Magnetic device, perpendicular magnetic recording head, magnetic recording system, method of forming magnetic layer pattern, and method of manufacturing perpendicular magnetic recording head

Abstract

Provided is a method of manufacturing a perpendicular magnetic recording head which can enhance accuracy and simplify the manufacturing process. The method includes: forming a photoresist pattern having an opening part (the inclination of an inner wall); forming a non-magnetic layer (the inclination of another inner wall) so as to narrow the opening part by a dry film forming method such as ALD method; stacking a seed layer and a plating layer so as to bury the opening part provided with the non-magnetic layer; and forming a main magnetic pole layer (a front end portion having a bevel angle) by polishing the non-magnetic layer, the seed layer, and the plating layer by CMP method until the photoresist pattern is exposed. The final opening width (the forming width of the front end portion) is unsusceptible to variations, thus reducing the number of the steps of forming the main magnetic layer.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A and 1B are sectional views each showing the sectional configuration of a thin film magnetic head equipped with a perpendicular magnetic recording head according to a preferred embodiment of the present invention;

FIG. 2 is a plan view showing the plan configuration of a key part of the thin film magnetic head shown in FIGS. 1A and 1B;

FIG. 3 is a plan view showing in enlarged dimension the configuration of an end surface in the key part of the thin film magnetic head shown in FIGS. 1A and 1B;

FIG. 4 is a sectional view showing the sectional configuration of the key part of the thin film magnetic head shown in FIGS. 1A and 1B;

FIG. 5 is another sectional view showing the sectional configuration of the key part of the thin film magnetic head shown in FIGS. 1A and 1B;

FIG. 6 is a sectional view for explaining a manufacturing step in a method of manufacturing a thin film magnetic head equipped with a perpendicular magnetic recording head according to the preferred embodiment of the present invention;

FIG. 7 is a sectional view for explaining the next following step of that shown in FIG. 6;

FIG. 8 is a sectional view for explaining the next following step of that shown in FIG. 7;

FIG. 9 is a sectional view for explaining the next following step of that shown in FIG. 8;

FIG. 10 is a sectional view for explaining the next following step of that shown in FIG. 9;

FIG. 11 is a sectional view for explaining the next following step of that shown in FIG. 10;

FIG. 12 is a sectional view for explaining the next following step of that shown in FIG. 11;

FIG. 13 is a sectional view for explaining the next following step of that shown in FIG. 12;

FIG. 14 is a sectional view for explaining the configuration of a thin film magnetic head as a comparative example of the thin film magnetic head according to the preferred embodiment of the present invention;

FIG. 15 is a sectional view for explaining a manufacturing process of a thin film magnetic head when a non-magnetic layer is formed by a method other than ALD method;

FIG. 16 is a sectional view for explaining the next following step of that shown in FIG. 15;

FIG. 17 is a sectional view showing a modification in the configuration of the thin film magnetic head according to the preferred embodiment of the present invention;

FIG. 18 is a sectional view showing other modification in the configuration of the thin film magnetic head according to the preferred embodiment of the present invention;

FIG. 19 is a sectional view for explaining a manufacturing step in a modification of the method of manufacturing a thin film magnetic head according to the preferred embodiment of the present invention;

FIG. 20 is a sectional view for explaining the next following step of that shown in FIG. 19;

FIG. 21 is a sectional view for explaining a manufacturing step in other modification of the method of manufacturing a thin film magnetic head according to the preferred embodiment of the present invention;

FIG. 22 is a sectional view for explaining the next following step of that shown in FIG. 21;

FIGS. 23A and 23B are sectional views showing a still other modification in the configuration of the thin film magnetic head according to the preferred embodiment of the present invention;

FIG. 24 is a perspective view showing the perspective configuration of a magnetic recording system equipped with the thin film magnetic head according to the preferred embodiment;

FIG. 25 is a perspective view showing in enlarged dimension the perspective configuration of a key part of the magnetic recording system shown in FIG. 24;

FIG. 26 is a diagram showing the result of observation of the surface structure in the vicinity of an air bearing surface observed by using an AFM; and

FIG. 27 is a diagram showing the correlation between non-magnetic layer thickness and trailing edge width.

Claims

1. A magnetic device comprising: a first non-magnetic layer with U-shaped cross section; anda magnetic layer filling inside of the first non-magnetic layer.

2. The magnetic device according to claim 1, wherein the magnetic layer includes a seed layer and a plating layer formed on the seed layer.

3. The magnetic device according to claim 1, wherein the first non-magnetic layer is formed by ALD (atomic layer deposition) method.

4. A magnetic device according to claim 1, wherein the first non-magnetic layer contains no inert gas; and a second non-magnetic layer containing inert gas fills outside of the first non-magnetic layer.

5. A magnetic device according to claim 1 further comprising a second non-magnetic layer filling outside of the first non-magnetic layer; wherein, in a direction to cross over the U-shaped cross section of the first non-magnetic layer, the first non-magnetic layer is recessed from the second non-magnetic layer, and the magnetic layer projects from the first non-magnetic layer.

6. The magnetic device according to claim 5, wherein the magnetic layer is recessed from the second non-magnetic layer.

7. The magnetic device according to claim 5, wherein the magnetic layer projects from the second non-magnetic layer.

8. A perpendicular magnetic recording head comprising: a non-magnetic layer with U-shaped cross section; anda magnetic pole filling inside of the non-magnetic layer.

9. The perpendicular magnetic recording head according to claim 8, wherein, the magnetic pole extends from an air bearing surface or its neighborhood to an area far therefrom; andan end surface of the magnetic pole on the air bearing surface or its neighborhood is of reverse trapezoidal shape.

10. The perpendicular magnetic recording head according to claim 8, wherein the magnetic pole includes a seed layer and a plating layer formed on the seed layer.

11. The perpendicular magnetic recording head according to claim 8, wherein the non-magnetic layer is formed by ALD method.

12. A perpendicular magnetic recording head according to claim 8, wherein the first non-magnetic layer contains no inert gas; anda second non-magnetic layer containing inert gas fills outside of the first non-magnetic layer.

13. A perpendicular magnetic recording head according to claim 8 further comprising a second non-magnetic layer filling outside of the first non-magnetic layer; wherein, in a direction to cross over the U-shaped cross section of the first non-magnetic layer, the first non-magnetic layer is recessed from the second non-magnetic layer, and the magnetic pole projects from the first non-magnetic layer.

14. The perpendicular magnetic recording head according to claim 13, wherein the magnetic pole is recessed from the second non-magnetic layer.

15. The perpendicular magnetic recording head according to claim 13, wherein the magnetic pole projects from the second non-magnetic layer.

16. A magnetic recording system comprising: a recording medium; anda perpendicular magnetic recording head according to claim 8.

17. The magnetic recording system according to claim 16, wherein the recording medium includes a magnetization layer disposed on a side close to the perpendicular magnetic recording head and a soft magnetic layer disposed on a side far from the perpendicular magnetic recording head.

18. A method of forming a magnetic layer pattern comprising: a first step of forming on a base a photoresist pattern having an opening part;a second step of forming a first non-magnetic layer so as to narrow the opening part by covering at least an inner wall of the photoresist pattern in the opening part;a third step of forming a magnetic layer so as to fill at least the opening part provided with the first non-magnetic layer; anda fourth step of forming a magnetic layer pattern at the opening part by selectively removing the first non-magnetic layer and the magnetic layer until at least the photoresist pattern is exposed.

19. The method of forming a magnetic layer pattern according to claim 18, wherein the first non-magnetic layer is formed by ALD method in the second step.

20. The method of forming a magnetic layer pattern according to claim 19, wherein a film forming temperature in the ALD method is controlled to be lower than a glass-transition temperature of the photoresist pattern.

21. The method of forming a magnetic layer pattern according to claim 18, wherein the first non-magnetic layer and the magnetic layer are removed by polishing in the fourth step.

22. The method of forming a magnetic layer pattern according to claim 18, further comprising: a fifth step of removing the photoresist pattern remaining;a sixth step of forming a second non-magnetic layer so as to cover the first non-magnetic layer and the magnetic layer pattern; anda seventh step of selectively removing the second non-magnetic layer until at least the first non-magnetic layer and the magnetic layer pattern are exposed.

23. The method of forming a magnetic layer pattern according to claim 18, wherein in the third step, the magnetic layer is formed by steps of forming a seed layer on the first non-magnetic layer, and thereafter growing a plating layer on the seed layer.

24. A method of manufacturing a perpendicular magnetic recording head comprising: a first step of forming on a base a photoresist pattern having an opening part;a second step of forming a first non-magnetic layer so as to narrow the opening part by covering at least an inner wall of the photoresist pattern in the opening part;a third step of forming a magnetic layer so as to fill at least the opening part provided with the first non-magnetic layer; anda fourth step of forming a magnetic pole at the opening part by selectively removing the first non-magnetic layer and the magnetic layer until at least the photoresist pattern is exposed.

25. The method of manufacturing a perpendicular magnetic recording head according to claim 24, wherein the first non-magnetic layer is formed by ALD method in the second step.

26. The method of manufacturing a perpendicular magnetic recording head according to claim 25, wherein a film forming temperature in the ALD method is controlled to be lower than a glass transition temperature of the photoresist pattern.

27. The method of manufacturing a perpendicular magnetic recording head according to claim 24, wherein the first non-magnetic layer and the magnetic layer are removed by polishing in the fourth step.

28. The method of manufacturing a perpendicular magnetic recording head according to claim 24, further comprising: a fifth step of removing the photoresist pattern remaining;a sixth step of forming a second non-magnetic layer so as to cover the first non-magnetic layer and the magnetic pole; anda seventh step of selectively removing the second non-magnetic layer until at least the first non-magnetic layer and the magnetic pole are exposed.

29. The method of manufacturing a perpendicular magnetic recording head according to claim 24, wherein in the third step, the magnetic layer is formed by steps of forming a seed layer on the first non-magnetic layer, and thereafter growing a plating layer on the seed layer.