Claims
- 1. An apparatus for switching first and second optical signals, the apparatus comprising:
a substrate; a movable microstructure formed by a semiconductor process on the substrate, the movable microstructure being suspended at a distance from the substrate and being adapted to move relative to the substrate; an actuator to cause the movable microstructure to move from a first position to a second position relative to the substrate; and a mirrorless light-guiding structure mounted to the movable microstructure such that the mirrorless light-guiding structure moves with the movable microstructure, the mirrorless light-guiding structure including a first set of optical paths and a second set of optical paths, the first set of optical paths having a large radius of curvature which gradually changes the direction of the first or second optical signal, whereby when the movable microstructure is in a first position, the first and second optical signals travel along the first set of optical paths in the light-guiding structure, and when the movable microstructure is in a second position, the first and second optical signals travel along the second set of optical paths in the mirrorless light-guiding structure.
- 2. The apparatus of claim 1 wherein the movable microstructure is adapted to move in a single direction relative to the substrate.
- 3. The apparatus of claim 1 wherein the movable microstructure is adapted to move laterally relative to the substrate.
- 4. The apparatus of claim 1 wherein the movable microstructure is adapted to move rotationally relative to the substrate.
- 5. The apparatus of claim 1 wherein the mirrorless light-guiding structure includes a plurality of waveguides.
- 6. The apparatus of claim 5 wherein the plurality of waveguides include a first waveguide to provide the first set of optical paths and a second waveguide to provide the second set of optical paths, where when the movable microstructure is in the first position, the first waveguide is aligned to receive the first and second optical signals and when the movable microstructure is in the second position, the second waveguide is aligned to receive the first and second optical signals.
- 7. The apparatus of claim 6 wherein the first waveguide has a large radius of curvature which gradually changes the direction of the first or second optical signal.
- 8. The apparatus of claim 6 wherein the second waveguide has a large radius of curvature which gradually changes the direction of the first or second optical signal.
- 9. The apparatus of claim 7 wherein the second waveguide has a large radius of curvature which gradually changes the direction of the first or second optical signal.
- 10. The apparatus of claim 1 wherein the second set of optical paths has a large radius of curvature which gradually changes the direction of the first or second optical signal.
- 11. The apparatus of claim 1 further comprising an input stationary waveguide coupled to the substrate and positioned to transmit the first or second optical signal to either the first set of optical paths or the second set of optical paths.
- 12. The apparatus of claim 1 further comprising an output stationary waveguide coupled to the substrate and positioned to receive the first or second optical signal from the first or second sets of optical paths.
- 13. The apparatus of claim 11 further comprising an output stationary waveguide coupled to the substrate and positioned to receive the first or second optical signal from the first or second sets of optical paths.
- 14. The apparatus of claim 11 wherein the input stationary waveguide is coupled to the first or second sets of optical paths by an air gap.
- 15. The apparatus of claim 12 wherein the output stationary waveguide is coupled to the first or second sets of optical paths by an air gap.
- 16. The apparatus of claim 1 further comprising an activation electrode coupled to the movable microstructure and wherein the actuator includes an actuation electrode positioned to interact electrostatically with the activation electrode.
- 17. The apparatus of claim 16 wherein the actuation electrode and activation electrode are inter-digitized.
- 18. The apparatus of claim 1 further comprising an optical connector positioned at either the input to or the output of the first or second sets of optical paths.
- 19. The apparatus of claim 18 wherein the optical connector includes an alignment correction surface that corrects an alignment trajectory error of the first or second optical signal.
- 20. The apparatus of claim 1 further comprising a sensing electrode for determining the position of the movable microstructure.
- 21. The apparatus of claim 1 wherein the first set of optical paths cross over each other and the second set of optical paths do not cross over each other.
- 22. The apparatus of claim 1 wherein the second set of optical paths cross over each other and the first set of optical paths do not cross over each other.
- 23. The apparatus of claim 1 further comprising a notch in a first edge portion of the movable microstructure, the first edge portion extending in an Y direction, the microstructure having a second edge portion which extends in a X direction, the X and Y directions being substantially perpendicular to each other, the notch having a third edge portion and a fourth edge portion, where the fourth edge portion extends substantially parallel to the X direction, where the first optical signal enters the first set of optical paths at the fourth edge portion of the notch.
- 24. The apparatus of claim 1 wherein the second optical signal enters the first set of optical paths at the fourth edge portion of the notch.
- 25. The apparatus of claim 23 wherein the first optical signal exits the first set of optical paths at the second edge portion of the movable microstructure.
- 26. The apparatus of claim 25 wherein the second optical signal enters the first set of optical paths at the fourth edge portion of the notch and exits the first set of optical paths at the second edge portion of the movable microstructure.
- 27. An apparatus for switching a first and second optical signals, the apparatus comprising:
a substrate; a rotatable microstructure formed by a semiconductor process on the substrate, the rotatable microstructure being suspended at a distance from the substrate and being adapted to rotate angularly relative to the substrate; an actuator to cause the rotatable microstructure to rotate from a first position to a second position relative to the substrate; and a light-guiding structure mounted to the rotatable microstructure such that the light-guiding structure moves with the rotatable microstructure, the light-guiding structure including a first set of optical paths and a second set of optical paths, the first set of optical paths having a large radius of curvature which gradually changes the direction of the first or second optical signal, whereby when the rotatable microstructure is in a first position, the first and second optical signals travel along the first set of optical paths in the light-guiding structure, and when the rotatable microstructure is in a second position, the first and second optical signals travel along the second set of optical paths in the light-guiding structure.
- 28. The apparatus of claim 27 wherein the light-guiding structure includes a plurality of waveguides.
- 29. The apparatus of claim 28 wherein the plurality of waveguides include a first waveguide to provide the first set of optical paths and a second waveguide to provide the second set of optical paths, where when the rotatable microstructure is in the first position, the first waveguide is aligned to receive the first and second optical signals and when the rotatable microstructure is in the second position, the second waveguide is aligned to receive the first and second optical signals.
- 30. The apparatus of claim 29 wherein the first waveguide has a large radius of curvature which gradually changes the direction of the first or second optical signal.
- 31. The apparatus of claim 29 wherein the second waveguide has a large radius of curvature which gradually changes the direction of the first or second optical signal.
- 32. The apparatus of claim 30 wherein the second waveguide has a large radius of curvature which gradually changes the direction of the first or second optical signal.
- 33. The apparatus of claim 27 wherein the second set of optical paths has a large radius of curvature which gradually changes the direction of the first or second optical signal.
- 34. The apparatus of claim 27 further comprising an input stationary waveguide coupled to the substrate and positioned to transmit the first or second optical signal to either the first set of optical paths or the second set of optical paths.
- 35. The apparatus of claim 27 further comprising an output stationary waveguide coupled to the substrate and positioned to receive the first or second optical signal from the first or second sets of optical paths.
- 36. The apparatus of claim 34 further comprising an output stationary waveguide coupled to the substrate and positioned to receive the first or second optical signal from the first or second sets of optical paths.
- 37. The apparatus of claim 34 wherein the input stationary waveguide is coupled to the first or second sets of optical paths by an air gap.
- 38. The apparatus of claim 35 wherein the output stationary waveguide is coupled to the first or second sets of optical paths by an air gap.
- 39. The apparatus of claim 27 further comprising an activation electrode coupled to the rotatable microstructure and wherein the actuator includes an actuation electrode positioned to interact electrostatically with the activation electrode.
- 40. The apparatus of claim 39 wherein the actuation electrode and activation electrode are inter-digitized.
- 41. The apparatus of claim 27 further comprising an optical connector positioned at either the input to or the output of the first or second sets of optical paths.
- 42. The apparatus of claim 41 wherein the optical connector includes an alignment correction surface that corrects an alignment trajectory error of the first or second optical signal.
- 43. The apparatus of claim 27 further comprising a sensing electrode for determining the position of the rotatable microstructure.
- 44. The apparatus of claim 27 wherein the first set of optical paths cross over each other and the second set of optical paths do not cross over each other.
- 45. The apparatus of claim 27 wherein the second set of optical paths cross over each other and the first set of optical paths do not cross over each other.
- 46. A method of switching a first optical signal and a second optical signal from a first set of optical paths to a second set of optical paths, the method comprising the steps of:
propagating the first and second optical signals toward a movable microstructure, the movable microstructure being formed by a semiconductor process on a substrate and being adapted to move relative to the substrate, the movable microstructure including a light guiding structure, the light guiding structure being mounted to the movable microstructure such that the light guiding structure moves with the movable microstructure; determining whether the first and second optical signals are to propagate along the first or second sets of optical paths; selectively moving the microstructure to a first position or a second position relative to the substrate, whereby when the movable microstructure is in the first position, the first and second optical signals travel along the first set of optical paths in the light guiding structure, and when the movable microstructure is in the second position, the first and second optical signals travel along the second set of optical paths in the light guiding structure; and gradually changing the direction of the first optical signal as it propagates along the first or second sets of optical paths.
- 47. The method of claim 46 further comprising the step of correcting an alignment trajectory error in the first optical signal.
- 48. The method of claim 47 wherein the step of correcting an alignment trajectory error in the first optical signal uses a spherical surface to correct the error.
- 49. The method of claim 46 wherein the step of moving the microstructure moves the microstructure vertically relative to the substrate.
- 50. The method of claim 46 wherein the step of moving the microstructure moves the microstructure laterally relative to the substrate.
- 51. The method of claim 46 wherein the step of moving the microstructure moves the microstructure rotationally relative to the substrate.
- 52. The method of claim 46 further comprising the step of gradually changing the direction of the second optical signal as it propagates along the first or second sets of optical paths.
- 53. The method of claim 46 further comprising the step of sensing the position of the movable microstructure.
- 54. The apparatus of claim 1 wherein the substrate is a semiconductor.
- 55. The apparatus of claim 27 wherein the substrate is a semiconductor.
- 56. The apparatus of claim 1 wherein the substrate is quartz.
- 57. The apparatus of claim 27 wherein the substrate is quartz.
- 58. The apparatus of claim 1 wherein the substrate is silica.
- 59. The apparatus of claim 27 wherein the substrate is silica.
- 60. An optical switching system comprising:
(a) an input port that receives a first optical signal; (b) a plurality of output ports; and (c) a plurality of optical switching devices coupled to receive the first optical signal and switch the first optical signal to one of the plurality of output ports, each optical switching device comprising:
(i) a substrate; (ii) a movable microstructure formed by a semiconductor process on the substrate, the movable microstructure being suspended at a distance from the substrate and being adapted to move relative to the substrate; (iii) an actuator to cause the movable microstructure to move from a first position to a second position relative to the substrate; and (iv) a light-guiding structure mounted to the movable microstructure such that the light-guiding structure moves with the movable microstructure, the light-guiding structure including a first set of optical paths and a second set of optical paths, the first set of optical paths having a large radius of curvature which gradually changes the direction of the first optical signal, whereby when the movable microstructure is in a first position, the first optical signal travels along the first set of optical paths in the light-guiding structure, and when the movable microstructure is in a second position, the first optical signal travels along the second set of optical paths in the light-guiding structure.
- 61. The optical switching system of claim 60 further comprising a stationary input light guiding structure adapted to receive the first optical signal, the stationary input fight guiding structure being aligned to transmit the first optical signal to one of the plurality of optical switching devices.
- 62. The optical switching system of claim 60 further comprising a stationary output light guiding structure aligned to receive the first optical signal from one of the plurality of optical switching devices.
- 63. The optical switching system of claim 60 wherein the microstructure is adapted to move vertically relative to the substrate.
- 64. The optical switching system of claim 60 wherein the microstructure is adapted to move laterally relative to the substrate.
- 65. The optical switching system of claim 60 wherein the microstructure is adapted to move rotationally relative to the substrate.
- 66. The optical switching system of claim 60 wherein the light guiding structure includes a plurality of waveguides.
- 67. The optical switching system of claim 60 further comprising a second input port for receiving a second optical signal, where the first set of optical paths having a large radius of curvature which gradually changes the direction of the second optical signal, whereby when the movable microstructure is in a first position, the second optical signal travels along the first set of optical paths in the light-guiding structure, and when the movable microstructure is in a second position, the second optical signal travels along the second set of optical paths in the light-guiding structure.
- 68. The optical switching system of claim 67 further comprising a stationary input light guiding structure adapted to receive the second optical signal, the stationary input light guiding structure being aligned to transmit the second optical signal to one of the plurality of optical switching devices.
- 69. The optical switching system of claim 67 further comprising a stationary output light guiding structure aligned to receive the second optical signal from one of the plurality of optical switching devices.
- 70. The optical switching system of claim 68 further comprising a stationary output light guiding structure aligned to receive the second optical signal from one of the plurality of optical switching devices.
- 71. The optical switching system of claim 60 wherein the optical switching device further comprises an activation electrode coupled to the microstructure and wherein the actuation mechanism includes an actuation electrode positioned to interact electrostatically with the activation electrode.
- 72. The optical switching system of claim 71 wherein the actuation electrode and activation electrode are inter-digitized.
- 73. The optical switching system of claim 60 further comprising an optical connector including an alignment correction surface that corrects an alignment trajectory error of the first optical signal.
- 74. The optical switching system of claim 60 wherein the optical switching device further comprises a sensing electrode for determining the position of the microstructure.
- 75. The optical switching system of claim 60 wherein the first set of optical paths cross over each other and the second set of optical paths do not cross over each other.
- 76. The optical switching system of claim 60 wherein the microstructure moves from a neutral position to the first position or second position and when the microstructure is in the neutral position, the first optical signal does not propagate through the first or second optical paths.
- 77. The apparatus of claim 1 wherein the microstructure moves from a neutral position to the first position or second position and when the microstructure is in the neutral position, the first optical signal does not propagate through the first or second set of optical paths.
- 78. The apparatus of claim 27 wherein the microstructure moves from a neutral position to the first position or second position and when the microstructure is in the neutral position, the first optical signal does not propagate through the first or second set of optical paths.
- 79. An apparatus for switching a first optical signal to any one of two output ports, the apparatus comprising:
a substrate; at least two output ports; a movable microstructure formed by a semiconductor process on the substrate, the movable microstructure being suspended at a distance from the substrate and being adapted to move relative to the substrate; an actuator to cause the movable microstructure to move from a first position to a second position relative to the substrate; and a light-guiding structure mounted to the movable microstructure such that the light-guiding structure moves with the movable microstructure, the light-guiding structure including a first optical path and a second optical path, the first optical path having a large radius of curvature which gradually changes the direction of the first optical signal, whereby when the movable microstructure is in a first position, the first optical signal travels along the first optical path in the light-guiding structure, and when the movable microstructure is in a second position, the first optical signal travels along the second optical path in the light-guiding structure.
- 80. The apparatus of claim 79 wherein the movable microstructure is adapted to move in a single direction relative to the substrate.
- 81. The apparatus of claim 79 wherein the movable microstructure is adapted to move laterally relative to the substrate.
- 82. The apparatus of claim 79 wherein the movable microstructure is adapted to move rotationally relative to the substrate.
- 83. The apparatus of claim 79 wherein the light-guiding structure includes a plurality of waveguides.
- 84. The apparatus of claim 83 wherein the plurality of waveguides include a first waveguide to provide the first optical path and a second waveguide to provide the second optical path, where when the movable microstructure is in the first position, the first waveguide is aligned to receive the first optical signal and when the movable microstructure is in the second position, the second waveguide is aligned to receive the first optical signal.
- 85. The apparatus of claim 84 wherein the first waveguide has a large radius of curvature which gradually changes the direction of the first optical signal.
- 86. The apparatus of claim 84 wherein the second waveguide has a large radius of curvature which gradually changes the direction of the first optical signal.
- 87. The apparatus of claim 85 wherein the second waveguide has a large radius of curvature which gradually changes the direction of the first optical signal.
- 88. The apparatus of claim 79 wherein the second optical path has a large radius of curvature which gradually changes the direction of the first optical signal.
- 89. The apparatus of claim 79 further comprising an input stationary waveguide coupled to the substrate and positioned to transmit the first optical signal to either the first or second optical paths.
- 90. The apparatus of claim 79 further comprising an output stationary waveguide coupled to the substrate and positioned to receive the first optical signal from the first or second optical paths.
- 91. The apparatus of claim 89 further comprising an output stationary waveguide coupled to the substrate and positioned to receive the first optical signal from the first or second optical paths.
- 92. The apparatus of claim 89 wherein the input stationary waveguide is coupled to the first or second optical paths by an air gap.
- 93. The apparatus of claim 90 wherein the output stationary waveguide is coupled to the first or second optical paths by an air gap.
- 94. The apparatus of claim 79 further comprising an activation electrode coupled to the movable microstructure and wherein the actuator includes an actuation electrode positioned to interact electrostatically with the activation electrode.
- 95. The apparatus of claim 94 wherein the actuation electrode and activation electrode are inter-digitized.
- 96. The apparatus of claim 79 further comprising an optical connector positioned at either the input to or the output of the first or second optical paths.
- 97. The apparatus of claim 96 wherein the optical connector includes an alignment correction surface that corrects an alignment trajectory error of the first optical signal.
- 98. The apparatus of claim 79 further comprising a sensing electrode for determining the position of the movable microstructure.
- 99. The apparatus of claim 1 wherein the semiconductor process includes bonding the movable microstructure to the substrate.
- 100. The apparatus of claim 1 wherein the substrate is a composite layer made by bonding wafers together.
- 101. The apparatus of claim 1 wherein the substrate is a monolithic layer.
- 102. An apparatus for switching first and second optical signals, the apparatus comprising:
a substrate; a movable microstructure formed by a semiconductor process on the substrate, the movable microstructure being suspended at a distance from the substrate and being adapted to move relative to the substrate; an actuator to cause the movable microstructure to move from a first position to a second position relative to the substrate; and a light-guiding structure mounted to the movable microstructure such that the light-guiding structure moves with the movable microstructure, the light-guiding structure including a first set of optical paths and a second set of optical paths, the first set of optical paths having a large radius of curvature which gradually changes the direction of the first or second optical signal, whereby when the movable microstructure is in a first position, the first and second optical signals travel along the first set of optical paths in the light-guiding structure, and when the movable microstructure is in a second position, the first and second optical signals travel along the second set of optical paths in the light-guiding structure.
- 103. The apparatus of claim 101 wherein the movable microstructure is adapted to move in a single direction relative to the substrate.
- 104. The apparatus of claim 101 wherein the movable microstructure is adapted to move laterally relative to the substrate.
- 105. The apparatus of claim 101 wherein the movable microstructure is adapted to move rotationally relative to the substrate.
- 106. The apparatus of claim 101 wherein the light-guiding structure includes a plurality of waveguides.
- 107. The apparatus of claim 101 wherein the light-guiding structure includes a mirror.
- 108. The apparatus of claim 101 wherein the light-guiding structure includes a lens.
- 109. The apparatus of claim 106 wherein the plurality of waveguides include a first waveguide to provide the first set of optical paths and a second waveguide to provide the second set of optical paths, where when the movable microstructure is in the first position, the first waveguide is aligned to receive the first and second optical signals and when the movable microstructure is in the second position, the second waveguide is aligned to receive the first and second optical signals.
- 110. The apparatus of claim 109 wherein the first waveguide has a large radius of curvature which gradually changes the direction of the first or second optical signal.
- 111. The apparatus of claim 109 wherein the second waveguide has a large radius of curvature which gradually changes the direction of the first or second optical signal.
- 112. The apparatus of claim 110 wherein the second waveguide has a large radius of curvature which gradually changes the direction of the first or second optical signal.
- 113. The apparatus of claim 101 wherein the second set of optical paths has a large radius of curvature which gradually changes the direction of the first or second optical signal.
- 114. The apparatus of claim 101 further comprising an input stationary waveguide coupled to the substrate and positioned to transmit the first or second optical signal to either the first set of optical paths or the second set of optical paths.
- 115. The apparatus of claim 101 further comprising an output stationary waveguide coupled to the substrate and positioned to receive the first or second optical signal from the first or second sets of optical paths.
- 116. The apparatus of claim 114 further comprising an output stationary waveguide coupled to the substrate and positioned to receive the first or second optical signal from the first or second sets of optical paths.
- 117. The apparatus of claim 114 wherein the input stationary waveguide is coupled to the first or second sets of optical paths by an air gap.
- 118. The apparatus of claim 115 wherein the output stationary waveguide is coupled to the first or second sets of optical paths by an air gap.
- 119. The apparatus of claim 101 further comprising an activation electrode coupled to the movable microstructure and wherein the actuator includes an actuation electrode positioned to interact electrostatically with the activation electrode.
- 120. The apparatus of claim 119 wherein the actuation electrode and activation electrode are inter-digitized.
- 121. The apparatus of claim 101 further comprising an optical connector positioned at either the input to or the output of the first or second sets of optical paths.
- 122. The apparatus of claim 119 wherein the optical connector includes an alignment correction surface that corrects an alignment trajectory error of the first or second optical signal.
- 123. The apparatus of claim 101 further comprising a sensing electrode for determining the position of the movable microstructure.
- 124. The apparatus of claim 101 wherein the first set of optical paths cross over each other and the second set of optical paths do not cross over each other.
- 125. The apparatus of claim 101 wherein the second set of optical paths cross over each other and the first set of optical paths do not cross over each other.
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This patent application is a continuation-in-part and is related to, and claims priority of, the following related patent applications: (1) provisional U.S. Patent Application Serial No. 60/233,672 by Ying Wen Hsu, filed on Sep. 19, 2000 and titled “Method For Switching Optical Signals Using Microstructures;” (2) provisional U.S. Patent Application Serial No. 60/241,762 by Ying Wen Hsu, filed on Oct. 20, 2000, titled “Method for switching optical signals using microstructures;” (3) U.S. patent application Ser. No. 09/837,829 (docket 263/176) by Ying Wen Hsu, filed on Apr. 17, 2001 and titled “Optical Switching Element Having Movable Optically Transmissive Microstructure;” and (4) U.S. patent application Ser. No. 09/837,817 (docket 263/214) by Ying Wen Hsu, filed on Apr. 17, 2001 and titled “Optical Switching System That Uses Movable Microstructures To Switch Optical Signals In Three Dimensions, ” all patent applications of which are incorporated herein by reference. This patent application is also related to U.S. patent application Ser. No. 09/______(docket 268/001) by Ying Wen Hsu and Arthur Telkamp, filed concurrently with the present patent application and titled “1×N or N×1 Optical Switch Having a Plurality Of Movable Light Guiding Microstructures,” which is also incorporated herein by reference.
Provisional Applications (2)
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Number |
Date |
Country |
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60233672 |
Sep 2000 |
US |
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60241672 |
Oct 2000 |
US |
Continuation in Parts (2)
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Number |
Date |
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Parent |
09837829 |
Apr 2001 |
US |
Child |
10052829 |
Oct 2001 |
US |
Parent |
09837817 |
Apr 2001 |
US |
Child |
10052829 |
Oct 2001 |
US |