Number | Date | Country | Kind |
---|---|---|---|
9-336055 | Dec 1997 | JP | |
9-336057 | Dec 1997 | JP | |
9-336058 | Dec 1997 | JP | |
9-336103 | Dec 1997 | JP | |
10-106299 | Apr 1998 | JP | |
10-304510 | Oct 1998 | JP | |
10-346076 | Dec 1998 | JP |
Number | Name | Date | Kind |
---|---|---|---|
4251824 | Hara et al. | Feb 1981 | A |
4611219 | Sugitani et al. | Sep 1986 | A |
4680859 | Johnson | Jul 1987 | A |
4723129 | Endo et al. | Feb 1988 | A |
4890126 | Hotomi | Dec 1989 | A |
4947192 | Hawkins et al. | Aug 1990 | A |
4990939 | Sekiya et al. | Feb 1991 | A |
5172139 | Sekiya et al. | Dec 1992 | A |
5278585 | Karz et al. | Jan 1994 | A |
5479197 | Fujikawa et al. | Dec 1995 | A |
5580468 | Fujikawa et al. | Dec 1996 | A |
5602576 | Murooka et al. | Feb 1997 | A |
5825385 | Silverbrook | Oct 1998 | A |
5924197 | Murakami et al. | Jul 1999 | A |
5943074 | Kashino et al. | Aug 1999 | A |
6071750 | Silverbrook | Jun 2000 | A |
Number | Date | Country |
---|---|---|
0 178 596 | Apr 1986 | EP |
0 500 110 | Aug 1992 | EP |
0 674 995 | Oct 1995 | EP |
745479 | Apr 1996 | EP |
0 737 582 | Oct 1996 | EP |
0 778 133 | Jun 1997 | EP |
6-261453 | Nov 1987 | JP |
6-31918 | Feb 1994 | JP |
9-226135 | Sep 1997 | JP |
Entry |
---|
Micromachined Transducers Sourcebook, 1998, The McGraw-Hill Companies, pp. 290-292, 825. |