This invention relates generally to laser diodes, and more particularly is related to laser diode arrays and methods for manufacturing laser diode arrays.
Laser diode arrays are in general used in a wide variety of industrial and research applications. Pluralities of diode bars are mounted on a substrate to provide the multiplied power of numerous bars, versus the effect offered by a single bar. For arrays that are operated in harsh environments such as high temperatures or rapidly changing temperatures it is desired that the entire array assembly be assembled with high temperature, so-called hard solders. In arrays that are fabricated with high temperature solders it is imperative to minimize the stress induced in the laser bar from the assembly process. To optimize the efficiency of a multiple diode bar array the materials used must also have high electrical conductivity and thermal conductivity. Historically, this has required the use of materials that have different thermal expansion properties. In a hard soldered assembly small thermal expansion mismatches can cause stress on the bars and hence reliability issues. In addition good alignment of the bars is necessary to maintain high efficiency, good performance, and high reliability.
Laser diode arrays characteristically have large heat dissipation per unit area of the laser diodes. This increase in temperature results in a limitation on output intensity. As the temperature increases and decreases, the device is subject to thermal cycling, shortening the life of the array. Furthermore, at higher temperatures the laser emission will be shifted in wavelength due to temperature induced shifts of the semiconductor bandgap.
Several patents have been directed to improve the heat removal capability of laser diode arrays. Specifically, array designs have incorporated macrochannel cooling as a means for heat removal. Microchannel coolers are small devices with channels etched therein to supply a coolant in close proximity to the heat source. See for example, U.S. Pat. Nos. 5,105,429; 5,311,530; 6,480,514; 6,865,200 and 7,016,383.
These prior art patents require complex assemblies involving many individual components joined together mechanically and using o-rings to seal the fluid paths. This makes assemblies of micro-channel coolers somewhat fragile, prone to fluid leaks and misalignment. In addition, the small fluid channels used in micro-channel coolers are prone to blockage and thus require filtered water as the cooling fluid which adds to operating costs. The high water velocity in the channels also leads to erosion of the channels, leading to failure of the assembly. Moreover, since the water is in the electrical path it must be electrically insulating or de-ionized. De-ionized water is somewhat corrosive, and thus requires corrosive resistant materials and coatings to prevent the device from rapidly degrading.
Several prior art designs also have incorporated macrochannel cooling as a means for heat removal. However, macrochannel cooler assemblies have suffered from an inability to meet the cooling performance of micro-channel assemblies and have therefore been limited to certain low power applications or applications where the laser diode bars can be placed far enough apart to enable the heat generated in each bar to be removed. In addition macrochannel cooler assemblies have typically employed soft low temperature, so-called soft solders to permit movement between thermally expansion mismatched materials. While soft solders permit movement and thus reduce stress, they are subject to fatigue type failures and can creep over time leading to catastrophic failure.
The foregoing discussion of the prior art derives from U.S. Pat. No. 7,660,335 in which there is described a laser bar array having a plurality of laser bars sandwiched between a spacer material having a thermal expansion that closely matches that of the laser bars, and mounted by solder to a substrate. According to the '335 patent, the spacer material is formed of a diamond/composite material comprising 30/50 volume % diamond, and the balance comprising primarily copper. The diamond particles have a maximum size of 500 microns.
We have now discovered certain other materials have thermal expansion properties that closely matches that of the laser bars and advantageously may be used as spacer materials in liquid cooled laser bar arrays. More particularly, we have discovered that spacer materials formed of an aluminum/diamond composite, a silver/diamond composite or a silver/aluminum alloy/diamond composite have a thermal expansion co-efficient that closely matches that of the laser diodes, and advantageously may be used in a liquid cooled laser bar array in which the laser diode bars are soldered to the electrically conductive spacers. Using as a spacer material an aluminum/diamond composite, a silver/diamond composite or a silver/aluminum alloy/diamond composite having a thermal expansion that closely matches that of the laser bars minimizes stress induced by thermal expansion, and also permits the use of hard solders. The monolithic nature of the laser bar/spacer assembly also means that heat is removed from both sides of the laser bar rather than just one side as is the case with micro-channel cooler assemblies. The monolithic laser diode bar/spacer assembly is then mounted on an electrically isolating expansion matched ceramic using hard solder. This in turn is mounted on a macro-channel cooler. The high thermal conductivity of the spacers enables such assemblies to operate at powers previously only possible with the use of micro-channel coolers, and the monolithic type of construction makes the assemblies extremely mechanically robust. The water path is isolated from the electrical path and hence does not require the use of de-ionized water. Also, the monolithic construction means that only a single coolant seal is needed. This monolithic construction also allows the use of soft metal seals which significantly reduces the possibility of coolant leaks. The invention is particularly useful in high-powered continuous wave (CW) laser diode arrays as well as high-powered pulsed lasers.
Further features and advantages of the invention will be seen from the following detailed description, taken in conjunction with the accompanying drawings, wherein like numerals depict like parts, and wherein:
The present invention provides laser diode array assembly with improved heat removal capability and reliability. More particularly, in accordance with the present invention, the laser bar array 12 includes spacer material 14 formed of an aluminum/diamond composite, a silver/diamond composite, or a silver/aluminum alloy/diamond composite material that has a thermal expansion that closely matches that of the laser bars 16. This permits the use of a hard solder and provides increased reliability. This array is then mounted on a heatsink or substrate with an intervening ceramic layer 28 to provide electrical isolation.
Two holes 18, 20 for supplying a coolant are formed in substrate 30. One hole 18 is used as an inlet for coolant fluid while the other hole 20 is used as an outlet. Inlet 18 and outlet 20 are connected via conduits 22 and 24, respectively, to a coolant fluid (gas or liquid) circulatory system (not shown).
Laser bars 16 are formed of conventional laser diode materials. A feature and advantage of the present invention results from forming the spacer 14 from an aluminum/diamond composite, a silver/diamond composite or a silver/aluminum alloy/diamond composite material is that the spacer material has a thermal expansion that closely matches the thermal expansion of the laser bars 16. This reduces stress in the assembly and also permits the use of hard solder. Typically the aluminum/diamond composite or the silver/diamond composite material may comprise 30-70% by volume diamond depending on the composite. For aluminium/diamond, the composition is preferably 40-70% by volume diamond, more preferably 50-65% by volume diamond. For silver/diamond, the composition is preferably 30-60% by volume diamond, more preferably 35-55% by volume diamond. Preferably the diamond particles are relatively uniform in size and typically have a maximum size of about 500 microns, preferably less than 200 microns, more preferably less than 100 microns. If desired, the diamond particles may be coated, e.g., with a layer of Cr, W, Mo, Co, Ti, Si, SiC, TiN, TiC, Ta or Zr. The aluminum/diamond ratio, the silver/diamond ratio, or the silver/aluminum alloy/diamond ratio in the composite material is chosen to provide a material that has a thermal expansion that closely matches that of the laser bar material. As a result, the laser diode bars may be soldered directly to the spacers using a hard, high temperature solder such as a gold/tin solder or gold/germanium solder which are given as exemplary.
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While the present invention has been described in connection with a macrochannel cooled laser array, it is not necessary that the substrate comprise a marcro-channel cooler. Rather, the heat sink may comprise a microchannel cooler, or an air cooled heat sink. Thus, the embodiments and examples set forth herein were presented in order to best explain the present invention and its practical application and to thereby enable those of ordinary skill in the art to make and use the invention. However, those of ordinary skill in the art will recognize that the foregoing description and examples have been presented for the purposes of illustration and example only. The description as set forth is not intended to be exhaustive or to limit the invention to the precise form disclosed. Many modifications and variations are possible in light of the teachings above without departing from the spirit and scope of the present invention.