Liquid crystal display device and fabricating method thereof

Information

  • Patent Grant
  • 6741316
  • Patent Number
    6,741,316
  • Date Filed
    Tuesday, December 17, 2002
    22 years ago
  • Date Issued
    Tuesday, May 25, 2004
    20 years ago
Abstract
Disclosed are a liquid crystal display device and a fabricating method thereof facilitating a cell-cutting process in cutting cells by the process of simultaneous scribing and breaking. The present invention includes a substrate, a closed-end main UV-hardening sealant on the substrate, and a closed-end dummy UV-hardening sealant on a periphery of the main UV-hardening sealant, wherein a width of one portion of the closed-end dummy UV-hardening sealant overlapped with a scribing line is narrower than the width of the other portions.
Description




BACKGROUND OF THE INVENTION




1. Field of the Invention




The present invention relates to a liquid crystal display device, and more particularly, to a liquid crystal display device and a fabricating method thereof using liquid crystal dropping.




2. Discussion of the Related Art




Generally, a liquid crystal display (LCD) device among ultra-thin flat panel displays, each having a display screen several centimeters thickness, operates at a low voltage, thereby consuming less power as well as being portable. Therefore, the liquid crystal display device has wide applicability in various fields such as a notebook computer, a monitor, a spacecraft, an airplane, and the like.




Such a liquid crystal display device generally includes a lower substrate having thin film transistors and pixel electrodes formed thereon, an upper substrate having a black matrix layer, a color filter layer, and a common electrode formed thereon so as to confront the lower substrate, and a liquid crystal layer formed between the lower and upper substrates. An electric field is generated between the substrates by the pixel and common electrodes to drive the liquid crystal layer. Light transmittance through the liquid crystal layer is controlled through the driven liquid crystal layer to display an image.




In the above-constituted liquid crystal display, the liquid crystal layer is formed between the lower and upper substrates by vacuum injecting liquid crystals between the two bonded substrates using capillary and pressure difference. Yet, such a method takes a long time for the liquid crystal injection to reduce productivity as the substrates become wider.




In order to overcome such a problem, a new method of liquid crystal dropping has been proposed, and a method of fabricating a liquid crystal display device by liquid crystal dropping according to a related art is explained by referring to the attached drawings as follows.





FIGS. 1A

to


1


E illustrate perspective view of a method of fabricating a liquid crystal display device by liquid crystal dropping according to a related art.




Referring to

FIG. 1A

, lower and upper substrates


1


and


3


are prepared. A plurality of gate and data lines (not shown in the drawing) are formed on the lower substrate


1


to cross each other to define pixel areas, respectively. A thin film transistor (not shown in the drawing) is formed at each of the crossing points between the gate and data lines. And, a pixel electrode(not shown in the drawing) is formed in each of the pixel areas to be connected to the corresponding thin film transistor.




And, a black matrix layer is formed on the upper substrate


3


to prevent light from leaking from the areas where the gate lines, data lines, and thin film transistors are formed. A color filter layer of red, green, and blue is formed on the upper substrate


3


. A common electrode is formed on the upper substrate


3


.




An alignment layer is formed on at least one of the lower and upper substrates


1


and


3


for initial alignment of liquid crystals.




Referring to

FIG. 1B

, a main sealant


7


and a dummy sealant


8


are formed on the lower substrate


1


. Liquid crystal


5


is applied onto the lower substrate


1


to form a liquid crystal layer. Spacers (not shown in the drawing) are scattered on the upper substrate


3


to maintain a cell gap.




The main sealant


7


prevents leakage of the liquid crystal as well as bonds the lower and upper substrates


1


and


3


to each other.




The dummy sealant


8


protects the main sealant


7


and is formed in a dummy area on a periphery of the main sealant


7


.




Yet, when an LCD panel is formed by applying liquid crystal onto a substrate, bonding of two substrates


1


and


3


is carried out after the liquid crystal has been dropped. Hence, if a thermo-hardening sealant is used as the sealant, the sealant


7


flows out during heating and contaminates the liquid crystals


5


. Therefore, the liquid crystal application uses a UV (ultraviolet) hardening sealant as the sealant.




Referring to

FIG. 1C

, the lower and upper substrates


1


and


3


are bonded to each other.




Referring to

FIG. 1D

, ultraviolet light from a UV light applier (lamp)


9


is irradiated on the sealant


7


to be hardened, whereby the lower and upper substrates


1


and


3


are bonded to each other completely.




Referring to

FIG. 1E

, the bonded substrate


1


and


3


are cut into cell units to complete liquid crystal cells, respectively.





FIG. 2

illustrates a perspective view for explaining a cell cutting process of cutting substrates into cell units according to a related art.




Referring to

FIG. 2

, a scribing line


10


is formed on surfaces of the bonded substrates


1


and


3


using a scribing device such as a diamond pen having a hardness greater than that of glass, which is commonly used as a substrate material (scribing process). Mechanical shock is then impacted on the bonded substrates


1


and


3


along the scribing line using a breaking device (breaking process), whereby a plurality of unit cells are obtained.




Instead, the scribing and breaking processes may be combined into a single process using a diamond based pen or wheel to obtain each unit cell.




Meanwhile,

FIG. 2

is intended to show the cell cutting process only, rather than the cell scribing line. However, a plurality of cell scribing lines are formed substantially to remove the dummy area in the periphery when the substrates are cut into unit cells.





FIG. 3

is intended to show the cell-scribing lines in detail and illustrates a layout of a lower substrate in a liquid crystal display device having sealants


7


and


8


formed thereon for showing cell-scribing lines


10


according to a related art.




Referring to

FIG. 3

, the cell-scribing line


10


is overlapped with the dummy sealant


8


at predetermined areas (circles). In this case, the dummy sealant


8


has been hardened by the UV irradiation process prior to the cell cutting process.




Hence, the method of forming the unit cells by scribing and then breaking is not influenced by the hardened dummy sealant


8


. However, the method of forming the unit cells by simultaneously scribing and breaking to cut the substrates into unit cells does not work well due to the hardened dummy sealant


8


.




SUMMARY OF THE INVENTION




Accordingly, the present invention is directed to a liquid crystal display device and a fabricating method thereof that substantially obviate one or more problems due to limitations and disadvantages of the related art.




An advantage of the present invention is to provide a liquid crystal display device and a fabricating method thereof that facilitates a cell-cutting process in cutting cells by the simultaneous process of scribing and breaking.




Additional advantages and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention. The objectives and other advantages of the invention may be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.




To achieve these and other advantages and in accordance with the purpose of the invention, as embodied and broadly described herein, a liquid crystal display device according to the present invention includes a substrate, a closed-end main UV-hardening sealant on the substrate, and a closed-end dummy UV-hardening sealant on a periphery of the main UV-hardening sealant, wherein a width of one portion of the closed-end dummy UV-hardening sealant overlapped with a scribing line is narrower than that of the other portions.




In another aspect of the present invention, a method of fabricating a liquid crystal display device includes preparing lower and upper substrates, forming a closed-end main UV-hardening sealant on one of the lower and upper substrates, forming a closed-end dummy UV-hardening sealant on a periphery of the main UV-hardening sealant so that a width of one portion of the UV-hardening sealant overlapped with a scribing line is narrower than that of the other portions, applying a liquid crystal on one of the lower and upper substrates, bonding the lower and upper substrates to each other, applying UV light to the bonded substrates, and cutting the bonded substrates into unit cells along the scribing line.




Namely, the present invention is characterized in that the width of the dummy UV-hardening sealant overlapped with the cell-scribing line is formed narrower to facilitate to cut the bonded substrates into the cell units.




It is to be understood that both the foregoing general description and the following detailed description of the present invention are exemplary and explanatory and are intended to provide further explanation of the invention as claimed.











BRIEF DESCRIPTION OF THE DRAWINGS




The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principle of the invention.




In the drawings:





FIGS. 1A

to


1


E illustrate a perspective view for explaining a method of fabricating a liquid crystal display device by liquid crystal application according to a related art;





FIG. 2

illustrates a perspective view for explaining a cell cutting process according to a related art;





FIG. 3

illustrates a layout of a lower substrate in a liquid crystal display device having sealants formed thereon for showing cell-scribing lines according to a related art;





FIG. 4A

illustrates a layout of one substrate for a liquid crystal display device according to one embodiment of the present invention;




FIG.


4


B and

FIG. 4C

illustrate layouts of substrates for liquid crystal displays according to other embodiments of the present invention, respectively;





FIGS. 5A

to


5


E illustrate perspective views for explaining a process of fabricating a liquid crystal display device according to one embodiment of the present invention; and





FIG. 6

illustrates a perspective view of UV light irradiation in a process of fabricating a liquid crystal display device according to another embodiment of the present invention.











DETAILED DESCRIPTION OF THE ILLUSTRATED EMBODIMENTS




Reference will now be made in detail to the embodiments of the present invention, examples of which are illustrated in the accompanying drawings. Wherever possible, the same reference numbers will be used throughout the drawings to refer to the same or like parts.





FIG. 4A

illustrates a layout of one substrate for a liquid crystal display device according to one embodiment of the present invention. Four unit cells are formed but the number of the unit cells is arbitrary.




Referring to

FIG. 4A

, a main UV-hardening sealant


700


is formed as a closed pattern having no inlet on a substrate


100


.




A dummy UV-hardening sealant


800


is formed as a closed pattern on a periphery of the main UV-hardening sealant


700


. In this case, a width of a portion of the dummy UV-hardening sealant


800


overlapped with a cell-scribing line


600


is formed narrower than that of the remaining portion of the dummy UV-hardening sealant


800


.




In this case, the other width of the dummy UV-hardening sealant


800


formed in the area that does not overlap the cell-scribing line


600


is preferably about 1.1±0.3 mm, and the width of a portion of the dummy UV-hardening sealant


800


overlapped with a cell-scribing line


600


is preferably about 0.5±0.3 mm.




Moreover, the area having the narrower width preferably extends to about 5 mm long centering around the cell-cutting line


600


.




Each of the main and dummy UV-hardening sealants


700


and


800


preferably uses a mixture of monomer or oligomer having acryl groups bonded to both ends with initiator, or another mixture of monomer or oligomer having acryl and epoxy groups bonded to both ends, respectively, with initiator.




Meanwhile, in the one embodiment of the present invention shown in

FIG. 4A

, the width of the dummy UV-hardening sealant is narrow in all the areas overlapped with the cell-scribing line


600


.




However, in case the cells are cut along the cell-scribing line by the simultaneous scribing and breaking process, the dummy UV-hardening sealant at right or left edges of the substrate is removed if the substrates are cut along the cell-scribing line at a right side edge or a left side edge of the substrate. Hence, the removed dummy UV-hardening sealant has no influence on a later cell-cutting process.




Therefore, if the widths of the dummy UV-hardening sealant along the upper and lower edges of the substrate and overlapped with the cell-scribing line, as shown in FIG.


4


B, are formed narrow only or if the widths of the dummy UV sealant along the left and right side edges of the substrate, as shown in

FIG. 4C

, are formed narrow only, the same effect is attained for facilitating the cell cutting process.




It is a matter of course that one manner shown in

FIG. 4B

is applied to the case that the cell is cut firstly in the up and down direction. And, the other manner shown in

FIG. 4C

is applied to the other case the cell is cut firstly in the right and left direction.




Meanwhile, the liquid crystal display device includes lower and upper substrates and a liquid crystal layer formed between the two substrates, in which the sealants can be formed on one of the two substrates.




Hence, if one of the two substrates for the liquid crystal display device according to one embodiment of the present invention shown in

FIG. 4A

to

FIG. 4C

is the lower substrate, gate and data lines, thin film transistors, and pixel electrodes are formed on the substrate


100


. Otherwise, a black matrix, a color filter layer, and a common electrode are formed on the substrate


100


.




Moreover, a column spacer for maintaining a cell gap can be attached to one of the substrates for the liquid crystal display device. Such a column spacer is formed in an area corresponding to a gate or data line forming area and is preferably formed of a photo-reactive organic resin.





FIGS. 5A

to


5


E illustrate perspective views of a process of fabricating a liquid crystal display device according to one embodiment of the present invention, in which four unit cells are formed, but the number of the unit cells is arbitrary.




Referring to

FIG. 5A

, a lower substrate


200


and an upper substrate


300


are prepared.




Although not shown in the drawing, a plurality of gate and data lines are formed on the lower substrate


200


to cross with each other to define pixel areas, respectively. A thin film transistor including a gate electrode, a gate insulating layer, a semiconductor layer, an ohmic contact layer, source/drain electrodes, and a passivation layer is formed at each of the intersections between the gate and data lines. A pixel electrode is formed in each of the pixel areas to be connected to the thin film transistor.




Moreover, an alignment layer for initial alignment of liquid crystals is formed on the pixel electrode. In this case, the alignment layer can be formed by carrying out rubbing alignment treatment on a material such as polyamide, poyimide-based compound, polyvinylalcohol (PVA), polyamic acid, or the like or photo-alignment treatment on a photo-reactive material such as PVCN (polyvinylcinnamate), PSCN (polysiloxanecinnamate), or Cecl (cellulosecinnamate) based compound.




A black matrix layer is formed on the upper substrate


300


so as to prevent light from leaking from the areas where the gate lines, data lines, and thin film transistors are formed. A color filter layer of red, green, and blue is formed on the upper substrate


3


. A common electrode is formed on the upper substrate


3


. In addition, an overcoat layer can be further formed between the color filter layer and the common electrode. Moreover, the above-explained alignment layer is formed on the common electrode.




Silver (Ag) dots are formed on a circumference of the lower substrate


200


so that a voltage can be applied to the common electrode on the upper substrate


300


after completion of a bonding process of the substrates


200


and


300


.




Meanwhile, in case of an IPS (in-plane switching) mode liquid crystal display device, the common electrode is formed on the lower substrate having the pixel electrodes formed thereon to induce a horizontal electric field without forming the Ag dots.




Referring to

FIG. 5B

, a closed main UV-hardening sealant


700


is formed on the upper substrate


300


, and a closed dummy UV-hardening sealant


800


is formed on a periphery of the main UV-hardening sealant


700


so that a width of a portion overlapped with a cell-scribing line is narrower than that of the remaining portion.




The dummy UV-hardening sealant


800


is not shown in detail in the drawing but can be understood by referring to

FIG. 4A

to FIG.


4


C.




The sealants


700


and


800


can be formed thereon by one of a screen printing method, a dispensing method, and the like. However, the screen printing method has a screen come into contact with a substrate, which can possibly cause damage on an alignment layer on the substrate or the like. The screen printing method applied to a large-sized substrate can also result in a great loss of sealant, thereby becoming uneconomical. Therefore, the dispensing method is preferably used.




In order to coat the dummy UV-hardening sealant


800


using the dispensing method, the speed at which the sealant is coated on the area that overlaps with the cell-scribing line is greater than the speed at which the sealant is coated on the other area. In this case, the sealant is coated at a speed of about 110 mm/s on one portion of each about 5 mm in length crossing with the cell-scribing line to have the width of about 0.5±0.3 mm. The sealant is coated at a speed of about 90 mm/s on the remaining portion to have the width of about 1.1±0.3 mm.




The main or dummy UV-hardening sealant


700


or


800


preferably uses a mixture of monomer or oligomer having acryl groups bonded to both ends with initiator, or another mixture of monomer or oligomer having acryl and epoxy groups bonded to both ends, respectively with initiator.




Liquid crystal


500


is applied on the lower substrate


200


to form a liquid crystal layer.




The liquid crystal


500


coming into contact with the unhardened main UV-hardening sealant


700


becomes contaminated. Hence, the liquid crystal


500


is preferably applied, dispensed or dropped onto a central portion of the lower substrate


200


. The liquid crystal


500


dropped on the central portion spreads slowly, even after the main UV-hardening sealant


700


has been hardened, thereby being distributed uniformly on the substrate with the same density.




Meanwhile,

FIG. 5B

illustrates the process of coating the sealants


700


and


800


on the upper substrate


300


after the liquid crystal


500


has been applied onto the lower substrate


200


. Instead, the liquid crystal


500


and UV-hardening sealants


700


and


800


can also be formed on the upper and lower substrates


200


and


300


, respectively.




Besides, the liquid crystal


500


and UV-hardening sealant


700


and


800


can be formed on the same substrate. Yet, in case that the liquid crystals


500


and UV-hardening sealant


700


and


800


are formed on the same substrate, an imbalance in the number of process steps is generated between forming the substrate having the liquid crystals


500


and the UV-hardening sealants


700


and


800


and forming the other substrate without the liquid crystal


500


and UV-hardening sealants


700


and


800


, thereby resulting in a longer overall processing time. Since the liquid crystal and the sealants are formed on the same substrate, it is difficult to clean the substrate having the sealants to remove contaminants before the bonding. Therefore, it is preferable that the liquid crystals and the sealants are formed on different substrates, respectively.




Besides, although not shown in the drawing, spacers can be formed on one of the substrates


200


and


300


, and preferably, on the upper substrate


300


, to maintain a cell gap.




The spacers can be formed by mixing ball spacers with a solution with a proper concentration and spraying the mixed solution including the ball spacers on the substrate through a spraying nozzle at high pressure or by attaching column spacers to the substrate to correspond to the area having the gate or data lines formed thereon. Since the ball spacers applied to a large-sized substrate is disadvantageous because a cell gap becomes uneven, it is preferable to form the column spacers on the large-sized substrate.




In this case, the column spacers are preferably formed with photosensitive (photo-reactive) organic resin.




Referring to

FIG. 5C

, the lower and upper substrates


200


and


300


are bonded to each other.




The bonding process is carried out by fixing one substrate having the liquid crystals dropped thereon to a bottom surface, rotating 180° the other substrate to be placed over the fixed substrate so that a layer-formed surface faces downward, and pressurizing the substrate over the fixed substrate to bond the two substrates to each other or forming a vacuum state in a space between the substrates and releasing the vacuum state to bond the substrates to each other.




Referring to

FIG. 5D

, UV light is irradiated on the bonded substrates using a UV light applier


900


(e.g., a UV lamp).




Once UV light is irradiated, monomer or oligomer activated by the initiator constituting the UV-hardening sealants


700


and


800


performs polymerization to form a polymer to bond the lower and upper substrates


200


and


300


to each other.




In this case, when the UV-hardening sealants


700


and


800


are formed of monomer or oligomer, of which one end is bonded to an acryl group and of which other end is bonded to an epoxy group, mixed with initiator, the epoxy group fails to respond to UV light irradiation. Hence, an additional heating process is carried out after the UV light irradiation to harden the sealants completely. The heating process is performed at about 120° C. for an hour.




Meanwhile, if the UV light is applied to an entire surface of the bonded substrate by the UV-irradiation process, characteristics of devices such as thin film transistors and the like formed on the substrates are degraded, as well as a pretilt angle of the alignment for the initial alignment of the liquid crystals can be changed.




Therefore, it is preferable that an active area inside the main UV-hardening sealant


700


is covered with a mask


950


before applying UV light thereto.




Referring to

FIG. 5E

, the bonded substrates are cut into unit cells.




The process of cutting into unit cells is carried out in a manner that each unit cell is cut one by one along the cell-scribing line


600


by the simultaneous scribing/breaking process using the cutting device such as a diamond based pen or cutting wheel having indents.




Thus, the present invention uses the cutting device enabling carrying out of the simultaneous scribing/breaking process, thereby reducing a space occupied by equipment as well as reducing the cutting process time.




Thereafter, although not shown in the drawing, a final inspection process is carried out after the cutting process.




The final inspection process is a process of checking pass/failure before the substrate broken into the cell units is assembled into a liquid crystal module, and carried out in a manner whether the respective pixels are driven correctly with or without applying a voltage thereto.




Accordingly, the present invention forms the width of the portion of the dummy UV-hardening sealant that overlaps with the cell-scribing line to be narrower, thereby facilitating the process of cutting the bonded substrates into the cell units by the simultaneous scribing/breaking process.




It will be apparent to those skilled in the art than various modifications and variations can be made in the present invention. Thus, it is intended that the present invention covers the modifications and variations of this invention provided they come within the scope of the appended claims and their equivalents.



Claims
  • 1. A liquid crystal display device, comprising:a substrate; a closed-end main UV-hardening sealant on the substrate; and a closed-end dummy UV-hardening sealant on a periphery of the main UV-hardening sealant, wherein a width of one portion of the closed-end dummy UV-hardening sealant overlapped with a scribing line is narrower than that of other portions of the closed-end dummy UV-hardening sealant.
  • 2. The device of claim 1, wherein the portion having the narrower width is formed at upper and lower or right and left sides of the closed-end dummy UV-hardening sealant.
  • 3. The device of claim 1, further comprising:a thin film transistor on the substrate; and a pixel electrode connected to the thin film transistor.
  • 4. The device of claim 1, further comprising:a black matrix on the substrate; a color filter layer on the black matrix; and a common electrode on the color filter layer.
  • 5. The device of claim 1, further comprising a column spacer on the substrate.
  • 6. A method of fabricating a liquid crystal display device, comprising:preparing lower and upper substrates; forming a closed-end main UV-hardening sealant on one of the lower and upper substrates; forming a closed-end dummy UV-hardening sealant on a periphery of the main UV-hardening sealant so that a width of one portion of the dummy UV-hardening sealant overlapped with a scribing line is narrower than that of a width of other portions of the dummy UV-hardening sealant; applying a liquid crystal on one of the lower and upper substrates; bonding the lower and upper substrates to each other; applying UV light to the bonded substrates; and cutting the bonded substrates into unit cells along the scribing line.
  • 7. The method of claim 6, wherein forming the closed-end main and dummy UV-hardening sealants are formed by a dispensing method.
  • 8. The method of claim 7, wherein forming the dummy UV-hardening sealant is carried out in a manner that a coating speed on the portion overlapped with the scribing line is higher than the coating speed of the other portion.
  • 9. The method of claim 6, wherein each of the main and dummy UV-hardening sealants is formed using one of a monomer and oligomer having acryl groups bonded to both ends.
  • 10. The method of claim 6, wherein each of the main and dummy UV-hardening sealants is formed using one of a monomer and oligomer having acryl and epoxy groups bonded to both ends.
  • 11. The method of claim 10, further comprising a heating after applying the UV light.
  • 12. The method of claim 6, wherein cutting the bonded substrates into the unit cells is carried out by scribing and breaking processes.
  • 13. The method of claim 6, wherein applying the UV-rays is carried out by masking an active area inside the main UV-hardening sealant.
  • 14. The method of claim 6, wherein the main and dummy UV-hardening sealants are formed on the upper substrate and the liquid crystal is applied on the lower substrate.
Priority Claims (1)
Number Date Country Kind
10-2002-0011923 Mar 2002 KR
Parent Case Info

This application claims the benefit of the Korean Application No. P2002-11923 filed on Mar. 6, 2002, which is hereby incorporated by reference. This application incorporates by reference two co-pending applications, Ser. No. 10/184,096, filed on Jun. 28, 2002, entitled “SYSTEM AND METHOD FOR MANUFACTURING LIQUID CRYSTAL DISPLAY DEVICES” and Ser. No. 10/184,088, filed on Jun. 28, 2002, entitled “SYSTEM FOR FABRICATING LIQUID CRYSTAL DISPLAY AND METHOD OF FABRICATING LIQUID CRYSTAL DISPLAY USING THE SAME”, as if fully set forth herein.

US Referenced Citations (42)
Number Name Date Kind
3978580 Leupp et al. Sep 1976 A
4094058 Yasutake et al. Jun 1978 A
4653864 Baron et al. Mar 1987 A
4691995 Yamazaki et al. Sep 1987 A
4775225 Tsuboyama et al. Oct 1988 A
5247377 Omeis et al. Sep 1993 A
5263888 Ishihara et al. Nov 1993 A
5379139 Sato et al. Jan 1995 A
5406989 Abe Apr 1995 A
5410423 Furushima et al. Apr 1995 A
5499128 Hasegawa et al. Mar 1996 A
5507323 Abe Apr 1996 A
5511591 Abe Apr 1996 A
5539545 Shimizu et al. Jul 1996 A
5548429 Tsujita Aug 1996 A
5642214 Ishii et al. Jun 1997 A
5680189 Shimizu et al. Oct 1997 A
5742370 Kim et al. Apr 1998 A
5757451 Miyazaki et al. May 1998 A
5852484 Inoue et al. Dec 1998 A
5854664 Inoue et al. Dec 1998 A
5861932 Inata et al. Jan 1999 A
5875922 Chastine et al. Mar 1999 A
5952678 Ashida Sep 1999 A
5956112 Fujimori et al. Sep 1999 A
6001203 Yamada et al. Dec 1999 A
6011609 Kato et al. Jan 2000 A
6016178 Kataoka et al. Jan 2000 A
6016181 Shimada Jan 2000 A
6055035 von Gutfeld et al. Apr 2000 A
6137559 Tanaka et al. Oct 2000 A
6163357 Nakamura Dec 2000 A
6219126 Von Gutfeld Apr 2001 B1
6226067 Nishiguchi et al. May 2001 B1
6236445 Foschaar et al. May 2001 B1
6304306 Shiomi et al. Oct 2001 B1
6304311 Egami et al. Oct 2001 B1
6337730 Ozaki et al. Jan 2002 B1
6414733 Ishikawa et al. Jul 2002 B1
6490022 Hoshino Dec 2002 B1
6628365 Park et al. Sep 2003 B1
20010021000 Egami Sep 2001 A1
Foreign Referenced Citations (130)
Number Date Country
1003066 May 2000 EP
51-065656 Jun 1976 JP
57038414 Mar 1982 JP
57088428 Jun 1982 JP
58027126 Feb 1983 JP
59-057221 Apr 1984 JP
59-195222 Nov 1984 JP
60-111221 Jun 1985 JP
60164723 Aug 1985 JP
60217343 Oct 1985 JP
61007822 Jan 1986 JP
61055625 Mar 1986 JP
62089025 Apr 1987 JP
62090622 Apr 1987 JP
62205319 Sep 1987 JP
63109413 May 1988 JP
63110425 May 1988 JP
63128315 May 1988 JP
63311233 Dec 1988 JP
05127179 May 1993 JP
05-154923 Jun 1993 JP
05265011 Oct 1993 JP
05281557 Oct 1993 JP
05281562 Oct 1993 JP
06051256 Feb 1994 JP
06148657 May 1994 JP
8160871 Jun 1994 JP
06-235925 Aug 1994 JP
06265915 Sep 1994 JP
06-313870 Nov 1994 JP
07-084268 Mar 1995 JP
07128674 May 1995 JP
07181507 Jul 1995 JP
08095066 Apr 1996 JP
08-101395 Apr 1996 JP
08106101 Apr 1996 JP
08171094 Jul 1996 JP
08190099 Jul 1996 JP
08240807 Sep 1996 JP
09005762 Jan 1997 JP
09026578 Jan 1997 JP
09-061829 Mar 1997 JP
09073075 Mar 1997 JP
09073096 Mar 1997 JP
09127528 May 1997 JP
09230357 Sep 1997 JP
09281511 Oct 1997 JP
09311340 Dec 1997 JP
10123537 May 1998 JP
10123538 May 1998 JP
10142616 May 1998 JP
10-177178 Jun 1998 JP
10221700 Aug 1998 JP
10282512 Oct 1998 JP
10-333157 Dec 1998 JP
10-333159 Dec 1998 JP
11014953 Jan 1999 JP
11038424 Feb 1999 JP
11064811 Mar 1999 JP
11109388 Apr 1999 JP
11-133438 May 1999 JP
11-142864 May 1999 JP
11174477 Jul 1999 JP
11212045 Aug 1999 JP
11-248930 Sep 1999 JP
11-326922 Nov 1999 JP
11344714 Dec 1999 JP
2000-002879 Jan 2000 JP
2000029035 Jan 2000 JP
2000-056311 Feb 2000 JP
2000-066165 Mar 2000 JP
2000-137235 May 2000 JP
3000-147528 May 2000 JP
2000-193988 Jul 2000 JP
2000-241824 Sep 2000 JP
2000-284295 Oct 2000 JP
2000-292799 Oct 2000 JP
2000-310759 Nov 2000 JP
2000-310784 Nov 2000 JP
2000-338501 Dec 2000 JP
2001-005401 Jan 2001 JP
2001-005405 Jan 2001 JP
2001-013506 Jan 2001 JP
2001-033793 Feb 2001 JP
2001-042341 Feb 2001 JP
2001-051284 Feb 2001 JP
2001-066615 Mar 2001 JP
2001-091727 Apr 2001 JP
2001117105 Apr 2001 JP
2001-117109 Apr 2001 JP
2001-133745 May 2001 JP
2001133794 May 2001 JP
2001-133799 May 2001 JP
2001142074 May 2001 JP
2001147437 May 2001 JP
2001154211 Jun 2001 JP
2001-166272 Jun 2001 JP
2001-166310 Jun 2001 JP
2001-183683 Jul 2001 JP
2001-209052 Aug 2001 JP
2001-209060 Aug 2001 JP
2001-222017 Aug 2001 JP
2001-235758 Aug 2001 JP
2001-215459 Sep 2001 JP
2001255542 Sep 2001 JP
2001264782 Sep 2001 JP
2001-201750 Oct 2001 JP
2001-272640 Oct 2001 JP
2001-281675 Oct 2001 JP
2001-281678 Oct 2001 JP
2001-282126 Oct 2001 JP
2001-305563 Oct 2001 JP
2001-330837 Nov 2001 JP
2001330840 Nov 2001 JP
2001-356353 Dec 2001 JP
2001356354 Dec 2001 JP
2002014360 Jan 2002 JP
2002023176 Jan 2002 JP
2002049045 Feb 2002 JP
2002082340 Mar 2002 JP
2002090759 Mar 2002 JP
2002090760 Mar 2002 JP
2002107740 Apr 2002 JP
2002122872 Apr 2002 JP
2002122873 Apr 2002 JP
2002080321 Jun 2002 JP
2002202512 Jul 2002 JP
2002202514 Jul 2002 JP
2002214626 Jul 2002 JP
2000-0035302 Jun 2000 KR