Claims
- 1. A coordinate measuring apparatus, which comprises:
- a plurality of coordinate measuring members located on a plurality of axes wherein a guide-carrying structure is positioned along one axis of said plurality of axes;
- a carriage movably mounted on said guide-carrying structure;
- a reference structure located separate from and spaced a predetermined distance from said carrying structure and connected to said carriage structure by link means;
- at least one sensor attached to said carriage for determining the position of said carriage relative to said reference structure; and
- a workpiece support wherein the reference structure of a first measuring axis is connected to said workpiece support.
- 2. An apparatus according to claim 1, wherein a first sensor is positioned along said one axis for measuring the displacement of the carriage in the direction of said one axis and a plurality of additional sensors for measuring linear displacement are arranged so as to define the position of the carriage relative to the reference structure according to a plurality of degrees of freedom.
- 3. An apparatus according to claim 1, wherein the reference structure comprises a metal lattice which has a relatively small thermal expansion property.
Priority Claims (1)
Number |
Date |
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Kind |
88 02109 |
Feb 1988 |
FRX |
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Parent Case Info
This application is a continuation of application Ser. No. 07/314,037, filed on Feb. 23, 1989, now abandoned.
US Referenced Citations (8)
Continuations (1)
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Number |
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Parent |
314037 |
Feb 1989 |
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