Claims
- 1. A magnetic head comprising:
a substrate; a non-magnetic seed layer deposited on the substrate; a bottom magnetic core piece positioned over and contacting the non-magnetic seed layer; a magnetic seed layer; and a top magnetic core piece positioned over and contacting the magnetic seed layer.
- 2. The head of claim 1 wherein the magnetic seed layer is a single layer comprising an alloy of Fe, Co, Zr, and Ta.
- 3. The head of claim 2 wherein Fe is present in the range of 50 to 80 Atomic percent, Co is present in the range of 20 to 50 Atomic percent, Zr is present in the range of 1 to 10 Atomic percent, and Ta is present in the range of 1 to 10 Atomic percent.
- 4. The head of claim 2 wherein the magnetic seed layer has a thickness in the range of 500 to 5000 Angstroms.
- 5. The head of claim 1 wherein the magnetic seed layer is a dual layer comprising a base layer and a top layer.
- 6. The head of claim 5 wherein the base layer is an alloy chosen from the group consisting of NiFe, CoFe, NiFeCr, Ta, TaN.
- 7. The head of claim 6 wherein the base layer has a thickness in the range of 5 to 500 Angstroms.
- 8. The head of claim 5 wherein the top layer is an alloy of Fe, Co, Zr, and Ta.
- 9. The head of claim 8 wherein Fe is present in the range of 50 to 80 Atomic percent, Co is present in the range of 20 to 50 Atomic percent, Zr is present in the range of 1 to 10 Atomic percent, and Ta is present in the range of 1 to 10 Atomic percent.
- 10. The head of claim 5 wherein the magnetic seed layer has a thickness in the range of 500 to 5000 Angstroms.
- 11. A method of fabricating a magnetic head comprising:
depositing a non-magnetic seed layer on a substrate; forming a bottom portion of a magnetic core on the non-magnetic seed layer; depositing a non-magnetic material on at least a portion of the bottom portion of the magnetic core; depositing a magnetic seed layer on the non-magnetic material; and forming a top portion of the magnetic core on the magnetic seed layer.
- 12. The method of claim 11 wherein the magnetic seed layer is a single layer comprising an alloy of Fe, Co, Zr, and Ta.
- 13. The method of claim 12 wherein Fe is present in the range of 50 to 80 Atomic percent, Co is present in the range of 20 to 50 Atomic percent, Zr is present in the range of 1 to 10 Atomic percent, and Ta is present in the range of 1 to 10 Atomic percent.
- 14. The method of claim 12, wherein the magnetic seed layer has a thickness in the range of 500 to 5000 Angstroms.
- 15. The method of claim 11 wherein the magnetic seed layer comprises a base layer upon which a top layer is deposited.
- 16. The method of claim 15 wherein the base layer is an alloy chosen from the group consisting of NiFe, CoFe, NiFeCr, Ta, and TaN.
- 17. The method of claim 16 wherein the base layer has a thickness in the range of 5 to 500 Angstroms.
- 18. The method of claim 15 wherein the top layer is an alloy of Fe, Co, Zr, and Ta.
- 19. The method of claim 18 wherein Fe is present in the range of 50 to 80 Atomic percent, Co is present in the range of 20 to 50 Atomic percent, Zr is present in the range of 1 to 10 Atomic percent, and Ta is present in the range of 1 to 10 Atomic percent.
- 20. The method of claim 15 wherein the magnetic seed layer has a thickness in the range of 500 to 5000 Angstroms.
- 21. The method of claim 11 wherein the magnetic seed layer is deposited using Dc-magnetron sputtering.
- 22. The method of claim 21 wherein the sputtering is performed at a power of at least 500 Watts, a gas pressure of at least 10 milli-Torr, and a magnetic field based on a current.
- 23. The method of claim 22 further comprising applying a magnetic field in the range from 50 to 200 Oersted.
- 24. The method of claim 11 further comprising annealing the magnetic seed layer.
- 25. The method of claim 24 wherein annealing occurs at a temperature in the range from 100 to 500 Celsius based on a time duration.
- 26. The method of claim 25 wherein annealing occurs after depositing the magnetic seed layer.
- 27. A magnetic head comprising:
a substrate; a non-magnetic seed layer deposited on the substrate; a bottom magnetic core piece positioned over and contacting the non-magnetic seed layer; a means for increasing the magnetic moment and the resistivity of the magnetic head; and a top magnetic core piece positioned over and contacting the means.
- 28. The head of claim 27 wherein the means for increasing the magnetic moment and the resistivity of the magnetic head includes a magnetic seed layer comprising a single layer of an alloy of Fe, Co, Zr, and Ta.
- 29. The head of claim 28 wherein Fe is present in the range of 50 to 80 Atomic percent, Co is present in the range of 20 to 50 Atomic percent, Zr is present in the range of 1 to 10 Atomic percent, and Ta is present in the range of 1 to 10 Atomic percent.
- 30. The head of claim 28 wherein the magnetic seed layer has a thickness in the range of 500 to 5000 Angstroms.
- 31. The head of claim 27 wherein the means for increasing the magnetic moment and the resistivity of the magnetic head includes a magnetic seed layer comprising a base layer and a top layer.
- 32. The head of claim 31 wherein the base layer is an alloy chosen from the group consisting of NiFe, CoFe, NiFeCr, Ta, TaN.
- 33. The head of claim 31 wherein the base layer has a thickness in the range of 5 to 500 Angstroms.
- 34. The head of claim 31 wherein the top layer is an alloy of Fe, Co, Zr, and Ta.
- 35. The head of claim 34 wherein Fe is present in the range of 50 to 80 Atomic percent, Co is present in the range of 20 to 50 Atomic percent, Zr is present in the range of 1 to 10 Atomic percent, and Ta is present in the range of 1 to 10 Atomic percent.
- 36. The head of claim 31 wherein the magnetic seed layer has a thickness in the range of 500 to 5000 Angstroms.
Parent Case Info
[0001] Priority based on provisional patent application, Ser. No. 60/225,329 filed Aug. 15, 2000 entitled, “High Resistivity, High Moment Sputtered FeCoZrTa Film” is claimed.
Provisional Applications (1)
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Number |
Date |
Country |
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60225329 |
Aug 2000 |
US |