LIQUID DISCHARGE HEAD AND MANUFACTURING METHOD THEREFOR

Abstract

A liquid discharge head comprises a substrate, on which are formed energy generating means for generating energy to be used for the discharge of a liquid through a discharge port, and a precious metal protective layer for protecting the energy generating means, an inorganic adhesive layer formed of at least one material selected from titanium, titanium nitride, tantalum nitride and chromium nitride, said inorganic adhesive layer being closely adhered to the precious metal protective layer, an organic adhesive layer made of an organic material, and a flow path formation member, serving as a wall of a flow path communicated with the discharge port. The substrate, the inorganic adhesive layer, the adhesive layer and the flow path formation member are bonded to the substrate in the this order.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic cross-sectional view of a liquid discharge head according to one embodiment of the present invention;

FIG. 2 is a schematic cross-sectional view of a first step in the manufacture of the liquid discharge head shown in FIG. 1.

FIG. 3 is a schematic cross-sectional view of a second step in the manufacture of the liquid discharge head shown in FIG. 1.

FIG. 4 is a schematic cross-sectional view of a third step in the manufacture of the liquid discharge head shown in FIG. 1.

FIG. 5 is a schematic cross-sectional view of a fourth step in the manufacture of the liquid discharge head shown in FIG. 1.

FIG. 6 is a schematic cross-sectional view of a fifth step in the manufacture of the liquid discharge head shown in FIG. 1.

FIG. 7 is a partial plan view of a conventional example.

FIG. 8 is a cross-sectional view, taken along line A-A in FIG. 7.

Claims

1. A liquid discharge head comprising: a substrate, provided with energy generating means for generating energy to be used for discharging liquid through a discharge port, and a precious metal protective layer made of a precious metal for protecting the energy generating means;an inorganic adhesive layer made of at least one material selected from titanium, titanium nitride, tantalum nitride and chromium nitride, said inorganic adhesive layer being closely adhered to the precious metal protective layer;an organic adhesive layer made of an organic material; anda flow path forming member, serving as a wall of a flow path communicated with the discharge port, wherein the substrate, the inorganic adhesive layer, the organic adhesive layer and the flow path forming member are bonded in the this order.

2. A liquid discharge head according to claim 1, wherein, on the substrate, an insulating protective layer for protecting the energy generating means and an additional adhesive layer made of an inorganic material are located between the energy generating means and the precious metal protective layer.

3. A liquid discharge head according to claim 2, wherein the additional adhesive layer is made of at least one material selected from titanium, titanium nitride, tantalum nitride and chromium nitride.

4. A liquid discharge head according to claim 3, wherein the inorganic adhesive layer and the additional adhesive layer are made of a same material.

5. A liquid discharge head according to claim 4, wherein the inorganic adhesive layer and the additional adhesive layer are made of titanium.

6. A liquid discharge head according to claim 3, wherein one of the inorganic adhesive layer and the additional adhesive layer is made of titanium, and another is made of titanium nitride.

7. A liquid discharge head according to claim 1, wherein the precious metal protective film is made of iridium or platinum.

8. A liquid discharge head according to claim 1, wherein the organic adhesive layer is made of polyether amide.

9. A manufacturing method for manufacturing a liquid discharge head according to claim 1, comprising: forming step for forming a layer with a material for the inorganic adhesive layer on the precious metal protective layer; anddriving step for driving the energy generating means to remove only a material for the inorganic adhesive layer deposited right above the energy generating means.