the baffle portion 70 was used, and an air amount Qa (NL/min) of gas spray, an effective fog amount Qf (spray amount of mist from cover outlet) and an average particle diameter (SMD) of mist sprayed form the outlet when air pressure Pa of gas spray was changed to 0.045, 0.07 (MPa) were evaluated. Results of evaluations are shown in Table 2.
In Examples 1 and 2, primary fog having an average particle diameter (SMD) of 10 to 20 μm was generated from the nozzle body by low speed spray, the fog past through the cover body, mist was micronized, and secondary fog having an average particle diameter (SMD) of 5 to 13 μm could easily be obtained. Since the primary fog is sprayed at low speed, cases where partial mist adhered to an inner wall surface of the cover body and becomes water drops are reduced. As the results of the Examples 1 and 2, it could be confirmed that liquid could be sucked with low gas energy (low gas pressure) and could be atomized. The higher the gas pressure (gas flow rate) became, the higher the suction force of liquid became, and an atomization amount (fog amount) was also increased, and the micronizing performance was enhanced.
In Examples 3 and 4, the effective fog amount Qf became greater than those of Examples 1 and 2 due to an effect of micronization of the baffle portion, and the average particle diameter (SMD) also became smaller.
A liquid atomization device of embodiment 3 is configured as a nozzle device.
The fixing method of the various members is not limited to fixation by means of screws, and other connecting means can be used. Seal members (e.g., O-rings) (not shown) may appropriately be inserted into gaps between the members.
In embodiment 3, the cap portion 81 and the gas-liquid orifice portion 83 form the first and second gas orifices 835a and 835b, but the first and second gas orifices may be formed of a single member. A cross-sectional shape of each of the first and second orifices is not limited to the rectangular shape, and the cross sectional shape may be other polygonal shape or a circular shape. The collision angle a between the gas flows is not limited to 110°, and this angle may be set in a range from 90° to 180°. An inner wall surface of the cap portion 81 may be formed into a recessed groove shape, and this inner wall surface may be covered with an outer wall surface of the gas-liquid orifice portion 83.
Spray characteristics were evaluated using the liquid atomization device (nozzle device) shown in embodiment 3 (Example 5). A diameter of a cross section of each of the two liquid orifices 832 and 833 was φ0.15, a diameter of a cross section of the depression 834 was φ0.81 mm, a cross section of each of the gas orifices 835a and 835b was rectangular, a width thereof was 0.2 mm, and a slit depth thereof was 0.2 mm. Air was used as gas, and water was used as liquid. In Example 5, an air amount Qa (NL/min) of gas spray, a spray amount Qw (spray amount of mist from spray outlet), and an average particle diameter (SMD) of mist sprayed form the spray outlet when air pressure Pa of gas spray was set to 0.05 (MPa) were evaluated. Results of evaluations are shown in Table 3. The average particle diameter (SMD) was measured by a laser diffraction measuring device. A measuring position was separated from the spray outlet by 20 mm.
Mist produced in Example 5 was low speed spray flow, a spray angle was 25° and a cross section of a spray pattern was circular. Although the average particle diameter (SMD) was relatively high, since a suction amount became large, the spray amount Qf increased.
A liquid atomization device of embodiment 4 is configured as a nozzle device.
The fixing method of the various members is not limited to fixation by means of screws, and other connecting means can be used. Seal members (e.g., 0-rings) (not shown) may appropriately be inserted into gaps between the members.
In embodiment 4, the cap portion 81 and the gas-liquid orifice portion 83 form the first and second gas orifices 835a and 835b, but the first and second gas orifices may be formed of a single member. A cross-sectional shape of each of the first and second orifices is not limited to the rectangular shape, and the cross-sectional shape may be other polygonal shape or a circular shape. The collision angle a between the gas flows is not limited to 110°, and this angle may be set in a range from 90° to 180°. An inner wall surface of the cap portion 81 may be formed into a recessed groove shape, and this inner wall surface may be covered with an outer wall surface of the gas-liquid orifice 83.
Spray characteristics were evaluated using the liquid atomization device (nozzle device) shown in embodiment 4 (Example 6). A diameter of a cross section of the liquid orifice 831 was φ0.2, a diameter of a cross section of the depression 834 was φ0.73 mm, a cross section of each of the gas orifices 835a and 835b was rectangular, a width thereof was 0.15 mm, and a slit depth thereof was 0.3 mm. Air was used as gas, and water was used as liquid. In Example 6, an air amount Qa (NL/min) of gas spray, a spray amount Qw (spray amount of mist from spray outlet), a spray angle y, and an average particle diameter (SMD) of mist sprayed form the spray outlet when air pressure Pa of gas spray was set to 0.05 (MPa) were evaluated. Results of evaluations are shown in Table 4. The average particle diameter (SMD) was measured by a laser diffraction measuring device. A measuring position was separated from the spray outlet by 20 mm.
Mist produced in Example 6 was low speed spray flow, a spray angle y was 80° and a cross section of a spray pattern was elliptic.
In a configuration of the liquid atomization device (nozzle device) of embodiment 4, a diameter of a cross section of the liquid orifice 831 was φ0.4, a diameter of a cross section of the depression 834 on the liquid orifice side was φ0.73 mm, a cross section of each of the gas orifices 835a and 835b was V-shape, a width thereof was 0.3 mm, and a slit depth thereof was 0.2 mm. A case using only this nozzle device, a case where the cover body 50 shown in
Mist produced in Example 7 was low speed spray flow, a spray angle y was 80° and a cross section of a spray pattern was elliptic.
Number | Date | Country | Kind |
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2011-277336 | Dec 2011 | JP | national |
Filing Document | Filing Date | Country | Kind | 371c Date |
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PCT/JP2012/082420 | 12/13/2012 | WO | 00 | 6/16/2014 |