Chiu, et al., "A Bird's Beak Free Local Oxidation Technology Feasible to VSLI Circuits Fabrication" IEEE Transactions on Electron Devices, vol. ED-29, No. 4, pp. 536-540, Apr., 1982. |
Momose, et al., "1 .mu.m n-well CMOS/Bipolar Technology," IEDM Transactions (Feb. 1985) p. 217. |
Kapoor, et al., "A High Speed High Density Single-Poly ECL Technology for Linear/Digital Applications" 1985 Custom Integrated Circuits Conference. |
Takemura, et al., "BSA Technology for Sub-100 mn Deep Base Bipolar Transistors" IEDM Technical Digest (1987), pp. 375-377. |
Gomi, et al., "A Sub-30 psec Si Bipolar LSI Technology" IEDM Technical Digest (1988) pp. 744-747. |
Brassington, et al., "An Advanced Single-Level Polysilicon Submicrometer BiCMOS Technology," IEEE Trans. Elect. Devices. |