Electro-plating is a plating process that uses electrical current to reduce cations of a plating material from a solution and coat an object with a thin layer of the material, such as a metal. The process used in electro-plating is called electro-deposition. Electro-plating and electro-deposition may be referred to interchangeably herein. Electro-plating typically uses material indiscriminately from a source, requiring wasteful concentrations of plating material in the solution to maintain diffusion based electro-plating concentrations.
The foregoing and other features of the present disclosure will become more fully apparent form the following description and appended claims, taken in conjunction with the accompanying drawings. Understanding that these drawings depict only several examples in accordance with the disclosure and are, therefore, not to be considered limiting of its scope, the disclosure will be described with additional specificity and detail through use of the accompanying drawings.
In the drawings:
In the following detailed description, reference is made to the accompanying drawings, which form a part hereof. In the drawings, similar symbols typically identify similar components, unless context dictates otherwise. The illustrative embodiments described in the detailed description, drawings, and claims are not meant to be limiting. Other embodiments may be utilized, and other changes may be made, without departing from the spirit or scope of the subject matter presented herein. It will be readily understood that the aspects of the present disclosure, as generally described herein, and illustrated in the Figures, may be arranged, substituted, combined, separated, and designed in a wide variety of different configurations, all of which are explicitly contemplated herein.
This disclosure is drawn, inter alia, to methods, apparatus, computer programs and systems generally related to magnetic electro-plating of a plating material on a surface of a substrate. Example methods may include utilizing a magnet during electro-deposition to modify deposition kinetics. Electro-deposition is an electrochemical process by which metal or other materials (referred to herein as the plating material(s)) are deposited on a substrate by passing a current through an electrolyte solution containing the plating material. Replacing or augmenting diffusion with magnet force may facilitate usage of source chemicals (plating material) in the solution. Such approach may reduce material needs and may offer speed and control to a plating solution. Accordingly, various methods and systems for electro-deposition of a plating material are generally disclosed. Materials may be electro-deposited on a substrate relatively simply and effectively. In some examples, constant direct current may be used to plate a thin layer on a substrate.
More specifically, an electrolyte solution may be provided containing the plating material to be deposited. Generally, the plating material may be a material comprising a magnetically attracted species such as a ferrous compound, a permalloy (a nickel iron magnetic alloy, for example having approximately 20% iron and 80% nickel), a chrome alloy, and the like. For example, the plating material may be a cobalt-nickel-iron (Co—Ni—Fe) alloy. The electrolyte solution, comprising the plating material in solution, may be provided in a tank suitable for receiving the substrate. The substrate may be placed in the electrolyte solution. The substrate may be fully or partially submerged. The magnet may be positioned such that the magnetic field is associated with the surface of the substrate to enhance kinetics of deposition of the plating material thereon. For example, the magnet may be placed opposite or near the surface to receive the material to pull the plating material to the surface. Alternatively, the magnet may be positioned such that the surface of the substrate faces the magnet, thereby slowing kinetics of deposition of the plating material thereon. The electrode(s) may be associated with the substrate, such as by contacting the electrodes to the substrate, and electrical current applied.
In some examples, the substrate may act as the cathode. As the current is applied and/or the magnetic field activated, positive metal ions from the solution may be deposited on the substrate. The magnet may be a conventional magnet, may be an electromagnet, or may be a magnet designed for magnetic electro-deposition. Suitable electromagnets include, for example, current coils. Suitable conventional magnets may be permanent magnets or temporary magnets. Suitable permanent magnets may include, for example, neodymium iron boron (NdFeB or NIB) magnets, samarium cobalt (SmCo) magnets, alnico magnets, or ceramic or ferrite magnets. In some examples, the magnet may be a current coil. Generally, the magnetic field may be at a strength above the magnitude of the earth's magnetic field.
In some examples, the magnet may be positioned to modify deposition kinetics, such as to enhance deposition kinetics. This may be done over an entire surface of the substrate or may be done in particular positions. In one example, the magnet may enhance deposition over substantially the entire surface of the substrate, such as by providing a magnet having a size substantially correlating to a size of the surface of the substrate. In another example, one or more magnets may be positioned at particular locations of the substrate to preferentially pull plating material to those locations. In one example, one or more current coils may be associated with the substrate and a power source or signal generator associated with those current coils. By turning on certain coils, thereby activating the magnetic field of the coil, a bit map may be written on the substrate. Accordingly, thickness of the electroplated material may be varied over a surface through the use of selectively positioned magnets.
In some examples, the magnet may be positioned to slow deposition kinetics. In some situations, slowing down movement of the plating material may result in a smoother deposited surface.
Replacing or augmenting diffusion with magnetic force facilitates usage of material in the supply. More specifically, the magnetic field may reduce waste of plating material in the electrolyte solution. The described approach may reduce electrolyte needs and may offer speed and control to a plating bath. In some examples, the anode may be sacrificial and may supply replenishment for deposited ions from the electrolyte solution. In other examples, the anode may be formed from a non-consumable material and the solution may be replenished.
The tank 36 may be made of a generally non-metallic material. In various examples, the non-metallic material may be plastic, glass, ceramic, or other non-metallic material. The electrolyte solution 38 may be provided in the tank 36 and may contain the plating material, a magnetically active material, in an ionic form. For example, the electrolyte solution 38 may comprise analytical reagent Co—Ni—FE and Millipore water. In some examples, the magnet 39 may be positioned in the solution 38. As shown, the magnet may have a size substantially correlating to a size of the substrate. The magnet may be positioned underneath the substrate, or opposite the surface to receive the material, where the magnet is positioned so that it may enhance deposition kinetics over substantially the entire surface of the substrate. The signal generator 34 may be configured to apply a current signal to the electrode 32. A frequency modulator (not shown) or a pulse modulator (not shown) may be associated with the signal generator or power source 34. One or more devices for controlling temperature may be provided (not shown), such as a Peltier element and temperature selector. By reducing temperature, the electrolyte solution 38 may be solidified.
With reference to
The electrode(s) may be formed of any suitable material. Generally, the electrode may be formed of a material suitable for machining and, in some examples, micro-machining. Thus, for example, the electrode may be formed of one or more materials including nickel (Ni), copper (Cu), or graphite. Electrodes formed of a material that may be depleted by the electrolyte solution may not be suitable for reuse while electrodes formed from a material that is not depleted by the electrolyte solution may be suitable for reuse. In alternative examples, the electrodes may be formed of a material suitable for reuse.
Any suitable material may be used as a substrate so long as it may be electro-plated upon. For example, a piezo-electric substrate such as aluminum nitrate substrate material may be used. For electronics, a thin layer of gold may be provided over the substrate. Common substrate materials for electro-plating may include piezo-electric materials, silicon on insulators (SOI, such as silicon on oxides) materials, oxide materials, and polymer materials.
In some examples, the substrate may be prepared to enhance suitability for electro-deposition. For example, the substrate may be cleaned, may be coated with a hydrophilic coating, may be coated with a conductive coating such as gold, coated with an electro-plating seed layer, or otherwise prepared. Further, the substrate may be sized and shaped for final use prior to or after electro-deposition. Thus, in some examples, the substrate may be cut or subdivided into chip sizes before electro-deposition of the plating material. In other examples, the substrate may be provided in a monolithic piece, plating material may be electro-deposited thereon, and the substrate may be cut or subdivided into sizes for use thereafter.
Any suitable electrolyte solution may be used. Generally, the electrolyte solution may contain one or more dissolved magnetically attracted species as well as other ions that permit the flow of electricity. The dissolved magnetically attracted species comprises the plating material to be deposited on the substrate. Generally, the plating material may be a material comprising a magnetically attracted species such as ferrous compounds, permalloy, chrome alloys, and the like.
In some examples, systems and methods as described herein may further include a computing system (not shown). The computer system may be arranged to drive the signal generator or power source 34 and may be used to control a signal level, a frequency, a period, a pulse duration, a duty cycle, an exposure time, or some other characteristic of the applied current signal. A varied frequency may in some examples increase evenness of deposition. In one particular example, a processor 65 may be provided for controlling a frequency and/or a signal level of the current signal provided by the signal generator or signal generator 34. The computer system may further be arranged to drive the electromagnets such as to turn the electromagnets on or off to control plating thicknesses.
Depending on the desired configuration, processor 910 may be of any type including but not limited to a microprocessor (μP), a microcontroller (μC), a digital signal processor (DSP), or any combination thereof. Processor 910 may include one or more levels of caching, such as a level one cache 911 and a level two cache 912, a processor core 913, and registers 914. An example processor core 913 may include an arithmetic logic unit (ALU), a floating point unit (FPU), a digital signal processing core (DSP Core), or any combination thereof. An example memory controller 915 may also be used with the processor 910, or in some implementations, the memory controller 915 may be an internal part of the processor 910.
Depending on the desired configuration, the system memory 920 may be of any type including but not limited to volatile memory (such as RAM), non-volatile memory (such as ROM, flash memory, etc.) or any combination thereof. System memory 920 may include an operating system 921, one or more applications 922, and program data 924. Application 922 may include an electro-deposition algorithm 923 that may be arranged to generate a selected frequency or other characteristics of the applied signal during deposition. Program Data 924 may include current data 925 (or other data indicative of characteristics of the applied signal) that may be useful for determining a frequency corresponding to a specific periodicity of the applied signal during deposition. In some embodiments, application 922 may be arranged to operate with program data 924 on an operating system 921 such that current may be supplied to electrodes to cause electro-deposition of materials in accordance with described methods found herein. This described basic configuration is illustrated in
Computing device 900 may have additional features or functionality, and additional interfaces to facilitate communications between the basic configuration 901 and any required devices and interfaces. For example, a bus/interface controller 940 may be used to facilitate communications between the basic configuration 901 and one or more data storage devices 950 via a storage interface bus 941. The data storage devices 950 may be removable storage devices 951, non-removable storage devices 952, or a combination thereof. Examples of removable storage and non-removable storage devices include magnetic disk devices such as flexible disk drives and hard-disk drives (HDD), optical disk drives such as compact disk (CD) drives or digital versatile disk (DVD) drives, solid state drives (SSD), and tape drives to name a few. Example computer storage media may include volatile and nonvolatile, removable and non-removable media implemented in any method or technology for storage of information, such as computer readable instructions, data structures, program modules, or other data.
System memory 920, removable storage 951 and non-removable storage 952 are all examples of computer storage media. Computer storage media includes, but is not limited to, RAM, ROM, EEPROM, flash memory or other memory technology, CD-ROM, digital versatile disks (DVD) or other optical storage, magnetic cassettes, magnetic tape, magnetic disk storage or other magnetic storage devices, or any other medium which may be used to store the desired information and which may be accessed by computing device 900. Any such computer storage media may be part of device 900.
Computing device 900 may also include an interface bus 942 for facilitating communication from various interface devices (e.g., output interfaces, peripheral interfaces, and communication interfaces) to the basic configuration 901 via the bus/interface controller 940. Example output devices 960 include a graphics processing unit 961 and an audio processing unit 962, which may be configured to communicate to various external devices such as a display or speakers via one or more A/V ports 963. Example peripheral interfaces 970 include a serial interface controller 971 or a parallel interface controller 972, which may be configured to communicate with external devices such as input devices (e.g., keyboard, mouse, pen, voice input device, touch input device, etc.) or other peripheral devices (e.g., printer, scanner, etc.) via one or more I/O ports 973. An example communication device 980 includes a network controller 981, which may be arranged to facilitate communications with one or more other computing devices 990 over a network communication link via one or more communication ports 982.
The network communication link may be one example of a communication media. Communication media may typically be embodied by computer readable instructions, data structures, program modules, or other data in a modulated data signal, such as a carrier wave or other transport mechanism, and may include any information delivery media. A “modulated data signal” may be a signal that has one or more of its characteristics set or changed in such a manner as to encode information in the signal. By way of example, and not limitation, communication media may include wired media such as a wired network or direct-wired connection, and wireless media such as acoustic, radio frequency (RF), microwave, infrared (IR) and other wireless media. The term computer readable media as used herein may include both storage media and communication media.
Computing device 900 may be implemented as a portion of a small-form factor portable (or mobile) electronic device such as a cell phone, a personal data assistant (PDA), a personal media player device, a wireless web-watch device, a personal headset device, an application specific device, or a hybrid device that include any of the above functions. Computing device 900 may also be implemented as a personal computer including both laptop computer and non-laptop computer configurations.
Also depicted in
The present disclosure is not to be limited in terms of the particular embodiments described in this application, which are intended as illustrations of various aspects. Many modifications and variations may be made without departing from its spirit and scope, as will be apparent to those skilled in the art. Functionally equivalent methods and apparatuses within the scope of the disclosure, in addition to those enumerated herein, will be apparent to those skilled in the art from the foregoing descriptions. Such modifications and variations are intended to fall within the scope of the appended claims. The present disclosure is to be limited only by the terms of the appended claims, along with the full scope of equivalents to which such claims are entitled. It is to be understood that this disclosure is not limited to particular methods, reagents, compounds compositions or biological systems, which may, of course, vary. It is also to be understood that the terminology used herein is for the purpose of describing particular embodiments only, and is not intended to be limiting.
With respect to the use of substantially any plural and/or singular terms herein, those having skill in the art may translate from the plural to the singular and/or from the singular to the plural as is appropriate to the context and/or application. The various singular/plural permutations may be expressly set forth herein for sake of clarity.
It will be understood by those within the art that, in general, terms used herein, and especially in the appended claims (e.g., bodies of the appended claims) are generally intended as “open” terms (e.g., the term “including” should be interpreted as “including but not limited to,” the term “having” should be interpreted as “having at least,” the term “includes” should be interpreted as “includes but is not limited to,” etc.). It will be further understood by those within the art that if a specific number of an introduced claim recitation is intended, such an intent will be explicitly recited in the claim, and in the absence of such recitation, no such intent is present. For example, as an aid to understanding, the following appended claims may contain usage of the introductory phrases “at least one” and “one or more” to introduce claim recitations. However, the use of such phrases should not be construed to imply that the introduction of a claim recitation by the indefinite articles “a” or “an” limits any particular claim containing such introduced claim recitation to embodiments containing only one such recitation, even when the same claim includes the introductory phrases “one or more” or “at least one” and indefinite articles such as “a” or “an” (e.g., “a” and/or “an” should be interpreted to mean “at least one” or “one or more”); the same holds true for the use of definite articles used to introduce claim recitations. In addition, even if a specific number of an introduced claim recitation is explicitly recited, those skilled in the art will recognize that such recitation should be interpreted to mean at least the recited number (e.g., the bare recitation of “two recitations,” without other modifiers, means at least two recitations, or two or more recitations). Furthermore, in those instances where a convention analogous to “at least one of A, B, and C, etc.” is used, in general, such a construction is intended in the sense one having skill in the art would understand the convention (e.g., “a system having at least one of A, B, and C” would include but not be limited to systems that have A alone, B alone, C alone, A and B together, A and C together, B and C together, and/or A, B, and C together, etc.). In those instances where a convention analogous to “at least one of A, B, or C, etc.” is used, in general, such a construction is intended in the sense one having skill in the art would understand the convention (e.g., “a system having at least one of A, B, or C” would include but not be limited to systems that have A alone, B alone, C alone, A and B together, A and C together, B and C together, and/or A, B, and C together, etc.). It will be further understood by those within the art that virtually any disjunctive word and/or phrase presenting two or more alternative terms, whether in the description, claims, or drawings, should be understood to contemplate the possibilities of including one of the terms, either of the terms, or both terms. For example, the phrase “A or B” will be understood to include the possibilities of “A” or “B” or “A and B.”
In addition, where features or aspects of the disclosure are described in terms of Markush groups, those skilled in the art will recognize that the disclosure is also thereby described in terms of any individual member or subgroup of members of the Markush group.
As will be understood by one skilled in the art, for any and all purposes, such as in terms of providing a written description, all ranges disclosed herein also encompass any and all possible subranges and combinations of subranges thereof. Any listed range may be easily recognized as sufficiently describing and enabling the same range being broken down into at least equal halves, thirds, quarters, fifths, tenths, etc. As a non-limiting example, each range discussed herein may be readily broken down into a lower third, middle third and upper third, etc. As will also be understood by one skilled in the art all language such as “up to,” “at least,” “greater than,” “less than,” and the like include the number recited and refer to ranges which may be subsequently broken down into subranges as discussed above. Finally, as will be understood by one skilled in the art, a range includes each individual member. Thus, for example, a group having 1-3 cells refers to groups having 1, 2, or 3 cells. Similarly, a group having 1-5 cells refers to groups having 1, 2, 3, 4, or 5 cells, and so forth.
While various aspects and embodiments have been disclosed herein, other aspects and embodiments will be apparent to those skilled in the art. The various aspects and embodiments disclosed herein are for purposes of illustration and are not intended to be limiting, with the true scope and spirit being indicated by the following claims.
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