Patent Application
20080024923
The preferred embodiments of the present invention will be described below with reference to the drawings. In the description of the drawings, the same elements will be denoted by the same reference symbols, without redundant description. It is noted that dimensional ratios in the drawings do not always agree with those in the description.
(Base Material Preparation Step)
First, a base material 10 as an object to be processed is prepared, as shown in
The present embodiment will describe an example where the base material 10 used is diamond-like carbon (amorphous carbon) being a carbon-based protecting film prepared by CVD (chemical vapor deposition).
Normally, there are terminal bonds, called dangling bonds 12, in the surface of the base material 10. The dangling bonds 12 include those 12a not bound to any other atom, those 12b bound to an OH group, those 12c hydrogen-bound (adsorbed) to a water molecule, and so on. Of course, there are dangling bonds bound (adsorbed) to molecules other than those.
Such dangling bonds 12 appear not only in carbon materials, but also in all types of solid materials. The dangling bonds are prominently seen, particularly, in materials with a strong covalently binding property.
Prior to a lubricant application step, it is preferable to detach molecules (e.g., water or the like) or functional groups (e.g., OH groups, or the like) bound to the dangling bonds 12, for example, by heating the base material 10 (e.g., at 80-200° C. and for 30 minutes or more), by irradiating the surface of the base material 10 with ultraviolet rays (e.g., at the wavelength of 50-350 nm), or by keeping the base material 10 under a reduced pressure atmosphere (e.g., 1×10−1 Torr or less), under an inert gas atmosphere (e.g., nitrogen, argon, or the like), or under a low moisture environment (e.g., RH 10% or less). The heating and the irradiation with ultraviolet rays are preferably carried out in vacuum or in an inert gas such as nitrogen or argon, or in a low moisture environment (RH 10% or less). It is needless to mention that the present invention can be carried out even if there remain molecules and functional groups bound to the dangling bonds. It is preferable to adopt a heating temperature or an intensity of UV irradiation not to cause damage to the base material.
It is also preferable to remove organic substances and the like on the surface by an ozone treatment.
(Lubricant Application Step)
Subsequently, as shown in
Examples of the lubricant 21 include hydrocarbons with an OH group and the following compounds: alcohols (e.g., erucyl alcohol, ricinolyl alcohol, arachidyl alcohol, capryl alcohol, capric alcohol, polyolefin alcohol, 2-ethylhexyl alcohol, polyalkylene glycol, etc.); carboxylic acids (e.g., aliphatic carboxylic acids, aromatic carboxylic acids, oxo carboxylic acids, etc.); esters with an OH group (e.g., thioesters, phosphoric esters, nitric esters, etc. with an OH group); ethers with an OH group (e.g., polyphenylethers, dimethyl ether, ethyl methyl ether, diethyl ether, etc. with an OH group); silicon compounds with an OH group (e.g., silicone oil with an OH group, etc.); halogenated organic compounds with an OH group (halogenated ethers with an OH group, halogenated alcohols with an OH group, halogenated carboxylic acids with an OH group, etc.). Particularly, it is preferable to use a fluorinated organic compound with an OH group; for example, examples of such fluorinated organic compounds include fluoroethers with an OH group such as perfluoropolyethers with an OH group, fluoroalcohols, carboxylic fluorides, carboxylic fluoride-alkyl esters with an OH group, fluorodiester-dicarboxylic acid compounds with an OH group, fluoromonoester-monocarboxylic acid compounds with an OH group, and so on. Among these, it is particularly preferable to use a chain halogenated organic compound with an OH group at a terminal and it is particularly preferable to use a chain fluorinated organic compound.
In particular, fluoropolyethers with an OH group are preferably adopted among the fluoroethers with an OH group and, in particular, it is particularly preferable to use one of chain fluoropolyethers with an OH group at a terminal, such as compounds represented by Formula (1) and known as Fomblin Z, compounds represented by Formula (2) and known as Fomblin Y, compounds represented by Formula (3) and known as Krytox, and compounds represented by Formula (4) and known as Demnum.
X—CF2—O(—CF2—CF2—O—) m(—CF2—O—)nCF2—X (1)
X—CF2—O(—CF(CF3)—CF2—O—)m(—CF2—O—)nCF2—X (2)
X—CF2—O(—CF(CF3)—CF2—O—)mCF2—CF2—X (3)
X—CF2—CF2—O(—CF2—CF2—CF2—O—)mCF2—X (4)
In these formulae, each of n and m represents an integer of not less than 1. X represents a functional group selected from the group consisting of —CF3, —CH2—OH, —CH2(—O—CH2—CH2—)p—OH, —CH2—O—CH(OH)—CH2—OH, and each compound has a functional group including at least one OH group. Here P indicates an integer of not less than 1. There are no particular restrictions on the molecular weight of the chain fluoropolyethers, but the center molecular weight is preferably approximately from 500 to 4000.
It is also needless to mention that the lubricant may contain a compound without an OH group, e.g., a solvent or the like.
The application of the lubricant can be implemented by one of the known methods; e.g., vacuum vapor deposition, PVD, CVD, immersion (dipping), spin coating, spray coating, and so on. In the case where the cleaning treatment such as the heating or UV irradiation in vacuum or in inert gas is carried out for the surface of the base material 10 before the application of the lubricant, as described in the base material preparation step, this application is preferably carried out in vacuum or in inert gas in order to prevent the surface of the cleaned base material 10 from being contaminated by oxygen or water in the atmosphere, other impurities (contaminants) with high reactivity, and so on during the application.
There are no particular restrictions on the thickness of the lubricant film 20 applied herein, but the thickness is preferably approximately 2 nm or less, so as to permit the infrared laser to efficiently reach, particularly, the interface between the base material 10 and the lubricant film 20 and the vicinity thereof. In the case of multiphoton absorption, there are no particular restrictions on the film thickness.
The lubricant film 20 may be heated (e.g., at 80-200° C. and for 30 minutes or more) or the lubricant film 20 may be irradiated with UV, if necessary, after the application of the lubricant 21 so that the OH group of the lubricant 21 or a functional group except for the OH group (e.g., an amino group) can be preliminarily bound to the dangling bond 12 of the base material 10. It is needless to mention that the present invention can be adequately carried out without the heating or the irradiation with UV. It is preferable to adopt a temperature or an intensity of UV not to damage the base material 10 or the lubricant film 20.
(Laser Irradiation Step)
Subsequently, the lubricant 21 in the lubricant film 20 is irradiated with an infrared laser beam to excite the vibration of the OH bond of the OH group. Specifically, since the OH bond is likely to absorb infrared light, approximately, at wavelengths of about 0.9-8 μm as shown in
Specifically, in the case of single-photon absorption, the infrared laser light is, for example, an infrared laser beam of wavelengths of 0.9-8 μm and, particularly, it is an infrared laser beam of wavelengths of 0.9-1.2 μm or 2.7-3.0 μm. On the other hand, in the case of multiphoton absorption where two or more photons are absorbed, infrared laser light at a predetermined wavelength is used to make the lubricant absorb the energy corresponding to the infrared laser light of wavelengths of 0.9-8 μm and, preferably, the energy corresponding to the infrared laser light of wavelengths of 0.9-1.2 μm or 2.7-3.0 μm. For example, the multiphoton absorption is implemented by simultaneously or continuously supplying a plurality of photons the total energy of which falls in the foregoing energy range. Namely, the irradiation light in the case of multiphoton absorption has the wavelength longer than those in the case of single-photon absorption.
There are no particular restrictions on how to irradiate the lubricant with the infrared laser light, but the irradiation can be implemented, for example, by a laser irradiation system LS1 as shown in (a) of
The homogenizer 54 herein can be one of the known homogenizers, such as a combination of two lenses, or one using a diffraction grating, and it is preferably one capable of converting an in-plane intensity distribution of a Gaussian distribution type into a sufficiently flat in-plane intensity distribution.
The most effective angle of incidence of the laser beam to the lubricant film 20 is 90° as shown in (a) of
The spot diameter of the infrared laser beam to irradiate the lubricant film 20 and the base material 10 can be determined corresponding to the area of the lubricant film 20. In a case where the irradiation area is very large, the beam spot may be arranged to relatively scan the lubricant film 20.
Another laser irradiation system LS2 as shown in (b) of
The two-dimensional scanning optical system 56 is composed, for example, of two galvanomirror scanners, and is controlled by an unrepresented scanner driver to implement two-dimensional scanning on the base material with the laser spot focused on the lubricant film 20. It is a matter of course that the base material side can be moved to effect scanning.
The laser light source 50 may be the aforementioned light source, but is preferably a laser light source for supplying an ultrashort pulsed laser such as a femtosecond laser, in order to enable multiphoton absorption.
There are no particular restrictions on the irradiation intensity of the infrared laser beam in either case, but the irradiation intensity is preferably not more than 60 J/cm2 in order to reduce influence on the base material and influence of evaporation or the like of the lubricant, and the irradiation intensity is preferably not less than 0.01 mJ/cm2 in order to induce sufficient vibration excitation. The binding energy of the OH group is approximately 428-510 kJ/mol, and an energy over it is required to break the OH bond. However, a too strong energy will cause problems of evaporation of the lubricant, occurrence of unwanted reaction, and damage to the base material, and thus the laser irradiation energy needs to be optimized so as to match an individual sample.
In a case where the infrared laser light is a pulsed laser beam, the laser beam preferably has the irradiation intensity of not more than 60 J/cm2, the pulse width of 0.1-1 ms, the pulse number of 1-10, and the frequency of pulses of 10-50 Hz in order to suppress unwanted temperature increase in the laser processing part.
It is also possible to adopt a plurality of laser light sources.
Then the irradiation with the infrared laser light as described above excites the vibration of the OH bond of the OH group in the lubricant. Therefore, it enhances the reactivity between the OH group of the lubricant 21 and the surface of the base material 10 and facilitates chemical binding of the lubricant 21 to the surface of the base material 10.
Specifically, the following mechanism can be contemplated. Namely, since the irradiation with the infrared laser light excites the vibration of the OH bond of the OH group in the lubricant 21, the OH group is activated to cause dissociation between O and H or the like and facilitate binding to the dangling bonds 12 in the surface of the base material. Therefore, the lubricant 21 can be readily covalently bound through the hydroxyl-derived O atom to the dangling bonds 12 in the surface of the base material 10, for example, as shown in
Particularly, since the fixing method with the infrared laser light allows selective heating of the OH group as compared with the heating process, the UV process, and so on, it enables effective heating with less energy and also enables short-time processing. Therefore, it reduces thermal deterioration, thermal stress, unwanted thermal decomposition, evaporation of material, and so on. The two-photon absorption using the apparatus as shown in (b) of
The lubricant film-20 can be heated (e.g., at 80-200° C. and for 30 minutes or more) or the lubricant film 20 can be irradiated with UV, if necessary, after the irradiation with the infrared laser, so that the OH groups of the lubricant 21 or the functional groups other than the OH groups (e.g., an amino group or the like) can be subsidiarily bound to the dangling bonds 12 of the base material 10. It is needless to mention that the present invention can be adequately carried out without the heating or the irradiation with UV. It is preferable to adopt a temperature or an intensity of UV not to damage the base material 10 or the lubricant film 20.
(Cleaning Step)
Subsequently, a cleaning step is carried out, if necessary, to remove unnecessary contents in the lubricant 21 of the lubricant film 20, i.e., the lubricant 21 not fixed to the surface of the base material 10, unwanted side products, foreign matter, free oil contents, and so on from the lubricant film 20 (cf.
Specifically, the cleaning step is carried out using a cleaning medium, e.g., an organic solvent such as a fluorine-based solvent, ether, hexane, or alcohol, water, CO2 (gas or supercritical fluid), and so on, so that the lubricant film 20 is brought into contact with one of these cleaning media. During the cleaning the lubricant film 20 may undergo supersonic vibration. When the principal purpose is removal of low-molecular substances, the cleaning can be implemented by vacuuming or heating to evaporate them.
This reduces the amount of the lubricant 21 not bound to the surface of the base material 10. There are no particular restrictions on the thickness of the lubricant film after the cleaning, but the thickness is preferably not more than 2 nm.
The lubricant can be heated (e.g., at 80-200° C. and for 30 minutes or more) or the lubricant can be irradiated with UV as described above, if necessary, after the cleaning, to bind the remaining OH groups of the lubricant or the functional groups other than them to the dangling bonds 12 in the base material 10.
This completes the lubricant film forming method according to the preferred embodiment of the present invention.
(Magnetic Head Slider and Magnetic Recording Medium)
The below will describe methods of producing a magnetic head slider and a magnetic recording medium, using the lubricant film forming method as described above.
The magnetic recording medium 120 is of disk shape and is internally provided with a magnetic recording layer 129. A motor 130 for rotating the magnetic recording medium 120 is coupled to the axial center part of the magnetic recording medium 120 and the magnetic recording medium 120 is rotated around the axis.
The magnetic head slider 110 is approximately of plate shape and is opposed to a surface S of the magnetic recording medium 120. The magnetic head slider 110 normally floats slightly above the surface S of the magnetic recording medium 120 by an airflow caused with rotation of the magnetic recording medium 120.
The magnetic head slider 110 is equipped with a magnetic head 140. The magnetic head 140 has an unrepresented writer for writing data in the magnetic recording layer 129 of the magnetic recording medium 120, and/or an unrepresented reader for reading data out of this magnetic recording layer 129. The surface of the magnetic head slider 110 opposed to the surface S of the magnetic recording medium 120 is a medium-opposed surface ABS. A head driver 113 for moving the magnetic head slider 110 to a desired place on the surface of the magnetic recording medium 120 is connected to the magnetic head slider 110.
As shown in the partial sectional view of (a) of
A material of the substrate 115 can be, for example, a nonmagnetic insulating material, e.g., a ceramic material such as an alumina-titanium-carbide (Al2O3—TiC) sintered body, a metal oxide such as alumina Al2O3, a metal material such as Ti, a nonmetallic inorganic material such as Si or C, or the like.
A material of the ground layer 116 can be silicon, silicon nitride, or the like.
A material of the protecting film 117 is preferably selected from carbon materials such as amorphous carbon (e.g., diamond-like carbon, graphite carbon, hydrogen-added carbon, nitrogen-added carbon, fluorine-added carbon, etc.) and carbons doped with various metals, and inorganic materials such as WC, WMoC, ZrN, BN, B4C, SiO2, and ZrO2, and the protecting film 117 can be formed, for example, in the thickness of approximately 1-3 nm. In this example, the protecting film 117 corresponds to the aforementioned “base material.”
Furthermore, the lubricant film 118 corresponds to the aforementioned lubricant film 20. There are no particular restrictions on the material of the lubricant 21, but a particularly preferred material to be used is a fluorinated organic compound with an OH group such as a fluoropolyether with an OH group.
A production method of this magnetic head slider 110 is as follows: the magnetic head 140 is formed on a substrate by one of the known methods, the medium-opposed surface ABS is then formed and polished, and thereafter the ground layer 116 and protecting film 117 are formed by one of the known methods such as vapor deposition (vacuum vapor deposition, sputtering, CVD, etc.). Thereafter, the aforementioned lubricant film forming method is carried out using the protecting film 117 as the base material.
Subsequently, the magnetic recording medium 120 will be described. As shown in the partial sectional view of (b) of
A material of the substrate 125 can be, for example, glass, aluminum, Al-based alloy glass, plastic, ceramic, carbon, silicon, a Si single-crystal substrate with an oxidized surface, or the like, and, in the case of a flexible disk medium or a magnetic tape medium, the material of the substrate 125 can be, for example, a synthetic resin such as polyacetate.
There are no specific restrictions on a material of the ground film 126, and, in the case of the magnetic recording medium for hard disk, the material can be Cr, Ni—P, or the like. Furthermore, in the case of a horizontal magnetic recording medium, the material of the ground film 126 can be a nonmagnetic material such as a Cr alloy, and, in the case of a perpendicular magnetic recording medium, it can be a soft magnetic material such as a material containing Fe, Ni, and Co, or the like. Particularly, in the case of the perpendicular magnetic recording medium, the recording medium can further have another ground layer located below the soft magnetic ground layer and made of a material selected from Ti, Ta, W, Cr, Pt, or alloys containing these, or oxides and nitrides thereof, in order to improve crystallinity of the soft magnetic ground layer or in order to enhance adhesion to the substrate, and the magnetic medium can also have an intermediate layer located between the soft magnetic ground layer and the recording layer and made of a nonmagnetic material selected from Ru, Pt, Pd, W, Ti, Ta, Cr, Si, or alloys containing those, or oxides, nitrides, etc. thereof
A material of the magnetic recording layer 129 can be, for example, a material a principal component of which is Co, which contains at least Pt, which contains Cr according to need, and which further contains an oxide.
A material of the protecting film 127 can be, for example, a carbon material such as diamond-like carbon of approximately 1-10 nm. The protecting film 127 herein corresponds to the aforementioned “base material.”
Furthermore, the lubricant film 128 corresponds to the aforementioned lubricant film 20. There are no particular restrictions on the lubricant, but it is particularly preferably a fluorinated organic compound with an OH group such as a fluoropolyether with an OH group. There are no particular restrictions on the molecular weight of the fluorinated organic compound, but the center molecular weight thereof is preferably approximately from 500 to 4000.
A production method of this magnetic recording medium 120 is as follows: the ground layer 126, magnetic recording layer 129, and protecting film 127 are formed in order on the substrate 125 by the known methods, and the aforementioned lubricant film forming method is then carried out.
According to the invention as described above, the heating is not essential in particular and it is thus preferable because it can suppress thermal demagnetization or the like of the magnetic head 140 and the magnetic recording layer 129. Since the use of the magnetic head slider 110 and the magnetic recording medium 120 as described above achieves extremely high durability of the lubricant film 20, the hard disk drive is obtained with excellent reliability and lifetime. The same effect can also be enjoyed, of course, in cases where a tape medium, a flexible disk (FD), or the like is used as the magnetic recording medium.
Diamond-like carbon was deposited in vacuum to form the base material in the thickness of 3 nm on a Co substrate. Thereafter, the lubricant was applied onto the surface of the base material to obtain the lubricant film in the thickness of about 1.2 nm thereon. The lubricant used was Fomblin Z presented by Formula (1). Thereafter, the lubricant film was irradiated with a pulsed infrared laser beam of the wavelength of 1.064 μm (Nd-YAG laser). The pulse width of this laser was 0.3 ms. The laser irradiation intensity was set to 9.6, 11.6, or 13.5 J/cm2 in the order of Examples A1-A3, respectively. Sample substrates with the lubricant film were obtained in this manner.
A sample substrate was obtained in the same manner as in Example A1 except that the lubricant was not irradiated with the laser.
(Evaluation)
Scratch tests for the lubricant films of the respective sample substrates (in the thickness of about 1.1 nm) were conducted with an indenter having a diamond tip in the tip diameter of 8 μm and under the load of 3.98 mN. Then the depth D and width W of each scratch were measured with a scanning ellipsometer. The results are presented in
For Example A3 and Comparative Example A1, sample surfaces not used in the scratch tests were subjected to mass spectroscopy with a TOF type secondary ion mass spectrometer (SIMS) to acquire a ratio of C—F bonds characteristic to the lubricant, to Co atoms existing in the magnetic layer of the magnetic recording medium. The results are presented in
As seen from
As seen from
The below will describe a method of forming a lubricant film in only a portion of a sliding surface of a slide body on a simple flat plate for simplicity.
(Lubricant Application Step)
The base material as an object to be processed will be described on the basis of
The present embodiment will describe an example where the base material 10 used is diamond-like carbon (amorphous carbon) being a carbon-based protecting film prepared by CVD (chemical vapor deposition).
Normally, there are terminal bonds, called dangling bonds 12, in the surface of the base material 10. The dangling bonds 12 include those 12a not bound to any other atom, those 12b bound to an OH group, those 12c hydrogen-bound (adsorbed) to a water molecule, and so on. Of course, there are dangling bonds bound (adsorbed) to molecules other than those.
Such dangling bonds 12 do not appear only in carbon materials, but also appear in all types of solid materials. The dangling bonds are prominently seen, particularly, in materials with a strong covalently binding property.
Prior to a lubricant application step, it is preferable to detach molecules (e.g., water or the like) or functional groups (e.g., OH groups, or the like) bound to the dangling bonds 12, for example, by heating the base material 10 (e.g., at 80-200° C. and for 30 minutes or more), by irradiating the surface of the base material 10 with ultraviolet rays (e.g., at the wavelength of 50-350 nm), or by keeping the base material 10 under a reduced pressure atmosphere (e.g., 1×10−1 Torr or less), under an inert gas atmosphere (e.g., nitrogen, argon, or the like), or under a low moisture environment (e.g., RH 10% or less). The heating and the irradiation with ultraviolet rays are preferably carried out in vacuum or in an inert gas such as nitrogen or argon, or in a low moisture environment (RH 10% or less). It is needless to mention that the present invention can be carried out even if there remain molecules and functional groups bound to the dangling bonds. It is preferable to adopt a heating temperature or an intensity of UV irradiation not to cause damage to the base material. It is also preferable to remove organic substances and the like on the surface by an ozone treatment.
Subsequently, a step of applying the lubricant 21 onto the surface of the base material 10 to form a lubricant layer 20 will be described on the basis of
The lubricant 21 can be any compound with an OH group bound to a carbon atom. The “OH group bound to a carbon atom” stated herein is a concept embracing those contained in complicated functional groups such as a carboxyl group (—COOH) and a phenolic group.
Examples of the lubricant 21 include hydrocarbons with an OH group bound to a carbon atom and the following compounds: alcohols (e.g., erucyl alcohol, ricinolyl alcohol, arachidyl alcohol, capryl alcohol, capric alcohol, polyolefin alcohol, 2-ethylhexyl alcohol, polyalkylene glycol, etc.); carboxylic acids (e.g., aliphatic carboxylic acids, aromatic carboxylic acids, oxo carboxylic acids, etc.); esters with an OH group bound to a carbon atom (e.g., thioesters, phosphoric esters, nitric esters, etc. with an OH group bound to a carbon atom); ethers with an OH group bound to a carbon atom (e.g., polyphenylethers, dimethyl ether, ethyl methyl ether, diethyl ether, etc. with an OH group bound to a carbon atom); halogenated organic compounds with an OH group bound to a carbon atom (e.g., halogenated ethers, halogenated alcohols, halogenated carboxylic acids, etc. with an OH group bound to a carbon atom). Particularly, it is preferable to use a fluorinated organic compound with an OH group bound to a carbon atom; for example, examples of such fluorinated organic compounds include fluoroethers with an OH group bound to a carbon atom such as perfluoropolyethers with an OH group bound to a carbon atom, fluoroalcohols, carboxylic fluorides, carboxylic fluoride-alkyl esters with an OH group bound to a carbon atom, fluorodiester-dicarboxylic acid compounds with an OH group bound to a carbon atom, fluoromonoester-monocarboxylic acid compounds with an OH group bound to a carbon atom, and so on. Among these, it is particularly preferable to use a chain fluorinated organic compound with an OH group bound to a carbon atom and it is particularly preferable to use a chain fluoroether.
In particular, perfluoropolyethers with an OH group bound to a carbon atom are preferably adopted among the fluoroethers with an OH group bound to a carbon atom and, in particular, it is particularly preferable to use one of chain fluoropolyethers with an OH group bound to a carbon atom at a terminal, such as compounds represented by Formula (1) and known as Fomblin Z, compounds represented by Formula (2) and known as Fomblin Y, compounds represented by Formula (3) and known as Krytox, and compounds represented by Formula (4) and known as Demnum.
X—CF2—O(—CF2—CF2—O—)m(—CF2—O—)nCF2—X (1)
X—CF2—O(—CF(CF3)—CF2—O—)m(—CF2—O—)nCF2—X (2)
X—CF2—O(—CF(CF3)—CF2—O—)mCF2—CF2—X (3)
X—CF2—CF2—O(—CF2—CF2—CF2—O—)mCF2—X (4)
In these formulae, each of m and n represents an integer of not less than 1. X represents a functional group selected from the group consisting of —CF3, —CH2—OH, —CH2(—O—CH2—CH2—)p—OH, —CH2—O—CH(OH)—CH2—OH, and each compound has a functional group including at least one OH group. Here P indicates an integer of not less than 1. There are no particular restrictions on the molecular weight of the chain fluoropolyethers, but the center molecular weight is preferably approximately from 500 to 4000.
It is also needless to mention that the lubricant 21 may contain a compound without an OH group bound to a carbon atom, e.g., a solvent or the like.
The application of the lubricant 21 can be implemented by one of the known methods; e.g., vacuum vapor deposition, PVD, CVD, immersion (dipping), spin coating, spray coating, and so on. In the case where the cleaning treatment such as the heating or UV irradiation in vacuum or in inert gas is carried out for the surface of the base material 10 before the application of the lubricant, this application is preferably carried out in vacuum or in inert gas in order to prevent the surface of the cleaned base material 10 from being contaminated by oxygen or water in the atmosphere, other impurities (contaminants) with high reactivity, and so on during the application.
There are no particular restrictions on the thickness of the lubricant layer 20 obtained by the application of the lubricant 21 herein, but the thickness is preferably approximately 2 nm or less, so as to permit the infrared laser to efficiently reach, particularly, the interface between the base material 10 and the lubricant layer 20 and the vicinity thereof. In the case of multiphoton absorption, there are no particular restrictions on the film thickness.
(Laser Light Irradiation Step)
The following will describe a laser light irradiation step of irradiating only a portion of a surface of the base material 10 coated with the aforementioned lubricant 21, with infrared laser light to excite the vibration of the OH bond of the OH group.
First, the infrared laser light will be described. Since the OH bond is likely to absorb infrared light, approximately, at wavelengths of about 0.9-8 μm as shown in
Specifically, in the case of single-photon absorption, the infrared laser light is, for example, an infrared laser beam of wavelengths of 0.9-8 μm and, particularly, it is an infrared laser beam of wavelengths of 0.9-1.2 μm or 2.7-3.0 μm. On the other hand, in the case of multiphoton absorption where two or more photons are absorbed, infrared laser light at a predetermined wavelength is used to make the lubricant absorb the energy corresponding to the infrared laser light of wavelengths of 0.9-8 μm and, preferably, the energy corresponding to the infrared laser light of wavelengths of 0.9-1.2 μm or 2.7-3.0 μm. For example, the multiphoton absorption is implemented by simultaneously or continuously supplying a plurality of photons the total energy of which falls in the foregoing energy range. Namely, the irradiation light in the case of multiphoton absorption has the wavelength longer than those in the case of single-photon absorption.
There are no particular restrictions on the irradiation with the infrared laser light, but the irradiation can be implemented, for example, by a laser irradiation system LS1 as shown in (a) of
The homogenizer 54 herein can be one of the known homogenizers, such as a combination of two lenses, or one using a diffraction grating, and it is preferably one capable of converting an in-plane intensity distribution of a Gaussian distribution type into a sufficiently flat in-plane intensity distribution.
The most effective angle of incidence of the laser beam to the lubricant layer 20 is 90° as shown in (a) of
The spot diameter of the infrared laser beam to irradiate the lubricant layer 20 and the base material 10 can be determined corresponding to the area of the lubricant layer 20. In a case where the irradiation area is very large, the beam spot may be arranged to relatively scan the lubricant layer 20.
Another laser irradiation system LS2 as shown in (b) of
The two-dimensional scanning optical system 56 is composed, for example, of two galvanomirror scanners, and is controlled by an unrepresented scanner driver to implement two-dimensional scanning on the base material with the laser spot focused on the lubricant layer 20. It is a matter of course that the base material side can be moved to effect scanning.
The laser light source 50 may be the aforementioned light source, but is preferably a laser light source for supplying an ultrashort pulsed laser such as a femtosecond laser, in order to enable multiphoton absorption.
There are no particular restrictions on the irradiation intensity of the infrared laser beam in either case, but the irradiation intensity is preferably not more than 60 J/cm2 in order to reduce influence on the base material and influence of evaporation or the like of the lubricant, and the irradiation intensity is preferably not less than 0.01 mJ/cm2 in order to induce sufficient vibration excitation. The binding energy of the OH group is approximately 428-510 kJ/mol, and an energy over it is required to break the OH bond. However, a too strong energy will cause problems of evaporation of the lubricant, occurrence of unwanted reaction, and damage to the base material, and thus the laser irradiation energy needs to be optimized so as to match an individual sample.
In a case where the infrared laser light is a pulsed laser beam, the laser beam preferably has the irradiation intensity of not more than 60 J/cm2, the pulse width of 0.1-1 ms, the pulse number of 1-10, and the frequency of pulses of 10-50 Hz in order to suppress unwanted temperature increase in the laser processing part.
It is also possible to adopt a plurality of laser light sources.
Then the irradiation with the infrared laser light as described above excites the vibration of the OH bond of the OH group in the lubricant 21. Therefore, it enhances the reactivity between the OH group of the lubricant 21 and the surface of the base material 10 and facilitates chemical binding of the lubricant 21 to the surface of the base material 10.
Particularly, since the fixing method with the infrared laser light allows selective heating of the OH group as compared with the heating process, the UV process, and so on, it enables effective heating with less energy and also enables short-time processing. Therefore, it reduces thermal deterioration, thermal stress, unwanted thermal decomposition, evaporation of material, and so on. The two-photon absorption using the apparatus as shown in (b) of
The following will describe a method of irradiating only a portion of the surface of the base material 10 with laser light.
First, there is a method of disposing a mask M between the laser light source 50 and the lubricant layer 20, as shown in
The laser irradiation system LS2 shown in (b) of
Furthermore, as shown in
A constituent material of this protecting film 28 can be, for example, an amorphous carbon-based material, a ceramic material such as alumina or titanium carbide, a nonferrous metal-based material, a polymer type photoresist material, or the like.
The protecting film 28 containing such a constituent material can be formed, for example, by one of the known methods such as vapor deposition (CVD, PVD), spray coating, spin coating, and dip coating.
The protecting film 28 can be removed, for example, by one of the known methods including physical etching such as blast processing or plasma processing, chemical etching, peeling, etc., after the laser light irradiation step.
Next, a state of the lubricant 21 after the laser irradiation will be examined based on
The lubricant layer 20 exists on both surfaces in the region where the lubricant film 30 is formed on the surface of the base material 10 and in the region where the lubricant film 30 is not formed, as shown in
The lubricant film 30 formed by the above method is preferably a plurality of dot patterns and the dot diameter thereof is preferably 0.9-100 μm. Furthermore, the density of dot patterns in the region where the dot patterns are formed is preferably 5-50% from the viewpoint of not impeding fluidity of the lubricant too much. There are no particular restrictions on the shape of dots, but it can be, for example, circular, elliptical, rectangular, fractal pattern, or the like.
The lubricant film 30 formed by the above method may be formed as a solid pattern on only a portion of the surface of the base material 10, or may be formed as a plurality of dot patterns in part or the whole of the surface of the base material 10.
The slide body with the lubricant film 30 being formed in only a portion of the sliding surface is obtained in this manner.
(Cleaning Step)
The following will describe a cleaning step, which is carried out if necessary, to remove (delube) the lubricant 21 not fixed to the surface of the base material 10, except for the molecules 23 constituting the lubricant film 30, unwanted side products, foreign matter, free oil contents, etc. from the lubricant film 30, on the basis of
The cleaning step can be carried out using a cleaning medium, e.g., an organic solvent such as a fluorine-based solvent, ether, hexane, or alcohol, water, CO2 (gas or supercritical fluid), and so on, so that the lubricant film 30 is brought into contact with one of these cleaning media. During the cleaning the lubricant film 30 may undergo supersonic vibration.
When the principal purpose is removal of low-molecular substances, the cleaning can be implemented by vacuuming or heating to evaporate them. This reduces the amount of the lubricant 21 not fixed to the surface of the base material 10. There are no particular restrictions on the thickness of the lubricant film 30 after the cleaning, but the thickness is preferably not more than 2 nm.
The remaining lubricant 21 can be heated (e.g., at 80-200° C. and for 30 minutes or more) or the lubricant 21 can be irradiated with UV, if necessary, after the cleaning, to bind the remaining OH groups of the lubricant 21 or the functional groups other than them to the dangling bonds 12 in the base material 10.
Let us define state B herein as a state in which the lubricant 21 is removed except for the lubricant film 30 as shown in
(Second Lubricant Application Step)
Furthermore, the following will describe a second lubricant application step, which is carried out if necessary, to apply the lubricant 21 again onto the surface of the base material 10 after the cleaning step.
The second application of the lubricant is carried out, for example, by one of the known methods such as vapor deposition (CVD, PVD), spray coating, spin coating, and dip coating.
As the second application of the lubricant is carried out in this manner, a lubricant layer 20 with unevenness in the surface can be formed on the base material 10.
Let us define state C herein as a state in which the region with the lubricant film 30 is more outwardly projecting than the region without the lubricant film 30 on the surface of the lubricant layer 20 as shown in
This completes the lubricant film forming method according to the preferred embodiment of the present invention.
The above described only the slide body on the simple flat plate for simplicity, but there are no particular restrictions on the slide body as long as it is a member that comes or can come into contact such as sliding contact with another member. Specific examples of such slide bodies include bearings with a sliding surface, e.g., sliding bearings, rolling bearings, etc., and also include the magnetic recording medium and magnetic head slider in the hard disk drive as detailed below.
[Hard Disk]
The following will describe a case where the above embodiment is applied to a hard disk.
In
The assembly carriage section 3 is provided with a plurality of arms 5. These arms 5 can be angularly pivoted around a shaft 7 by voice coil motor (VCM) 6, and the arms 5 are stacked in a direction along this shaft 7. A head gimbal assembly 14 is attached to a tip of each arm 5. A magnetic head slider 60 is located at a tip of each head gimbal assembly 14 so that it faces a surface of each magnetic recording medium 40. The surface of the magnetic head slider 60 facing the surface of the magnetic recording medium 40 is defined as an air bearing surface ABS. The hard disk drive may be constructed of a single magnetic recording medium 40 and may be constructed in a configuration wherein an arm 5 is disposed relative to only one surface of each magnetic recording medium 40.
When the assembly carriage section 3 rotates an arm 5, the magnetic head slider 60 moves in a radial direction of the magnetic recording medium 40, i.e., in a direction crossing track lines. The assembly carriage section 3 is arranged to be able to rotate each arm 5 and to retract each magnetic head slider 60 to the retraction section 17, based on a signal from the outside.
[Magnetic Recording Medium]
The below will describe a magnetic recording medium 40 according to the present embodiment. As shown in the partial sectional view of
A material of the substrate 125 can be, for example, glass, aluminum, Al-based alloy glass, plastic, ceramic, carbon, silicon, a Si single-crystal substrate with an oxidized surface, or the like, and, in the case of a flexible disk medium or a magnetic tape medium, the material of the substrate 125 can be, for example, a synthetic resin such as polyacetate.
There are no specific restrictions on the material of the ground film 126, and, in the case of the magnetic recording medium for hard disk, it can be Cr, Ni—P, or the like. Furthermore, in the case of a horizontal magnetic recording medium, the material of the ground film 126 can be a nonmagnetic material such as a Cr alloy, and, in the case of a perpendicular magnetic recording medium, it can be a soft magnetic material such as a material containing Fe, Ni, and Co, or the like. Particularly, in the case of the perpendicular magnetic recording medium, the recording medium can further have another ground layer located below the soft magnetic ground layer and made of a material selected from Ti, Ta, W, Cr, Pt, or alloys containing these, or oxides, nitrides, etc. thereof, in order to improve crystallinity of the soft magnetic ground layer or in order to enhance adhesion to the substrate, and the magnetic medium can also have an intermediate layer located between the soft magnetic ground layer and the recording layer and made of a nonmagnetic material selected from Ru, Pt, Pd, W, Ti, Ta, Cr, Si, or alloys containing those, or oxides, nitrides, etc. thereof.
A material of the magnetic recording layer 129 can be, for example, a material a principal component of which is Co, which contains at least Pt, and which contains Cr according to need, or a material which further contains an oxide.
A material of the protecting film 127 can be, for example, a carbon material such as diamond-like carbon of approximately 1-10 nm. The surface of the protecting film 127 herein corresponds to the aforementioned “surface of the base material.”
The lubricant film 128 corresponds to the aforementioned lubricant film 30. There are no particular restrictions on molecules forming the lubricant film 30, but the molecules are particularly preferably those having an organic group containing a plurality of fluorine atoms, such as a residue resulting from elimination of a H atom from an OH group in a chain fluoropolyether with an OH group bound to a carbon atom, at a terminal. There are no particular restrictions on the molecular weight of the molecules forming the lubricant film 30, but the center molecular weight thereof is preferably approximately 500-4000.
In the magnetic recording medium 40 in
The following will describe a region where the lubricant film 128 is preferably formed, in the magnetic recording medium 40.
In
The magnetic recording media 40 of the present embodiment have a data section 32 (corresponding to a radially middle portion) and a peripheral section 31 (corresponding to a radially outside portion), in addition to the CSS zone 33, and the lubricant film is preferably formed as a plurality of dot patterns in at least one of these regions.
In
The magnetic recording medium 40A, in which the lubricant film 128 is formed as a plurality of dot patterns in the data section 32 as shown in (a) of
The magnetic recording medium 40B, in which the lubricant film 128 is formed as a plurality of dot patterns in the CSS section 33 as shown in (c) of
The magnetic recording medium 40C, in which the lubricant film 30 is formed as a plurality of dot patterns in the peripheral section 31 as shown in (d) of
In
The magnetic recording medium 40 of the present embodiment has a data section 32 (corresponding to a radially middle section and inside section), in addition to the landing zone 34, and a preferred configuration thereof is such that the lubricant film 128 is formed as a plurality of dot patterns in any one of these regions.
The magnetic recording medium 40D, wherein the lubricant film 128 is formed as a plurality of dot patterns in the data section 32 as shown in (a) of
The magnetic recording medium 40E, wherein the lubricant film 128 is formed as a plurality of dot patterns in the landing zone 34 as shown in (b) of
The magnetic recording media 40 wherein the lubricant film 128 is formed as a plurality of dot patterns, preferably further has a lubricant layer in which lubricant molecules physically adsorb to the sliding surface, on the region without the dot patterns and on the surfaces of the dot patterns in the sliding surface as in the state A of
This permits us to adjust the fluidity of the lubricant 21 in the lubricant layer 30 by the anchor effect of dot patterns, by adjusting the dot patterns and the density thereof. The foregoing anchor effect can prevent the lubricant 21 from moving by virtue of centrifugal force caused with rotation of the magnetic recording medium 40 so as to result in uneven thickness of the lubricant layer 30 and prevent the lubricant 21 in the thick part of the lubricant layer 30 from transferring and sticking to the magnetic head slider. Furthermore, it can suppress stiction (a phenomenon in which the magnetic head slider sticks to the magnetic recording medium) and lubricant pickup (a phenomenon in which the lubricant transfers from the magnetic recording medium to the magnetic head slider).
Furthermore, where the magnetic recording medium has the lubricant layer 30 in the state C of
Furthermore, in the cases where the region with the plurality of dot patterns 128 is provided on only a part of the surface and where the lubricant layer 20 is present on the portion with dot patterns and on the portion without dot patterns as in
According to the production method of the magnetic recording medium 40 described above, the ground layer 126, magnetic recording layer 129, and protecting film 127 are formed in order on the substrate 125 by the known methods, and thereafter the lubricant film 128 is formed in only a part of the sliding surface by the aforementioned lubricant film forming method.
[Magnetic Head Slider]
The following will describe the magnetic head slider 60 according to the present embodiment. As shown in the schematic sectional view of
A material of the substrate 115 can be, for example, a nonmagnetic insulating material, e.g., a ceramic material such as an alumina-titanium-carbide (Al2O3—TiC) sintered body, a metal oxide such as alumina Al2O3, a metal material such as Ti, a nonmetallic inorganic material such as Si or C, or the like.
A material of the ground layer 116 can be silicon, silicon nitride, or the like.
A material of the protecting film 117 is preferably selected from carbon materials such as amorphous carbon (e.g., diamond-like carbon, graphite carbon, hydrogen-added carbon, nitrogen-added carbon, fluorine-added carbon, etc.) and carbons doped with various metals, and inorganic materials such as WC, WMoC, ZrN, BN, B4C, SiO2, and ZrO2, and the protecting film 117 can be formed, for example, in the thickness of approximately 1-3 nm. In this example, the surface of the protecting film 117 corresponds to the aforementioned “surface of the base material.”
The lubricant film 118 corresponds to the aforementioned lubricant film 30. There are no particular restrictions on molecules making the lubricant film 30, but a particularly preferred molecule has an organic group containing a plurality of fluorine atoms, e.g., a residue resulting from elimination of a H atom from an OH group of a chain fluoropolyether with an OH group bound to a carbon atom, at a terminal. There are no particular restrictions on the molecular weight of molecules making the lubricant film 30, but the center molecular weight thereof is preferably approximately 500-4000.
The below will describe the magnetic head slider 60 of the present embodiment, based on the perspective view of the magnetic head slider 60 shown in
The magnetic head slider 60 of the present embodiment is mainly comprised of a slider 150 and a thin-film magnetic head 140 formed on an end face of the slider 150, and the magnetic head slider 60 is approximately of rectangular plate shape. The surface on this side in
The thin-film magnetic head 140 is mainly comprised of a reading element 72R for reading magnetic information from the magnetic recording medium 40, a writing element 72W for writing magnetic information into the magnetic recording medium 40, and a cover 65 made of an insulating material such as alumina, for protecting these reading element 72R and writing element 72W. In the thin-film magnetic head 140, the reading element 72R is located on the near side to a substrate 110, while the writing element 72W is located on the far side from the substrate 110.
The reading element 72R and writing element 72W can be any and suitable ones selected from the known elements. For example, the reading element 72R can be an MR element making use of the magnetoresistance effect; e.g., a GMR element, an AMR element, a TMR element, or the like. The writing element 72W can be an induction type electromagnetic transforming element provided with a magnetic circuit with a predetermined gap formed therein, and a thin-film coil surrounding the magnetic circuit.
Electrode pads 61a, 61b, 61c, and 61d are provided in this order on a surface 140a opposite to the slider 150, in the thin-film magnetic head 140.
Then the writing element 72W is electrically connected through connection lines (not shown) to the electrode pads 61a, 61b, and the reading element 72R is electrically connected through connection lines (not shown) to the electrode pads 61c, 61d.
On the air bearing surface ABS of the magnetic head slider 60 as described above, there are cavity portions 79, 110 (corresponding to the bottom portion), pad portions 73, 74, 75 (corresponding to the first projection), and a shallow portion 78 (corresponding to the second projection). The pad portions 73, 75 are formed on the air bearing surface ABS of the slider 150. The pad portion 74 is formed as ranging from on the air bearing surface of the slider 150 to on the air bearing surface of the thin-film magnetic head 140, and has a pad portion 74a formed on the air bearing surface ABS of the substrate 110 and a sensor portion (pad portion) 74b formed on the air bearing surface ABS of the thin-film magnetic head 140. These pad portions 73, 74, 75 project from the cavity portions 79, 110 toward the sliding surface of the magnetic recording medium 40. The reading element 72R and the writing element 72W are exposed in part in the surface of the sensor portion 74b.
The pad portions 73, 74, 75 project in the same height from the cavity portions 79, 110.
These pad portions 73, 74, 75 are provided for stabilizing the amount of flotation of the magnetic head slider 60 above the magnetic recording medium 40, and there are no particular restrictions on the locations, the number, and the shape of the pad portions.
The shallow portion 78 around the pad portions 73, 75 is further formed on the air bearing surface ABS of the magnetic head slider 60. The shallow portion 78 also projects from the cavity portions 79, 110 toward the magnetic recording medium 40 as the pad portions 73, 74, 75 do. The projection height of the shallow portion 78 from the cavity portions 79, 110 is lower than the height of the pad portions 73, 74, 75.
The following will describe preferred locations where the lubricant film 118 is formed, in the magnetic head slider 60, on the basis of plan views of the magnetic head slider 60 from the air bearing surface ABS, i.e., on the basis of
The magnetic head slider 60 of the present embodiment is preferably constructed as follows: the lubricant film 118 is formed on a surface of at least one of the shallow portion 78, cavity portions 79, 110, pad portions 73, 74, 75, and sensor portion 74b.
The magnetic head slider 60A, wherein the lubricant film 118 is formed on the shallow portion 78 as shown in
The magnetic head slider 60B, wherein the lubricant film 118 is formed on the cavity portions 79, 110 as shown in
The magnetic head slider 60C, wherein the lubricant film 118 is formed on the pad portions 73, 74, 75 as shown in
The magnetic head slider 60D, wherein the lubricant film 118 is formed on the sensor portion 74b as shown in
Each lubricant film 118 described above may be formed as dot patterns or formed as a solid pattern. The magnetic recording medium 40 in
In the magnetic head slider 60 of the present embodiment, the lubricant film 30 is formed with the laser light, and the magnetic recording element 72W and the magnetic reading element 72R are unlikely to deteriorate with heat accordingly.
A production method of these magnetic head sliders 60 is as follows: the magnetic head 140 is formed on the substrate by the known methods, the air bearing surface ABS is formed and polished thereafter, and then the ground layer 116 and protecting film 117 are formed by the known methods such as vapor deposition (vacuum vapor deposition, sputtering, CVD, etc.). Then the aforementioned lubricant film forming method is carried out using this protecting film 117 as the base material.
Diamond-like carbon is deposited in vacuum to form the base material in the thickness of 3 nm on a Co substrate. A photoresist was deposited with a plurality of circular apertures in the diameter of 10 μm and in the thickness of 100 nm on a part of this lubricant layer. The photoresist was a novolac resin. Thereafter, a lubricant was applied onto the surface of the base material to form a lubricant layer in the thickness of about 1.2 nm on the surface of the base material. The lubricant was Fomblin Z presented by Formula (1). Thereafter, the lubricant layer was irradiated with pulsed infrared laser light of the wavelength of 1.064 μm (Nd-YAG laser). The pulse width of the laser was 0.3 ms. The laser irradiation intensity was 9.6, 11.6, or 13.5 J/cm2 in the order of Examples B1-B3, respectively. Sample substrates with the lubricant film were obtained in this way.
A sample substrate was obtained in the same manner as in Example B2 except that the lubricant layer was irradiated with the laser through a mask with a plurality of circular apertures in the diameter of 100 μm, instead of forming the photoresist on a part of the lubricant layer.
A sample substrate was obtained in the same manner as in Example B1 except that the lubricant was not irradiated with the laser.
(Evaluation)
Scratch tests for the lubricant films of the respective sample substrates (in the thickness of about 1.1 nm) were conducted with an indenter having a diamond tip in the diameter of 8 μm and under the load of 3.98 mN. Then the depth D and width W of each scratch were measured with a scanning ellipsometer. The results are presented in
For Example B3 and Comparative Example B1, sample surfaces not used for the scratch tests were subjected to mass spectroscopy with a TOF type secondary ion mass spectrometer (SIMS) to acquire a ratio of C—F bonds characteristic to the lubricant, to Co atoms existing in the magnetic layer of the magnetic recording medium. The results are presented in
As seen from
As seen from
| Number | Date | Country | Kind |
|---|---|---|---|
| 2006-144499 | May 2006 | JP | national |
| 2006-231153 | Aug 2006 | JP | national |
