Patent Application
20090295858
1. Technical Field
The present invention relates to a droplet discharge device including a discharge head having a discharge nozzle for discharging a droplet, and a droplet discharge method by the droplet discharge device.
2. Related Art
As a technique of forming a functional film such as a color filter of a color liquid crystal device, the following technique of forming a functional film by using a droplet discharge device is known. The droplet discharge device is provided with a droplet discharge head which discharges a droplet as droplets. In the technique, a droplet containing a material of the functional film is discharged as droplets so as to land on an arbitrary position on a substrate which serves as a processing object. Thus the droplet is arranged on the arbitrary position. Then, in the technique, the droplet arranged is dried so as to form the functional film. The droplet discharge head of the droplet discharge device used in such film formation can selectively discharge a minute droplet from its discharge nozzle and allow the droplet to land with a high positional accuracy so as to be able to form a film having a precise planar shape and a precise film thickness.
In order to form a functional film with higher functionality, it is required to realize a functional film having more precise planar shape and more precise film thickness. In order to form a functional film having a uniform film thickness, it is required to maintain a constant discharge amount of a functional liquid discharged from a discharge nozzle. The discharge amount means a size (volume) of a droplet discharged from the droplet discharge head or an amount discharged in a unit time from the discharge head which performs continuous discharge. A weight of a functional liquid corresponding to the discharge amount is referred to as a discharge weight. Discharge of a droplet toward a processing object is referred to as drawing discharge, and an approximate continuous discharge step including the drawing discharge is referred to as a drawing discharge step.
It is known that a viscosity of a droplet varies depending on a temperature. In a droplet discharge device, the variation of viscosity of the droplet varies flow resistance of the droplet, so that there is a possibility that the discharge amount varies. That is, there has been such a problem that the discharge amount from the droplet discharge device varies due to the variation of the temperature of the discharge device.
JP-A-2004-209429 as an example discloses a droplet discharge system that realizes a uniform discharge amount. The system realizes the uniform discharge amount such that a droplet discharge device is disposed in a chamber so as to maintain a temperature of the atmosphere approximately constant, and at the same time, a discharge weight is measured so as to adjust the discharge amount depending on the measurement result.
However, various driving sources for driving the discharge device of the droplet discharge device release heat as a heat source in many cases, so that the sources highly likely vary the temperature of the discharge device. Further, there is a possibility that a member that generates no heat such as a processing object and a droplet which is to be supplied to the discharged device absorbs heat, possibly varying the temperature of the discharge device. Even though the temperature of the atmosphere is maintained approximately constant as the droplet discharge system disclosed in the above example, there is a possibility that temperatures of the discharge device and the droplet vary during the drawing discharge step in which the processing object and the droplet are supplied and the discharge device is driven. The discharge amount may vary during the drawing discharge step due to the variation of the temperature during the drawing discharge step. In the same manner, the temperatures of the discharge device and the droplet may different between in the drawing discharge step and in the measurement of the discharge weight. Due to the difference, there is a possibility that the discharge amount obtained by measuring the discharge weight is not always a precise discharge amount in the drawing discharge step.
The invention is proposed in order to solve the above-mentioned problems and can be achieved as the following aspects.
A droplet discharge device according to a first aspect of the invention, includes: a discharge unit discharging a droplet and being moved relatively to a discharged object, on which the droplet is discharged, so as to form a predetermined pattern on the discharged object; a discharge amount measurement unit measuring a discharge amount of the droplet discharged from the discharge unit; a temperature acquisition unit acquiring a temperature in the formation of the predetermined pattern, of the discharge unit; a temperature adjustment unit adjusting the temperature of the discharge unit; and a discharge amount adjustment unit adjusting the discharge amount of the discharge unit. In the device, the temperature adjustment unit adjusts a temperature of the discharge unit in the measurement of the discharge amount by the discharge amount measurement unit to the temperature in the formation of the predetermined pattern.
According to the droplet discharge device of the first aspect, the temperature adjustment unit adjusts the temperature of the discharge unit in the measurement of the discharge amount by the discharge amount measurement unit to the temperature, which is acquired by the temperature acquisition unit, in the formation of the predetermined pattern. The discharge amount that is an amount of the droplet discharged per unit time from the discharge unit or a volume of a discharged droplet is influenced by the temperature of the discharge unit. The discharge amount measurement unit measures the discharge amount in such state that the temperature of the discharge unit is the temperature in the formation of the predetermined pattern. Therefore, when the discharge amount is measured, the discharge amount in the formation of the predetermined pattern is highly likely duplicated in a precise manner. Thus, the discharge amount in the formation of the predetermined pattern can be more precisely measured, compared to a case without performing the temperature adjustment of the discharge unit by the temperature adjustment unit. By adjusting the discharge amount by the discharge amount adjustment unit depending on the discharge amount precisely measured, the discharge amount difference, which is caused by a temperature difference of the discharge unit between in the formation of the predetermined pattern and in the measurement of the discharge amount, is suppressed, being able to realize the formation of the predetermined pattern with precise discharge amount.
As the temperature of the discharge unit, the temperature at a periphery of a hole, from which the droplet is discharged, of the discharge unit, the temperature of a pressure chamber that applies discharge pressure to the droplet, the temperature of a flowing path of the droplet, or the temperature of an outer wall of the pressure chamber or the flowing path may be employed arbitrarily. In any of these parts, the temperature in the formation of the predetermined pattern by the discharge unit is acquired and the temperature in the measurement of the discharge amount is adjusted to the temperature in the formation of the predetermined pattern, which is acquired by the temperature acquisition unit.
A droplet discharge device according to a second aspect of the invention includes: a discharge unit discharging a droplet and being moved relatively to a discharged object, on which the droplet is discharged, so as to form a predetermined pattern on the discharged object; a discharge amount measurement unit measuring a discharge amount of the droplet discharged from the discharge unit; a temperature acquisition unit acquiring a temperature in the formation of the predetermined pattern, of the droplet; a temperature adjustment unit adjusting the temperature of the droplet; and a discharge amount adjustment unit adjusting the discharge amount of the discharge unit. In the device, the temperature adjustment unit adjusts a temperature of the droplet in the measurement of the discharge amount by the discharge amount measurement unit to the temperature in the formation of the predetermined pattern.
According to the droplet discharge device of the second aspect, the temperature adjustment unit adjusts the temperature of the droplet in the measurement of the discharge amount by the discharge amount measurement unit to the temperature in the formation of the predetermined pattern, which is acquired by the temperature acquisition unit. The discharge amount that is an amount of the droplet discharged per unit time from the discharge unit or a volume of a discharged droplet is influenced by the temperature of the droplet. The discharge amount measurement unit measures the discharge amount in such state that the temperature of the droplet is the temperature in the formation of the predetermined pattern. Therefore, when the discharge amount is measured, the discharge amount in the formation of the predetermined pattern is highly likely duplicated in a precise manner. Thus, the discharge amount in the formation of the predetermined pattern can be more precisely measured, compared to a case without performing the temperature adjustment of the droplet by the temperature adjustment unit. By adjusting the discharge amount by the discharge amount adjustment unit depending on the discharge amount precisely measured, the discharge amount difference, which is caused by a temperature difference of the droplet between in the formation of the predetermined pattern and in the measurement of the discharge amount, is suppressed, being able to realize the formation of the predetermined pattern with precise discharge amount.
As the temperature of the droplet, the temperature of the droplet in a hole, from which the droplet is discharged, of the discharge unit, the temperature of the droplet in a pressure chamber that applies discharge pressure to the droplet, the temperature of the droplet in a flowing path of the droplet, or the temperature of the droplet immediately before supplied to the discharge unit may be employed arbitrarily. In any of these parts, the temperature of the droplet in the formation of the predetermined pattern by the discharge unit is acquired and the temperature of the droplet at the starting time of the formation of the predetermined pattern is adjusted to the temperature in the formation of the predetermined pattern, which is acquired by the temperature acquisition unit.
In the droplet discharge device according to the above aspect, it is preferable that the discharge unit include a plurality of nozzle groups each having one or more discharge nozzles; the discharge amount measurement unit measure the discharge amount of the droplet at each of the nozzle groups; the temperature acquisition unit acquire a temperature of one of the discharge unit and the droplet in the formation of the predetermined pattern at each of the nozzle groups; the temperature adjustment unit adjust the temperature of one of the discharge unit and the droplet at each of the nozzle groups; and the discharge amount adjustment unit adjust a discharge amount of each of the nozzle groups.
According to the device, the discharge amount difference, which is caused by a temperature difference of the droplet between in the formation of the predetermined pattern and in the measurement of the discharge amount, is suppressed, being able to realize the formation of the predetermined pattern with precise discharge amount. Therefore, even if temperatures of the discharge nozzles of the droplet discharge device are different from each other, precise measurement and precise adjustment of the discharge amount can be performed, compared to a case of measuring and adjusting the discharge amount for all of the discharge nozzles at once.
In the droplet discharge device according to the above aspect, it is preferable that the nozzle groups have a common path for supplying the droplet to each of the discharge nozzles of the discharge groups.
According to the device, the measurement and the adjustment of the discharge amount can be performed to the discharge nozzles all at once which have the common path for supplying the droplet. It is highly possible that the state of the droplet to be supplied is nearly same in the discharge nozzles having the common path for supplying the droplet, so that the peripheries of respective discharge nozzles highly likely have small temperature difference from each other, or the droplet at the peripheries of the discharge nozzles highly likely has small temperature difference at each of the peripheries of the nozzles. Thus the measurement and the adjustment of the discharge amount are performed with respect to the discharge nozzles, having small temperature difference from each other, all at once, of the nozzle group. Therefore, the measurement and adjustment of the discharge amount can be efficiently performed without degrading the accuracy of the measurement and the adjustment of the discharge amount, compared to a case of performing the measurement and the adjustment of the discharge amount individually.
In the droplet discharge device according to the above aspect, it is preferable that the nozzle groups be composed of discharge nozzles provided to one discharge head having the one or more discharge nozzles.
According to the device, the measurement and the adjustment of the discharge amount can be performed for the discharge nozzles of one discharge head all at once. One discharge head is commonly a unit for being independently moved or discharge-controlled. Therefore, the peripheries of respective discharge nozzles of the discharge head highly likely have small temperature difference from each other or the droplet at the peripheries of the discharge nozzles highly likely has small temperature difference at each of the peripheries of the nozzles. Thus the measurement and the adjustment of the discharge amount are performed with respect to the discharge nozzles, having small temperature difference from each other, all at once, of the nozzle group. Therefore, the measurement and adjustment of the discharge amount can be efficiently performed without degrading the accuracy of the measurement and the adjustment of the discharge amount, compared to a case of performing the measurement and the adjustment of the discharge amount individually.
In the droplet discharge device according to the above aspect, it is preferable that a single kind of the droplet be supplied to each of the discharge nozzles of the discharge groups.
According to the device, the measurement and the adjustment of the discharge amount can be performed for all of the discharge nozzles at once to which the single kind of the droplet is supplied. It is highly likely that the characteristic of the droplet is originally same and the characteristic and the state of the droplet are common in the respective discharge nozzles to which the single kind of droplet is supplied, the peripheries of respective discharge nozzles highly likely have small temperature difference from each other or the droplet at the peripheries of the discharge nozzles highly likely has small temperature difference at each of the peripheries of the nozzles. Thus the measurement and the adjustment of the discharge amount are performed with respect to the discharge nozzles, having small temperature difference from each other, all at once, of the nozzle group. Therefore, the measurement and adjustment of the discharge amount can be efficiently performed without degrading the accuracy of the measurement and the adjustment of the discharge amount, compared to a case of performing the measurement and the adjustment of the discharge amount individually.
In the droplet discharge device according to the above aspect, it is preferable that the temperature adjustment unit adjust one of the temperature of the discharge unit and the temperature of the droplet to the temperature in the formation of the predetermined pattern by warm-up driving the discharge unit.
According to the device, due to the warm-up drive of the discharge unit, the temperature of the discharge unit or the droplet can be set to be the temperature in the formation of the predetermined pattern, without separately providing a temperature adjustment device. Here, the driving state in which the discharge unit is warm-up driven is a driving state including a case where the discharge unit is driven so as to discharge the droplet in a normal state and a case where the discharge unit is driven to an extent that the droplet is not discharged.
In the droplet discharge device according to the above aspect, it is preferable that the temperature acquisition unit perform the warm-up drive under two or more kinds of warm-up drive conditions of the warm-up drive so as to estimate a temperature in the formation of the predetermined pattern.
According to the device, the warm-up drive is performed under the different kinds of warm-up drive conditions. In a case where the warm-up drive is performed under the different kinds of warm-up drive conditions, the state of the temperature change occurred from the warm-up drive differs among the warm-up drive conditions. By comparing the different kinds of temperature change states, the temperature in the formation of the predetermined pattern can be estimated.
The droplet discharge device according to the above aspect further includes: a warm-up condition setting unit obtaining a warm-up condition of the warm-up drive. In the device, it is preferable that the warm-up condition setting unit perform the warm-up drive under two or more different kinds of warm-up drive conditions so as to estimate the warm-up drive condition under which the temperature of one of the discharge unit and the droplet becomes the temperature in the formation of the predetermined pattern by performing the warm-up drive.
According to the device, the warm-up drive is performed under the different kinds of warm-up drive conditions. In a case where the warm-up drive is performed under the different kinds of warm-up drive conditions, the state of the temperature change occurred from the warm-up drive differs among the warm-up drive conditions. The temperature in the formation of the predetermined pattern can be estimated by comparing the different kinds of temperature change states, so that the driving condition under which the temperature in the formation of the predetermined pattern can be realized can be estimated.
In the droplet discharge device according to the above aspect, it is preferable that the temperature adjustment unit further include a first temperature measurement unit measuring the temperature of one of the discharge unit and the droplet, and adjust the temperature of one of the discharge device and the droplet to the temperature in the formation of the predetermined pattern by allowing the discharge unit to perform the warm-up drive depending on a measured result of the first temperature measurement unit.
According to the device, the discharge unit is allowed to perform the warm-up drive depending on the measured result of the temperature measurement unit so as to adjust the temperature of the discharge unit or the droplet. Therefore, an actual temperature, which is measured by the temperature measurement unit, of the discharge unit or the droplet can be securely adjusted to the temperature in the formation of the predetermined pattern.
In the droplet discharge device according to the above aspect, it is preferable that the temperature adjustment unit be one of a heating unit and a cooling unit, and adjust the temperature of one of the discharge unit and the droplet to the temperature in the formation of the predetermined pattern by heating or cooling one of the discharge unit and the droplet.
According to the device, the temperature of the discharge unit or the droplet can be securely changed to be adjusted to the temperature in the formation of the predetermined pattern by heating or cooling the discharge unit or the droplet by the heating unit or the cooling unit.
The droplet discharge device according to the above aspect, it is preferable that the temperature acquisition unit adjust the temperature of one of the discharge unit and the droplet at a starting time of the formation of the predetermined pattern to two or more different kinds of temperatures, and estimate the temperature in the formation of the predetermined pattern based on a temperature change in the formation of the predetermined pattern in each case of the different kinds of temperatures.
According to the device, the formation of the predetermined pattern is started at different temperatures of the discharge unit or the droplet. The difference of the temperatures at the starting time of the formation of the predetermined pattern brings different behaviors of the temperatures of the discharge unit or the droplet in the formation of the predetermined pattern. By comparing different kinds of temperature changes, the temperature in the formation of the predetermined pattern can be estimated.
In the droplet discharge device according to the above aspect, it is preferable that the temperature adjustment unit further include a second temperature measurement unit measuring the temperature of one of the discharge unit and the droplet, and one of the heating unit and the cooling unit heat or cool one of the discharge unit and the droplet depending on a measured result of the second temperature measurement unit so as to adjust the temperature of one of the discharge device and the droplet to the temperature in the formation of the predetermined pattern.
According to the device, the heating unit or the cooling unit heats or cools the discharge unit or the droplet depending on the measured result of the temperature measurement unit. Therefore, an actual temperature, which is measured by the temperature measurement unit, of the discharge unit or the droplet can be securely adjusted to the temperature in the formation of the predetermined pattern.
A droplet discharge method, according to a third aspect of the invention, by which a discharge unit discharging a droplet is relatively moved to a discharged object on which the droplet is discharged, so as to form a predetermined pattern on the discharged object includes: a) acquiring a temperature of the discharge unit in the formation of the predetermined pattern; b) adjusting the temperature of the discharge unit; c) measuring a discharge amount of the droplet discharged from the discharge unit; and d) adjusting the discharge amount of the discharge unit. In the method, in the step b), a temperature of the discharge unit in performing the step c) is adjusted to the temperature in the formation of the predetermined pattern.
According to the droplet discharge method of the third aspect, the temperature of the discharge unit in the step c) is adjusted to the temperature, which is acquired in the step a), in the formation of the predetermined pattern, in the step b). The discharge amount that is an amount of the droplet discharged per unit time from the discharge unit or a volume of a discharged droplet is influenced by the temperature of the discharge unit. The discharge amount is measured in the step c) in such state that the temperature of the discharge unit is the temperature in the formation of the predetermined pattern. Therefore, when the discharge amount is measured in the step c), the discharge amount in the formation of the predetermined pattern is highly likely duplicated in a precise manner. Accordingly, the discharge amount in the formation of the predetermined pattern can be more precisely measured, compared to a case without performing the temperature adjustment of the discharge unit. By adjusting the discharge amount in the step d) depending on the discharge amount precisely measured, the discharge amount difference, which is caused by a temperature difference of the discharge unit between in the formation of the predetermined pattern and in the measurement of the discharge amount, is suppressed, being able to realize the formation of the predetermined pattern with precise discharge amount.
As the temperature of the discharge unit, the temperature at a periphery of a hole, from which the droplet is discharged, of the discharge unit, the temperature of a pressure chamber that applies discharge pressure to the droplet, the temperature of a flowing path of the droplet, or the temperature of an outer wall of the pressure chamber or the flowing path may be employed arbitrarily. In any of these parts, the temperature in the formation of the predetermined pattern by the discharge unit is acquired and the temperature in the measurement of the discharge amount is adjusted to the temperature in the formation of the predetermined pattern, which is acquired by the temperature acquisition unit.
A droplet discharge method, according to a fourth aspect of the invention, by which a discharge unit discharging a droplet is relatively moved to a discharged object on which the droplet is discharged, so as to form a predetermined pattern on the discharged object includes: e) acquiring a temperature of the droplet in the formation of the predetermined pattern; f) adjusting the temperature of the droplet; g) measuring a discharge amount of the droplet discharged from the discharge unit; and h) adjusting the discharge amount of the discharge unit. In the method, in the step f), a temperature of the discharge unit in performing the step g) is adjusted to the temperature in the formation of the predetermined pattern.
According to the droplet discharge method of the fourth aspect, the temperature of the droplet in the step g) is adjusted to the temperature, which is acquired in the step e), in the formation of the predetermined pattern, in the step f). The discharge amount that is an amount of the droplet discharged per unit time from the discharge unit or a volume of a discharged droplet is influenced by the temperature of the droplet which is discharged. The discharge amount is measured in the step g) in such state that the temperature of the droplet is the temperature in the formation of the predetermined pattern. Therefore, when the discharge amount is measured in the step g), the discharge amount in the formation of the predetermined pattern is highly likely duplicated in a precise manner. Accordingly, the discharge amount in the formation of the predetermined pattern can be more precisely measured, compared to a case without performing the temperature adjustment of the discharge unit. By adjusting the discharge amount in the step h) depending on the discharge amount precisely measured, the discharge amount difference, which is caused by a temperature difference of the discharge unit between in the formation of the predetermined pattern and in the measurement of the discharge amount, is suppressed, being able to realize the formation of the predetermined pattern with precise discharge amount.
As the temperature of the droplet, the temperature of the droplet in a hole, from which the droplet is discharged, of the discharge unit, the temperature of the droplet in a pressure chamber that applies discharge pressure to the droplet, the temperature of the droplet in a flowing path of the droplet, or the temperature of the droplet immediately before supplied to the discharge unit may be employed arbitrarily. In any of these parts, the temperature of the droplet in the formation of the predetermined pattern by the discharge unit is acquired and the temperature of the droplet at the starting time of the formation of the predetermined pattern is adjusted to the temperature in the formation of the predetermined pattern, which is acquired by the temperature acquisition unit.
In the droplet discharge method according to the above aspect, it is preferable that the discharge unit include a plurality of nozzle groups each having one or more discharge nozzles; a temperature of one of the discharge unit and the droplet in the formation of the predetermined pattern be acquired at each of the nozzle groups in step a); the temperature of one of the discharge unit and the droplet be adjusted at each of the nozzle groups in the step b); the discharge amount of the droplet be measured at each of the nozzle groups in the step c); and a discharge amount in each of the nozzle groups is adjusted in the step d).
According to the method, the discharge amount difference, which is caused by a temperature difference of the droplet between in the formation of the predetermined pattern and in the measurement of the discharge amount, is suppressed in the step c), being able to realize the formation of the predetermined pattern with precise discharge amount. Therefore, even if temperatures of the discharge nozzles of the discharge unit are different from each other, precise measurement and precise adjustment of the discharge amount can be performed, compared to a case of measuring and adjusting the discharge amount for all of the discharge nozzles at once.
In the droplet discharge method according to the above aspect, it is preferable that the nozzle groups have a common path for supplying the droplet to each of the discharge nozzles of the discharge groups.
According to the method, the measurement and the adjustment of the discharge amount can be performed to the discharge nozzles all at once which have the common path for supplying the droplet. It is highly possible that the state of the droplet to be supplied is nearly same in the discharge nozzles having the common path for supplying the droplet, so that the peripheries of respective discharge nozzles highly likely have small temperature difference from each other, or the droplet at the peripheries of the discharge nozzles highly likely has small temperature difference at each of the peripheries of the nozzles. Thus the measurement and the adjustment of the discharge amount are performed with respect to the discharge nozzles, having small temperature difference from each other, all at once, of the nozzle group. Therefore, the measurement and adjustment of the discharge amount can be efficiently performed without degrading the accuracy of the measurement and the adjustment of the discharge amount, compared to a case of performing the measurement and the adjustment of the discharge amount individually.
In the droplet discharge method according to the above aspect, it is preferable that the discharge nozzles of the nozzle groups be discharge nozzles provided to one discharge head having one or more discharge nozzles.
According to the method, the measurement and the adjustment of the discharge amount can be performed at the discharge nozzles of one discharge head all at once. One discharge head is commonly a unit for being independently moved or discharge-controlled. Therefore, the peripheries of respective discharge nozzles of the discharge head highly likely have small temperature difference from each other or the droplet at the peripheries of the discharge nozzles highly likely has small temperature difference at each of the peripheries of the nozzles. Thus the measurement and the adjustment of the discharge amount are performed with respect to the discharge nozzles, having small temperature difference from each other, all at once, of the nozzle group. Therefore, the measurement and adjustment of the discharge amount can be efficiently performed without degrading the accuracy of the measurement and the adjustment of the discharge amount, compared to a case of performing the measurement and the adjustment of the discharge amount individually.
In the droplet discharge method according to the above aspect, it is preferable that a single kind of the droplet be supplied to each of the discharge nozzles of the discharge groups.
According to the method, the measurement and the adjustment of the discharge amount can be performed for all of the discharge nozzles at once to which the single kind of the droplet is supplied. It is highly likely that the characteristic of the droplet is originally same and the characteristic and the state of the droplet are common in the respective discharge nozzles to which the single kind of droplet is supplied, so that the peripheries of respective discharge nozzles highly likely have small temperature difference from each other or the droplet at the peripheries of the discharge nozzles highly likely has small temperature difference at each of the peripheries of the nozzles. Thus the measurement and the adjustment of the discharge amount are performed with respect to the discharge nozzles, having small temperature difference from each other, all at once, of the nozzle group. Therefore, the measurement and adjustment of the discharge amount can be efficiently performed without degrading the accuracy of the measurement and the adjustment of the discharge amount, compared to a case of performing the measurement and the adjustment of the discharge amount individually.
In the droplet discharge method according to the above aspect, it is preferable the temperature of one of the discharge unit and the droplet be adjusted to the temperature in the formation of the predetermined pattern by warm-up driving the discharge unit, in the step b).
According to the method, due to the warm-up drive of the discharge unit, the temperature of the discharge unit or the droplet can be set to be the temperature in the formation of the predetermined pattern, without separately providing a temperature adjustment device. Here, the driving state in which the discharge unit is warm-up driven is a driving state including a case where the discharge unit is driven so as to discharge the droplet in a normal state and a case where the discharge unit is driven to an extent that the droplet is not discharged.
In the droplet discharge method according to the above aspect, it is preferable that the step a) include t) forming the predetermined pattern after the warm-up drive is performed under a first warm-up drive condition, and u) forming the predetermined pattern after the warm-up drive is performed under a second warm-up drive condition that is different from the first warm-up drive condition, and the temperature in the formation of the predetermined pattern be estimated depending on a temperature change of one of the discharge unit and the droplet in the formation of the predetermined pattern in each of the step t) and the step u).
According to the method, the steps t) and u) are performed after the warm-up drive is performed under different kinds of warm-up drive conditions. In a case where the warm-up drive is performed under the different kinds of warm-up drive conditions, the state of the temperature change occurred from the warm-up drive and a reached temperature differ among the warm-up drive conditions. Therefore, the temperature at the start of the formation of the predetermined pattern differs among the warm-up drive conditions. In the formation of the predetermined pattern with the different starting temperatures, the temperature change states are different from each other. By comparing the different kinds of temperature change states, the temperature in the formation of the predetermined pattern can be estimated.
The droplet discharge method according to the above aspect, further includes: i) setting a warm-up drive condition of the warm-up drive. It is preferable that the step i) include v) forming the predetermined pattern after the warm-up drive is performed under a first warm-up drive condition; w) forming the predetermined pattern after the warm-up drive is performed under a second warm-up drive condition that is different from the first warm-up drive condition; and x) estimating the warm-up drive condition under which the temperature of one of the discharge unit and the droplet becomes the temperature in the formation of the predetermined pattern, based on a temperature change of one of the discharge unit and the droplet in the formation of the predetermined pattern in each of the step v) and the step w).
According to the method, the steps v) and w) are performed after the warm-up drive is performed under different kinds of warm-up drive conditions. In a case where the warm-up drive is performed under the different kinds of warm-up drive conditions, the state of the temperature change occurred from the warm-up drive and a reached temperature differ among the warm-up drive conditions. Therefore, the temperatures at the start of the steps v) and w) differ between the warm-up drive conditions. In the steps v) and w) with the different starting temperatures, the temperature change states are different from each other. The temperature in the formation of the predetermined pattern can be estimated by comparing the different kinds of temperature change states, so that the driving condition under which the temperature in the formation of the predetermined pattern can be realized can be estimated.
In the droplet discharge method according to the above aspect, it is preferable that the step b) further include y) measuring the temperature of one of the discharge unit and the droplet, and the discharge unit be warm-up driven depending on a measured result in the step y) so as to adjust the temperature of one of the discharge device and the droplet to the temperature in the formation of the predetermined pattern.
According to the device, the discharge unit is allowed to perform the warm-up drive depending on the measured result of the step y) of the temperature so as to adjust the temperature of the discharge unit or the droplet. Therefore, an actual temperature, which is measured in the step y), of the discharge unit or the droplet can be securely adjusted to the temperature in the formation of the predetermined pattern.
In the droplet discharge method according to the above aspect, it is preferable that the temperature of one of the discharge unit and the droplet be adjusted to the temperature in the formation of the predetermined pattern by heating or cooling one of the discharge unit and the droplet, in the step b).
According to the method, the temperature of the discharge unit or the droplet can be securely changed to be adjusted to the temperature in the formation of the predetermined pattern by heating or cooling the discharge unit or the droplet.
The droplet discharge method according to the above aspect, it is preferable that the temperature of one of the discharge unit and the droplet at a starting time of the formation of the predetermined pattern be adjusted to two or more different kinds of temperatures, and the temperature in the formation of the predetermined pattern be estimated based on a temperature change in the formation of the predetermined pattern in each case of the temperatures, in the step a).
According to the method, the formation of the predetermined pattern is started at different temperatures of the discharge unit or the droplet. The difference of the temperatures at the starting time of the formation of the predetermined pattern brings different behaviors of the temperatures of the discharge unit or the droplet in the formation of the predetermined pattern. By comparing different kinds of temperature changes, the temperature in the formation of the predetermined pattern can be estimated.
In the droplet discharge method according to the above aspect, it is preferable that the step b) further include z) measuring the temperature of one of the discharge unit and the droplet, and one of the discharge unit and the droplet be heated or cooled depending on a measured result of the step z) so as to adjust the temperature of one of the discharge device and the droplet to the temperature in the formation of the predetermined pattern.
According to the method, the discharge unit or the droplet is heated or cooled depending on the measured result of the step z) of the temperature. Therefore, an actual temperature, which is measured in the step z), of the discharge unit or the droplet can be securely adjusted to the temperature in the formation of the predetermined pattern.
The invention will be described with reference to the accompanying drawings, wherein like numbers reference like elements.
Hereinafter, preferred embodiments of a droplet discharge device, a method for discharging a droplet, an electro-optical device manufacturing device, a method for manufacturing an electro-optical device, an electronic apparatus manufacturing device, and a method for manufacturing an electronic apparatus manufacturing device will be described with reference to the accompanying drawings. The embodiments will be described with an example of a process for forming a color element film (a filter film) constituting a color filter with a droplet discharging device that employs an inkjet method. The color filter is provided to a substrate of a liquid crystal display device that is an example of the electro-optical device. The droplet discharge device is an example of the droplet discharging device. Note that the drawings referred to in the following descriptions sometimes show members or portions having different horizontal and vertical ratios from the actual members or portions for the sake of illustration.
A droplet discharge device as a droplet discharge device according to a first embodiment is used in a manufacturing line of a liquid crystal device and used for forming a color element film of a color filter. The color element film is formed such that a functional liquid is arranged on a glass substrate, for example, as an object to be drawn (an object to be processed) with a droplet discharge head employing an inkjet method. The droplet discharge head is capable of discharging a functional liquid containing a material of a color element film and the like.
Droplet Discharge Method
A droplet discharge method used for forming a functional film such as a filter film will be first described. The droplet discharge method has such an advantage that a material can be accurately disposed on a desired location in a desired amount with little waste in the use of the material. As discharging techniques of the droplet discharge method, a charge control method, a pressurized vibration method, an electromechanical converting method, an electrothermal converting method, an electrostatic attraction method, and the like are exemplified.
Among these, the electromechanical converting method is such a method that uses a deformation characteristic of a piezoelectric element in response to a pulsed electric signal. In the method, a piezoelectric element is deformed to apply pressure to a space storing a liquid material with a member made of an elastic material interposed therebetween and thus the liquid material is pushed out of the space to be discharged from a discharge nozzle. The piezo method does not heat the liquid material and generate bubbles in the material so as to less influence a component of the material. Therefore, the method has such an advantage that a size of a droplet is easily adjusted by adjusting a drive voltage. The embodiment employs the piezo method because the piezo method does not influence a component of a material so as to provide high degree of freedom in selecting a liquid material, and because the size of a droplet is easily adjusted so as to provide a good controllability of a droplet.
Droplet Discharge Device
Next, the whole structure of a droplet discharge device 1 will be described with reference to
As shown in
The discharge unit 2 includes 6 pieces of the droplet discharge heads 17 that discharge a functional liquid as the droplet as a droplet, and includes a Y-axis table 12 used for moving the droplet discharge heads 17 in a Y-axis direction and keeping them at a position to which the heads are moved. The work unit 3 includes a work placing board 21 for placing a work W that is an object for discharging a droplet which is discharged from the droplet discharge heads 17. The liquid supply unit 60 includes a storing tank (not shown) for storing the functional liquid and supplies the functional liquid to the droplet discharge heads 17. The inspection unit 4 includes a discharge inspection unit 18 and a weight measurement unit 19 for inspecting a discharging state from the droplet discharge heads 17. The weight measurement unit 19 has a flashing unit 14. The maintenance unit 5 includes a suction unit 15 and a wiping unit 16 that perform maintenance of the droplet discharge heads 17.
The discharge device controlling part 6 totally controls each of these units. A weight measurement processing, a drawing processing, a discharge inspection processing, a maintenance processing, and the like respectively performed by the weight measurement unit 19, the discharge unit 2, the discharge inspection unit 18, the maintenance unit 15, and the like are performed by controlling each of the units by the discharge device controlling part 6.
The droplet discharge device 1 includes an X-axis supporting base 1A supported on a stone surface plate, and each unit thereof is disposed on the X-axis supporting base 1A. An X-axis table 11 that extends in an X-axis direction as a main-scanning direction and is disposed on the X-axis supporting base 1A moves the work placing board 21 in the X-axis direction (the main-scanning direction).
The Y-axis tables 12 of the discharge unit 2 are disposed on a pair of Y-axis supporting bases 7 and 7, which are formed to straddle the X-axis table 11, on a plurality of columns 7A, and extend in the Y-axis direction as a sub-scanning direction. The discharge unit 2 includes a carriage unit 51 having the six pieces of the droplet discharge heads 17. The carriage unit 51 is formed to be suspended from a bridge plate 52. The bridge plate 52 is supported on the Y-axis table 12 in a slidable manner in the Y-axis direction with a Y-axis slider (not shown) interposed. The Y-axis table 12 moves the bridge plate 52 (the carriage unit 51) in the Y-axis direction (the sub-scanning direction).
Droplets of the functional liquid are discharged by discharge-driving the droplet discharge heads 17 of the discharge unit 2 in synchronization with the drive of the X-axis table 11 and the Y-axis table 12, thus drawing a desired drawing pattern with the functional liquid on the work W that is placed on the work placing board 21.
The discharge inspection unit 18 includes an inspection drawing unit 161 and an imaging unit 162. The inspection drawing unit 161 is fixed on an X-axis second slider 23 so as to be moved together with the weight measurement unit 19 and the flashing unit 14 that are also fixed on the X-axis second slider 23. The imaging unit 162 includes two pieces of inspection cameras 163, and camera moving mechanisms 164 that support the inspection cameras 163 in a slidable manner in the Y-axis direction.
The suction unit 15 and the wiping unit 16 included in the maintenance unit 5 are disposed on a pedestal 8. The pedestal 8 is disposed on a position apart from the X-axis table 11 and does not disturb the move of the carriage unit 51 moved by the Y-axis table 12. The suction unit 15 includes a cap unit 15a. The suction unit 15 seals a nozzle forming surface 76a (refer to
The X-axis table 11 includes an X-axis first slider 22, the X-axis second slider 23, a pair of left and right X-axis linear motors 26 and 26, and a pair of X-axis common supporting bases 24 and 24.
On the X-axis first slider 22, the work placing board 21 is attached. The X-axis first slider 22 is supported on the X-axis common supporting bases 24, which extend in the X-axis direction, in a slidable manner in the X-axis direction. To the X-axis second slider 23, the inspection drawing unit 161, the weight measurement unit 19, and the flashing unit 14 are attached. The X-axis second slider 23 is supported on the X-axis common supporting bases 24, which extends in the X-axis direction, in a slidable manner in the X-axis direction. The X-axis linear motors 26 are formed in parallel with the X-axis common supporting bases 24. The motors 26 move the X-axis first slider 22 or the X-axis second slider 23 along the X-axis common supporting bases 24 so as to move the work placing board 21 (the work W placed on the work placing board 21) or the weight measurement unit 19 in the X-axis direction. The X-axis first slider 22 and the X-axis second slider 23 can be separately driven by the X-axis linear motors 26. The X-axis direction corresponds to the main-scanning direction and the Y-axis direction corresponds to the sub-scanning direction.
The work placing board 21 includes an adsorption table 31, a θ table 32, and the like. The adsorption table 31 adsorbs and fixes the work W that is placed and holds it. The θ table 32 supports the adsorption table 31. The θ table 32 θ-compensates a position of the work W set on the adsorption table 31 in a θ direction that is a direction around a Z axis which is orthogonal to the X-axis direction and the Y-axis direction, and maintains and keeps the θ-compensated direction. The θ table 32 includes a θ driving motor 532 which drives the θ table 32.
The position of the work placing board 21 shown in
The image recognition unit 80 includes two pieces of alignment cameras 81 and a camera moving mechanism 82. The camera moving mechanism 82 is provided on the X-axis supporting base 1A so as to extend in the Y-axis direction and straddle the X-axis table 11. The alignment cameras 81 are supported on the camera moving mechanism 81 in a slidable manner in the Y-axis direction with a camera holder (not shown) interposed. The alignment cameras 81 supported on the camera moving mechanism 82 face the X-axis table 11 from the upside so as to image-recognize a reference mark (alignment mark) of each work W placed on the work placing board 21 on the X-axis table 11. The two pieces of alignment cameras 81 can be separately moved by a camera moving motor (not shown) in the Y-axis direction.
Each of the alignment cameras 81 is moved by the camera moving mechanism 82 in the Y-axis direction and takes an image of an alignment mark of each work W that is supplied by the robot arm in collaboration with the move of the work placing board 21 in the X-axis direction. Then, based on an imaging result of the alignment cameras 81, the work W is θ-compensated (aligned) by the θ table 32.
The Y-axis table 12 is provided with a pair of Y-axis sliders (not shown) and a pair of Y-axis linear motors (not shown). The pair of Y-axis linear motors are formed respectively on the pair of Y-axis supporting bases 7 and 7 and extend in the Y-axis direction. The Y-axis sliders are respectively supported by the Y-axis supporting bases 7 and 7 in a slidable manner. The pair of Y-axis sliders that are respectively supported by the Y-axis supporting bases 7 and 7 supports the bridge plate 52 at both ends of the plate 52. To the bridge plate 52, the carriage unit 51 included in the discharge unit 2 is fixed. The bridge plate 52 that fixes the carriage plate 51, which is included in the discharge unit 2, thereon is formed on the pair of Y-axis supporting bases 7 and 7 in a manner interposing the Y-axis sliders that support the bridge plate 52 at both ends of the plate 52.
When the Y-axis linear motors are (synchronously) driven, the Y-axis sliders move at a time in parallel in the Y-axis direction with a guide of the Y-axis bases 7 and 7. Due to the move of the sliders, the bridge plate 52 moves in the Y-axis direction, and accordingly the carriage unit 51 suspended from the bridge plate 52 moves in the Y-axis direction.
The carriage unit 51 is provided with a head unit 54 (refer to
Droplet Discharge Head
The droplet discharge head 17 will be described with reference to
As shown in
At a base portion side of the pump part 75, that is, at a base portion side of the head body 74, a flange part 79 having a rectangular flange shape is formed so as to support the liquid introducing part 71 and the head substrate 73. On the flange part 79, a pair of small screw holes (female threaded screws) 79a for fixing the droplet discharge head 17 are formed. The droplet discharge head 17 is fixed on a head supporting member with locking screws that penetrate the head supporting member and engage with the screw holes 79a.
On the nozzle forming surface 76a of the nozzle plate 76, two nozzle rows 78A are formed. The nozzle rows 78A are composed of discharge nozzles 78 that are formed on the nozzle plate 76 and discharge droplets. The two nozzle rows 78A are arranged in parallel, and each of the nozzle rows 78A and 78A is composed of 180 pieces, for example, (schematically shown in the drawing) of discharge nozzles 78 that are arranged in a regular pitch. That is, the two nozzle rows 78A are disposed on the nozzle forming surface 76a of the head body 74 in such a manner that the two nozzle rows 78A are symmetric with respect to the center line of the nozzle forming surface 76a.
In a state that the droplet discharge head 17 is attached to the droplet discharge device 1, the nozzle rows 78A extend in the Y-axis direction. The discharge nozzles 78 constituting one of the two nozzle rows 78A are arranged in a manner shifting by a half pitch to those constituting the other of the rows 78A in the Y-axis direction. One nozzle pitch is 140 μm, for example. On a certain position in the X-axis direction, droplets that are discharged from the discharge nozzles 78 constituting respective nozzle rows 78A land linearly so as to align at regular intervals in the Y-axis direction, on a design. In a case where a nozzle pitch of the discharge nozzles 78 of the nozzle rows 78A is 140 μm, a distance between centers of the landed positions that align linearly is 70 μm on the design.
As shown in
On the pressure chamber plate 151, a reservoir 155 is formed. The reservoir 155 is constantly filled with the functional liquid that is supplied from the liquid introducing part 71 through a liquid supply hole 153 of the vibrating plate 152. The reservoir 155 is a space surrounded by the vibrating plate 152, the nozzle plate 76, and the pressure chamber plate 151. Further, a pressure chamber 158 that is separated by a plurality of head partitions 157 is formed on the pressure chamber plate 151. A space formed by the vibrating plate 152, the nozzle plate 76, and two pieces of the head partitions 157 is the pressure chamber 158.
Corresponding to the discharge nozzles 78, the pressure chamber 158 is provided in the same number as the discharge nozzles 78. Into the pressure chamber 158, the functional liquid is supplied from the reservoir 155 through a supply opening 156 positioned between two pieces of the head partitions 157. Groups each including the head partitions 157, the pressure chamber 158, the discharge nozzles 78, and the supply opening 156 are aligned along the reservoir 155, and the discharge nozzles 78 arranged in a line form the nozzle row 78A. Though not shown in
On a portion, which constitutes the pressure chamber 158, of the vibrating plate 152, one end of a piezoelectric element 159 is fixed. The other end of the piezoelectric element 159 is fixed on a pedestal (not shown) supporting the whole of the droplet discharge head 17 with a fixing plate 154 (refer to
The piezoelectric element 159 includes an active part in which an electrode layer and a piezoelectric element are layered. The active part constricts in a longitudinal direction (a thickness direction of the vibrating plate 152 in
The discharge controlling part 6 controls the application of voltage with respect to the piezoelectric element 159, that is, controls a drive signal so as to control the discharge of the functional liquid with respect to each of the discharge nozzles 78. More specifically, the discharge controlling part 6 can change a volume of droplets discharged from the discharge nozzles 78, the number of droplets discharged per unit time, and the like. Accordingly, a distance between the droplets that land on the substrate, an amount of the functional liquid to land on a certain area of the substrate, and the like can be changed. If discharge nozzles 78 discharging droplets are used selectively from the discharge nozzles 78 aligning in the nozzle row 78A, for example, a plurality of droplets can be discharged at a time by a pitch of the discharge nozzles 78 in a range of the length of the nozzle row 78A in an extending direction of the nozzle row 78A. In a direction nearly orthogonal to the extending direction of the nozzle row 78A, the substrate is moved relatively to the discharge nozzles 78. In the relative move direction, droplets discharged from the discharge nozzles 78 can be arranged on arbitrary positions, to which the discharge nozzles 78 can face, of the substrate. Here, the volume of the droplets discharged from each of the discharge nozzles 78 is variable within a range from 1 pl (picoliters) to 300 pl, for example.
Head Unit
A schematic structure of the head unit 54 provided to the discharged unit 2 will be described with reference to
As shown in
The three pieces of the droplet discharge heads 17 included in one head group 55 are positioned such that the discharge nozzle 78 positioned at a first end (which is positioned at a second droplet discharge head side) of a first droplet discharge head 17 shift in the Y-axis direction by a half pitch with respect to the nozzle 78 positioned at a second end (which is positioned at the first head side) of the second droplet discharge head 17 that is adjacent to the first head 17. If all of the discharge nozzles 78 of the three pieces of the droplet discharge heads 17 included to the head group 55 are aligned on a certain position of the X-axis direction, the discharge nozzles 78 are arranged in a regular interval of a half nozzle pitch in the Y-axis direction. That is, on the certain position in the X-axis direction, droplets that are discharged from the discharge nozzles 78 constituting the nozzle rows 78A of the droplet discharge heads 17 land so as to be arranged in a line at regular intervals in the Y-axis direction, on a design. Since the droplet discharge heads 17 can not be aligned in a line in the Y-axis direction due to their physical shapes, the heads 17 overlaps with each other in the Y-axis direction so as to be arranged step-like in the X-axis direction and thus form the head group 55.
A line formed by discharging droplets one by one from the each of the discharge nozzles 78 of the heads of the head group 55 is defined as a nozzle group line. One head group 55 and another head group 55 are disposed in the Y-axis direction in such relative position that discharge nozzles 78 positioned at each end of the head groups 55 are apart from each other at a distance which is obtained by adding a half nozzle pitch to the length of the nozzle group line. For example, two head groups 55 discharge droplets one by one from respective discharge nozzles 78 so as to form first two nozzle group lines, and the two head groups 55 form second nozzle group lines at a position apart from an end of the first nozzle group lines in the Y-axis direction at a distance which is obtained by adding a half nozzle pitch to a length of the nozzle group line. Consequently, 4320 droplets discharged from 2160 pieces of the discharge nozzles 78 provided to the six pieces of the droplet discharged heads 17 are disposed at a regular interval, forming a straight line.
Discharge Inspection Unit
The discharge inspection unit 18 will be described with reference to
The discharge inspection unit 18 inspects whether the functional liquid is appropriately discharged from (the discharge nozzles 78 of) all of the droplet discharge heads 17 constituting the discharge unit 2. The inspection drawing unit 161 is structured such that the unit 161 can receive the functional liquid inspect-discharged from all of the discharge nozzles 78 of all of the droplet discharge heads 17 provided to the head unit 54, when the head unit 54 provided to the discharge unit 2 is positioned to be able to face the work W placed on the work placing board 21 in the Y-axis direction. The imaging unit 162 images and inspects an inspection pattern (a pattern of landed dots) drawn by the inspection drawing unit 161. As described above, the inspection drawing unit 161 is disposed on the X-axis table 11. The imaging unit 162 is fixed on the Y-axis supporting base 7 directly under the Y-axis table 12. The imaging unit 162 is provided in a fixed manner to an inspection position in the X-axis direction. The two inspection cameras 163 provided to the imaging unit 162 can be moved separately in the Y-axis direction.
As shown in
As described with reference to
The inspection drawing unit 161 is capable of moving to a position on which the inspection sheet 171 faces the inspection cameras 163 of the imaging unit 162 and staying on the position. An imaged result by the two inspection cameras 163 is send to the discharge device controlling part 6 and image-recognized. Based on the image recognition, whether each of the discharge nozzles 78 of each of the droplet discharge heads 17 normally discharges the functional liquid or not (whether the nozzle is clogged or not) is determined. Further, whether a relative position of the landed droplet is a specified position or not is determined.
Weight Measurement Unit
The weight measurement unit 19 and the flashing unit 14 will be described with reference to
Referring to
The weight measurement device 91 includes a periodic flashing box 93, a liquid receiving container 94, an electronic balance 99 (hidden under the liquid receiving container 94 in
The liquid receiving container 94 has such a size that the liquid receiving container 94 can face only one arbitrary droplet discharge head 17, among the three droplet discharge heads 17 constituting the head group 55, so as to receive the functional liquid discharged from the droplet discharge head 17 that the container 94 faces. The liquid receiving container 94 is mounted on the electronic balance 99. The electronic balance 99 measures the weight of the liquid receiving container 94 so as to measure the weight of the functional liquid that land on the liquid receiving container 94. The weight of the liquid receiving container 94 increased by receiving the functional liquid from the droplet discharge head 17 is the weight of the functional liquid that is discharged from the droplet discharge head 17 and land on the liquid receiving container 94.
In terms of the weight measurement time flashing box 95, a weight measurement time flashing box 95a and a weight measurement time flashing box 95b are arranged in the X-axis direction with the liquid receiving container 94 interposed. When one of the three droplet discharge heads 17 constituting the head group 55 faces the liquid receiving container 94, the other two droplet discharge heads 17 are positioned to face any of the weight measurement time flashing box 95a and the weight measurement time flashing box 95b. When the droplet discharge head 17 for a weight measurement object faces the liquid receiving container 94 and performs discharge for the weight measurement, the other droplet discharge heads 17 for other than the weight measurement object face the weight measurement time flashing box 95a or 95b and perform discarding discharge.
One weight measurement device 91 performs weight measurement of the three pieces of droplet discharge heads 17 of the head group 55. Therefore, when one droplet discharge head 17 performs discharge for weight measurement, the other two droplet discharge heads 17 wait until the measurement of the one discharge head 17 is finished. However, the other two heads 17 in the “waiting”(standby) state can perform discarding discharge. Accordingly, the discharge nozzles 78 are prevented from being dried in the “waiting” (standby) state so as to be able to favorably perform weight measurement discharge after the “waiting” (standby) state, being able to provide a proper measurement result.
The periodic flashing box 93 receives the functional liquid that undergoes discarding discharge in periodic flashing.
In the weight measurement time flashing box 95 and the periodic flashing box 93, the functional liquid absorber 97 is disposed in a manner held by a pair of holding plates 98 at both long sides of the flashing box 95 and the flashing box 93. The liquid receiving container 94 is formed so as to be able to receive the functional liquid in a nozzle row unit with respect to each of the droplet discharge heads 17.
The electronic balance 99 measures the weight of the functional liquid discharged to the liquid receiving container 94 so as to output a measurement result to the discharge device controlling part 6. Based on the measurement result that is received, the discharge device controlling part 6 controls driving power (voltage value) which is to be applied to the droplet discharge heads 17 from a head driver 17d (refer to
Electrical Structure of Droplet Discharge Device
An electrical structure for driving the droplet discharge device 1 having the above-mentioned structure will be described with reference to
The discharge device controlling part 6 of the droplet discharge device 1 includes an interface (I/F) 47, a central processing unit (CPU) 44, a read only memory (ROM) 45, a random access memory (RAM) 46, and a hard disk 48. Further, the discharge device controlling part 6 includes the head driver 17d, a drive mechanism driver 40d, a liquid supply driver 60d, a maintenance driver 5d, an inspection driver 4d, and a detecting part interface (I/F) 43. These are electrically coupled with each other through a data bus 49.
The interface 47 sends and receives data to and from the control device 65, and the CPU 44 performs various arithmetic processings based on a command from the control device 65 and outputs a control signal for controlling an operation of each unit of the droplet discharge device 1. The RAM 46 temporarily stores a controlling command or printing data received from the control device 65 in accordance with a command from the CPU 44. The ROM 45 stores routines for various arithmetic processings performed by the CPU 44, and the like. The hard disk 48 stores the controlling command or the printing data received from the control device 65 or stores the routines for various arithmetic processings performed by the CPU44.
To the head driver 17d, the droplet discharge heads 17 included in the discharge unit 2 are coupled. The head driver 17d drives the droplet discharge heads 17 in accordance with the control signal from the CPU 44 so as to allow the heads 17 to discharge droplets of the functional liquid. To the drive mechanism driver 40d, a head moving motor of the Y-axis table 12, the X-axis liner motor 26 of the X-axis table 11, and a drive mechanism 41 including various drive mechanisms having various driving source are coupled. The various drive mechanisms are the camera moving motor for moving the alignment camera 81, the θ driving motor 532 of the θ table 32, and the like. The drive mechanism drive 40d drives the motor and the like in accordance with the control signal from the CPU 44 so as to relatively move the droplet discharge head 17 and the work W and thus land droplets of the functional liquid on arbitrary positions on the work W in a manner collaborating with the head driver 17d.
To the maintenance driver 5d, the suction unit 15 and the wiping unit 16 of the maintenance unit 5 are coupled. The maintenance driver 5d drives the suction unit 15 or the wiping unit 16 in accordance with the control signal from the CPU 44 so as to perform a maintenance operation of the droplet discharge head 17.
To the inspection driver 4d, the discharge inspection unit 18 and the weight measurement unit 19 of the inspection unit 4 are coupled. The inspection driver 4d drives the discharge inspection unit 18 or the weight measurement unit 19 in accordance with the control signal from the CPU44 so as to perform an inspection of a discharging state of the droplet discharge head 17 such as a discharge weight, discharge availability, and accuracy of a landing position.
The discharge weight in the first embodiment corresponds to a weight of one droplet of the functional liquid discharged by the droplet discharge head 17. A bulk (volume) of one droplet of the functional liquid discharged by the droplet discharge head 17 is referred to as a discharge amount. The discharge weight and the discharge amount express a certain amount respectively by a weight and a volume.
To the liquid supply driver 60d, the liquid supply unit 60 is coupled. The liquid supply driver 60d drives the liquid supply unit 60 in accordance with the control signal from the CPU 44 so as to supply the functional liquid to the droplet discharge head 17. To the detecting part interface 43, a detecting part 42 including various sensors such as a head temperature sensor 142 for measuring a temperature of the droplet discharge head 17 is coupled. Detected information detected by each of the sensors of the detecting part 42 is transferred to the CPU 44 through the detecting part interface 43.
As the temperature of the droplet discharge head 17, a temperature of a part of the droplet discharge head 17 is used. The temperature of the part can be measured by relating variation of the temperature of the part to variation of the weight of a droplet discharged from the droplet discharge head 17. For example, a temperature of an outer wall surface of the pump part 75, a temperature of the nozzle plate 76, a temperature of a part, which constitutes the pressure chamber 158, of the vibrating plate 152, and the like can be used. The head temperature sensor 142 is a contact type temperature sensor, for example. The sensor is disposed so as to be able to contact with any of the above parts and measure the temperature of any of the parts.
Discharge of Functional Liquid
A discharge controlling method in the droplet discharge device 1 will be described with reference to
As described above, the droplet discharge device 1 includes the CPU 44 that outputs a control signal for controlling an operation of each unit of the droplet discharge device 1, and the head driver 17d performing an electrical driving control of the droplet discharge head 17.
As shown in
Discharge control in the droplet discharge device 1 is performed as follows. First, The CPU 44 sends dot pattern data to the head driver 17d. The dot pattern data is obtained by converting an arrangement pattern of the functional liquid on a drawing object such as the work W into data. Then the head driver 17d decodes the dot pattern data so as to generate nozzle data that is ON/OFF (discharging/non-discharging) information of each of the discharge nozzles 78. The nozzle data is converted into a serial signal (SI) and transmitted to each of the shift registers 85 in synchronization with the clock signal (CK).
The nozzle data transmitted to the shift registers 85 is latched with the timing with which a latch signal (LAT) is inputted into the latch circuit 86, and further, converted into a gate signal for the switch 88 by the level shifter 87. Specifically, when the nozzle data is “ON,” the switch 88 opens to supply the piezoelectric element 159 with a drive signal (COM), and when the nozzle data is “OFF,” the switch 88 is closed and no drive signal (COM) is supplied to the piezoelectric element 159. Then the functional liquid is discharged as droplets from the discharge nozzle 78 corresponding to the data of “ON” and land on a drawing object such as a work W, thus arranging the functional liquid on the drawing object.
Drive Waveform
A drive waveform of a drive signal applied to the piezoelectric element 159, and a discharging operation by an operation of the piezoelectric element 159 to which the drive signal having the drive waveform is applied will be described with reference to
As shown in
As shown in
In a first step of a drive period, a voltage to be applied to the piezoelectric element 159 is raised up to a high potential from the intermediate potential (a state B in
After the step-up liquid supply step, a state keeping the voltage to be applied to the piezoelectric element 159 at high potential is maintained. This state is referred to as a waiting state before discharge (a state C in FIG. 9A). A piezoelectric material for the piezoelectric element 159 mechanically vibrates even after the voltage fluctuation is stopped. Therefore, a step of waiting until the mechanical vibration is stopped is the waiting state before discharge.
After the waiting state before discharge is maintained until the mechanical vibration is stopped, the voltage applied to the piezoelectric element 159 is rapidly stepped down (a state D in
A constriction amount of the piezoelectric element 159 differs depending on the voltage value of the high potential, so that an increasing amount of the volume of the pressure chamber 158 differs. Therefore, changing of the voltage value of the high potential can adjust an amount of the functional liquid supplied to and discharged from the pressure chamber 158, that is, a discharge amount from the droplet discharge head 17.
After the step-down discharge step, a state keeping the voltage to be applied to the piezoelectric element 159 at low potential is maintained. This state is referred to as a waiting state after discharge (a state E in
After the waiting state after discharge is maintained until the mechanical vibration of the piezoelectric element 159 is stopped, the voltage applied to the piezoelectric element 159 is raised up to the intermediate potential (a state F in
Structure of Liquid Crystal Display Panel
A liquid crystal display panel that is an example of a liquid crystal device as an electrooptical device will be described. The electrooptical device uses the droplet discharge device 1 so as to form a functional film. A liquid crystal display panel 200 (refer to
A structure of the liquid crystal display panel 200 will be first described with reference to
As shown in
The element substrate 210 is provided with the TFT element 215, and a pixel electrode 217, a scanning line 212, and a signal line 214 that have conductivity on a surface, facing the counter substrate 220, of a glass substrate 211. An insulation layer 216 is formed so as to fill a space between these elements and a film having conductivity. The scanning line 212 and the signal line 214 are formed so as to cross each other with a part of the insulation layer 216 interposed. The scanning line 212 and the signal line 214 are insulated from each other by interposing the part of the insulation layer 216. In an area surrounded by the scanning line 212 and the signal line 214, the pixel electrode 217 is provided. The pixel electrode 217 has a rectangular shape of which one corner portion is cut out in a rectangular shape. The TFT element 215 including a source electrode, a drain electrode, a semiconductor portion, and a gate electrode is fitted in the part surrounded by a cutout part of the pixel electrode 217, the scanning line 212, and the signal line 214. The TFT element 215 is turned on and off with an application of a signal with respect to the scanning line 212 and the signal line 214 so as to perform conducting control to the pixel electrode 217.
On a surface, which contacts with the liquid crystal 230, of the element substrate 210, an alignment film 218 is provided. The alignment film 218 covers the whole area in which the scanning line 212, the signal line 214, and the pixel electrode 217 described above are formed.
The counter substrate 220 is provided with a color filter (hereinafter, referred to as “CF”) layer 208 on a surface, which faces the element substrate 210, of a glass substrate 201. The CF layer 208 includes a partition 204, a red filter film 205R, a green filter film 205G, and a blue filter film 205B. A black matrix 202 constituting the partition 204 is formed in matrix on the glass substrate 201, and a bank 203 is formed on the black matrix 202. The partitions 204 composed of the black matrix 202 and the bank 203 form a filter film region 225 having a rectangular shape. In the filter film region 225, the red filter film 205R, the green filter film 205G, or the blue filter film 205B is formed. Each of the red filter film 205R, the green filter film 205G, and the blue filter film 205B is formed on a position facing the pixel electrode 217 in a shape corresponding to the pixel electrode 217.
On the CF layer 208 (a side facing the element substrate 210), a planarization film 206 is provided. On the planarization film 206, the counter electrode 207 made of a transparent conductive material such as ITO is provided. Due to the provision of the planarization film 206, a surface on which the counter electrode 207 is formed is nearly planarized. The counter electrode 207 is contiguous films having a size to cover the whole region in which the pixel electrode 217 described above is formed. The counter electrode 207 is coupled to a wiring formed on the element substrate 210 through a conduction part which is not shown.
On a surface, which contacts with the liquid crystal 230, of the counter substrate 220, an alignment film 228 covering the whole surface of the pixel electrode 217 is provided. The liquid crystal 230 is filled in a space surrounded by the alignment film 228 of the counter substrate 220, the alignment film 218 of the element substrate 210, and a sealant for bonding the counter substrate 220 and the element substrate 210, in a state that the element substrate 210 and the counter substrate 220 are bonded to each other.
The liquid crystal display panel 200 has a transmissive structure, but the panel 200 may be formed to be a reflective liquid crystal device provided with a reflective layer or a transflective liquid crystal device provided with a transflective layer.
Mother Counter Substrate
A mother counter substrate 201A will be described with reference to
The counter substrate 220 is composed of the glass substrate 201 which is made of transparent quartz glass having the thickness of 1.0 mm. As shown in
As shown in
Color Filter
The CF layer 208 formed on the counter substrate 220 and arrangements of the filter films 205 (the red filter film 205R, the green filter film 205G, and the blue filter film 205B) will be described with reference to
As shown in
As arrangements of the red filter films 205R, the green filter films 205G, and the blue filter films 205B in the three-color filter, a stripe arrangement, a mosaic arrangement, and a delta arrangement are known. In the stripe arrangement, all of films on one column are the red filter films 205R, the green filter films 205G, or the blue filter films 205B, as shown in
In a three-color filter shown in
Formation of Liquid Crystal Display Panel
A process of forming the liquid crystal display panel 200 will be described with reference to
The counter substrate 220 is formed by executing a step S1 through a step S5 shown in
In the step S1, a partition part for sectioning the filter film regions 225 is formed on the glass substrate 201. The partition part is formed by arranging the partitions 204 in matrix. The partition 204 is composed of the black matrix 202 formed in matrix and the bank 203 formed on the black matrix 202. Accordingly, as shown in
Then, in the step S2 shown in
In specific, as shown in
In the same manner, a green functional liquid 252G and a blue functional liquid 252B are respectively arranged in a filter film region 225G and a filter film region 225B, shown in
In the step S3 shown in
In the step S4 shown in
In the step S5 shown in
As shown in
The element substrate 210 is formed by executing a step S6 through a step S8 shown in
In the step S6, a conductive layer, an insulating layer, and a semiconductor layer are formed on the glass substrate 211 so as to form elements such as the TFT element 215; the scanning line 212; the signal line 214; and the insulating layer 216. The scanning line 212 and the signal line 214 are formed on a position facing the partition 204, that is, a circumferential position of a pixel, in a state that the element substrate 210 and the counter substrate 220 are bonded with each other. The TFT element 215 is formed so as to be positioned at an end of the pixel, and at least one TFT element 215 is formed in one pixel.
In the step S7, the pixel electrodes 217 are formed. The pixel electrodes 217 are formed on positions to face the red filter film 205R, the green filter film 205G, and the blue filter film 205B in a state that the element substrate 210 and the counter substrate 220 are bonded with each other. The pixel electrodes 217 are electrically coupled with a drain electrode of the TFT element 215.
In the step S8, the alignment film 218 of the element substrate 210 is formed on the pixel electrodes 217 and the like. The alignment film 218 is formed on a region which covers at least the whole surface of all of the pixel layers 217.
As shown in
Subsequently, in the step S9 shown in
Structure of Wiring Board
A wiring board on which a metal wiring is formed will be described with reference to
As shown in
In the embodiment, the input wirings 271 and the output wirings 273 that are made of a conductive material, and the insulation film 277 that is made of an insulating material are formed by a droplet discharge method with the droplet discharge device 1 described above. By the droplet discharge, wirings and insulating films can be formed without wasting each material. In addition, as compared to photolithography, the droplet discharge method does not require a mask for exposure or a process such as development, etching, or the like in forming a pattern. Therefore, the manufacturing process can be simplified regardless of the dimensions of the mother substrate 270A.
The conductive material contained in the functional liquid that is discharged from the droplet discharge device 1 may be metallic fine particles containing at least any one of gold, silver, copper, aluminum, palladium, and nickel; an oxide of any of these; fine particles of conductive polymer or superconductor; or the like, for example. These conductive fine particles may be used with their surfaces coated with an organic matter, for example, to improve their dispersibility. The diameter of the conductive fine particles is preferably in the range from 1 nm to 1.0 μm inclusive. A particle diameter larger than 1.0 μm can cause clogging of the discharge nozzles 78 of the droplet discharge heads 17. On the other hand, particles whose diameter is smaller than 1 nm may make the volume ratio of a coating agent to the conductive fine particles so large that the ratio of the organic matter in an obtained film becomes excessive.
Here, any dispersion medium can be used as long as the dispersion medium is capable of dispersing the above-described conductive fine particles and does not cause an aggregation. Examples of the dispersion medium includes: water; alcohols such as methanol, ethanol, propanol, and butanol; hydro-carbon compounds such as n-heptane, n-octane, decane, dodecane, tetradecane, toluene, xylene, cymene, durene, indene, dipentene, tetrahydronaphthalene, decahydronaphthalene, and cyclohexylbenzene; ether compounds such as ethylene glycol dimethyl ether, ethylene glycol diethyl ether, ethylene glycol methyl ethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, diethylene glycol methyl ethyl ether, 1,2-dimethoxyethane, bis(2-methoxyethyl)ether, and p-dioxane; and polar compounds such as propylene carbonate, gamma-butyrolactone, N-methyl-2-pyrrolidone, dimethylformamide, dimethyl sulfoxide, and cyclohexanone. Among these, water, alcohols, hydrocarbon compounds, and ether compounds are preferably used due to particulate dispersibility, dispersion-liquid stability, and applicability to a droplet discharge method, and more preferably, water and hydrocarbon compounds are used.
The surface tension of the dispersion liquid (functional liquid) of the conductive fine particles is preferably within the range from 0.02 N/m to 0.07 N/m inclusive. A surface tension less than 0.02 N/m for discharging the functional liquid by droplet discharge increases the functional liquid's wettability relative to the nozzle forming surface 76a, so that a flying curve may easily occur. A surface tension more than 0.07 N/m makes a meniscus shape at the tip of the discharge nozzle 78 unstable, making it difficult to control the amount and timing of discharge. To adjust the surface tension, a fluorine-, silicone-, or nonionic-based surface tension regulator, for example, may be added in a small amount to the dispersion liquid within a range not largely lowering a contact angle to the mother substrate 270A. The nonionic surface tension regulator enhances the wettability of the functional liquid with respect to the mother substrate 270A, improves leveling property of a film, and serves to prevent generation of minute irregularity of the film. The surface tension regulator may include, as necessary, organic compounds, such as alcohol, ether, ester, and ketone.
The viscosity of the dispersion liquid is preferably within the range from 1 mPa·s to 50 mPa·s inclusive. A viscosity lower than 1 mPa·s for discharging droplets of the functional liquid by droplet discharge may easily cause contamination of the periphery of the discharge nozzle 78 due to leakage of the functional liquid. A viscosity higher than 50 mPa·s may frequently cause clogging of the discharge nozzle 78, making it difficult to discharge droplets smoothly. The viscosity of the dispersion liquid changes in accordance with change of the temperature of the dispersion liquid, so that it is preferable that the temperature of the dispersion liquid is kept approximately constant.
Arrangement of Functional Liquid
A process of arranging the functional liquid will be described with reference to
In a step S21 shown in
As the temperature of the droplet discharge head 17, a temperature of such a part of the droplet discharge head 17 is used that the temperature of the part can be measured by relating variation of the temperature of the part to variation of the weight of a droplet discharged from the droplet discharge head 17, as described above. For example, a temperature of an outer wall surface of the pump part 75, a temperature of the nozzle plate 76, a temperature of a part, which constitutes the pressure chamber 158, of the vibrating plate 152, and the like can be used.
The temperature of the outer wall surface of the pump part 75 and the temperature of the part, constituting the pressure chamber 158, of the vibrating plate 152 can be measured by disposing the head temperature sensor 142 on these parts. Alternatively, the temperature of the part, constituting the pressure chamber 158, of the vibrating plate 152 can be measured by using the piezoelectric material of the piezoelectric element 159 as a temperature sensor. Further, the temperature of an outer wall surface of the pump part 75 and that of the nozzle plate 76 can be measured from a removed position by using a contactless infrared temperature sensor.
The discharge device controlling part 6 receives the drawing time saturated temperature from the input output device 68 of the controlling device 65, for example, and stored the temperature in the RAM 46 or the hard disk 48 thereof. The input output device 68 of the controlling device 65, for example, corresponds to a temperature acquisition unit.
In a step S22, warm-up drive is executed. Driving conditions used in the warm-up drive are conditions that are obtained in advance at individual temperatures corresponding to a desired drawing time saturated temperature and inputted and stored in the RAM 46 or the hard disk 48 of the discharge device controlling part 6. The drawing time saturated temperature is individually obtained for each of the twelve nozzle rows 78A formed in the discharge unit 2, so that an individual driving condition corresponding to the drawing time saturated temperature of each of the twelve nozzle rows 78A of the discharge unit 2 is employed.
The discharge device controlling part 6 executes the warm-up drive by driving the droplet discharge head 17 under the corresponding driving condition. In this case, the discharge device controlling part 6 corresponds to a temperature adjustment unit.
In a step S23, discharge weight measurement is executed.
At the start of the weight measurement, the X-axis second slider 23 is moved in the X-axis direction by the X-axis linear motor 26, and at the same time, the head unit 54 is moved in the Y-axis direction by the Y-axis linear motor. By this operation, the liquid receiving container 94 of each of the weight measurement devices 91 fixed on the X-axis second slider 23 is allowed to face a first droplet discharge head 17 of each of the head groups 55 of the head unit 54.
Weight measurement discharge is executed with respect to each liquid receiving container 94 from all nozzles in one nozzle row 78A of the first droplet discharge head 17 of each of the head groups 55. At this time, second and third droplet discharge heads 17 of each of the head groups 55 face the weight measurement time flashing box 95 and perform discarding discharge to the weight measurement time flashing box 95. After the weight measurement discharge of the predetermined amount is ended, the electronic balance 99 measures the weight of discharged droplets that land on the liquid receiving container 94.
The discharge weight measurement of the head groups 55 is executed by measuring discharge weight of each of the six nozzle rows 78A of the three droplet discharge heads 17 included in the head group 55. The weight measurement unit 19 provided with the weight measurement device 91 corresponds to a discharge amount measurement unit.
In a step S24, the discharge weight that is measured in the step S23 is compared with a specified discharge weight and the discharge amount is adjusted in accordance with the mismatched amount from the specified discharge weight. The discharge amount can be adjusted by changing a voltage value (drive voltage) of high potential in a driving waveform of a drive signal that is applied to the piezoelectric element 159 and thus adjusting the amount of the functional liquid to be filled in the pressure chamber 158, as described above with reference to
The discharge amount is adjusted at each of the twelve nozzle rows 78A of the discharge unit 2. The drive voltage value of the drive signal that is applied to the droplet discharge head 17 from the head driver 17d is adjusted by the CPU 44 that is controlled by a program stored in the ROM 45 and the like. The CPU 44 of this case corresponds to a discharge amount adjustment unit.
In a step S25, the functional liquid is discharged from the droplet discharge head 17 of which the discharge amount is adjusted in the step S24 toward the filter film regions 225 and the like, that is, the drawing discharge is executed.
After the execution of the drawing discharge of the step S25, the process of arranging the functional liquid is ended.
Here, when a processing object such as the mother counter substrate 201A after the execution of the drawing discharge is exchanged with a new processing object, the droplet discharge head 17 is in a resting state. Therefore, the temperature of the head 17 under the execution of the drawing discharge may not be maintained. Therefore, in a case where the head 17 rests, for example, during the exchange of processing objects in the drawing discharge, the warm-up drive of the head 17 is preferably executed so as to restrain change of the head temperature.
Setting of Condition of Warm-up Drive
A method for setting a condition of warm-up drive in the droplet discharge head 17 will be described with reference to
As shown in
As shown in
As described with reference to
A drawing shape is various, so that the discharge ratio of the droplet discharge head 17 performing drawing discharge varies depending on the drawing shape. When the discharge ratio of the droplet discharge head 17 varies, operation states of the piezoelectric element 159 and a driving circuit of the piezoelectric element 159 vary. Therefore, the drawing time saturated temperature HM° C. also varies to be a value corresponding to each discharge ratio.
As shown in
When warm-up drive is performed at a drive voltage a that is a drive voltage of a % of a design drive voltage by which a proper discharge amount is obtained, the head temperature converges at Ha° C. and the head temperature at the time point S becomes Ha° C. When drawing discharge is started at the head temperature of Ha° C., the head temperature increases as a temperature increasing curve indicated by a0 in
When warm-up drive is performed at a drive voltage b that is a drive voltage of b % of a design drive voltage by which a proper discharge amount is obtained, the head temperature converges at Hb° C. and the head temperature at the time point S becomes Hb° C. When drawing discharge is started at the head temperature of Hb° C., the head temperature decreases as a temperature decreasing curve indicated by b0 in
As shown in
As shown in
In a case where a reached temperature of the droplet discharge head 17 is different from the drawing time saturated temperature HM° C. in the performance of the warm-up drive at the drive voltage of M, the drive voltage of M of the warm-up drive is fine adjusted and the warm-up drive is performed again with the resulted drive voltage, thus obtaining a proper drive voltage, with which the drawing time saturated temperature HM° C. can be obtained, in the warm-up drive.
According to the first embodiment, the following advantageous effects can be obtained.
(1) In advance of the discharge weight measurement, the warm-up drive is performed so as to adjust the temperature of the droplet discharge head 17 in performing discharge weight measurement to the drawing time saturated temperature. Thus the temperature of the droplet discharge head 17 during the discharge weight measurement can be approximately same as the temperature during the drawing. Accordingly, a measurement error of the discharge weight can be restrained. The error is possibly caused by the difference between the temperature of the droplet discharge head 17 in the discharge weight measurement and the temperature of the droplet discharge head 17 in the drawing discharge.
(2) The warm-up drive is performed by using the drive voltage a or the drive voltage b. From the slope of increase or decrease of the head temperature at the time of the start of the drawing discharge, the drive voltage, by which the head temperature in the warm-up drive can be made be the drawing time saturated temperature HM° C., is estimated. Accordingly, time for obtaining the drive voltage can be shortened compared to a case obtaining a drive voltage in the warm-up drive by actually performing drawing discharge. Further, consumption of the functional liquid and a processed member consumed for obtaining the drive voltage can be suppressed.
(3) Measurement of the drawing time saturated temperature, adjustment of the head temperature, measurement of the discharge weight, and adjustment of the discharge amount corresponding to the measurement result are performed for each nozzle row 78A. Accordingly, even if there is variation between the temperatures of the nozzle rows 78A in the discharge unit 2, the variation is redressed so as to be able to perform measurement of the discharge weight and adjustment of the discharge amount on which an effect caused by the variation between temperatures of the nozzle rows 78A is suppressed.
(4) Measurement of the drawing time saturated temperature, adjustment of the head temperature, measurement of the discharge weight, and adjustment of the discharge amount corresponding to the measurement result are performed for each nozzle row 78A. Accordingly, measurement of the drawing time saturated temperature, adjustment of the head temperature, measurement of the discharge weight, and adjustment of the discharge amount corresponding to the measured result can be efficiently performed compared to a case performing these to each of the discharge nozzles 78. The functional liquid is supplied to the discharge nozzles 78 included in one nozzle row through the reservoir 155 that is shared by the nozzles 78. Thus the discharge nozzles 78 included in the nozzle row are lead to a common supply path, which is from the supply unit 60 to the reservoir 155, of the functional liquid. Therefore, it is presumable that conditions of the functional liquid which is supplied are nearly equivalent and variation between temperatures of the discharge nozzles 78 included in a nozzle row is small.
(5) The warm-up drive is performed at a drive voltage by which the head temperature can be made be the drawing time saturated temperature HM° C. by the performance of the warm-up drive. Therefore, by the performance of the warm-up drive, the temperature of the droplet discharge head 17 at least varies toward the drawing time saturated temperature HM° C. Accordingly, the possibility of excessive change of the head temperature can be decreased depending on time for performing the warm-up drive.
A second embodiment of the droplet discharge device, the droplet discharging method, the electrooptical device manufacturing device, the electrooptical device manufacturing method, the electronic apparatus manufacturing device, and the electronic apparatus manufacturing method will now be described. The droplet discharge device as the droplet discharge device of the second embodiment is used in the manufacturing line of a liquid crystal device as is the case with the first embodiment. The droplet discharge device includes an ink-jetting droplet discharge head which can discharge a functional liquid containing a material for a color element film. With this head, the droplet discharge device disposes the functional liquid on a glass substrate serving as a drawing object (processing object) so as to form a functional film such as a color element film of a color filter.
A droplet discharge device 301 (refer to
Attachment of Droplet Discharge Head and Temperature Adjustment Unit
An attachment structure of the droplet discharge head 17 to the carriage plate 53 and an attachment structure of a temperature adjustment unit 110 in a head unit 354 included in a discharge unit 302 (refer to
As shown in
A head opening 53a is formed on the carriage plate 53, and the main head holding member 102 is fixed on the carriage plate 53 in a manner roughly covering the head opening 53a. The main head holding member 102 is fixed on the carriage plate 53 by three holding member screws 108 engaging with screw holes which are formed on the carriage plate 53 in a manner going through holes formed on the main head holding member 102. Hereinafter, a surface on which the main head holding member 102 is set is referred to as a “back surface” and the other surface is referred to as a “front surface”.
On the main head holding member 102, a flange opening 102a is formed. The sub head holding member 103 is fixed on the back surface of the main head holding member 102 in a manner straddling the flange opening 102a by its both end portions in a longitudinal direction. The sub head holding member 103 is fixed on the main head holding member 102 by two holding member screws 108 engaging with screw holes which are formed on the main head holding member 102 in a manner going through holes formed on the sub head holding member 103.
The sub head holding member 103 is made of stainless steel and the like and is formed to be a nearly rectangular flat plate. On the sub head holding member 103, a head body opening 103d having a square shape is formed. The head body 74 of the droplet discharge head 17 is inserted through the center of the head body opening 103d. As described above, the sub head holding member 103 is set on the back surface of the main head holding member 102 in a manner straddling the flange opening 102a. On the other hand, the droplet discharge head 17 is set from a front surface side of the main head holding member 102 in such a manner that the head body 74 is inserted through the head body opening 103d so as to protrude from the back surface of the sub head holding member 103. The droplet discharge head 17 is fixed on the sub head holding member 103 by two head fixing screws 107 engaging with the screw holes 79a (refer to
At the periphery of the head body opening 103d of the sub head holding member 103, a first adjustment hole 103a and a second adjustment hole 103b are formed on a center line of two through holes corresponding to the screw holes 79a described above and the head body opening 103d. At the first adjustment hole 103a and the second adjustment hole 103b, an adjustment pin for compensation of a position is engaged.
On outer sides of the first adjustment hole 103a and the second adjustment hole 103b on the center line of the head body opening 103d, adhesive holes 103c are formed in a nearly symmetrical manner about the head body opening 103d. Each of the adhesive holes 103c is an elongate hole elongated in a transverse direction. An adhesive (not shown) is poured into the adhesive holes 103c so as to fix the sub head holding member 103 on the main head holding member 102 by the adhesive.
Two pieces of temperature adjustment units 110 are attached to one droplet discharge head 17. The temperature adjustment units 110 are fixed along an outer surface extending in an extending direction of the nozzle row 78A (refer to
As shown in
A part, which is not covered by the cover film 117 so as to be exposed, of the heat-transfer pattern 114 is bonded to an outer wall of the head body 74 of the droplet discharge head 17 by an adhesive made of a material having high thermal conductivity. The temperature adjustment element 111 is fixed on a part, which is exposed at the opening part 116a of the base film 116 shown in
Through the heat-transfer pattern 114 of the terminal substrate 112 which is fixed to the temperature adjustment element 111, the temperature adjustment element 111 conducts thermal energy to the outer wall of the head body 74 of the droplet discharge head 17 to which the heat-transfer pattern 114 is bonded, or draws the thermal energy from the droplet discharge head 17. Thus, the temperature of the droplet discharge head 17 is adjusted. As described with reference to
As shown in
One surface of the heat-transfer base 114a is covered by the cover film 117. The other surface is covered by the base film 116 at its periphery and a part corresponding to the opening part 116a of the base film 116 is exposed. To the exposed part of the heat-transfer base 114a, the temperature adjustment element 111 is coupled in a heat conductive manner.
One surface of the terminal part 114b is covered by the base film 116 together with the heat-transfer base 114a. The other surface is covered by the cover film 117 from the heat-transfer base 114a to an intermediate part of the adjustment holes 115, exposing the terminal part 114b. The terminal part 114b that is exposed is coupled to the outer wall of the head body 74 in a heat conductive manner.
In each of the plurality of adjustment holes 115 formed at the boundary between the heat-transfer base 114a and the terminal part 114b, the width of the boundary between the heat-transfer base 114a and the terminal part 114b, and an arrangement of a part at which the heat-transfer base 114a and the terminal part 114b are connected can be adjusted by changing the width of the adjustment hole 115. By adjusting the arrangement of the part at which the heat-transfer base 114a and the terminal part 114b are connected, an amount of traveling heat per unit of time can be changed in an alignment direction of the discharge nozzles of the nozzle row.
Electrical Structure of Droplet Discharge Device
An electrical structure for driving the droplet discharge device 301 having the above-mentioned structure will be described with reference to
As shown in
To the temperature adjustment element driver 111d, the temperature adjustment element 111 of the temperature adjustment unit 110 is coupled. The temperature adjustment element driver 111d drives the temperature adjustment element 111 in accordance with a control signal from the CPU 44 so as to adjust the temperature of the droplet discharge head 17.
To the detecting part interface 43, the detecting part 42 including various sensors such as a head temperature sensor 142 for measuring the temperature of the droplet discharge head 17 is coupled. Detected information detected by each of the sensors of the detecting part 42 is transferred to the CPU 44 through the detecting part interface 43.
Arrangement of Functional Liquid
A process of arranging the functional liquid will be described with reference to
In a step S31 shown in
Here, as the temperature of the droplet discharge head 17, a temperature of such a part of the droplet discharge head 17 is used that the temperature of the part can be measured by relating variation of the temperature of the part to variation of the weight of a droplet discharged from the droplet discharge head 17. For example, a temperature of a part, to which the terminal substrate 112 does not contact, of an outer wall surface of the pump part 75, a temperature of the nozzle plate 76, a temperature of a part, which constitutes the pressure chamber 158, of the vibrating plate 152, and the like can be used.
The temperature of the outer wall surface of the pump part 75 and the temperature of the part, constituting the pressure chamber 158, of the vibrating plate 152 can be measured by disposing a head temperature sensor on these parts. Alternatively, the temperature of the part, constituting the pressure chamber 158, of the vibrating plate 152 can be measured by using the piezoelectric material of the piezoelectric element 159 as a temperature sensor. Further, the temperature of an outer wall surface of the droplet discharge head 75 and that of the nozzle plate 76 can be measured from a removed position by using a contactless infrared temperature sensor.
The discharge device controlling part 306 receives the drawing time saturated temperature from the input output device 68 of the controlling device 65, for example, and stored the temperature in the RAM 46 or the hard disk 48 thereof. The input output device 68 of the controlling device 65 and the like correspond to a temperature acquisition unit.
A head temperature of the droplet discharge head 17 is adjusted in a step S32. As described above, the temperature of the droplet discharge head 17 can be adjusted by controlling the temperature of the temperature adjustment element 111 of the temperature adjustment unit 110 by the discharge device controlling part 306. The temperature of the head 17 is adjusted to the drawing time saturated temperature by using the temperature adjustment unit 110.
In specific, a relation between the temperature of a part, of which the temperature is the drawing time saturated temperature of the head temperature of the droplet discharge head 17, and the temperature of the temperature adjustment element 111 is obtained in advance so as to form a table of the temperature relation between the head temperature and the temperature adjustment element 111 and store the table in the RAM 46 or the hard disk 48 of the discharge device controlling part 306. Then, the drawing time saturated temperature that is inputted in the step S31 is referred to the table of the temperature relation so as to obtain a temperature of the temperature adjustment element 111 corresponding to the drawing time saturated temperature. Subsequently, the temperature of the temperature adjustment element 111 is adjusted to a temperature corresponding to the drawing time saturated temperature that is obtained.
As described above, two temperature adjustment units 110 are disposed to one droplet discharge head 17, and each of the temperature adjustment units 110 is fixed along the nozzle row 78A of the droplet discharge head 17. Therefore, the temperature can be adjusted in each nozzle row 78A by using the temperature adjustment unit 110. Drawing time saturated temperatures are individually obtained for 120 rows of the nozzle rows 78A of the discharge unit 302. Temperatures corresponding to individual drawing time saturated temperatures of the 120 rows of the nozzle rows 78A included in the discharge unit 302 are used as the temperature of the temperature adjustment element 111 corresponding to the drawing time saturated temperature.
The discharge device controlling part 306 and the temperature adjustment unit 110 correspond to a temperature adjustment unit and also correspond to a heating unit and a cooling unit.
In a step S33, discharge weight measurement is executed. In accordance with the start of the weight measurement, the X-axis second slider 23 is moved in the X-axis direction by the X-axis linear motor 26, and the head unit 354 is moved in the Y-axis direction by the Y-axis linear motor. By this operation, the liquid receiving container 94 of each of the weight measurement devices 91 fixed on the X-axis second slider 23 is allowed to face a first droplet discharge head 17 of each of the head groups 55 of the head unit 354.
Weight measurement discharge is executed with respect to each liquid receiving container 94 from all nozzles in one nozzle row 78A of the first droplet discharge head 17 of each of the head groups 55. At this time, second and third droplet discharge heads 17 of each of the head groups 55 face the weight measurement time flashing box 95 and perform discarding discharge to the weight measurement time flashing box 95. After the weight measurement discharge of the predetermined amount is ended, the electronic balance 99 measures the weight of discharged droplets that land on the liquid receiving container 94.
The discharge weight measurement of the head groups 55 is executed by individually measuring discharge weight of the six nozzle rows 78A of three droplet discharge heads 17 included in the head groups 55. As described above, the droplet discharge device 301 includes 10 pieces of the head units 354 having two head groups 55 and 10 pieces of weight measurement blocks 91A having two pieces of the weight measurement units 19. By executing the discharge weight measurement of the six nozzle rows 78A in one head group 55 by one weight measurement unit 19, the discharge weight measurement of the 120 rows of the nozzle rows 78A included in the droplet discharge device 301 can be executed. The weight measurement unit 19 provided with the weight measurement device 91 corresponds to a discharge amount measurement unit.
In a step S34, the discharge weight that is measured in the step S33 is compared with a specified discharge weight and the discharge amount is adjusted so as to correspond to the mismatched amount from the specified discharge weight. The discharge amount can be adjusted by changing a voltage value (drive voltage) of high potential in a driving waveform of a drive signal that is applied to the piezoelectric element 159 and thus adjusting the amount of the functional liquid to be filled in the pressure chamber 158, as described above with reference to
The discharge amount is adjusted for each of the 120 rows of the nozzle rows 78A of the discharge unit 302. The drive voltage value of the drive signal that is applied to the droplet discharge head 17 from the head driver 17d is adjusted by the CPU 44 that is controlled by a program stored in the ROM 45 and the like. The CPU 44 of this case corresponds to a discharge amount adjustment unit.
In a step S35, the functional liquid is discharged from the droplet discharge head 17 of which the discharge amount is adjusted in the step S34 toward the filter film regions 225 and the like, that is, the drawing discharge is executed.
After the execution of the drawing discharge of the step S35, the process of arranging the functional liquid is ended.
Here, when a processing object such as the mother counter substrate 201A after the execution of the drawing discharge is exchanged with a new processing object, the droplet discharge head 17 is in a resting state. Therefore, the temperature of the head 17 in the execution of the drawing discharge may not be maintained. Therefore, in a case where the head 17 rests, for example, during the exchange of processing objects in the drawing discharge, it is preferable that the temperature adjustment unit 110 is operated so as to execute the temperature adjustment of the head 17.
Other Temperature Adjustment Units and Attachment of Other Temperature Adjustment Units
A structure of a temperature adjustment unit 310 that is different from the temperature adjustment unit 110, and an attachment structure of the droplet discharge head 17 to the carriage plate 53 and that of the temperature adjustment unit 310 in a head unit 374 having the temperature adjustment unit 310 will be described with reference to
As shown in
A part, which is not covered by the cover film 317 so as to be exposed, of the heat-transfer pattern 314 is bonded to an outer wall of the head body 74 of the droplet discharge head 17 by an adhesive made of a material having high thermal conductivity. On a part, which is exposed at an opening part 316a of the base film 316, of the heat-transfer pattern 314, the temperature adjustment element 311 is bonded and fixed by an adhesive made of a material having high thermal conductivity. The terminal substrate 312 has a plurality of the heat-transfer patterns 314, and the temperature adjustment element 311 is fixed on each of the heat-transfer patterns 314.
The temperature adjustment element 311 is electrically coupled to a discharge device controlling part similar to the discharge device controlling part 306 (refer to
The discharge device controlling part and the temperature adjustment unit 310 correspond to a temperature adjustment unit and also correspond to a heating unit and a cooling unit.
The temperature adjustment element 311 adjusts the temperature of the heat-transfer pattern 314, to which the temperature adjustment element 311 is fixed, so as to adjust the temperature of the outer wall of the head body 74 on which the heat-transfer pattern 314 is bonded. As described with reference to
As shown in
Attachment of the temperature adjustment unit 310 to the carriage plate 53 in the head unit 374 is same as that of the temperature adjustment unit 110 to the carriage plate 53 in the head unit 354 described with reference to
Electronic Apparatus
An electronic apparatus will be described with reference to
According to the second embodiment, the following advantageous effects are obtained in addition to the advantageous effects of the first embodiment.
(1) The head unit 354 and the head unit 374 respectively include the temperature adjustment unit 110 and the temperature adjustment unit 310. Therefore, the droplet discharge device 301 is capable of adjusting the temperature of the droplet discharge head 17 to a drawing time saturated temperature by using the temperature adjustment unit 110 or the temperature adjustment unit 310.
(2) Two pieces of the temperature adjustment units 110 and two pieces of the temperature adjustment units 310 are disposed for one droplet discharge head 17 having two nozzle rows 78A, and are fixed in a manner that the temperature of the outer wall nearly parallel with an extending direction of the nozzle rows 78A can be adjusted. With this structure, the temperature can be adjusted in each of the nozzle rows 78A by using the temperature adjustment unit 110 and the temperature adjustment unit 310.
(3) The terminal substrate 312 of the temperature adjustment unit 310 has the plurality of the heat-transfer patterns 314, and the temperature adjustment element 311 is fixed on each of the heat-transfer patterns 314. Therefore, the temperature is independently adjusted in each of the heat-transfer patterns 314. Accordingly, the temperature can be independently adjusted in individual discharge nozzles 78 or in a plurality of discharge nozzles 78 in a range corresponding to the heat-transfer pattern 314.
(4) The temperature adjustment unit 110 and the temperature adjustment unit 310 are respectively coupled through the terminal substrate 112 and the terminal substrate 312 that have flexibility to the droplet discharge head 17 in a heat conductive manner. Therefore, the temperature adjustment unit 110 and the temperature adjustment unit 310 are not necessarily positioned to the droplet discharge head 17 with high accuracy. Thus the temperature adjustment unit 110 and the temperature adjustment unit 310 can be easily attached to the head unit 354 and the head unit 374 respectively.
While the preferred embodiments are described with reference to the accompanying drawings, a preferred embodiment is not limited to the above embodiments. It should be understood that the invention is not limited to the above-mentioned embodiments, but can be applied to various modifications without departing from the scope and spirit of the invention. The invention can be applied as follows.
(Modification 1) In the above embodiments, a drawing time saturated temperature is obtained as a temperature, in a formation of a predetermined pattern, of the droplet discharge head 17 serving as the discharge unit so as to adjust the head temperature to the drawing time saturated temperature previous to the discharge weight measurement. However, an object for obtaining a temperature in a formation of a predetermined pattern and adjusting the temperature to the temperature in a formation of the predetermined pattern previous to the discharge weight measurement is not limited to the temperature of the discharge unit. A temperature of the droplet in a formation of a predetermined pattern may be obtained and the temperature of the droplet may be adjusted to the temperature in a formation of the predetermined pattern previous to the discharge weight measurement. If the temperature of the droplet varies, the viscosity of the droplet varies. The discharge amount (discharge weight) is influenced by the viscosity of the droplet that is discharged. The temperature of the droplet in the weight measurement is adjusted to the temperature of the droplet in a formation of the predetermined pattern, being able to suppress change of the discharge weight. The change of the discharge weight is caused by a difference between the temperature of the droplet in the weight measurement and the temperature of the droplet in a formation of the predetermined pattern. Accordingly, the discharge weight in a formation of the predetermined pattern can be properly duplicated in the weight measurement. Thus the discharge amount can be precisely measured.
(Modification 2) In the above embodiments, obtaining the drawing time saturated temperature, adjustment of the temperature, measurement of the discharge weight, and adjustment of the discharge amount are performed in each of the nozzle rows 78A as the nozzle group. However, the nozzle group is not always the nozzle row 78A. Any group of discharge nozzles is applicable as long as variation of the discharge amount caused by variation of temperatures of the discharge nozzles that are included in the nozzle group does not influence characteristics of a functional film that is drawn. For example, the nozzle group may be a nozzle group composed of one kind of discharge nozzles that are included in one discharge head such as the droplet discharge head 17, or a nozzle group composed of discharge nozzles that discharge the same functional liquid such as the discharge nozzles 78 included in the red discharge head 17R and the like described with reference to
Here, the temperatures of the discharge nozzles are, in the droplet discharge head 17, for example, a temperature of the outer wall of the pressure chamber 158, a temperature at a periphery of the discharge nozzles 78 of the nozzle plate 76, a temperature of a part, constituting the pressure chamber 158, of the vibrating plate 152, and the like. Alternatively, the temperatures are a temperature of the functional liquid in the pressure chamber 158, a temperature of the functional liquid in the discharge nozzles 78, a temperature of the functional liquid about to be discharged or the functional liquid immediately after discharged from the discharge nozzles 78, and the like.
(Modification 3) In the first embodiment, a drawing time saturated temperature is measured by the head temperature sensor 142. However, the drawing time saturated temperature need not to be actually measured as the temperature in a formation of a predetermined pattern. The drawing time saturated temperature may be obtained by estimation. The drawing time saturated temperature can be estimated in the same manner as the method in which the drawing time saturated temperature is obtained by estimating driving conditions of the warm-up drive described with reference to
As shown in
When warm-up drive is performed at a drive voltage a that is a drive voltage of a % of a design drive voltage by which a proper discharge amount is obtained, the head temperature converges at Ha° C. and the head temperature at the time point S becomes Ha° C. When drawing discharge is started at the head temperature of Ha° C., the head temperature increases as a temperature increasing curve indicated by a0 in
When warm-up drive is performed at a drive voltage b that is a drive voltage of b % of a design drive voltage by which a proper discharge amount is obtained, the head temperature converges at Hb° C. and the head temperature at the time point S becomes Hb° C. When drawing discharge is started at the head temperature of Hb° C., the head temperature decreases as a temperature decreasing curve indicated by b0 in
As is the case with the method described with reference to FIG. 18D, a value of the temperature of the droplet discharge head 17 at a point on which a line passing a point (a, Ha) and a point (b, Hb) meets a horizontal axis of the graph, that is, a value in a case where a slope becomes 0 is obtained when the horizontal axis of the graph shows a temperature, which is converged after warm-up drive, of the droplet discharge head 17 and a vertical axis shows a slope. The obtained temperature is assumed as the drawing time saturated temperature. Whether the obtained temperature is the drawing time saturated temperature or not can be examined by adjusting the temperature of the droplet discharge head 17 to the obtained temperature and starting the drawing discharge. In a case where the obtained temperature is the drawing time saturated temperature, if drawing discharge is started at the obtained temperature, the temperature of the droplet discharge head 17 hardly varies during the drawing discharge. Thus, in a case where the temperature of the droplet discharge head 17 is roughly settled from the start of the drawing discharge, the temperature is the drawing time saturated temperature. In this case, the discharge device controlling part 6 that estimates the drawing time saturated temperature by controlling the driving conditions of the droplet discharge head 17 corresponds to a temperature acquisition unit.
(Modification 4) In the above embodiments, a drawing time saturated temperature is obtained in advance, and the drawing time saturated temperature that is obtained in advance is acquired in the step of arranging the functional liquid. However, the drawing time saturated temperature need not to be obtained in advance as the temperature in a formation of a predetermined pattern. Instead of the step of acquiring the previously obtained temperature in a formation of a predetermined pattern, a step for acquiring a temperature in a formation of a predetermined pattern can be performed by measuring the temperature in a formation of the predetermined pattern or estimating temperature change from driving conditions of each nozzle performing drawing, a droplet discharge head, or a droplet discharge device including the nozzle and the head.
(Modification 5) In the first embodiment, the driving conditions with which the temperature of the droplet discharge head 17 becomes the drawing time saturated temperature by performing the warm-up drive is obtained and the warm-up drive is executed under the obtained conditions. However, the driving conditions with which the temperature of the head 17 becomes the drawing time saturated temperature are not always required. The temperature of the head 17 may be measured by a temperature sensor such as the head temperature sensor 142 that measures the temperature of the head 17, while performing the warm-up drive, and then the warm-up drive may be controlled depending on the measured result. The head temperature sensor 142 in this case corresponds to a temperature measurement unit included in a temperature adjustment unit.
(Modification 6) In the above embodiments, a drawing time saturated temperature of the droplet discharge head 17 is obtained, and the driving conditions of the warm-up drive by which the temperature of the head 17 becomes the drawing time saturated temperature is obtained by using the obtained drawing time saturated temperature as a reference. However, the drawing time saturated temperature need not be used as a reference. As is the case with Modification 2 described above, driving conditions by which the temperature of the head 17 becomes the drawing time saturated temperature may be estimated so as to be used as a reference. It may be assumed that the drawing time saturated temperature is achieved by performing the warm-up drive under the estimated driving conditions.
(Modification 7) In the second embodiment, a drawing time saturated temperature is measured by the head temperature sensor 142. However, the drawing time saturated temperature need not to be actually measured as the temperature in a formation of a predetermined pattern. As the example described in Modification 3, the drawing time saturated temperature may be estimated. The drawing time saturated temperature can be estimated in the same manner as the method in which the drawing time saturated temperature is obtained by estimating driving conditions of the warm-up drive described with reference to
As shown in
For example, the temperature adjustment unit 110 is operated so as to heat or cool the temperature of the droplet discharge head 17 to Ha° C. As described above, when drawing discharge is started at the head temperature of Ha° C., the head temperature increases as a temperature increasing curve indicated by a0 in
In the same manner, the temperature adjustment unit 110 is operated so as to heat or cool the temperature of the droplet discharge head 17 to Hb° C. As described above, when drawing discharge is started at the head temperature of Hb° C., the head temperature decreases as a temperature decreasing curve indicated by b0 in
As is the case with the method described with reference to
(Modification 8) In the second embodiment, the temperature of the temperature adjustment element 111 is adjusted to a temperature corresponding to the drawing time saturated temperature, which is obtained in advance, of the droplet discharge head 17 so as to adjust the temperature of the head 17 to the drawing time saturated temperature. However, the temperature, corresponding to the drawing time saturated temperature of the head 17, of the temperature adjustment element 111 is not necessarily obtained. The temperature of the temperature adjustment element 111 may be controlled corresponding to a measured result of the temperature of the droplet discharge head 17. The measured result is obtained by measuring by a temperature sensor such as the head temperature sensor 142 that measures the temperature of the head 17. Since a measured value of the temperature of the head 17 is adjusted to the drawing time saturated temperature, the temperature of the head 17 can be adjusted to the drawing time saturated temperature with higher accuracy. The head temperature sensor 142 in this case corresponds to a temperature measurement unit included in a temperature adjustment unit.
(Modification 9) In the above embodiments, the head temperature sensor 142 is, for example, a contact type temperature sensor, and contacts with either of the outer wall of the pump part 75, the nozzle plate 76, and the part, which constitutes the pressure chamber 158, of the vibrating plate 152 so as to measure either of the temperature of these. However, the head temperature sensor is not necessarily the contact type temperature sensor. The head temperature sensor may be a non-contact type infrared ray temperature sensor.
(Modification 10) In the above embodiments, a drive voltage is specified as a driving condition of the warm-up drive. However, the drive voltage is not necessarily specified as the driving condition of the warm-up drive and adjusted for changing the driving condition. The discharge amount and the temperature of the droplet discharge head can be adjusted by changing various elements of the driving waveform described with reference to
(Modification 11) In the above embodiments, the droplet discharge device 1 and the droplet discharge device 301 include the weight measurement device 91 for measuring the weight of the functional liquid, which is discharged, as a device for measuring the discharge amount of the head 17. However, the discharge amount is not necessarily measured by measuring the discharge weight. For example, the discharge amount may be measured by obtaining a size or a volume of a droplet by an optical method. The discharge amount may be measured by obtaining a volume of a droplet by optically measuring a size of a flying droplet, a shape and a size of a droplet immediately after landing on an object, or a size of a droplet that lands and spreads on an object.
(Modification 12) In the above embodiments, six pieces of the droplet discharge heads 17 are provided to the head unit 54 of the droplet discharge device 1 or the head unit 354 of the droplet discharge device 301. However, the number of the droplet discharge heads provided to the head unit is not limited to six. The head unit may be provided with any number of droplet discharge heads.
(Modification 13) In the above embodiments, the droplet discharge device 1 as the droplet discharge device is provided with a pair of head units 54 and the droplet discharge device 301 is provided with a pair of head units 354. However, the liquid discharge device is not necessarily provided with a pair of head units. The liquid discharge device may be provided with any number of pairs of head units.
(Modification 14) In the above embodiments, the heat-transfer pattern 114 and the heat-transfer pattern 314 as a heat-transfer member transferring heat between the temperature adjustment element 111 or the temperature adjustment element 311 and the droplet discharge head 17 are formed to have a shape of a substrate in which a metal material having a foil shape or a thin plate shape is sandwiched by films. However, the shape of the heat-transfer member is not limited to the shape of a substrate. The heat-transfer member may have any shape as long as the member can be brought into contact with the discharge head and transfer heat. The heat-transfer member may be made of any material as long as the material has high thermal conductivity.
(Modification 15) In the above embodiments, the heat-transfer pattern 114 and the heat-transfer pattern 314 as a heat-transfer member transferring heat between the temperature adjustment element 111 or the temperature adjustment element 311 and the droplet discharge head 17 are formed to have a shape of a substrate in which a metal material having a foil shape or a thin plate shape is sandwiched by films. However, the heat-transfer member is not always a solid substance such as a metal. Heat may be transferred by circulating the droplet in a flowing path provided between the temperature adjustment element and the droplet discharge head.
(Modification 16) In the above embodiments, the heat-transfer pattern 114 or the heat-transfer pattern 314 as the heat-transfer member for transferring heat between the temperature adjustment element 111 or the temperature adjustment element 311 and the droplet discharge head 17 is bonded to the outer wall of the head body 74 of the head 17 by an adhesive made of a material having high thermal conductivity. However, the adhesive is not necessarily used for fixing the heat-transfer member to the discharge head. Any fixing method may be employed as long as thermal conduction can be performed well. Further, any coupling method for coupling the temperature adjustment element and the heat-transfer member may be employed as long as thermal conduction can be performed well.
(Modification 17) In the above embodiments, the drawing discharge by which the filter film 205 of the liquid crystal display panel 200 is formed is described. However, a film that is formed is not limited to the filter film. A film that is formed may be a pixel electrode film, an alignment film, or a counter electrode film of the liquid crystal display device, or an overcoat film formed to protect a color filter.
A device having a film to be formed, or a device in which a film needs to be formed in a forming process is not limited to the liquid crystal display device. The device may be any device as long as the device has the above-mentioned film or a device in which the above-mentioned film needs to be formed. For example, the device may be an organic EL display device. A functional film formed by the droplet discharge device in manufacturing the organic EL display device may be a positive electrode film or a negative electrode film of the organic EL display device, a film used in forming a pattern by photo-etching, or a photo-resist film for photo-etching.
(Modification 18) In the above embodiments, the liquid crystal display panel 200, which is an example of the electrooptical device, provided with a color filter is described as an example of a drawing object on which the drawing is performed by arranging the functional liquid by the droplet discharge device 1. The wiring substrate 270 having wirings made of a conductive material is described as a drawing object. However, the drawing object is not limited to the electrooptical device or the wiring substrate. The liquid discharge device and the liquid discharging method described above may be used as a manufacturing device and as a manufacturing method for disposing various functional liquids so as to perform various processes on various processing objects. For example, the liquid discharge method and the liquid discharge device may be used as respectively a method and a device for processing a semiconductor wafer and a wiring conducting layer of a semiconductor device on which liquid conductive material is discharged, or may be used as respectively a method and a device for processing a semiconductor wafer and an insulating layer of a semiconductor device on which a liquid insulation material is discharged.
(Modification 19) In the above embodiments, the CF layer 208 provided on the liquid crystal display panel 200 is a three-color filter having filter films of three colors, i.e., the red filter film 205R, the green filter film 205G, and the blue filter film 205B. However, the color filter may be a multiple-color filter having more kinds of filter films. The multiple-color filter is a six-color filter, a four-color filter, and the like, for example. The six-color filter includes organic EL elements of cyan, magenta, and yellow which are complementary colors of red, green, and blue as well as organic EL elements of red, green, and blue. The four-color filter includes an element of green as well as elements of cyan, magenta, and yellow.
(Modification 20) In the above embodiments, the filter film region 225 serving as a film forming section, a functional film section, or a color element region has a rectangular shape. However, the film forming section, the functional film section, or the color element region is not necessarily rectangular. A display device of which a pixel shape is different from a rectangular shape has been designed recently so as to improve a display characteristic. The film forming section, the functional film section, or the color element region may have a shape in which a pixel having a different shape from a rectangle can be formed.
(Modification 21) In the above embodiments, in a single film forming region, a single function film region, or a single filter region film, the filter film regions 225 serving as the film forming sections, the functional film sections, or the color element regions have the same size and the same shape as each other. However, the film forming sections, the functional film sections, or the color element regions do not necessarily have the uniform size in a single film forming region, a single functional film region, or a single filter film region. For example, the film forming region, the functional film region, or the filter region film may have film forming sections, functional film sections, or color element regions having different sizes from each other, such that color elements constituting a minimum unit of display in a four-color filter have different sizes from each other so as to correspond to a characteristic of a light source, for example.
(Modification 22) In the above embodiments, the droplet discharge device 1 and the droplet discharge device 301 move the work placing board 21, on which the mother counter substrate 201A and the like are placed, in the main scanning direction, and at the same time discharges the functional liquid from the droplet discharge head 17 so as to arrange the functional liquid. Further, the device 1 and the device 301 respectively move the head unit 54 and the head unit 354 in the sub-scanning direction so as to position the droplet discharge head 17 (discharge nozzles 78) to the mother counter substrate 201A and the like. However, the device 1 and the device 301 do not necessarily perform the relative move between the droplet discharge head as an arranging head and the mother substrate in the main-scanning direction by moving the mother substrate, or perform a relative move in the sub-scanning direction by moving the discharge head.
The relative move between the discharge head and the mother substrate in the main-scanning direction may be performed by moving the discharge head in the main-scanning direction. The relative move between the discharge head and the mother substrate in the sub-scanning direction may be performed by moving the mother substrate in the sub-scanning direction. Alternatively, the relative move between the discharge head and the mother substrate in the main-scanning direction and the sub-scanning direction may be performed by moving one of the discharge head and the mother substrate in the main-scanning direction and the sub-scanning direction, or may be performed by moving both of the discharge head and the mother substrate in the main-scanning direction and the sub-scanning direction.
(Modification 23) In the above embodiments, the droplet discharge device 1 and the droplet discharge device 301 provided with the ink-jet type droplet discharge head 17 are illustrated as the droplet discharge device that arranges a functional liquid on the mother counter substrate 201A and the like. However, the droplet discharge device is not necessarily the droplet discharge device. The droplet discharge device may be a discharge device having a dispenser, for example. In a case where a large amount of a film material needs to be arranged on a large sized film forming section, a dispenser of which the discharge amount per unit time is larger than that of the droplet discharge head is useful.
The entire disclosure of Japanese Patent Application No. 2008-139051, filed May 28, 2008 is expressly incorporated by reference herein.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2008-139051 | May 2008 | JP | national |
