The present invention relates to low-e panels. More particularly, this invention relates to low-e panels having an improved barrier layer process window and methods for forming such low-e panels.
Low emissivity, or low-e, panels are often formed by depositing a reflective layer (e.g., silver), along with various other layers, onto a transparent (e.g., glass) substrate. The various layers typically include various dielectric and metal oxide layers, such as silicon nitride, tin oxide, and zinc oxide, to provide a barrier between the stack and both the substrate and the environment, as well as to act as optical fillers and function as anti-reflective coating layers to improve the optical characteristics of the panel.
In recent years, the use of titanium in the “barrier layer,” often formed directly above the reflective layer, has been shown to provide desirable optical performance. However, in order to achieve this performance, the process steps used to form the titanium barrier layer must be performed very precisely. For example, while a precisely formed titanium barrier may demonstrate excellent optical performance, minor variations in the thickness of such a barrier layer may result in poor optical performance.
To facilitate understanding, identical reference numerals have been used, where possible, to designate identical elements that are common to the figures. The drawings are not to scale and the relative dimensions of various elements in the drawings are depicted schematically and not necessarily to scale.
The techniques of the present invention can readily be understood by considering the following detailed description in conjunction with the accompanying drawings, in which:
A detailed description of one or more embodiments is provided below along with accompanying figures. The detailed description is provided in connection with such embodiments, but is not limited to any particular example. The scope is limited only by the claims and numerous alternatives, modifications, and equivalents are encompassed. Numerous specific details are set forth in the following description in order to provide a thorough understanding. These details are provided for the purpose of example and the described techniques may be practiced according to the claims without some or all of these specific details. For the purpose of clarity, technical material that is known in the technical fields related to the embodiments has not been described in detail to avoid unnecessarily obscuring the description.
Embodiments of the invention provide low-e optical coatings which provide an improved/increased process window while still allowing for optimal performance. In accordance with some embodiments of the invention, the “process window” for a titanium barrier layer is improved by forming a thin (e.g., 1 nm or less) nitride-containing layer (i.e., a process window enhancement layer) between the barrier layer and the over-coating layer. The use of the thin nitride-containing layer between the barrier layer and the over-coating layer allows for a greater range of thicknesses to be used for the barrier layer (e.g., by preventing oxygen from diffusing into the barrier layer), thus facilitating processing, as a larger processing window may used while still providing optimum performance.
In some embodiments, this nitride-containing layer is made of zinc nitride. In other embodiments, it is made of zinc oxynitride or another nitride/oxynitride with little or no absorption at visible wavelengths when deposited as a thin layer. The barrier layer may include titanium and be formed over the reflective layer, which is typically made of silver.
The low-e stack 104 includes a base layer 106, a seed layer 108, a reflective layer 110, a barrier layer 112, a process window enhancement layer 114, and an over-coating layer 116. Exemplary details as to the functionality provided by each of the layers 106-116 are provided below.
The various layers in the low-e stack 104 may be formed sequentially (i.e., from bottom to top) on the transparent substrate 102 using a physical vapor deposition (PVD) and/or reactive sputtering processing tool. In some embodiments, the low-e stack 104 is formed over the entire substrate 102. However, in other embodiments, the low-e stack 104 may only be formed on isolated portions of the transparent substrate 102. Although the layers may be described as being formed “above” or “over” the previous layer (or the substrate), it should be understood that in some embodiments, each layer is formed directly on (and adjacent to) the previously provided/formed component (e.g., layer). In other embodiments, additional layers may be included between the layers, and other processing steps may also be performed between the formation of various layers.
The base layer (or lower metal oxide layer) 106 is formed above the upper surface of the transparent substrate 102. The base layer 106 may be made of a metal oxide and have a thickness of, for example, approximately 150 Å. Examples of metal oxides used in the lower metal oxide layer 108 include, but are not limited to, titanium oxide, zinc oxide, tin oxide, and metal alloy oxides, such as zinc-tin oxide. The base layer 106 may be used to tune the optical properties of the low-e panel 100 as a whole, as well as to enhance silver nucleation.
The seed layer 108 is formed over the base layer 106. The seed layer 108 is made of a metal oxide and may have a thickness of, for example, approximately 100 Å. In some embodiments, the metal oxide used in the seed layer 108 is zinc oxide. The seed layer 108 may be used to enhance the deposition/growth of the reflective layer 110 on the low-e stack (e.g., enhance the crystalline structure and/or texturing of the reflective layer 110) and increase the transmission of the stack 104 for anti-reflection purposes. It should be understood that in other embodiments, the seed layer 108 may be made of tin oxide or may not be included at all.
The reflective layer 110 is formed above the seed layer 108. In some embodiments, the reflective layer 110 is made of silver and has a thickness of, for example, about 100 Å. As is commonly understood, the reflective layer 110 is used to reflect infra-red electro-magnetic radiation, thus reducing the amount of heat that may be transferred through the low-e panel 100.
The barrier layer 112 is formed over the reflective layer 110. In accordance with one aspect of the present invention, the barrier layer 24, in at least some embodiments, includes titanium (e.g., is made of titanium or titanium oxide). In some embodiments, the barrier layer 112 has a thickness of, for example, between 30 and 100 Å. The barrier layer 112 is used to protect the reflective layer 110 from the processing steps used to form the other, subsequent layers of the low-e stack 104 and to prevent any interaction of the material of the reflective layer 110 with the materials of the other layers of the low-e stack 104, which may result in undesirable optical characteristics of the Low-e panel 100.
According to one aspect of the present invention, the process window enhancement layer (or simply “enhancement layer”) 114 is formed over (e.g., adjacent to) the barrier layer 112. In some embodiments, the enhancement layer 114 comprises (i.e., is made of) a nitride, and as such may also be referred to as a “nitride-containing layer.” In some embodiments, the material used for the enhancement layer 114 does not include oxygen (e.g., is not an oxide). For example, in some embodiments, the enhancement layer 114 comprises (e.g., is made of) zinc nitride. In some embodiments, the enhancement layer 114 comprises an oxynitride, such as zinc oxynitride. The enhancement layer 114 may have a thickness that is not more (e.g., less than) 1.0 nanometers (nm), such as 0.5 nm. Other nitrides and oxynitrides with little or no absorption at visible wavelengths (at least when the thickness is 1 nm or less) may also be used, such as silicon nitride, tin nitride, aluminum nitride, titanium nitride, tantalum nitride, molybdenum nitride, and tungsten nitride. The enhancement layer 114 essentially performs the function of a second barrier layer as it protects the barrier layer 112 from any oxygen (or additional oxygen) which may otherwise diffuse from the layers above and adversely affect the performance of the low-e stack 104, while absorbing little, if any, visible light.
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It should be noted that depending on the materials used, some of the layers of the low-e stack 104 may have some materials in common. An example of such a stack may use a zinc-based material in the base layer 106, the seed layer 108, and the over-coating layer 116. As a result, embodiments described herein may allow for a relatively low number of different targets to be used for the formation of the low-e stack 104.
The methods described herein (e.g., the use of the process window enhancement layer described above) widens the process window for a titanium-based barrier layer such that it is similar to that of nickel chromium, while still providing the performance of titanium. For example, a low-e stack using a titanium-based barrier layer with the enhancement layer described above may allow for a variation in barrier layer thickness of as much as 4 nm without significantly affecting performance. Further, the enhancement layer allows for a thinner titanium-based barrier layer to be used by, for example, preventing oxygen diffusion from the over-coating layer. For example, when using a 1 nm thick titanium barrier layer, the sheet resistance of the stack may be as high as 34 ohms. However, the addition of the enhancement layer described above may reduce the sheet resistance of the stack to, for example, 10 ohms.
As such, the use of the barrier layer materials described herein allows for a greater range of thicknesses to be used for the barrier layer, thus facilitating processing, as a larger processing window may used while still providing acceptable performance. That is, the overall performance of the panel 100 may be improved as a wider range of barrier layer thickness may be utilized. As a result, manufacturing costs may be reduced.
The housing 302 includes a gas inlet 312 and a gas outlet 314 near a lower region thereof on opposing sides of the substrate support 306. The substrate support 306 is positioned near the lower region of the housing 302 and is configured to support a substrate 316. The substrate 316 may be a round glass (e.g., borosilicate glass) substrate having a diameter of, for example, about 200 mm or about 300 mm. In some embodiments (such as in a manufacturing environment), the substrate 316 may have other shapes, such as square or rectangular, and may be significantly larger (e.g., about 0.5—about 6 m across). The substrate support 306 includes a support electrode 318 and is held at ground potential during processing, as indicated.
The first and second target assemblies (or process heads) 308 and 310 are suspended from an upper region of the housing 302 within the processing chamber 304. The first target assembly 308 includes a first target 320 and a first target electrode 322, and the second target assembly 310 includes a second target 324 and a second target electrode 326. As shown, the first target 320 and the second target 324 are oriented or directed towards the substrate 316. As is commonly understood, the first target 320 and the second target 324 include one or more materials that are to be used to deposit a layer of material 328 on the upper surface of the substrate 316.
The materials used in the targets 320 and 324 may, for example, include tin, zinc, magnesium, aluminum, lanthanum, yttrium, titanium, antimony, strontium, bismuth, silicon, silver, nickel, chromium, or any combination thereof (i.e., a single target may be made of an alloy of several metals). Additionally, the materials used in the targets may include oxygen, nitrogen, or a combination of oxygen and nitrogen in order to form the oxides, nitrides, and oxynitrides described above. Additionally, although only two targets 320 and 324 are shown, additional targets may be used.
The PVD tool 300 also includes a first power supply 330 coupled to the first target electrode 322 and a second power supply 332 coupled to the second target electrode 324. As is commonly understood, the power supplies 330 and 332 pulse direct current (DC) power to the respective electrodes, causing material to be, at least in some embodiments, simultaneously sputtered (i.e., co-sputtered) from the first and second targets 320 and 324.
During sputtering, inert gases, such as argon or krypton, may be introduced into the processing chamber 304 through the gas inlet 312, while a vacuum is applied to the gas outlet 314. However, in embodiments in which reactive sputtering is used, reactive gases may also be introduced, such as oxygen and/or nitrogen, which interact with particles ejected from the targets (i.e., to form oxides, nitrides, and/or oxynitrides), as may be the case with the formation of the titanium-yttrium oxide and yttrium oxide using in barrier layers in accordance with the embodiments described above.
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At block 404, a reflective layer (e.g., silver) is formed above the transparent substrate. In some embodiments, the reflective layer is made of silver. At block 406, a barrier layer is formed above the reflective layer. In at least some embodiments, includes titanium. For example, the barrier layer may be made of titanium or titanium oxide.
At block 408, a nitride-containing layer (or process window enhancement layer) is formed above the barrier layer. In some embodiments, the nitride-containing layer comprises a nitride, such as zinc nitride, or an oxynitride, such as zinc oxynitride. As described above, the inclusion of the nitride-containing layer may widen the process window for a titanium-based barrier layer, such that it is more similar to that of nickel chromium.
At block 410, an over-coating layer is formed above the nitride-containing layer. In some embodiments, the over-coating layer is made of a material different than that of the nitride-containing layer (and is thus is distinct from the nitride-containing layer), such as a metal oxide. Although not shown in
Thus, in some embodiments, a method for forming a low-e panel is provided. A transparent substrate is provided. A reflective layer is formed above the transparent substrate. A barrier layer is formed above the reflective layer. A nitride-containing layer is formed above the barrier layer. The nitride-containing layer has a thickness that is 1 nm or less. An over-coating layer is formed above the nitride-containing layer. The over-coating layer includes a different material than that of the nitride-containing layer.
In some embodiments, a method for forming a low-e panel is provided. A transparent substrate is provided. A reflective layer is formed above the transparent substrate. A barrier layer is formed above the reflective layer. A nitride-containing layer is formed above and adjacent to the barrier layer. The nitride-containing layer includes zinc and has a thickness that is 1 nm or less. An over-coating layer is formed above the nitride-containing layer. The over-coating layer includes a different material than that of the nitride-containing layer.
In some embodiments, a low-e panel is provided. The low-e panel includes a transparent substrate. A reflective layer is formed above the transparent substrate. A barrier layer is formed above the reflective layer. A nitride-containing layer is formed above the barrier layer. The nitride-containing layer has a thickness that is 1 nm or less. A over-coating layer is formed above the nitride-containing layer. The over-coating layer includes a different material than that of the nitride-containing layer.
Although the foregoing examples have been described in some detail for purposes of clarity of understanding, the invention is not limited to the details provided. There are many alternative ways of implementing the invention. The disclosed examples are illustrative and not restrictive.