Number | Date | Country | Kind |
---|---|---|---|
197 06 029 | Feb 1997 | DE |
Filing Document | Filing Date | Country | Kind |
---|---|---|---|
PCT/EP98/00583 | WO | 00 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO98/36314 | 8/20/1998 | WO | A |
Number | Name | Date | Kind |
---|---|---|---|
5389698 | Chigrinov et al. | Feb 1995 | A |
5396355 | Wada et al. | Mar 1995 | A |
5456867 | Mazaki et al. | Oct 1995 | A |
5472635 | Iida et al. | Dec 1995 | A |
5491001 | Mazaki et al. | Feb 1996 | A |
5526150 | Mazaki et al. | Jun 1996 | A |
5543267 | Stumpe et al. | Aug 1996 | A |
5583677 | Ito et al. | Dec 1996 | A |
5599478 | Matumoto et al. | Feb 1997 | A |
5731405 | Gibbons et al. | Mar 1998 | A |
5737046 | Moriwaki et al. | Apr 1998 | A |
5784139 | Chigrinov et al. | Jul 1998 | A |
5831703 | Nishiguchi et al. | Nov 1998 | A |
6061113 | Kawata | Jun 2000 | A |
Number | Date | Country |
---|---|---|
0 646 829 | Apr 1995 | EP |
Entry |
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J. Stumpe et al, Thin Solid Films, vol. 284/285, Sep. 15, 1996, pp. 252-256. |