1. Field of the Invention
This invention is related to methods and devices for driving electromechanical devices such as interferometric modulators.
2. Description of the Related Art
Electromechanical systems include devices having electrical and mechanical elements, actuators, transducers, sensors, optical components (e.g., mirrors), and electronics. Electromechanical systems can be manufactured at a variety of scales including, but not limited to, microscales and nanoscales. For example, microelectromechanical systems (MEMS) devices can include structures having sizes ranging from about a micron to hundreds of microns or more. Nanoelectromechanical systems (NEMS) devices can include structures having sizes smaller than a micron including, for example, sizes smaller than several hundred nanometers. Electromechanical elements may be created using deposition, etching, lithography, and/or other micromachining processes that etch away parts of substrates and/or deposited material layers or that add layers to form electrical and electromechanical devices. In the following description, the term MEMS device is used as a general term to refer to electromechanical devices, and is not intended to refer to any particular scale of electromechanical devices unless specifically noted otherwise.
One type of electromechanical systems device is called an interferometric modulator. As used herein, the term interferometric modulator or interferometric light modulator refers to a device that selectively absorbs and/or reflects light using the principles of optical interference. In certain embodiments, an interferometric modulator may comprise a pair of conductive plates, one or both of which may be transparent and/or reflective in whole or part and capable of relative motion upon application of an appropriate electrical signal. In a particular embodiment, one plate may comprise a stationary layer deposited on a substrate and the other plate may comprise a metallic membrane separated from the stationary layer by an air gap. As described herein in more detail, the position of one plate in relation to another can change the optical interference of light incident on the interferometric modulator. Such devices have a wide range of applications, and it would be beneficial in the art to utilize and/or modify the characteristics of these types of devices so that their features can be exploited in improving existing products and creating new products that have not yet been developed.
In one aspect, a method of driving an array of electromechanical devices is provided, the method including performing an actuation operation on an electromechanical device within the array, where each actuation operation performed on the electromechanical device includes applying a release voltage across the electromechanical device, where the release voltage remains between a positive release voltage of the electromechanical device and a negative release voltage of the electromechanical device, and applying an address voltage across the electromechanical device, where the address voltage is either greater than a positive actuation voltage of the electromechanical device or less than a negative actuation voltage of the electromechanical device.
In another aspect, a display including a plurality of electromechanical display elements, is provided, the display including an array of electromechanical display elements, and driver circuitry configured to perform an actuation operation on an electromechanical device within the array, where each actuation operation performed on the electromechanical device includes applying a release voltage across the electromechanical device, where the release voltage remains between a positive release voltage of the electromechanical device and a negative release voltage of the electromechanical device, and applying an address voltage across the electromechanical device, where the address voltage is either greater than a positive actuation voltage of the electromechanical device or less than a negative actuation voltage of the electromechanical device
In another aspect, a method of driving an electromechanical device in an array of electromechanical devices is provided, the electromechanical device including a first electrode in electrical communication with a segment line spaced apart from a second electrode in electrical communication with a common line, the method including applying a segment voltage on the segment line, where the segment voltage varies between a maximum voltage and a minimum voltage, and where a difference between the maximum voltage and the minimum voltage is less than a width of a hysteresis window of the electromechanical device, applying a reset voltage on the common line, where the reset voltage is configured to place the electromechanical device in an unactuated state, and applying an overdrive voltage on the common line, where the overdrive voltage is configured to cause the electromechanical device to actuate based upon the state of the segment voltage.
In another aspect, a method of driving an array of electromechanical devices is provided, the array including a plurality of common lines and a plurality of segment lines, each electromechanical device including a first electrode in electrical communication with a common line spaced apart from a second electrode in electrical communication with a segment line, the method including applying a segment voltage on each of the plurality of segment lines, where the segment voltage applied on a given segment line is switchable between a high segment voltage state and low segment voltage state, and simultaneously applying a release voltage on a first common line and an address voltage on a second common line, where the release voltage causes release of all actuated electromechanical devices along the first common line independent of the state of a segment voltage applied to each electromechanical device, and where the address voltage causes actuation of electromechanical devices dependent upon the state of the segment voltage applied to a given electromechanical device.
In another aspect, a display device is provided, including an array of electromechanical devices, the array including a plurality of common lines and a plurality of segment lines, each electromechanical device including a first electrode in electrical communication with a common line spaced apart from a second electrode in electrical communication with a segment line, and driver circuitry configured to apply high segment voltage and a low segment voltage on segment lines, and configured to apply release voltages and address voltages on common lines, where the driver circuitry is configured to simultaneously apply a release voltage along a first common line and an address voltage along a second common line, where the high and low segment voltages are selected such that the release voltages release electromechanical devices located along a common line regardless of the applied segment voltage, and the address voltages cause actuation of certain electromechanical devices along a common line dependent upon the applied segment voltage.
In another aspect, a method of balancing charges within an array of electromechanical devices, the array including a plurality of segment lines and a plurality of common lines, the method including performing a write operation on the common line, where performing a write operation includes selecting a polarity for the write operation based at least in part on charge-balancing criteria, performing a reset operation by applying a reset voltage across a common line, the reset voltage placing each of the electromechanical devices along a common line in an unactuated state, applying a hold voltage of the selected polarity across the common line, where the hold voltage does not cause any of the electromechanical devices along the common line to actuate, and simultaneously applying an overdrive voltage of the selected polarity across the common line and a plurality of segment voltages across the segment lines, where the segment voltages vary between a first polarity and a second polarity, and where the overdrive voltage causes the actuation of an electromechanical device when the polarity of the overdrive voltage and the polarity of the corresponding segment voltage are not the same.
The following detailed description is directed to certain specific embodiments. However, the teachings herein can be applied in a multitude of different ways. In this description, reference is made to the drawings wherein like parts are designated with like numerals throughout. The embodiments may be implemented in any device that is configured to display an image, whether in motion (e.g., video) or stationary (e.g., still image), and whether textual or pictorial. More particularly, it is contemplated that the embodiments may be implemented in or associated with a variety of electronic devices such as, but not limited to, mobile telephones, wireless devices, personal data assistants (PDAs), hand-held or portable computers, GPS receivers/navigators, cameras, MP3 players, camcorders, game consoles, wrist watches, clocks, calculators, television monitors, flat panel displays, computer monitors, auto displays (e.g., odometer display, etc.), cockpit controls and/or displays, display of camera views (e.g., display of a rear view camera in a vehicle), electronic photographs, electronic billboards or signs, projectors, architectural structures, packaging, and aesthetic structures (e.g., display of images on a piece of jewelry). MEMS devices of similar structure to those described herein can also be used in non-display applications such as in electronic switching devices.
As displays based on electromechanical devices become larger, addressing of the entire display becomes more difficult, and a desired frame rate may be more difficult to achieve. In addition, as electromechanical display elements become smaller, their actuation time decreases, and care must be taken to avoid accidental or undesired actuation of the electromechanical display elements. A low voltage drive scheme, in which a given row of electromechanical devices is released before new information is written to the row, and in which the data information is conveyed using a smaller range of voltages, addresses these issues by allowing shorter line times. Furthermore, the low voltage drive scheme generally uses less power than previous drive schemes, and inhibits the onset of stiction failure within the electromechanical display elements.
One interferometric modulator display embodiment comprising an interferometric MEMS display element is illustrated in
The depicted portion of the pixel array in
The optical stacks 16a and 16b (collectively referred to as optical stack 16), as referenced herein, typically comprise several fused layers, which can include an electrode layer, such as indium tin oxide (ITO), a partially reflective layer, such as chromium, and a transparent dielectric. The optical stack 16 is thus electrically conductive, partially transparent and partially reflective, and may be fabricated, for example, by depositing one or more of the above layers onto a transparent substrate 20. The partially reflective layer can be formed from a variety of materials that are partially reflective such as various metals, semiconductors, and dielectrics. The partially reflective layer can be formed of one or more layers of materials, and each of the layers can be formed of a single material or a combination of materials.
In some embodiments, the layers of the optical stack 16 are patterned into parallel strips, and may form row electrodes in a display device as described further below. The movable reflective layers 14a, 14b may be formed as a series of parallel strips of a deposited metal layer or layers (orthogonal to the row electrodes of 16a, 16b) to form columns deposited on top of posts 18 and an intervening sacrificial material deposited between the posts 18. When the sacrificial material is etched away, the movable reflective layers 14a, 14b are separated from the optical stacks 16a, 16b by a defined gap 19. A highly conductive and reflective material such as aluminum may be used for the reflective layers 14, and these strips may form column electrodes in a display device. Note that
With no applied voltage, the gap 19 remains between the movable reflective layer 14a and optical stack 16a, with the movable reflective layer 14a in a mechanically relaxed state, as illustrated by the pixel 12a in
In one embodiment, the processor 21 is also configured to communicate with an array driver 22. In one embodiment, the array driver 22 includes a row driver circuit 24 and a column driver circuit 26 that provide signals to a display array or panel 30. The row driver circuit and column driver circuit 26 may be generically referred to as a segment driver circuit and a common driver circuit, and either of the row or columns may be used to apply segment voltages and common voltages. Furthermore, the terms “segment” and “common” are used herein merely as labels, and are not intended to convey any particular meaning regarding the configuration of the array beyond that which is discussed herein. In certain embodiments, the common lines extend along the movable electrodes, and the segment lines extend along the fixed electrodes within the optical stack. The cross section of the array illustrated in
In certain embodiments, the actuation protocol may be based on a drive scheme such as that discussed in U.S. Pat. No. 5,835,255. In certain embodiments of such drive schemes, for a display array having the hysteresis characteristics of
As described further below, in certain applications, a frame of an image may be created by sending a set of data signals (each having a certain voltage level) across the set of column electrodes in accordance with the desired set of actuated pixels in the first row. A row pulse is then applied to a first row electrode, actuating the pixels corresponding to the set of data signals. The set of data signals is then changed to correspond to the desired set of actuated pixels in a second row. A pulse is then applied to the second row electrode, actuating the appropriate pixels in the second row in accordance with the data signals. The first row of pixels are unaffected by the second row pulse, and remain in the state they were set to during the first row pulse. This may be repeated for the entire series of rows in a sequential fashion to produce the frame. Generally, the frames are refreshed and/or updated with new image data by continually repeating this process at some desired number of frames per second. A wide variety of protocols for driving row and column electrodes of pixel arrays to produce image frames may be used.
In the
The display device 40 includes a housing 41, a display 30, an antenna 43, a speaker 45, an input device 48, and a microphone 46. The housing 41 is generally formed from any of a variety of manufacturing processes, including injection molding, and vacuum forming. In addition, the housing 41 may be made from any of a variety of materials, including but not limited to plastic, metal, glass, rubber, and ceramic, or a combination thereof. In one embodiment the housing 41 includes removable portions (not shown) that may be interchanged with other removable portions of different color, or containing different logos, pictures, or symbols.
The display 30 of exemplary display device 40 may be any of a variety of displays, including a bi-stable display, as described herein. In other embodiments, the display 30 includes a flat-panel display, such as plasma, EL, OLED, STN LCD, or TFT LCD as described above, or a non-flat-panel display, such as a CRT or other tube device. However, for purposes of describing the present embodiment, the display 30 includes an interferometric modulator display, as described herein.
The components of one embodiment of exemplary display device 40 are schematically illustrated in
The network interface 27 includes the antenna 43 and the transceiver 47 so that the exemplary display device 40 can communicate with one or more devices over a network. In one embodiment the network interface 27 may also have some processing capabilities to relieve requirements of the processor 21. The antenna 43 is any antenna for transmitting and receiving signals. In one embodiment, the antenna transmits and receives RF signals according to the IEEE 802.11 standard, including IEEE 802.11(a), (b), or (g). In another embodiment, the antenna transmits and receives RF signals according to the BLUETOOTH standard. In the case of a cellular telephone, the antenna is designed to receive CDMA, GSM, AMPS, W-CDMA, or other known signals that are used to communicate within a wireless cell phone network. The transceiver 47 pre-processes the signals received from the antenna 43 so that they may be received by and further manipulated by the processor 21. The transceiver 47 also processes signals received from the processor 21 so that they may be transmitted from the exemplary display device 40 via the antenna 43.
In an alternative embodiment, the transceiver 47 can be replaced by a receiver. In yet another alternative embodiment, network interface 27 can be replaced by an image source, which can store or generate image data to be sent to the processor 21. For example, the image source can be a digital video disc (DVD) or a hard-disc drive that contains image data, or a software module that generates image data.
Processor 21 generally controls the overall operation of the exemplary display device 40. The processor 21 receives data, such as compressed image data from the network interface 27 or an image source, and processes the data into raw image data or into a format that is readily processed into raw image data. The processor 21 then sends the processed data to the driver controller 29 or to frame buffer 28 for storage. Raw data typically refers to the information that identifies the image characteristics at each location within an image. For example, such image characteristics can include color, saturation, and gray-scale level.
In one embodiment, the processor 21 includes a microcontroller, CPU, or logic unit to control operation of the exemplary display device 40. Conditioning hardware 52 generally includes amplifiers and filters for transmitting signals to the speaker 45, and for receiving signals from the microphone 46. Conditioning hardware 52 may be discrete components within the exemplary display device 40, or may be incorporated within the processor 21 or other components.
The driver controller 29 takes the raw image data generated by the processor 21 either directly from the processor 21 or from the frame buffer 28 and reformats the raw image data appropriately for high speed transmission to the array driver 22. Specifically, the driver controller 29 reformats the raw image data into a data flow having a raster-like format, such that it has a time order suitable for scanning across the display array 30. Then the driver controller 29 sends the formatted information to the array driver 22. Although a driver controller 29, such as a LCD controller, is often associated with the system processor 21 as a stand-alone Integrated Circuit (IC), such controllers may be implemented in many ways. They may be embedded in the processor 21 as hardware; embedded in the processor 21 as software, or fully integrated in hardware with the array driver 22.
Typically, the array driver 22 receives the formatted information from the driver controller 29 and reformats the video data into a parallel set of waveforms that are applied many times per second to the hundreds and sometimes thousands of leads coming from the display's x-y matrix of pixels.
In one embodiment, the driver controller 29, array driver 22, and display array 30 are appropriate for any of the types of displays described herein. For example, in one embodiment, driver controller 29 is a conventional display controller or a bi-stable display controller (e.g., an interferometric modulator controller). In another embodiment, array driver 22 is a conventional driver or a bi-stable display driver (e.g., an interferometric modulator display). In one embodiment, a driver controller 29 is integrated with the array driver 22. Such an embodiment is common in highly integrated systems such as cellular phones, watches, and other small area displays. In yet another embodiment, display array 30 is a typical display array or a bi-stable display array (e.g., a display including an array of interferometric modulators).
The input device 48 allows a user to control the operation of the exemplary display device 40. In one embodiment, input device 48 includes a keypad, such as a QWERTY keyboard or a telephone keypad, a button, a switch, a touch-sensitive screen, a pressure- or heat-sensitive membrane. In one embodiment, the microphone 46 is an input device for the exemplary display device 40. When the microphone 46 is used to input data to the device, voice commands may be provided by a user for controlling operations of the exemplary display device 40.
Power supply 50 can include a variety of energy storage devices as are well known in the art. For example, in one embodiment, power supply 50 is a rechargeable battery, such as a nickel-cadmium battery or a lithium ion battery. In another embodiment, power supply 50 is a renewable energy source, a capacitor, or a solar cell, including a plastic solar cell, and solar-cell paint. In another embodiment, power supply 50 is configured to receive power from a wall outlet.
In some implementations control programmability resides, as described above, in a driver controller which can be located in several places in the electronic display system. In some cases control programmability resides in the array driver 22. The above-described optimization may be implemented in any number of hardware and/or software components and in various configurations.
The details of the structure of interferometric modulators that operate in accordance with the principles set forth above may vary widely. For example,
In embodiments such as those shown in
In other embodiments, alternate drive schemes may be utilized to minimize the power required to drive the display, as well as to allow a common line of electromechanical devices to be written to in a shorter amount of time. In certain embodiments, a release or relaxation time of an electromechanical device such as an interferometric modulator may be longer than an actuation time of the electromechanical device, as the electromechanical device may be pulled to an unactuated or released state only via the mechanical restoring force of the movable layer. In contrast, the electrostatic force actuating the electromechanical device may act more quickly on the electromechanical device to cause actuation of the electromechanical device. In the high voltage drive scheme discussed above, the write time for a given line must be sufficient to allow not only the actuation of previously unactuated electromechanical devices, but to allow for the unactuation of previously actuated electromechanical devices. The release rate of the electromechanical devices thus acts as a limiting factor in certain embodiments, which may inhibit the use of higher refresh rates for larger display arrays.
An alternate drive scheme, referred to herein as a low voltage drive scheme, may provide improved performance over the drive scheme discussed above, in which the bias voltage is applied along both the common and segment lines.
In a bichrome display, each of the pixels 130-135 may be substantially identical, with similar or identical electromechanical properties. For example, the gap between the movable electrode and the optical stack when the electromechanical device is in the unactuated position may be substantially identical for each of the pixels, and the pixels may have substantially identical actuation and release voltages, and therefore substantially identical hysteresis windows. In a color display, the exemplary array segment 100 may comprise three colors of subpixels, with each of the pixels 130-135 comprising a subpixel of a particular color. The colored subpixels may be arranged such that each common line 110a, 110b, 110c defines a common line of subpixels of similar colors. For example, in an RGB display, pixels 130 and 133 along common line 110a may comprise red subpixels, pixels 131 and 134 along common line 110b may comprise green subpixels, and pixels 132 and 135 along common line 110a may comprise blue subpixels. Although depicted as being a tri-color display, any number of subpixels may be used in a given color pixel. Thus, the 2×3 array may in an RGB display represent two color pixels 138a and 138b, where the color pixel 138a comprises red subpixel 130, green subpixel 131, and blue subpixel 132, and the color pixel 138b comprises red subpixel 133, green subpixel 134, and blue subpixel 135.
In other embodiments, more or fewer colors of subpixels used, and the number of common lines per pixel adjusted accordingly. In still other embodiments, subpixels of more than one color may be arranged along a single common line. For example, in a four-color display, 2×2 regions of the display may form pixels, such that for example, pixel 130 may be a red subpixel, pixel 133 may be a green subpixel, pixel 131 may be a blue subpixel, and pixel 134 may be a yellow subpixel.
In one embodiment of an alternate drive scheme, the voltage VSEG applied on segment lines 120a and 120b is switched between a high segment voltage VSH and a low segment voltage VSL. The voltage VCOM applied on common lines 110a, 110b, and 110c is switched between 5 different voltages, one of which is a ground state in certain embodiments. The four non-ground voltages are a high hold voltage VCHOLD
In a particular embodiment, the high segment voltage VSH may be a relatively low voltage, on the order of 1V-2V, and the low segment voltage VSL may be ground. Because the high and low segment voltages are not symmetric about the ground, the absolute value of the high hold and address voltages may be less than the absolute value of the low hold and address voltages (as can be seen later with respect to, e.g.,
The positive and negative hysteresis windows may be different for certain electromechanical devices, and an offset voltage along the common line may be used to account for that difference. In such an embodiment, when the low segment voltage is set to ground, the high and low hold voltages are dependent upon the high segment voltage VSH, as well as an offset voltage VOS which may represent the midway point between the positive and negative hysteresis values and a bias voltage VBIAS which may represent the difference between the midpoint of the hysteresis window and the offset voltage VOS. A suitable high hold voltage may be given by
VCHOLD
and a suitable low hold voltage may be given by
VCHOLD
High and low address voltages VCADD
In
The common line voltage on common line 110a (waveform 210a) then moves to a ground state 244a, causing release of the pixels 130 and 133 along common line 110a. This can be seen in
The common line voltage on line 110a (waveform 210a) then moves to a low hold value VCHOLD
The common line voltage on line 110a (waveform 210a) is then decreased to a low address voltage VCADD
Next, the common line voltage along line 110a (waveform 210a) is increased back to the low hold voltage 246a. As previously discussed, the voltage differential across the pixels remains within the hysteresis window when the low hold voltage 226a is applied, regardless of the segment voltage. The voltage across pixel 130 (waveform 230) thus drops below the positive actuation voltage 260 but remains above the positive release voltage 262, and thus remains actuated. The voltage across pixel 133 (waveform 233) does not drop below the positive release voltage 262, and will remain unactuated.
In the illustrated embodiment, similar common voltages are applied on common lines 110b, and 110c, as can be seen in waveforms 210b and 210c, which are identical to waveform 210a but temporally offset by one and two line times, respectively. As only one common line is exposed to an addressing voltage at a time in this embodiment, only that line will be written to, and the segment voltages applied during the application of the addressing voltage are selected to write the desired data to the common line currently being addressed. It can also be seen that the entire release and write process for a given column line is performed during a single line time in the embodiment of
Once all the common lines have been addressed, the initial common line 110a may be addressed again, beginning the process of writing another frame. It can be seen that in the second write process on the first common line 110a (waveform 210a), a positive hold and address voltage are used. It can also be seen that during a negative polarity write cycle, when the low hold and address voltages are used, a high segment voltage will cause actuation of the pixel along that segment line. Similarly, during a positive polarity write cycle, the low segment voltage will cause actuation of the pixel along that segment line, because the absolute value of the pixel voltage, the voltage differential between the voltages applied on the common and segment lines for that pixel, will be as large as possible. Because this meaning of the state of the segment data (referred to herein as the “sense” of the data) alternates in this embodiment on a frame to frame basis, the polarity of the write procedures must be tracked so that the segment voltages can be properly formatted.
Multiple modifications can be made to the low voltage drive scheme described above. In the drive scheme of
In addition, in other embodiments, the segment voltage may not vary between a low segment voltage and ground, but may instead vary between a high and low segment voltage such as a positive segment voltage and a negative segment voltage. In an embodiment in which the absolute value of the high segment voltage is substantially equal to the absolute value of the low segment voltage (where the segment voltages are centered about ground), the positive and negative hold and address voltages may be substantially symmetrical about the offset voltage. In other embodiments, both the segment voltages may have the same polarity, such as an embodiment where the high segment voltage is set to 2.5V, and the low segment voltage is set to 0.5 volts. In certain embodiments, however, minimizing the absolute value of the segment voltages may simplify the segment drivers.
In the embodiment illustrated in
It can be seen that voltage 310a first includes a write procedure having a negative polarity performed along common line 110a. Subsequently, a write procedure having a positive polarity is performed along common line 110b using voltage 310b. The polarity of the write procedure continues to alternate on a line by line basis. In the illustrated embodiment, because there are an odd number of common lines, the polarity of write procedures performed along a given common line will alternate over time, as well. In embodiments in which there is an even number of common lines, the polarity of the write procedure on the final common line may be used as the polarity of the next write procedure on the first common line, so as to maintain the alternating polarity along a given common line. Alternatively, the polarity of a particular write procedure, such as the write procedure for the first line in a frame may be selected on a pseudo-random basis. The polarity of subsequent write procedures in that fram may be alternated on a line-by-line or color group basis, or may themselves be selected on a pseudo-random basis.
In the line inversion embodiment of
In further embodiments, a low voltage drive scheme may be modified to perform at least some of the steps leading up to application of the address voltage on common lines other than the common line currently being addressed. In particular embodiments, extending the release and write procedure across multiple line times may allow faster refresh rates for a display. Because all voltages other than those used for the high and low addressing voltages are selected to have no effect not to actuate the interferometric modulators, regardless of the addressing voltage, the segment voltages can be set to appropriate values to write data to the common line currently being addressed, without affecting the state of pixels along other common lines.
In the first line time 470 illustrated in
In the second line time 471, the voltage 410a is increased to a high hold value 440a. Because the increase to the high hold value 440a will not result in actuation of any of the interferometric modulators, the voltage need not remain at the high hold value 440a for as long as it remains at the ground value 444a. The voltage 410b remains at the ground state 444b during this line time 471, and the voltage 410c is increased from the low hold state 446c to the ground state 444c.
In the third line time 472, the voltage 410a is increased from the high hold voltage 440a to a high address or overdrive voltage 442a for a period of time sufficient to ensure that all pixels along common line 110a intended to be actuated will be actuated. A positive polarity write procedure is thus performed, wherein any pixel in common line 110a located along a segment line where the low segment voltage is applied will be actuated, and any pixel located along a segment line where the high segment voltage is applied will remain unactuated. The voltage is then lowered back down to the high hold voltage 440a. In this line time 472, the voltage 410b is lowered to a low hold voltage 446b, and the voltage 410c remains at ground state 444c.
In the fourth line time 473, a negative polarity write procedure is performed along column line 110b, wherein the voltage 410b is decreased from low hold voltage 446b to low address voltage 448b for a period of time sufficient to actuate desired pixels along common line 110b.
In the fifth line time 474, a positive polarity write procedure is performed along column line 110c in a similar manner to that discussed above with respect to the positive polarity write procedure performed along column line 110a in third line time 472.
Thus, even though the complete release and write procedure spans multiple line times, the release procedure and the application of the hold voltage affect pixels in a consistent manner independent of the segment voltage when the segment voltages are properly selected. These procedures can thus be applied to any desired common line regardless of the data being written to a common line during a particular line time. The line time can thus be made a function only of the write time to ensure actuation, rather than a function of the release time, as well.
As noted above, proper selection of the voltage values is beneficial. Just as the actuation and release voltages may vary for interferometric modulators of different colors, manufacturing variances or other factors may lead to interferometric modulators of the same color having some variance in actuation or release voltages. The actuation voltages and release voltages may thus be treated as a small range of voltages. Some margin of error may also be assumed, and used to define a buffer between expected values for the various voltages.
A ground voltage 502 is illustrated, as well as an offset voltage VOS 504. A high segment voltage VSH 510, which in the illustrated embodiment is positive, and a low segment voltage VSL 512, which in the illustrated embodiment is negative, are shown. The absolute value of the segment voltages 510, 512 is smaller than the DC release voltages in both polarities, and the offset voltage is thus relatively small. The positive release voltage 520 is shown having a width of 522, due to variance in the release voltage on the line or array of interferometric modulators. Similarly, the positive actuation voltage 524 has an illustrated width of 526. The high hold voltage VCHOLD
Line 532 represents the pixel voltage when the common line voltage is set to high hold voltage 530 and the segment line voltage is set to the high segment voltage VSH, and line 534 represents the pixel voltage when the common line voltage is set to high hold voltage 530 and the segment line voltage is set to the low segment voltage VSL. As can be seen, both lines 532 and 534 lie within the hysteresis window 528, as well, ensuring that the pixel voltage remains within the hysteresis window when the high hold voltage VCHOLD is applied along the common line.
Line 540 represents the pixel voltage when the high addressing or overdrive voltage VCADD
It can be seen in
The actuation time is dependent also upon the addressing voltage (alternately referred to as the overdrive voltage, as noted above), as an increased addressing voltage will increase the rate of charge flow to the interferometric modulator, increasing the electrostatic force acting on the movable layer. In particular, if the distance between the addressing voltage and the outer range of the actuation voltages is made larger, the actuation time of the pixels may be increased due to the increase in electrostatic force seen by all of the addressed pixels. If the actuation voltage window can be made as small as possible, it can be ensured that each of the pixels will see additional electrostatic force for a given voltage swing, and the line time may be reduced accordingly.
At noted above, the use of a low voltage drive scheme such as the one discussed above may provide multiple advantages over the high-voltage drive scheme. One notable advantage is the reduced power consumption under most circumstances. Under the high voltage drive scheme, the energy needed to “rip” or render an image is dependent on the current image on the display array, and controlled by the energy required to switch the segment voltages from their previous value to their intended value. Because the switch in segment voltages in the high voltage drive scheme generally requires a switch between the positive bias voltage and the negative bias voltage, the segment voltage swing is on the order of roughly 12 volts, assuming a bias voltage of roughly 6 volts. In contrast, the segment voltage swing in the low voltage drive scheme may be on the order of roughly 2 volts. The energy required to rip an image is thus is reduced by a factor of up to ( 2/12)2, a significant energy savings.
In addition, the use of low voltage along the segment lines reduces the risk of unintended pixel switching due to coupling of the segment signals into the common lines. The amplitude and duration of any spurious signals resulting from cross-talk is reduced, lowering the likelihood of false pixel switching. This also lessens constraints on resistance throughout the array and in the periphery, allowing the use of materials and designs having higher resistance, or the use of narrower routing lines in the periphery of the array.
The range of usable voltages within the hysteresis window is also increased. Because the high voltage drive scheme discussed above does not intentionally unactuate and reactuate an already actuated pixel when the pixel is to remain actuated across two consecutive frames, unintended actuation of the pixel must be avoided. The use of a bias voltage significantly higher than the DC release voltage can mitigate this problem by ensuring that the switching between positive and negative hysteresis values is sufficiently fast, but doing so limits the usable bias voltages to within the flash bias window, which is smaller than the DC hysteresis window and is image dependent. In contrast, because each pixel is released for a period of time before reactuation in the low voltage drive scheme, unintentional release is not a concern, and the entire DC hysteresis window can be used.
The low voltage segment driver circuitry may also reduce the cost of the driver circuitry. Because of the lower voltages used, the segment driver circuitry can be build with digital logic circuitry. This may be particularly useful in large panels having multiple integrated circuits driving the panel. Some additional complexity is introduced in the common driver circuitry, as the common driver circuitry is configured to output five different voltages on a given common line, but this complexity is offset by the simplification of the segment driver circuitry.
The low voltage driver circuitry also permits the use of smaller, faster interferometric modulator pixels. The high voltage drive scheme may become impractical for smaller interferometric modulator elements. For example the use of interferometric modulators at or below 45 μm pitch may be impractical using a high voltage drive scheme, due in part to the actuation speed of the pixels, which could release too quickly. In contrast, interferometric modulators at or below 38 μm pitch are usable using a low voltage drive scheme such as the drive schemes discussed herein.
The line time of the interferometric modulators can be significantly reduced, as well. Using the high voltage drive scheme may be difficult for line times less than 100 μs on a display, but using the low voltage drive scheme, line times less than 10 μs are possible. In certain embodiments, the line time required by the low voltage drive schemes may be reduced to a point where the content in a given frame is written twice, once using a positive polarity, and once using a negative polarity. This double writing process is an ideal charge balancing process, as it is not dependent upon the probability of charge balancing over a large number of frames. Rather, each pixel is charge balanced within each frame by writing in both positive and negative polarities.
As can be seen in, for example,
In an embodiment with frame inversion, the constant polarity across regions of the array during a given frame may cause some visible flicker of the segment lines, as a given segment voltage will affect almost all unactuated pixels along a segment line in the same manner. In some embodiments, line inversion of the type discussed above may mitigate this flicker, as adjacent pixels along a segment line may be affected in opposite ways by a given segment voltage, producing a much finer visual pattern which may appear to blend the two unactuated color states together. In other embodiments, the segment voltage may be deliberately switched during each line time to ensure that unactuated pixels spend half their time in each of the two unactuated color states.
Rapid refresh of a display may occur during display of video or similarly dynamic content, such that the next frame is written immediately or soon after the previous frame is finished. However, in other embodiments, a particular frame may be displayed for an extended period of time after the frame is written, by applying hold voltages on each of the common lines for a period of time. In certain embodiments, this may be due to the display of a relatively static image, such as the GUI of a mobile phone or other display. In other embodiments, the number of common lines in the display may be sufficiently small, particularly in embodiments with slow refresh rates or short line times, that the write time for a frame is significantly shorter than the display time for the frame. In other embodiments, the operation of a particular GUI or other display of information may only require a portion of a display may be updated in a given frame, and other portions of the display need not be addressed.
In one embodiment, flicker may be avoided or mitigated by maintaining the segment voltages at a constant voltage during this time period. In particular embodiments, each of the segment voltages are maintained at the same voltage, which may be the high segment voltage, the low segment voltage, or an intermediate voltage. In other embodiments, the voltages may be maintained at the voltage used to write data to the last common line. By maintaining a constant voltage on all segment lines, however, greater uniformity in color across a color display may be provided, as each unactuated pixel of a given color will have a similar applied pixel voltage.
The segment voltages applied on segment lines, such as segment lines 120a and 120b of the array of
At the end of the frame write 570, the voltage applied on segment line 120a (see waveform 520a) moves to an intermediate voltage 554a, and the voltage applied on segment line 120b (see waveform 520b) moves to an intermediate voltage 554b. As noted above, the segment voltages could alternately move to either the high or low segment voltages, or any other voltage, but the use of ground as the segment voltage during the hold state means that the pixel voltage across a given pixel will be substantially equal to the common line voltage applied along the corresponding common line, which may simplify a determination of a desired hold voltage in further embodiments. By applying a uniform voltage on each of the segment lines, the pixel voltage across unactuated pixels on a given common line will be equal. When similar hold voltages are applied on multiple common lines the pixel voltages for all unactuated pixels with a given applied hold voltage will be equal.
Thus, in an RGB display with red, green, and blue common lines, there may be six distinct hold voltages applied during the extended hold sequence 580, high and low red hold voltages, high and low blue hold voltages, and high and low green hold voltages. By applying a uniform segment voltage on each of the segment lines, pixel voltages across unactuated pixels in the array will thus be one of six possible values, two for each color. In contrast, if both high and low segment voltages are applied on the various segment lines, there may be 12 possible pixel voltages, which may lead to significant variation in the color reflected by an interferometric modulator array due to variations in the positions of the unactuated pixels.
In further embodiments, the hold voltages along the common lines may be also be adjusted to account for this effect. In one embodiment, at least one of the low and high hold voltages for a given color may be adjusted to bring the absolute values of the pixel voltages of the pixels at the high and low voltages closer to one another. If the absolute values of the pixel voltages are made substantially equal to one another, all unactuated pixels of a given color will reflect substantially the same color, providing better color uniformity across the display. In addition, the hold voltages for various colors in a multi-color display such as an RGB display may be optimized for the purposes of white balance, such that the color reflected by a combination of the red, green, and blue pixels is at a particular white point to provide a desired white balance.
In other embodiments, both the high and low hold voltages for a given color may be adjusted to provide a desired pixel voltage. For example, a particular shade of red requiring a particular pixel voltage may be desired, and both the high and low voltages may be optimized to provide that desired pixel voltage when the constant segment voltage is applied on the segment lines.
When a fluctuating segment voltage is applied, the hold voltage is limited to voltages which will not cause actuation or release of pixels when either the highest or lowest segment voltage is applied. In contrast, no such margin is required when the applied segment voltage is constant, so the range of possible hold voltages which can be applied along the common lines without changing the state of the pixels is increased. In particular, hold voltages which are closer to the actuation and release voltages of the pixel may be used. In certain embodiments, voltages in this additional range of available voltages may be selected for the hold voltage.
In some embodiments, the optimized hold voltage may be used for the hold voltage even during the frame write periods. However, because the range of voltages which can be used as a hold voltage during the extended hold period 580 is increased, hold voltages which may not be used during the frame write 570 may be used once the frame write 570 is concluded, and constant segment voltages are being applied. This post-write adjustment of the hold voltage is illustrated in
Suitable optimized hold voltages may be determined on a panel by panel basis to account for variations in the manufacturing process. By measuring characteristics of the interferometric modulators, such as the capacitance of the interferometric modulators, appropriate pixel voltages and hold voltages may be determined which provide a desired optical response.
In other embodiments, hold voltages may be optimized even in displays without extended hold periods. Because there may be some room in a given embodiment to adjust the hold voltage while ensuring that the pixel voltage remains within the hysteresis window when the hold voltage is applied along the common line, a hold voltage which minimizes the visual effect of this variation in the position of the movable layer may be selected as the hold voltage. For example, the bias voltage may be selected such that the two hold positions of an unactuated interferometric modulator reflect different shades of the same color, rather than shifting towards another color in one of the states.
Various combinations of the above embodiments and methods discussed above are contemplated. In particular, although the above embodiments are primarily directed to embodiments in which interferometric modulators of particular elements are arranged along common lines, interferometric modulators of particular colors may instead be arranged along segment lines in other embodiments. In particular embodiments, different values for high and low segment voltages may be used for specific colors, and identical hold, release and address voltages may be applied along common lines. In further embodiments, when multiple colors of subpixels are located along common lines and segment lines, such as the four-color display discussed above, different values for high and low segment voltages may be used in conjunction with different values for hold and address voltages along the common lines, so as to provide appropriate pixel voltages for each of the four colors. In addition, the methods of testing described herein may be used in combination with other methods of driving electromechanical devices.
It is also to be recognized that, depending on the embodiment, the acts or events of any methods described herein can be performed in other sequences, may be added, merged, or left out altogether (e.g., not all acts or events are necessary for the practice of the methods), unless the text specifically and clearly states otherwise.
While the above detailed description has shown, described, and pointed out novel features as applied to various embodiments, various omissions, substitutions, and changes in the form and details of the device of process illustrated may be made. Some forms that do not provide all of the features and benefits set forth herein may be made, and some features may be used or practiced separately from others.
This application is a continuation of U.S. patent application Ser. No. 12/413,336, filed Mar. 27, 2009, which is hereby incorporated by reference in its entirety.
Number | Name | Date | Kind |
---|---|---|---|
3982239 | Sherr | Sep 1976 | A |
4403248 | Te Velde | Sep 1983 | A |
4441791 | Hornbeck | Apr 1984 | A |
4459182 | Te Velde | Jul 1984 | A |
4482213 | Piliavin et al. | Nov 1984 | A |
4500171 | Penz et al. | Feb 1985 | A |
4519676 | Te Velde | May 1985 | A |
4566935 | Hornbeck | Jan 1986 | A |
4571603 | Hornbeck et al. | Feb 1986 | A |
4596992 | Hornbeck | Jun 1986 | A |
4615595 | Hornbeck | Oct 1986 | A |
4662746 | Hornbeck | May 1987 | A |
4681403 | Te Velde et al. | Jul 1987 | A |
4709995 | Kuribayashi et al. | Dec 1987 | A |
4710732 | Hornbeck | Dec 1987 | A |
4856863 | Sampsell et al. | Aug 1989 | A |
4859060 | Katagiri et al. | Aug 1989 | A |
4954789 | Sampsell | Sep 1990 | A |
4956619 | Hornbeck | Sep 1990 | A |
4982184 | Kirkwood | Jan 1991 | A |
5018256 | Hornbeck | May 1991 | A |
5028939 | Hornbeck et al. | Jul 1991 | A |
5037173 | Sampsell et al. | Aug 1991 | A |
5055833 | Hehlen et al. | Oct 1991 | A |
5061049 | Hornbeck | Oct 1991 | A |
5078479 | Vuilleumier | Jan 1992 | A |
5079544 | DeMond et al. | Jan 1992 | A |
5083857 | Hornbeck | Jan 1992 | A |
5096279 | Hornbeck et al. | Mar 1992 | A |
5099353 | Hornbeck | Mar 1992 | A |
5124834 | Cusano et al. | Jun 1992 | A |
5142405 | Hornbeck | Aug 1992 | A |
5142414 | Koehler | Aug 1992 | A |
5162787 | Thompson et al. | Nov 1992 | A |
5168406 | Nelson | Dec 1992 | A |
5170156 | DeMond et al. | Dec 1992 | A |
5172262 | Hornbeck | Dec 1992 | A |
5179274 | Sampsell | Jan 1993 | A |
5192395 | Boysel et al. | Mar 1993 | A |
5192946 | Thompson et al. | Mar 1993 | A |
5206629 | DeMond et al. | Apr 1993 | A |
5212582 | Nelson | May 1993 | A |
5214419 | DeMond et al. | May 1993 | A |
5214420 | Thompson et al. | May 1993 | A |
5216537 | Hornbeck | Jun 1993 | A |
5226099 | Mignardi et al. | Jul 1993 | A |
5227900 | Inaba et al. | Jul 1993 | A |
5231532 | Magel et al. | Jul 1993 | A |
5233385 | Sampsell | Aug 1993 | A |
5233456 | Nelson | Aug 1993 | A |
5233459 | Bozler et al. | Aug 1993 | A |
5254980 | Hendrix et al. | Oct 1993 | A |
5272473 | Thompson et al. | Dec 1993 | A |
5278652 | Urbanus et al. | Jan 1994 | A |
5280277 | Hornbeck | Jan 1994 | A |
5285196 | Gale | Feb 1994 | A |
5287096 | Thompson et al. | Feb 1994 | A |
5287215 | Warde et al. | Feb 1994 | A |
5296950 | Lin et al. | Mar 1994 | A |
5305640 | Boysel et al. | Apr 1994 | A |
5312513 | Florence et al. | May 1994 | A |
5323002 | Sampsell et al. | Jun 1994 | A |
5325116 | Sampsell | Jun 1994 | A |
5327286 | Sampsell et al. | Jul 1994 | A |
5331454 | Hornbeck | Jul 1994 | A |
5339116 | Urbanus et al. | Aug 1994 | A |
5365283 | Doherty et al. | Nov 1994 | A |
5411769 | Hornbeck | May 1995 | A |
5444566 | Gale et al. | Aug 1995 | A |
5446479 | Thompson et al. | Aug 1995 | A |
5448314 | Heimbuch et al. | Sep 1995 | A |
5452024 | Sampsell | Sep 1995 | A |
5454906 | Baker et al. | Oct 1995 | A |
5457493 | Leddy et al. | Oct 1995 | A |
5457566 | Sampsell et al. | Oct 1995 | A |
5459602 | Sampsell | Oct 1995 | A |
5461411 | Florence et al. | Oct 1995 | A |
5488505 | Engle | Jan 1996 | A |
5489952 | Gove et al. | Feb 1996 | A |
5497172 | Doherty et al. | Mar 1996 | A |
5497197 | Gove et al. | Mar 1996 | A |
5497262 | Kaeriyama | Mar 1996 | A |
5499062 | Urbanus | Mar 1996 | A |
5506597 | Thompson et al. | Apr 1996 | A |
5515076 | Thompson et al. | May 1996 | A |
5517347 | Sampsell | May 1996 | A |
5523803 | Urbanus et al. | Jun 1996 | A |
5526051 | Gove et al. | Jun 1996 | A |
5526172 | Kanack | Jun 1996 | A |
5526327 | Cordova, Jr. | Jun 1996 | A |
5526688 | Boysel et al. | Jun 1996 | A |
5535047 | Hornbeck | Jul 1996 | A |
5548301 | Kornher et al. | Aug 1996 | A |
5551293 | Boysel et al. | Sep 1996 | A |
5552924 | Tregilgas | Sep 1996 | A |
5552925 | Worley | Sep 1996 | A |
5563398 | Sampsell | Oct 1996 | A |
5567334 | Baker et al. | Oct 1996 | A |
5570135 | Gove et al. | Oct 1996 | A |
5578976 | Yao | Nov 1996 | A |
5581272 | Conner et al. | Dec 1996 | A |
5583688 | Hornbeck | Dec 1996 | A |
5589852 | Thompson et al. | Dec 1996 | A |
5597736 | Sampsell | Jan 1997 | A |
5598565 | Reinhardt | Jan 1997 | A |
5600383 | Hornbeck | Feb 1997 | A |
5602671 | Hornbeck | Feb 1997 | A |
5606441 | Florence et al. | Feb 1997 | A |
5608468 | Gove et al. | Mar 1997 | A |
5610438 | Wallace et al. | Mar 1997 | A |
5610624 | Bhuva | Mar 1997 | A |
5610625 | Sampsell | Mar 1997 | A |
5612713 | Bhuva et al. | Mar 1997 | A |
5619061 | Goldsmith et al. | Apr 1997 | A |
5619365 | Rhoads et al. | Apr 1997 | A |
5619366 | Rhoads et al. | Apr 1997 | A |
5629790 | Neukermans et al. | May 1997 | A |
5633652 | Kanbe et al. | May 1997 | A |
5636052 | Arney et al. | Jun 1997 | A |
5638084 | Kalt | Jun 1997 | A |
5638946 | Zavracky | Jun 1997 | A |
5646768 | Kaeriyama | Jul 1997 | A |
5648793 | Chen | Jul 1997 | A |
5650834 | Nakagawa et al. | Jul 1997 | A |
5650881 | Hornbeck | Jul 1997 | A |
5654741 | Sampsell et al. | Aug 1997 | A |
5657099 | Doherty et al. | Aug 1997 | A |
5659374 | Gale, Jr. et al. | Aug 1997 | A |
5665997 | Weaver et al. | Sep 1997 | A |
5699075 | Miyamoto | Dec 1997 | A |
5726675 | Inoue | Mar 1998 | A |
5745193 | Urbanus et al. | Apr 1998 | A |
5745281 | Yi et al. | Apr 1998 | A |
5754160 | Shimizu et al. | May 1998 | A |
5771116 | Miller et al. | Jun 1998 | A |
5784189 | Bozler et al. | Jul 1998 | A |
5784212 | Hornbeck | Jul 1998 | A |
5808780 | McDonald | Sep 1998 | A |
5818095 | Sampsell | Oct 1998 | A |
5828367 | Kuga | Oct 1998 | A |
5835255 | Miles | Nov 1998 | A |
5842088 | Thompson | Nov 1998 | A |
5867302 | Fleming | Feb 1999 | A |
5883608 | Hashimoto | Mar 1999 | A |
5883684 | Millikan et al. | Mar 1999 | A |
5912758 | Knipe et al. | Jun 1999 | A |
5943158 | Ford et al. | Aug 1999 | A |
5959763 | Bozler et al. | Sep 1999 | A |
5966235 | Walker | Oct 1999 | A |
5986796 | Miles | Nov 1999 | A |
6008785 | Hewlett et al. | Dec 1999 | A |
6028690 | Carter et al. | Feb 2000 | A |
6037922 | Yagyu | Mar 2000 | A |
6038056 | Florence et al. | Mar 2000 | A |
6040937 | Miles | Mar 2000 | A |
6049317 | Thompson et al. | Apr 2000 | A |
6055090 | Miles | Apr 2000 | A |
6057903 | Colgan et al. | May 2000 | A |
6061075 | Nelson et al. | May 2000 | A |
6099132 | Kaeriyama | Aug 2000 | A |
6100872 | Aratani et al. | Aug 2000 | A |
6113239 | Sampsell et al. | Sep 2000 | A |
6147790 | Meier et al. | Nov 2000 | A |
6151167 | Melville | Nov 2000 | A |
6160833 | Floyd et al. | Dec 2000 | A |
6180428 | Peeters et al. | Jan 2001 | B1 |
6201633 | Peeters et al. | Mar 2001 | B1 |
6232936 | Gove et al. | May 2001 | B1 |
6232942 | Imoto et al. | May 2001 | B1 |
6245590 | Wine et al. | Jun 2001 | B1 |
6246398 | Koo | Jun 2001 | B1 |
6275326 | Bhalla et al. | Aug 2001 | B1 |
6282010 | Sulzbach et al. | Aug 2001 | B1 |
6295154 | Laor et al. | Sep 2001 | B1 |
6304297 | Swan | Oct 2001 | B1 |
6323982 | Hornbeck | Nov 2001 | B1 |
6324007 | Melville | Nov 2001 | B1 |
6327071 | Kimura | Dec 2001 | B1 |
6356085 | Ryat et al. | Mar 2002 | B1 |
6356254 | Kimura | Mar 2002 | B1 |
6362912 | Lewis et al. | Mar 2002 | B1 |
6381022 | Zavracky | Apr 2002 | B1 |
6429601 | Friend et al. | Aug 2002 | B1 |
6433907 | Lippert et al. | Aug 2002 | B1 |
6433917 | Mei et al. | Aug 2002 | B1 |
6447126 | Hornbeck | Sep 2002 | B1 |
6465355 | Horsley | Oct 2002 | B1 |
6473274 | Maimone et al. | Oct 2002 | B1 |
6480177 | Doherty et al. | Nov 2002 | B2 |
6483456 | Huisken | Nov 2002 | B2 |
6496122 | Sampsell | Dec 2002 | B2 |
6501107 | Sinclair et al. | Dec 2002 | B1 |
6505056 | Liou | Jan 2003 | B1 |
6507330 | Handschy et al. | Jan 2003 | B1 |
6507331 | Schlangen et al. | Jan 2003 | B1 |
6522794 | Bischel et al. | Feb 2003 | B1 |
6543286 | Garverick et al. | Apr 2003 | B2 |
6545335 | Chua et al. | Apr 2003 | B1 |
6548908 | Chua et al. | Apr 2003 | B2 |
6549338 | Wolverton et al. | Apr 2003 | B1 |
6552840 | Knipe | Apr 2003 | B2 |
6574033 | Chui et al. | Jun 2003 | B1 |
6589625 | Kothari et al. | Jul 2003 | B1 |
6593934 | Liaw et al. | Jul 2003 | B1 |
6600201 | Hartwell et al. | Jul 2003 | B2 |
6606175 | Sampsell et al. | Aug 2003 | B1 |
6625047 | Coleman, Jr. | Sep 2003 | B2 |
6630786 | Cummings et al. | Oct 2003 | B2 |
6632698 | Ives | Oct 2003 | B2 |
6633306 | Marz et al. | Oct 2003 | B1 |
6636187 | Tajima et al. | Oct 2003 | B2 |
6643069 | Dewald | Nov 2003 | B2 |
6650455 | Miles | Nov 2003 | B2 |
6666561 | Blakley | Dec 2003 | B1 |
6674090 | Chua et al. | Jan 2004 | B1 |
6674562 | Miles et al. | Jan 2004 | B1 |
6680792 | Miles | Jan 2004 | B2 |
6690344 | Takeuchi et al. | Feb 2004 | B1 |
6710908 | Miles et al. | Mar 2004 | B2 |
6741377 | Miles | May 2004 | B2 |
6741384 | Martin et al. | May 2004 | B1 |
6741503 | Farris et al. | May 2004 | B1 |
6747785 | Chen et al. | Jun 2004 | B2 |
6762873 | Coker et al. | Jul 2004 | B1 |
6775047 | Leung et al. | Aug 2004 | B1 |
6775174 | Huffman et al. | Aug 2004 | B2 |
6778155 | Doherty et al. | Aug 2004 | B2 |
6781643 | Watanabe et al. | Aug 2004 | B1 |
6787384 | Okumura | Sep 2004 | B2 |
6787438 | Nelson | Sep 2004 | B1 |
6788520 | Behin et al. | Sep 2004 | B1 |
6792293 | Awan et al. | Sep 2004 | B1 |
6794119 | Miles | Sep 2004 | B2 |
6811267 | Allen et al. | Nov 2004 | B1 |
6813060 | Garcia et al. | Nov 2004 | B1 |
6819469 | Koba | Nov 2004 | B1 |
6822628 | Dunphy et al. | Nov 2004 | B2 |
6829132 | Martin et al. | Dec 2004 | B2 |
6853129 | Cummings et al. | Feb 2005 | B1 |
6853418 | Suzuki et al. | Feb 2005 | B2 |
6855610 | Tung et al. | Feb 2005 | B2 |
6859218 | Luman et al. | Feb 2005 | B1 |
6861277 | Monroe et al. | Mar 2005 | B1 |
6862022 | Slupe | Mar 2005 | B2 |
6862029 | D'Souza et al. | Mar 2005 | B1 |
6862141 | Olczak | Mar 2005 | B2 |
6867896 | Miles | Mar 2005 | B2 |
6870581 | Li et al. | Mar 2005 | B2 |
6882461 | Tsai et al. | Apr 2005 | B1 |
6903860 | Ishii | Jun 2005 | B2 |
6972881 | Bassetti | Dec 2005 | B1 |
7006276 | Starkweather et al. | Feb 2006 | B2 |
7034783 | Gates et al. | Apr 2006 | B2 |
7072093 | Piehl et al. | Jul 2006 | B2 |
7110158 | Miles | Sep 2006 | B2 |
7123216 | Miles | Oct 2006 | B1 |
7142346 | Chui et al. | Nov 2006 | B2 |
7161728 | Sampsell et al. | Jan 2007 | B2 |
7196837 | Sampsell et al. | Mar 2007 | B2 |
7242512 | Chui et al. | Jul 2007 | B2 |
7291363 | Miller | Nov 2007 | B2 |
7327510 | Cummings et al. | Feb 2008 | B2 |
7339993 | Brooks et al. | Mar 2008 | B1 |
7342705 | Chui et al. | Mar 2008 | B2 |
7349139 | Chui et al. | Mar 2008 | B2 |
7355780 | Chui et al. | Apr 2008 | B2 |
7366393 | Cassarly et al. | Apr 2008 | B2 |
7369296 | Floyd | May 2008 | B2 |
7388697 | Chui et al. | Jun 2008 | B2 |
7389476 | Senda et al. | Jun 2008 | B2 |
7400489 | Van Brocklin et al. | Jul 2008 | B2 |
7489428 | Sampsell et al. | Feb 2009 | B2 |
7499208 | Mignard | Mar 2009 | B2 |
7508571 | Gally et al. | Mar 2009 | B2 |
7515147 | Mignard | Apr 2009 | B2 |
7532195 | Sampsell | May 2009 | B2 |
7532385 | Lin et al. | May 2009 | B2 |
7545550 | Gally et al. | Jun 2009 | B2 |
7545554 | Chui et al. | Jun 2009 | B2 |
7551159 | Mignard et al. | Jun 2009 | B2 |
7560299 | Cummings | Jul 2009 | B2 |
7561323 | Gally et al. | Jul 2009 | B2 |
7602375 | Chui et al. | Oct 2009 | B2 |
7626581 | Chui et al. | Dec 2009 | B2 |
7675669 | Gally et al. | Mar 2010 | B2 |
7679627 | Sampsell et al. | Mar 2010 | B2 |
7710632 | Cummings | May 2010 | B2 |
7724993 | Chui et al. | May 2010 | B2 |
7782525 | Sampsell et al. | Aug 2010 | B2 |
7813026 | Sampsell | Oct 2010 | B2 |
7843410 | Floyd | Nov 2010 | B2 |
7864402 | Chui et al. | Jan 2011 | B2 |
7889163 | Chui et al. | Feb 2011 | B2 |
7911428 | Gally et al. | Mar 2011 | B2 |
7986451 | Gally et al. | Jul 2011 | B2 |
8004504 | Cummings et al. | Aug 2011 | B2 |
8009347 | Chui et al. | Aug 2011 | B2 |
8031133 | Gally et al. | Oct 2011 | B2 |
8040588 | Chui et al. | Oct 2011 | B2 |
8045252 | Chui et al. | Oct 2011 | B2 |
8054528 | Cummings | Nov 2011 | B2 |
8102407 | Gally et al. | Jan 2012 | B2 |
8111445 | Chui et al. | Feb 2012 | B2 |
8111446 | Gally et al. | Feb 2012 | B2 |
8169688 | Sampsell | May 2012 | B2 |
8405649 | Lewis et al. | Mar 2013 | B2 |
8514169 | Chui et al. | Aug 2013 | B2 |
20010003487 | Miles | Jun 2001 | A1 |
20010026250 | Inoue et al. | Oct 2001 | A1 |
20010034075 | Onoya | Oct 2001 | A1 |
20010040536 | Tajima et al. | Nov 2001 | A1 |
20010043171 | Van et al. | Nov 2001 | A1 |
20010046081 | Hayashi et al. | Nov 2001 | A1 |
20010051014 | Behin et al. | Dec 2001 | A1 |
20010052887 | Tsutsui et al. | Dec 2001 | A1 |
20020000959 | Colgan et al. | Jan 2002 | A1 |
20020005827 | Kobayashi | Jan 2002 | A1 |
20020010763 | Salo et al. | Jan 2002 | A1 |
20020012159 | Tew | Jan 2002 | A1 |
20020036304 | Ehmke et al. | Mar 2002 | A1 |
20020050882 | Hyman et al. | May 2002 | A1 |
20020075226 | Lippincott | Jun 2002 | A1 |
20020075555 | Miles | Jun 2002 | A1 |
20020093722 | Chan et al. | Jul 2002 | A1 |
20020097133 | Charvet et al. | Jul 2002 | A1 |
20020126354 | Jeong et al. | Sep 2002 | A1 |
20020126364 | Miles | Sep 2002 | A1 |
20020179421 | Williams et al. | Dec 2002 | A1 |
20020186108 | Hallbjorner | Dec 2002 | A1 |
20020190940 | Itoh et al. | Dec 2002 | A1 |
20030004272 | Power | Jan 2003 | A1 |
20030020699 | Nakatani et al. | Jan 2003 | A1 |
20030030608 | Kurumisawa et al. | Feb 2003 | A1 |
20030072070 | Miles | Apr 2003 | A1 |
20030112507 | Divelbiss et al. | Jun 2003 | A1 |
20030122773 | Washio et al. | Jul 2003 | A1 |
20030123125 | Little | Jul 2003 | A1 |
20030137215 | Cabuz | Jul 2003 | A1 |
20030137521 | Zehner et al. | Jul 2003 | A1 |
20030164814 | Starkweather et al. | Sep 2003 | A1 |
20030189536 | Ruigt | Oct 2003 | A1 |
20030202264 | Weber et al. | Oct 2003 | A1 |
20030202265 | Reboa et al. | Oct 2003 | A1 |
20030202266 | Ring et al. | Oct 2003 | A1 |
20030227429 | Shimoshikiryo | Dec 2003 | A1 |
20040008396 | Stappaerts | Jan 2004 | A1 |
20040021658 | Chen | Feb 2004 | A1 |
20040022044 | Yasuoka et al. | Feb 2004 | A1 |
20040026757 | Crane, Jr. et al. | Feb 2004 | A1 |
20040027701 | Ishikawa | Feb 2004 | A1 |
20040051929 | Sampsell et al. | Mar 2004 | A1 |
20040058532 | Miles et al. | Mar 2004 | A1 |
20040080382 | Nakanishi et al. | Apr 2004 | A1 |
20040080479 | Credelle | Apr 2004 | A1 |
20040080516 | Kurumisawa et al. | Apr 2004 | A1 |
20040136596 | Oneda et al. | Jul 2004 | A1 |
20040145049 | McKinnell et al. | Jul 2004 | A1 |
20040145553 | Sala et al. | Jul 2004 | A1 |
20040147056 | McKinnell et al. | Jul 2004 | A1 |
20040160143 | Shreeve et al. | Aug 2004 | A1 |
20040169683 | Chiu et al. | Sep 2004 | A1 |
20040174583 | Chen et al. | Sep 2004 | A1 |
20040179281 | Reboa | Sep 2004 | A1 |
20040212026 | Van Brocklin et al. | Oct 2004 | A1 |
20040217378 | Martin et al. | Nov 2004 | A1 |
20040217919 | Piehl et al. | Nov 2004 | A1 |
20040218334 | Martin et al. | Nov 2004 | A1 |
20040223204 | Mao et al. | Nov 2004 | A1 |
20040240032 | Miles | Dec 2004 | A1 |
20040240138 | Martin et al. | Dec 2004 | A1 |
20040245588 | Nikkel et al. | Dec 2004 | A1 |
20040263502 | Dallas et al. | Dec 2004 | A1 |
20040263944 | Miles et al. | Dec 2004 | A1 |
20050001545 | Aitken et al. | Jan 2005 | A1 |
20050001828 | Martin et al. | Jan 2005 | A1 |
20050012577 | Pillans et al. | Jan 2005 | A1 |
20050024301 | Funston | Feb 2005 | A1 |
20050038950 | Adelmann | Feb 2005 | A1 |
20050057442 | Way | Mar 2005 | A1 |
20050068583 | Gutkowski et al. | Mar 2005 | A1 |
20050069209 | Damera-Venkata et al. | Mar 2005 | A1 |
20050116924 | Sauvante et al. | Jun 2005 | A1 |
20050174340 | Jones | Aug 2005 | A1 |
20050212734 | Kimura | Sep 2005 | A1 |
20050264472 | Rast | Dec 2005 | A1 |
20050286113 | Miles | Dec 2005 | A1 |
20050286114 | Miles | Dec 2005 | A1 |
20060044291 | Willis | Mar 2006 | A1 |
20060044523 | Teijido et al. | Mar 2006 | A1 |
20060066542 | Chui | Mar 2006 | A1 |
20060066561 | Chui et al. | Mar 2006 | A1 |
20060066586 | Gally et al. | Mar 2006 | A1 |
20060066594 | Tyger | Mar 2006 | A1 |
20060066595 | Sampsell et al. | Mar 2006 | A1 |
20060066601 | Kothari et al. | Mar 2006 | A1 |
20060066937 | Chui | Mar 2006 | A1 |
20060066938 | Chui | Mar 2006 | A1 |
20060077149 | Gally et al. | Apr 2006 | A1 |
20060077520 | Chui et al. | Apr 2006 | A1 |
20060103613 | Chui | May 2006 | A1 |
20060103643 | Mathew et al. | May 2006 | A1 |
20060114542 | Bloom | Jun 2006 | A1 |
20060250320 | Fuller et al. | Nov 2006 | A1 |
20060250335 | Stewart et al. | Nov 2006 | A1 |
20060250350 | Kothari et al. | Nov 2006 | A1 |
20070075942 | Martin et al. | Apr 2007 | A1 |
20070126673 | Djordjev et al. | Jun 2007 | A1 |
20070147688 | Mathew | Jun 2007 | A1 |
20070182707 | Kothari | Aug 2007 | A1 |
20070205969 | Hagood et al. | Sep 2007 | A1 |
20070242008 | Cummings | Oct 2007 | A1 |
20070247419 | Sampsell et al. | Oct 2007 | A1 |
20070285385 | Albert et al. | Dec 2007 | A1 |
20070290961 | Sampsell | Dec 2007 | A1 |
20080180576 | Anderson | Jul 2008 | A1 |
20080231592 | Johnson et al. | Sep 2008 | A1 |
20090219309 | Sampsell | Sep 2009 | A1 |
20090219600 | Gally et al. | Sep 2009 | A1 |
20090225069 | Sampsell | Sep 2009 | A1 |
20090273596 | Cummings | Nov 2009 | A1 |
20100026680 | Chui et al. | Feb 2010 | A1 |
20100315398 | Chui et al. | Dec 2010 | A1 |
20110128307 | Gally et al. | Jun 2011 | A1 |
20110141163 | Gally et al. | Jun 2011 | A1 |
20110148751 | Gally et al. | Jun 2011 | A1 |
20110316861 | Gally et al. | Dec 2011 | A1 |
20120001962 | Chui et al. | Jan 2012 | A1 |
20120026176 | Cummings | Feb 2012 | A1 |
20120044563 | Cummings et al. | Feb 2012 | A1 |
20120099177 | Chui et al. | Apr 2012 | A1 |
20120212796 | Sampsell | Aug 2012 | A1 |
20130063335 | Chui et al. | Mar 2013 | A1 |
Number | Date | Country |
---|---|---|
19526656 | Jan 1997 | DE |
0173808 | Mar 1986 | EP |
0 295 802 | Dec 1988 | EP |
0 300 754 | Jan 1989 | EP |
0306308 | Mar 1989 | EP |
0318050 | May 1989 | EP |
0417523 | Mar 1991 | EP |
0467048 | Jan 1992 | EP |
0554109 | Aug 1993 | EP |
0570906 | Nov 1993 | EP |
0608056 | Jul 1994 | EP |
0655725 | May 1995 | EP |
0667548 | Aug 1995 | EP |
0725380 | Aug 1996 | EP |
0852371 | Jul 1998 | EP |
0 911 794 | Apr 1999 | EP |
1017038 | Jul 2000 | EP |
1039311 | Sep 2000 | EP |
1 134 721 | Sep 2001 | EP |
1146533 | Oct 2001 | EP |
1 239 448 | Sep 2002 | EP |
1258860 | Nov 2002 | EP |
1 280 129 | Jan 2003 | EP |
1341025 | Sep 2003 | EP |
1343190 | Sep 2003 | EP |
1345197 | Sep 2003 | EP |
1381023 | Jan 2004 | EP |
1 414 011 | Apr 2004 | EP |
1473691 | Nov 2004 | EP |
1 640 316 | Mar 2006 | EP |
1 640 765 | Mar 2006 | EP |
1 640 953 | Mar 2006 | EP |
2851683 | Aug 2004 | FR |
2401200 | Nov 2004 | GB |
63-055590 | Mar 1988 | JP |
11352938 | Dec 1999 | JP |
2000-075963 | Apr 2000 | JP |
2000121970 | Apr 2000 | JP |
2001324959 | Nov 2001 | JP |
2002-072974 | Mar 2002 | JP |
2002175053 | Jun 2002 | JP |
2002341267 | Nov 2002 | JP |
2003058134 | Feb 2003 | JP |
2004004553 | Jan 2004 | JP |
2004029571 | Jan 2004 | JP |
2004145286 | May 2004 | JP |
2008541155 | Nov 2008 | JP |
101990001491 | Oct 1990 | KR |
101997000463 | Jan 1997 | KR |
101999000714 | Jan 1999 | KR |
546672 | Aug 2003 | TW |
552720 | Sep 2003 | TW |
WO-9428452 | Dec 1994 | WO |
WO-0108441 | Feb 2001 | WO |
WO-0173937 | Oct 2001 | WO |
WO 02089103 | Nov 2002 | WO |
WO-03015071 | Feb 2003 | WO |
WO-03044765 | May 2003 | WO |
WO-03060940 | Jul 2003 | WO |
WO 03079323 | Sep 2003 | WO |
WO-03090199 | Oct 2003 | WO |
WO-03090241 | Oct 2003 | WO |
WO 2004054088 | Jun 2004 | WO |
WO-2004093041 | Oct 2004 | WO |
WO-2005071651 | Aug 2005 | WO |
WO 2006121608 | Nov 2006 | WO |
Entry |
---|
IPRP dated Aug. 1, 2011 in PCT/US0/028552. |
Chen et al., Low peak current driving scheme for passive matrix-OLED, SID International Symposium Digest of Technical Papers, May 2003, pp. 504-507. |
Miles, MEMS-based interferometric modulator for display applications, Part of the SPIE Conference on Micromachined Devices and Components, 3876:20-28 (1999). |
Miles et al., 2000, 5.3: Digital Paper™: Reflective displays using interferometric modulation, SID Digest, vol. XXXI, pp. 32-35. |
Office Action dated Mar. 9, 2012 in U.S. Appl. No. 12/413,336. |
ISR and WO in PCT/US10/028552, dated Jan. 20, 2011. |
Invitation to Pay Additional Fees in PCT/US10/028552, dated Jun. 18, 2010. |
Office Action dated Aug. 20, 2012 in U.S. Appl. No. 12/413,336. |
Bains, “Digital Paper Display Technology Holds Promise for Portables,” CommsDesign EE Times, 2000. |
U.S Appl. No. 08/554,630, filed on Nov. 6, 1995. |
U.S. Appl. No. 60/613,419, filed on Sep. 27, 2004. |
Lieberman, “MEMS Display Looks to give PDAs Sharper Image.” EE Times (2004). |
Lieberman, “MEMS Display Looks to Give PDAs Sharper Image,” EE Times (Feb. 11, 1997). |
Lieberman, “Microbridges at heart of new MEMS displays” EE Times (2004). |
Miles et al., “10.1: Digital PaperTM for Reflective Displays,” 2002 SID International Symposium Digest of Technical Papers Boston MASID International Symposium Digest of Technical Papers San Jose, 2002, 115-117. |
Peroulis et al., “Low contact resistance series MEMS switches”, 2002, pp. 223-226, vol. 1, IEEE MTTS International Microwave Symposium Digest, New York, NY. |
Seeger, et al., “Stabilization of Electrostatically Actuated Mechanical Devices,” International Conference on Solid State Sensors and Actuators, 1997, vol. 2, 1133-1136. |
Number | Date | Country | |
---|---|---|---|
20100245311 A1 | Sep 2010 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 12413336 | Mar 2009 | US |
Child | 12690391 | US |