The disclosed embodiments relate to a liquid discharge head and a recording device.
A known printing apparatus is an inkjet printer or an inkjet plotter using an inkjet recording method. A liquid discharge head for discharging a liquid is mounted in such a printing apparatus using an inkjet method.
Such a liquid discharge head introduces, for example, a liquid in a reservoir, into a pressure chamber, applies a drive signal for operating a piezoelectric element, and discharges the liquid in the pressure chamber from a nozzle. In the configuration, a proposed technique disposes a dummy pressure chamber that does not discharge liquid at an end portion of a region of discharging liquid and improves discharge performance.
Patent Document 1: JP 2015-37863 A
Patent Document 2: JP 2018-65391 A
A liquid discharge head according to an aspect of an embodiment includes a discharge unit and a dummy unit. The discharge unit includes a nozzle configured to discharge a droplet, a pressurizing chamber connected to the nozzle, and a pressurizer supplied with a drive signal and configured to deform the pressurizing chamber. The dummy unit includes a dummy pressurizing chamber and a dummy pressurizer supplied with a drive signal and configured to deform the dummy pressurizing chamber. The liquid discharge head includes a discharge region and a dummy region. The discharge region is a region where a plurality of the discharge units is disposed in one row. The dummy region is a region where one or more of the dummy units are disposed adjacent to the discharge region on an extended line of the row of the discharge units. The discharge region includes a central region located at the center of the row and an end portion region located adjacent to the dummy region at an end of the row. The end portion region is a region where the discharge unit having a size of a dot larger than the discharge unit located in the central region is located. The dot is formed on a recording medium by a droplet discharged by an identical drive signal when the dummy unit is not driven. In the liquid discharge head, a drive signal is supplied to the dummy unit while the drive signal is being supplied to the discharge unit located in the end portion region.
Embodiments of a liquid discharge head and a recording device disclosed in the present application will be described in detail below with reference to the accompanying drawings. The present invention is not limited by the following embodiment.
There is still room for improvement in discharge performance in a liquid discharge head in which a dummy pressure chamber that does not discharge liquid is disposed at an end portion of a region where liquid is discharged.
Therefore, provision of a liquid discharge head and a recording device that can improve discharge performance is expected.
First, with reference to
As illustrated in
The printer 1 further includes a controller 14 configured to control each part of the printer 1. The controller 14 controls the operation of the paper feed roller 2, the guide rollers 3, the applicator 4, the head case 5, the plurality of transport rollers 6, the plurality of frames 7, the plurality of liquid discharge heads 8, the transport rollers 9, the dryer 10, the transport rollers 11, the sensor portion 12, and the collection roller 13.
The printer 1 records an image and a character on a printing sheet P by causing droplets to impact on the printing sheet P. The printing sheet P is an example of a recording medium. The printing sheet P is rolled on the paper feed roller 2 prior to use. The printer 1 conveys the printing sheet P from the paper feed roller 2 to the inside of the head case 5 via the guide rollers 3 and the applicator 4.
The applicator 4 uniformly applies a coating agent over the printing sheet P. This can perform surface treatment on the printing sheet P, improving the printing quality of the printer 1.
The head case 5 houses the plurality of transport rollers 6, the plurality of frames 7, and the plurality of liquid discharge heads 8. The inside of the head case 5 is formed with a space separated from the outside except for a part connected to the outside such as parts where the printing sheet P enters and exits.
As required, the controller 14 controls at least one of controllable factors of the internal space of the head case 5, such as temperature, humidity, and air pressure. The transport rollers 6 convey the printing sheet P near the liquid discharge heads 8 inside the head case 5.
The frames 7 are rectangular flat plates and are positioned above and close to the printing sheet P to be conveyed by the transport rollers 6. As illustrated in
A liquid, for example, ink, is supplied to the liquid discharge heads 8 from a liquid tank (not illustrated). The liquid discharge heads 8 discharge the liquid supplied from the liquid tank.
The controller 14 controls the liquid discharge head 8 based on data such as an image and a character to discharge a liquid toward the printing sheet P. The distance between each liquid discharge head 8 and the printing sheet P is, for example, approximately 0.5 mm to 20 mm.
Each of the liquid discharge heads 8 is fixed to the frame 7. The liquid discharge heads 8 are positioned having the longitudinal direction orthogonal to the conveyance direction of the printing sheet P.
That is, the printer 1 according to the embodiment is a so-called line printer in which the liquid discharge heads 8 are fixed inside the printer 1. Note that the printer 1 according to the embodiment is not limited to a line printer and may also be a so-called serial printer.
The serial printer is a printer employing a method of alternately performing operations of recording while moving the liquid discharge heads 8 in a manner such as reciprocation in a direction intersecting (e.g., substantially orthogonal to) the conveyance direction of the printing sheet P, and conveying the printing sheet P.
As illustrated in
The plurality of liquid discharge heads 8 positioned in one frame 7 form a head group 8A. Four head groups 8A are positioned along the conveyance direction of the printing sheet P. The liquid discharge heads 8 belonging to the same head group 8A are supplied with ink of the same color. As a result, the printer 1 can perform printing with four colors of ink using the four head groups 8A.
The colors of the ink discharged from the respective head groups 8A are, for example, magenta (M), yellow (Y), cyan (C), and black (K). The controller 14 can print a color image on the printing sheet P by controlling the respective head groups 8A to discharge the plurality of colors of ink onto the printing sheet P.
Note that a surface treatment may be performed on the printing sheet P, by discharging a coating agent from the liquid discharge head 8 onto the printing sheet P.
The number of the liquid discharge heads 8 included in one head group 8A or the number of the head groups 8A mounted on the printer 1 can be appropriately changed according to a printing target and a printing condition. For example, if the color to be printed on the printing sheet P is a single color and the range of the printing can be covered by a single liquid discharge head 8, only a single liquid discharge head 8 may be provided in the printer 1.
The printing sheet P printed inside the head case 5 is conveyed to the outside of the head case 5 by the transport rollers 9 and passes through the inside of the dryer 10. The dryer 10 dries the printing sheet P printed. The printing sheet P dried by the dryer 10 is transported by the transport rollers 11 and then collected by the collection roller 13.
In the printer 1, by drying the printing sheet P with the dryer 10, it makes it possible to suppress bonding, or rubbing of an undried liquid, between the printing sheets P overlapped with each other and rolled at the collection roller 13.
The sensor portion 12 includes a position sensor, a speed sensor, or a temperature sensor. Based on information from the sensor portion 12, the controller 14 can determine the state of each part of the printer 1 and control each part of the printer 1.
In the printer 1 described above, the printing sheet P is the printing target (i.e., the recording medium), but the printing target in the printer 1 is not limited to the printing sheet P, and a roll type fabric or the like may be the printing target.
The printer 1 may convey the printing sheet P put on a conveyor belt instead of directly conveying it. Using the conveyor belt allows the printer 1 to use a sheet of paper, a cut cloth, wood, a tile, or the like to be printed.
The printer 1 may discharge a liquid containing electrically conductive particles from the liquid discharge heads 8, to print a wiring pattern or the like of an electronic device. The printer 1 may make chemicals by causing the liquid discharge head 8 to discharge a predetermined amount of a liquid chemical agent or a liquid containing a chemical agent toward a reaction vessel or the like.
The printer 1 may also include a cleaner for cleaning the liquid discharge heads 8. The cleaner cleans the liquid discharge head 8 by, for example, a wiping process or a capping process.
The wiping process is, for example, a process of wiping a surface of a portion from which a liquid is discharged using a flexible wiper, thereby removing the liquid attached to the liquid discharge head 8.
The capping process is performed as follows, for example. First, a cap is put to cover a portion to which liquid is discharged, for example, a second surface 21b (see
The discharge of liquid is then repeated in such a hermetically sealed space. This makes it possible to remove a liquid, a foreign matter, or the like clogged in a discharge hole (nozzle) 163 (see
Next, the configuration of the liquid discharge head 8 according to an embodiment will be described using
The liquid discharge head 8 includes a head body 20, a wiring portion 30, a housing 40, and a pair of heatsinks 45. The head body 20 includes the channel member 21, a piezoelectric actuator substrate 22 (see
In the following description, for convenience, the direction in which the head body 20 is provided in the liquid discharge head 8 may be represented as “lower”, and the direction in which the housing 40 is provided with respect to the head body 20 may be represented as “upper”.
The channel member 21 of the head body 20 has a substantially flat plate shape, and includes a first surface 21a (see
The second surface 21b has a plurality of the discharge holes 163 (see
The piezoelectric actuator substrate 22 is located on the first surface 21a of the channel member 21. The piezoelectric actuator substrate 22 includes a plurality of displacement elements 170 (see
The reservoir 23 is located on the piezoelectric actuator substrate 22. The reservoir 23 is provided with openings 23a at both end portions in a main scanning direction, which is a direction orthogonal to a sub scanning direction, which is the conveyance direction of the printing sheet P, and parallel to the printing sheet P. The reservoir 23 includes a channel therein, and is supplied with a liquid from the outside through the opening 23a. The reservoir 23 supplies liquid to the channel member 21. The reservoir 23 stores liquid to be supplied to the channel member 21.
The wiring portion 30 includes the flexible substrate 31, a wiring board 32, a plurality of driver ICs 33, a pressing member 34, and an elastic member 35. The flexible substrate 31 transmits, to the head body 20, a predetermined signal sent from the outside. As illustrated in
The flexible substrate 31 has one end portion electrically connected to the piezoelectric actuator substrate 22 of the head body 20. The other end portion of the flexible substrate 31 is drawn upward in a manner to be inserted through a slit 23b of the reservoir 23, and is electrically connected to the wiring board 32. This enables the piezoelectric actuator substrate 22 of the head body 20 and the outside to be electrically connected.
The wiring board 32 is located above the head body 20. The wiring board 32 distributes signals to the plurality of driver ICs 33.
The plurality of driver ICs 33 is located on a main surface of one of the flexible substrates 31. As illustrated in
The driver IC 33 drives the piezoelectric actuator substrate 22 of the head body 20 based on a drive signal sent from the controller 14 (see
The pressing member 34 has a substantially U shape in cross-sectional view, and presses the driver IC 33 on the flexible substrate 31 toward the heatsink 45 from the inside. As a result, in the embodiment, the heat generated when the driver IC 33 is driven can be efficiently radiated to the outer heatsink 45.
The elastic member 35 is disposed in a manner to be in contact with an outer wall of a pressing portion not illustrated in the pressing member 34. By providing such an elastic member 35, it is possible to reduce the likelihood of the pressing member 34 causing breakage of the flexible substrate 31 when the pressing member 34 presses the driver ICs 33.
The elastic member 35 is made of, for example, double-sided foam tape or the like. For example, by using a non-silicon-based thermal conductive sheet as the elastic member 35, it is possible to improve the heat radiating properties of the driver IC 33. Note that the elastic member 35 does not necessarily have to be provided.
The housing 40 is disposed on the head body 20 in a manner to cover the wiring portion 30. This enables the wiring portion 30 to be sealed with the housing 40. The housing 40 is made of, for example, resin or metal.
The housing 40 has a box shape elongated in the main scanning direction, and includes a first opening 40a and a second opening 40b at a pair of side surfaces opposed along the main scanning direction, respectively. The housing 40 includes a third opening 40c at a lower surface, and a fourth opening 40d at an upper surface.
One of the heatsinks 45 is disposed in the first opening 40a to close the first opening 40a, and the other of the heatsinks 45 is disposed in the second opening 40b to close the second opening 40b.
The heatsink 45 is provided to extend in the main scanning direction, and is made of metal, alloy, or the like having high heat radiating properties. The heatsink 45 is provided to be in contact with the driver IC 33, and radiates heat generated in the driver IC 33.
The pair of heatsinks 45 is fixed to the housing 40 by screws not illustrated. Therefore, the housing 40 to which the heatsink 45 is fixed has a box shape in which the first opening 40a and the second opening 40b are closed and the third opening 40c and the fourth opening 40d are opened.
The third opening 40c is positioned to oppose the reservoir 23. The flexible substrate 31 and the pressing member 34 are inserted into the third opening 40c.
The fourth opening 40d is provided in order to insert a connector (not illustrated) provided on the wiring board 32. When a space between the connector and the fourth opening 40d is sealed with resin or the like, liquid, dust, or the like is less likely to enter the housing 40.
The housing 40 includes heat insulating portions 40e. The heat insulating portions 40e are respectively provided in a manner to be adjacent to the first opening 40a and the second opening 40b, and are provided in a manner to protrude outward from side surfaces of the housing 40 along the main scanning direction.
The heat insulating portions 40e are formed in a manner to extend in the main scanning direction. That is, the heat insulating portions 40e are positioned between the heatsinks 45 and the head body 20. By providing the heat insulating portions 40e in the housing 40 as described above, heat generated by the driver IC 33 is less likely to be transferred to the head body 20 via the heatsinks 45.
Note that
Next, the configuration of the head body 20 according to the embodiment will be described with reference to
As described above, the head body 20 includes the channel member 21 and the piezoelectric actuator substrate 22. The head body 20 includes a discharge region 24 and dummy regions 25 (25a and 25b) adjacent to the discharge region 24. A plurality of discharge units 26 is located in the discharge region 24. A plurality of dummy units 26a is located in the dummy region 25a, and a plurality of dummy units 26b is located in the dummy region 25b. The dummy unit 26a and the dummy unit 26b have the same structure.
As illustrated in
A large number of holes are formed in the plates constituting the channel member 21. The thickness of each plate is about 10 um to 300 um. This can increase the accuracy of forming the hole. The plates are layered in alignment such that these holes communicate with one another to constitute an individual channel 164 and a supply manifold 161.
In the channel member 21, the individual channel 164 connects between the supply manifold 161 and the discharge hole 163. The supply manifold 161 is located on the second surface 21b side inside the channel member 21, and the discharge hole 163 is located on the second surface 21b of the channel member 21.
The individual channel 164 includes the pressurizing chamber 162 and an individual supply channel 165. The pressurizing chamber 162 is located on the first surface 21a of the channel member 21, and the individual supply channel 165 is a channel connecting the supply manifold 161 and the pressurizing chamber 162.
The individual supply channel 165 includes an aperture 166 having a narrower width than other parts. Since the aperture 166 is narrower than the other parts of the individual supply channel 165, the channel resistance is high. As described above, when the channel resistance of the aperture 166 is high, the pressure generated in the pressurizing chamber 162 hardly escapes to the supply manifold 161.
The piezoelectric actuator substrate 22 includes piezoelectric ceramic layers 22A and 22B, a common electrode 171, an individual electrode 172, a connection electrode 175, a dummy connection electrode 176, and a surface electrode (not illustrated).
In the piezoelectric actuator substrate 22, the piezoelectric ceramic layer 22B, the common electrode 171, the piezoelectric ceramic layer 22A, and the individual electrode 172 are laminated in this order.
The piezoelectric ceramic layers 22A and 22B each have a thickness of about 20 μm. Both layers of the piezoelectric ceramic layers 22A and 22B extend across the plurality of pressurizing chambers 162. For the piezoelectric ceramic layers 22A and 22B, a lead zirconate titanate (PZT)-based ceramic material having ferroelectricity can be used.
The common electrode 171 is formed over substantially the entire surface in the plane direction in a region between the piezoelectric ceramic layer 22A and the piezoelectric ceramic layer 22B. That is, the common electrode 171 overlaps all the pressurizing chambers 162 in the region opposed to the piezoelectric actuator substrate 22. The common electrode 171 has a thickness of about 2 μm. For the common electrode 171, a metal material such as an Ag-Pd-based metal material can be used.
The individual electrode 172 includes an individual electrode body 173 and an extraction electrode 174. The individual electrode body 173 is located in a region opposed to the pressurizing chamber 162 on the piezoelectric ceramic layer 22B. The individual electrode body 173 is slightly smaller than the pressurizing chamber 162 and has a shape substantially similar to that of the pressurizing chamber 162.
The extraction electrode 174 is extracted from the individual electrode body 173. The connection electrode 175 is located at a part at one end of the extraction electrode 174, the part extracted to the outside of the region opposed to the pressurizing chamber 162. For the individual electrode 172, for example, a metal material such as an Au-based metal material can be used.
The connection electrode 175 is located on the extraction electrode 174 and has a convex shape with a thickness of about 15 um. The connection electrode 175 is electrically joined to an electrode provided on the flexible substrate 31 (see
The dummy connection electrode 176 is located on the piezoelectric ceramic layer 22A so as not to overlap with various electrodes such as the individual electrode 172. The dummy connection electrode 176 connects the piezoelectric actuator substrate 22 and the flexible substrate 31 to increase connection strength.
The dummy connection electrode 176 uniformizes distribution of contact positions between the piezoelectric actuator substrate 22 and the piezoelectric actuator substrate 22, and stabilizes electrical connection. The dummy connection electrode 176 is preferably formed of a material and by a process equivalent to that of the connection electrode 175.
The surface electrode is located on the piezoelectric ceramic layer 22A while avoiding the individual electrode 172. The surface electrode is connected to the common electrode 171 via a via hole formed in the piezoelectric ceramic layer 22A. Therefore, the surface electrode is grounded and held at the ground potential. The surface electrode is preferably formed of a material and by a process equivalent to that of the individual electrode 172.
The plurality of individual electrodes 172 is electrically connected individually to the controller 14 (see
That is, the portions opposed to the pressurizing chamber 162 in the individual electrode 172, the piezoelectric ceramic layer 22A, and the common electrode 171 in the piezoelectric actuator substrate 22b constitute the displacement element 170. When the displacement element 170 undergoes unimorph deformation, the pressurizing chamber 162 is pressed, and liquid is discharged from the discharge hole 163. That is, the displacement element 170 functions as a pressurizer that deforms the pressurizing chamber 162. The discharge hole 163 is an example of a nozzle penetrating the nozzle plate 21I.
The piezoelectric actuator substrate 22 includes the piezoelectric ceramic layers 22A and 22B, a common electrode 171a, an individual electrode 172a, a connection electrode 175a, a dummy connection electrode 176a, and a surface electrode (not illustrated).
In the piezoelectric actuator substrate 22, the piezoelectric ceramic layer 22B, the common electrode 171a, the piezoelectric ceramic layer 22A, and the individual electrode 172a are laminated in this order. Both layers of the piezoelectric ceramic layers 22A and 22B extend across the plurality of dummy pressurizing chambers 162a.
The common electrode 171a is formed over substantially the entire surface in the plane direction in a region between the piezoelectric ceramic layer 22A and the piezoelectric ceramic layer 22B. That is, the common electrode 171a overlaps all the dummy pressurizing chambers 162a in the region opposed to the piezoelectric actuator substrate 22. The common electrode 171a can be formed in the same manner as the common electrode 171.
The individual electrode 172a includes an individual electrode body 173a and an extraction electrode 174a. The individual electrode body 173a is located in a region opposed to the dummy pressurizing chamber 162a on the piezoelectric ceramic layer 22B. The individual electrode body 173a is slightly smaller than the dummy pressurizing chamber 162a and has a shape substantially similar to that of the dummy pressurizing chamber 162a.
The extraction electrode 174a is extracted from the individual electrode body 173a. The connection electrode 175a is located at a part at one end of the extraction electrode 174a, the part extracted to the outside of the region opposed to the dummy pressurizing chamber 162a. The same metal material as that of the individual electrode 172 can be used for the individual electrode 172a.
The connection electrode 175a is located on the extraction electrode 174a. The connection electrode 175a is electrically joined to an electrode provided on the flexible substrate 31 (see
The dummy connection electrode 176a is located on the piezoelectric ceramic layer 22A so as not to overlap with various electrodes such as the individual electrode 172a. The dummy connection electrode 176a connects the piezoelectric actuator substrate 22 and the flexible substrate 31 to increase connection strength.
The dummy connection electrode 176a uniformizes distribution of contact positions between the piezoelectric actuator substrate 22 and the piezoelectric actuator substrate 22, and stabilizes electrical connection. The dummy connection electrode 176a is preferably formed of a material and by a process equivalent to that of the connection electrode 175a.
The surface electrode is located on the piezoelectric ceramic layer 22A while avoiding the individual electrode 172a. The surface electrode is connected to the common electrode 171a via a via hole formed in the piezoelectric ceramic layer 22A. Therefore, the surface electrode is grounded and held at the ground potential. The surface electrode is preferably formed of a material and by a process equivalent to that of the individual electrode 172a.
The plurality of individual electrodes 172a is electrically connected individually to the controller 14 (see
That is, the portions opposed to the dummy pressurizing chamber 162a in the individual electrode 172a, the piezoelectric ceramic layer 22A, and the common electrode 171a in the piezoelectric actuator substrate 22 constitute the displacement element 170a. When the displacement element 170a undergoes unimorph deformation, the dummy pressurizing chamber 162a is pressed. That is, the displacement element 170a functions as a dummy pressurizer that deforms the dummy pressurizing chamber 162a. The dummy units 26a and 26b have no discharge hole, and liquid is not discharged to the outside even by pressurizing the dummy pressurizing chamber 162a. That is, the dummy region 25 is a non-printing region where printing is not performed even when the drive signal is supplied. On the other hand, the discharge region 24 is a printable region where printing is performed in response to a supplied drive signal.
As illustrated in
Next, drive control of the dummy units 26a and 26b will be described.
As shown in
In the liquid discharge head 8 according to the embodiment, as illustrated in
As shown in
In the example illustrated in
As described above, the liquid discharge head 8 of the present embodiment includes the discharge unit 26 and the dummy units (26a and 26b). The discharge unit 26 includes the nozzle (discharge hole 163) for discharging droplets, the pressurizing chamber 162 connected to the nozzle (discharge hole 163), and the pressurizer (displacement element 170) that is supplied with a drive signal (namely, “first drive signal”) and deforms the pressurizing chamber 162. The dummy units (26a and 26b) include the dummy pressurizing chamber 162a and the dummy pressurizer (displacement element 170a) that is supplied with a drive signal (namely, “second drive signal”) and deforms the dummy pressurizing chamber 162a. The liquid discharge head 8 includes the discharge region 24 and the dummy region 25. The discharge region 24 is a region where the plurality of discharge units 26 is disposed in one row. The dummy region 25 is a region where one or more dummy units (26a and 26b) are disposed adjacent to the discharge region 24 on the extended line of the row of the discharge units 26. The discharge region 24 includes a central region 26c (see
In the liquid discharge head 8 of the present embodiment, the drive signal (namely, “second drive signal”) is supplied to the dummy units (26a and 26b) while the drive signal (namely, “third drive signal”) is being supplied to the discharge units 26 (261 and 262) at the position closest to the respective dummy regions 25 (25a and 25b). Such a configuration can reduce the difference between the size of the dot formed on the recording medium by the droplets discharged from the discharge units 26 (261 and 262) at the position closest to the dummy region 25 and the size of another dot, where the size of the dot formed on the recording medium by the droplet discharged by the identical drive signal tends to be the largest.
As illustrated in
That is, in the liquid discharge head 8 illustrated in
In the liquid discharge head 8 illustrated in
In the liquid discharge head 8 illustrated in
In the liquid discharge head 8 illustrated in
In the liquid discharge head 8 illustrated in
In each embodiment described above, the number of the dummy units 26a and the number of the dummy units 26b are the same, but may be different. The drive signal may be supplied to only one of the dummy unit 26a and the dummy unit 26b. For example, when the printer 1 includes the plurality of liquid discharge heads 8, the drive signal may be supplied only to the dummy unit located in the dummy region 25 overlapping the discharge region 24 of another liquid discharge head 8 in the conveyance direction of the recording medium. In such a case, the power consumption can be reduced by not supplying the drive signal to the dummy unit in the dummy region 25 located at the end portion of the printing region where the density difference is inconspicuous. When the discharge region 24 of the liquid discharge head 8 includes a plurality of rows of the discharge units 26, performing the drive control of the dummy units 26a and 26b described above in at least one row can obtain an effect according to the number of rows of the dummy units 26a and 26b to be driven. For example, the drive control of the dummy units 26a and 26b described above may be performed every other row. The largest effect can be obtained by performing the drive control of the dummy units 26a and 26b described above in all the rows. In the embodiment described above, the discharge units 263 to 266 need not be located in the end portion region.
The drive control of the dummy units 26a and 26b described above is merely an example and may be another aspect. That is, the drive signal is supplied to any one of the dummy units (26a or 26b) located in the dummy region 25 adjacent to the end portion region 26d while the drive signal is being supplied to any one of the discharge units 26 located in the end portion region 26d, and thus the above-described effect (improvement in discharge performance) can be expected.
Although each embodiment of the present disclosure has been described above, the present disclosure is not limited to the embodiments described above, and various changes can be made without departing from the spirit of the present disclosure. For example, in the above-described embodiment, an example in which the channel member 21 includes the plurality of layered plates has been described, but the channel member 21 is not limited to the case of including the plurality of layered plates.
For example, the channel member 21 may be configured by forming the supply manifold 161, the individual channel 164, or the like by etching processing.
Further effects and variations can be easily derived by those skilled in the art. Thus, a wide variety of aspects of the present disclosure are not limited to the specific details and representative embodiments represented and described above. Accordingly, various changes are possible without departing from the spirit or scope of the general inventive concepts defined by the appended claims and their equivalents.
Number | Date | Country | Kind |
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2021-113803 | Jul 2021 | JP | national |
This application is national stage application of International Application No. PCT/JP2022/026310, filed on Jun. 30, 2022, which claims the benefit of priority from Japanese Patent Application No. 2021-113803, filed on Jul. 8, 2021.
Filing Document | Filing Date | Country | Kind |
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PCT/JP2022/026310 | 6/30/2022 | WO |