The subject matter of the present disclosure relates to magnetic recording media, and more particularly relates to magnetic recording media with multiple magnetic layers.
For many years conventional magnetic storage devices have been used to store data and information. Magnetic storage devices generally include units (“bits”) of magnetic material that can be polarized into distinct magnetic states, such as a positive state and a negative state. Conventionally, each bit stores binary information (either a 1 or a 0) according to the magnetic polarization state of the bit. Accordingly, magnetic storage devices generally include a “read” element that passes over the magnetic material and perceives the magnetic polarization state of each bit and a “write” element that passes over the magnetic material and changes the magnetic polarization state of each bit, thereby recording individual units of binary information. The amount of information that can be stored on a magnetic storage device is directly proportional to the number of magnetic bits on the magnetic storage device.
Various types of magnetic storage devices are known in the art and each type may involve a different fabrication process. For example, conventional granular magnetic recording devices include disks with magnetic layer bits that have multiple magnetic grains on each bit. All of the bits of a granular magnetic recording disk are coplanar and the surface of the disk is substantially smooth and continuous. In order to increase the amount of information that can be stored on a granular magnetic disk, the size of the bits can be decreased while keeping the grain size the same. However, with smaller bits there are fewer grains on each bit, which decreases the signal-to-noise ratio (less signal, more noise). In order to maintain a higher signal-to-noise ratio, methods have been developed that decrease both the bit size and the grain size, thus keeping the number of grains on each bit constant. However, when the grains become too small, thermal fluctuations can cause the grains to spontaneously reverse polarity, thus resulting in a loss of stored information.
Bit-patterned media devices are another example of magnetic storage devices. In bit-patterned media, the bits are physically etched into a surface using conventional lithographic etching techniques. In contrast to continuous or granular magnetic recording devices, bit-patterned media devices are topographically patterned with intersecting trenches and elevated bit islands. In some instances, the trenches are etched directly into a magnetic material, and in other instances the physical patterns are etched into a substrate and a magnetic material is coated over the patterned substrate. Because of the physical separation between the elevated magnetic bit islands and the depressed trenches, the width of each distinct magnetic bit island can be decreased in order to increase the areal bit density of the device while still maintaining a high signal-to-noise ratio and high thermal stability.
However, bit-patterned media devices are still limited by conventional patterning and fabrication processes. For example, bit-patterned magnetic recording media may be thermally and magnetically stable at bit densities of greater than 1 trillion bits per square inch (Tbit/in2). However, conventional lithography can only generate bit pattern densities up to about 0.5 Tbit/in2. Although current density multiplication fabrication techniques (i.e. self-assembled structures and nano-formation building blocks) may facilitate a decrease in feature size and an increase in feature density, as bits get smaller, the magnetic stability and the signal-to-noise ratio of these bits will still decrease, effectively limiting the areal information density of conventional magnetic recording media.
From the foregoing discussion, it should be apparent that a need exists for increasing areal information density without necessarily increasing physical areal bit density. The subject matter of the present application has been developed in response to the present state of the art, and in particular, in response to the problems and needs in the art that have not yet been fully solved by currently available magnetic recording media devices and nano-fabrication methods. Accordingly, the present disclosure has been developed to provide a magnetic recording medium that includes multiple magnetic states within each bit for increasing areal information density.
According to one embodiment, a magnetic recording medium includes a substrate and a plurality of anisotropic magnetic layers applied over the substrate. The medium further includes at least one anti-ferromagnetic coupling layer between two adjacent anisotropic magnetic layers of the plurality of anisotropic magnetic layers.
In some implementations of the magnetic recording medium, each of the plurality of anisotropic magnetic layers is spaced apart from another of the anisotropic magnetic layers by an anti-ferromagnetic coupling layer. A ratio of the thickness of an anisotropic magnetic layer directly coating the substrate to an adjacent anti-ferromagnetic coupling layer can be in the range of between about 2:1 and 10:1. Each bit of the magnetic recording medium can be capable of achieving a number of magnetic states equal to at least 2n where the plurality of anisotropic magnetic layers has n number of layers.
According to certain implementations of the magnetic recording medium, the substrate includes bit-patterned features. In yet some implementations, the anisotropic magnetic layers and the anti-ferromagnetic coupling layer include bit-patterned features. At least one of the anisotropic magnetic layers can include a cobalt-platinum-chromium alloy. The anti-ferromagnetic coupling layer can include a ruthenium-cobalt alloy.
In some implementations of the magnetic recording medium, the substrate may include a conditioning layer. The conditioning layer can include an oxide-nucleation layer.
According to certain implementations of the magnetic recording medium, the at least one anti-ferromagnetic coupling layer includes a first anti-ferromagnetic coupling layer and a second anti-ferromagnetic coupling layer. The two anisotropic magnetic layers include a first anisotropic magnetic layer and a second anisotropic magnetic layer. The plurality of anisotropic magnetic layers also includes a third anisotropic magnetic layer. The second anisotropic magnetic layer is between the first and third anisotropic magnetic layers, the first anti-ferromagnetic coupling layer is positioned between the first and second anisotropic magnetic layers, and the second anti-ferromagnetic coupling layer is positioned between the second and third anisotropic magnetic layers.
According to another embodiment, a bit-patterned magnetic recording medium includes a substrate, a conditioning layer, a first anisotropic magnetic layer applied over the conditioning layer, an anti-ferromagnetic coupling layer applied over the first anisotropic magnetic layer, and a second anisotropic magnetic layer applied over the anti-ferromagnetic coupling layer. The conditioning layer can include an oxide-nucleation layer. The anti-ferromagnetic coupling layer can include a ruthenium-cobalt alloy. The first anisotropic magnetic layer can include a first cobalt-platinum-chromium alloy and the second anisotropic magnetic layer can include a second cobalt-platinum-chromium alloy. The first cobalt-platinum-chromium alloy can be CoCr7Pt25 and the second cobalt-platinum-chromium alloy can be CoCr18Pt12.
According to certain implementations of the bit-patterned magnetic recording medium, the thickness ratio of the first anisotropic magnetic layer to the anti-ferromagnetic coupling layer is between about 2:1 and 10:1. In some implementations, the thickness ratio of the first anisotropic magnetic layer to the anti-ferromagnetic coupling layer is between about 5:1 and 7:1. In yet one implementation, the thickness ratio of the first anisotropic magnetic layer to the anti-ferromagnetic coupling layer is about 6:1.
In some implementations of the bit-patterned magnetic recording medium, the thickness ratio of the first anisotropic magnetic layer to the second anisotropic magnetic layer is between about 3:2 and 10:1. In yet certain implementations, the thickness ratio of the first anisotropic magnetic layer to the second anisotropic magnetic layer is between about 5:2 and 8:1. According to one implementation, the thickness ratio of the first anisotropic magnetic layer to the second anisotropic magnetic layer is about 4:1.
The substrate of the bit-patterned magnetic recording medium can include self-assembled block copolymer patterns. Further, the bit-patterned magnetic recording medium can be a hard disk of a magnetic recording device.
According to yet another embodiment, a method for fabricating an anti-ferromagnetic recording medium includes providing a substrate, applying a conditioning layer over the substrate, applying a first anisotropic magnetic layer over the conditioning layer, applying an anti-ferromagnetic coupling layer over the first anisotropic magnetic layer, and applying a second anisotropic magnetic layer over the anti-ferromagnetic coupling layer.
Reference throughout this specification to features, advantages, or similar language does not imply that all of the features and advantages that may be realized with the present disclosure should be or are in any single embodiment of the invention. Rather, language referring to the features and advantages is understood to mean that a specific feature, advantage, or characteristic described in connection with an embodiment is included in at least one embodiment of the subject matter disclosed herein. Thus, discussion of the features and advantages, and similar language, throughout this specification may, but do not necessarily, refer to the same embodiment.
Furthermore, the described features, advantages, and characteristics of the disclosure may be combined in any suitable manner in one or more embodiments. One skilled in the relevant art will recognize that the subject matter of the present application may be practiced without one or more of the specific features or advantages of a particular embodiment. In other instances, additional features and advantages may be recognized in certain embodiments that may not be present in all embodiments of the disclosure.
These features and advantages of the present disclosure will become more fully apparent from the following description and appended claims, or may be learned by the practice of the disclosure as set forth hereinafter.
In order that the advantages of the disclosure will be readily understood, a more particular description of the disclosure briefly described above will be rendered by reference to specific embodiments that are illustrated in the appended drawings. Understanding that these drawings depict only typical embodiments of the disclosure and are not therefore to be considered to be limiting of its scope, the subject matter of the present application will be described and explained with additional specificity and detail through the use of the accompanying drawings, in which:
As depicted in
The bits 102 can range in width, height, size, and density, according to the specifics of a given application. For example, the bits 102 may be substantially cylindrical, as depicted, or the bits may be substantially rectangular, conical, elliptical, or pyramid-like. In lithographic patterning, the distance between features 102, known as the bit pitch, can be as small as 5-10 nanometers in some implementations. Density multiplication techniques, such as self assembly of block copolymers, may be used to decrease the bit pitch and therefore increase the areal bit density. Also included in
In one embodiment, the conditioning layer 105 is a component of the substrate 104. In another embodiment, the conditioning layer 105 is a substantially separate component. The conditioning layer 105 may be a single material or the conditioning layer 105 may include multiple materials and components that prepare and condition the surface of the substrate for subsequent processing and coating steps, such as additional conditioning materials, magnetic layers, and the like.
In one embodiment, the conditioning layer 105 includes at least one layer specifically configured to influence the magnetic anisotropy of a subsequently applied magnetic layer(s). For example, a nano-scale nucleation layer, such as tantalum oxide (“Ta2O5”), may constitute at least a portion of the conditioning layer 105. Ta2O5 reduces the intrinsic switching field of certain magnetic layers, such as cobalt-platinum-chromium alloy layers. The conditioning layer 105 may also include magnetic metals, magnetic alloys (not used for recording information), non-magnetic metal alloys, and the like. For example, alloys of nickel and refractory metals, such as tungsten and tantalum, may constitute a portion of the conditioning layer 105. Such alloys are well-suited for controlling the crystallographic properties and the magnetic axis orientation of subsequent magnetic recording layers.
In another embodiment, the conditioning layer 105 includes masking materials for controlling the fabrication of the magnetic recording medium. For example, silicon dioxide may be selected as a masking material in the conditioning layer and may be applied on the substrate 104 base. After the silicon oxide is applied, a layer of chromium may also be applied over the silicon oxide to form a double masking layer. Silicon dioxide and chromium are examples of “hard” masking materials that are substantially durable and resist damage or destruction when the magnetic recording medium is treated with reactive gases or chemical solvents during subsequent processing steps. These “hard” masking materials are generally used to protect the substrate while the outer-layers undergo chemical washing and etching. Accordingly, the conditioning layers, made from “hard” masking materials, provide a fabrication process with greater control in patterning and processing the substrate 104 because the conditioning layers allow the fabricator to control when a certain etching or washing process will penetrate the conditioning layer and therefore when the actual etching of the substrate 104 will occur. It is also contemplated that the conditioning layer 105 may include “soft” masking materials, such as polymer films, resist layers, etc. These “soft” conditioning layers are more susceptible to washing and etching treatments and therefore may not provide the level of protection that “hard” exterior layers can provide.
The conditioning layer 105, in one embodiment, may be a brush polymer material. Brush polymers are generally polymer chains of a certain length that are capable of adhering to a surface. Often brush polymers include both a “head” portion and a “tail” portion, where the head portion is attached to the surface and the tail portion hangs free and interacts with other nearby components. For example, poly methyl methacrylate (“PMMA”) may be used as a conditioning layer 105.
In addition to brush polymers, MAT polymers or other polymer films may be used as components of the conditioning layer 105 to coat the surface of the substrate 104. MAT materials are cross-linked polymers that have chemical surface features that allow subsequent layers of block copolymers to self-assemble into periodic alternating patterns. The selection of a proper conditioning layer 105 may be related to the patterning and density multiplication techniques that are subsequently employed. For example, patterning with electron-beam lithography may require a certain type of lithographic resist material, which may or may not adhere to certain conditioning layers 105.
Throughout the pages of the present disclosure, the term “intermediate layer” will refer to any non-magnetic material that spaces apart the multiple magnetic layers. In some embodiments, different types of intermediate layers are used to space apart different magnetic layers. For example, in one embodiment where cobalt-chromium-platinum alloys are used as the magnetic layer materials, a ruthenium-cobalt alloy may be the intermediate layer that spaces apart the two magnetic layers. Depending on the thickness and composition of the magnetic materials and the thickness and composition of the intermediate layer(s), various magnetic coupling configurations may be created in a magnetic recording medium.
First,
Throughout the present disclosure, the term “magnetic layer” refers to any ferromagnetic material that has the characteristics of a permanent magnet; i.e. a material that, in pertinent part, exhibits a net magnetic moment in the absence of an external magnetic field—i.e. a magnetic remanence. It is noted that said remanence refers to the case when the thermal stability of the material is large enough to overcome the super paramagnetic limit of the material which depends on its magnetic anisotropy and sample volume.
Magnetism is the result of moving electric charge. For example, the spin of an electron in an atom or a molecule creates a magnetic dipole. A magnetic field is created when the magnetic dipoles in a material result in a net magnitude and direction. Thus, the magnetism of a material is directly related to the magnitude, direction, inter-alignment, and interaction of the magnetic dipoles in the material. For example, when an external magnetic field is applied over a piece of iron, adjacent dipoles generally align in the direction of the magnetic field and substantially remain aligned in the same direction even after the external field is removed, thus creating a net magnetic moment.
However, in context of the subject matter of the present disclosure, macro-scale alignment of the majority of dipoles in a magnetic material is not desired. Rather, the subject matter of the present disclosure relates to the magnetic polarization states of nano-regions of magnetic material. For example, in the embodiments of a bit-patterned magnetic recording medium as depicted in
Second, the magnetic layers 202, 206 may include anisotropic magnetic materials. Magnetic anisotropy is the directional dependence of a particular magnetic material. For example, an anisotropic magnetic layer 202, 206 may energetically favor certain alignments along certain axes. Anisotropic magnetic materials are well-suited for use in the present application because magnetic recording mediums generally include directionally specific magnetization formats (e.g. longitudinal or perpendicular). Thus, in one embodiment, the magnetic dipoles in a single magnetic domain 102 need not only be aligned, but must be aligned in a certain direction so as to ensure the proper reading and writing of information. There are several factors that affect the magnetic anisotropy of a material, including the magneto-crystallinity of a material, dipole-dipole interactions, exchange interactions, and general principles of electromagnetism.
In one embodiment, as described above with reference to
Since there is no intermediate layer between the magnetic layers 202, 206 in
In one embodiment, the interaction between different magnetic layers is a balancing of magnetic forces. Generally, the most relevant magnetic forces affecting the inter-magnetic layer interactions are exchange-type interactions, magnetostatic-type interactions, and RKKY-type interactions. Generally, exchange interactions are the controlling forces affecting nearby dipoles. Exchange interactions cause the parallel alignment and interlayer coupling that is depicted and described with reference to
The top graph in
The middle graph in
The bottom graph in
The dotted lines in
In one embodiment, the intermediate layer 204 may be thick enough to space apart the multiple magnetic layers 202, 206 so that instead of being magnetically coupled (as in the embodiments depicted in
The top graph in
The middle graph in
The bottom graph in
Starting at polarization state A, where both magnetic layers have negative dipoles, a positive external magnetic field with a magnitude of about +h206 may be applied over the magnetic recording medium, causing the magnetic moment of the second anisotropic magnetic layer 206 to switch to positive polarization state B206 and the overall magnetic moment of the magnetic recording medium to switch to polarization state B. Once at state B, a positive external magnetic field with a magnitude of about h202 may be applied over the magnetic recording medium, causing the magnetic moment of the first anisotropic magnetic layer 202 to switch to positive polarization state C202 and overall magnetic moment of the magnetic recording medium to switch to polarization state C.
Once at polarization state C, where both magnetic layers have positive dipoles, a negative external magnetic field with a magnitude of about −h206 may be applied over the magnetic recording medium, causing the magnetic moment of the second anisotropic magnetic layer 206 to switch to negative polarization state A206 and the overall magnetic moment of the magnetic recording medium to switch to polarization state D. Once at state D, a negative external magnetic field with a magnitude at or just above −h202 may be applied over the magnetic recording medium, causing the magnetic moment of the first anisotropic magnetic layer 202 to switch to negative polarization state A202 and overall magnetic moment of the magnetic recording medium to switch back to polarization state A.
The dotted lines in
In one embodiment, however, while the decoupling of the magnetic layers creates more magnetic states, the magnetic states may not be stable. Magnetostatic forces are generally weaker than the coupling exchange interactions (see description of
The anti-ferromagnetic coupling intermediate layer is different than the coupling intermediate layers (see
In one embodiment, the thickness ratio of the first anisotropic magnetic layer 206 and the anti-ferromagnetic intermediate layer 204 is relevant to a stable anti-ferromagnetically coupled magnetic recording medium. In one embodiment the ratio of the thickness 512 of the first magnetic layer 202 to the thickness 514 of the anti-ferromagnetic intermediate layer 204 is in the range of between about 2:1 to 10:1. In another embodiment the ratio of the thickness 512 of the first magnetic layer 202 to the thickness 504 of the anti-ferromagnetic intermediate layer 514 is in the range of between about 5:1 to 7:1. In yet another embodiment the ratio of the thickness 602 of the first magnetic layer 512 to the thickness 514 of the anti-ferromagnetic intermediate layer 206 is about 6:1.
In one embodiment, the thickness ratio of the first anisotropic magnetic layer 206 and the second anisotropic magnetic layer 202 is relevant to a stable anti-ferromagnetically coupled magnetic recording medium. In one embodiment the ratio of the thickness 512 of the first magnetic layer 202 to the thickness 516 of the second magnetic layer 506 is in the range of between about 3:2 to 10:1. In another embodiment the ratio of the thickness 512 of the first magnetic layer 202 to the thickness 516 of the second magnetic layer 206 is in the range of between about 5:2 to 8:1. In yet another embodiment the ratio of the thickness 512 of the first magnetic layer 202 to the thickness 516 of the second magnetic layer 206 is about 4:1.
Although the anti-ferromagnetic intermediate layer is generally thicker than coupling intermediate layers and thinner than decoupling intermediate layers, other factors may affect the anti-ferromagnetic nature of the intermediate layer. For example, factors may include: the type and composition of the magnetic layer materials, the type and composition of the intermediate layer materials, the thickness of the intermediate layer, and the thickness of the magnetic layers, among others. A description of specific embodiments, including specific details relating to these factors, is included below with reference to
The top graph in
The middle graph in
The bottom graph in
Starting at polarization state A, where both magnetic layers have negative dipoles, an external magnetic field with a magnitude of about h1 may be applied over the magnetic recording medium, causing the magnetic moment of the second anisotropic magnetic layer 206 to switch to a positive polarization state and the overall magnetic moment of the magnetic recording medium to switch to polarization state B. Once at state B, an external magnetic field with a magnitude of about h2 may be applied over the magnetic recording medium, causing the magnetic moment of the first anisotropic magnetic layer 202 to switch to a positive polarization state and the overall magnetic moment of the magnetic recording medium to switch to positive polarization state C.
Once at polarization state C, where both magnetic layers have positive dipoles, an external magnetic field with a magnitude of about h3 may be applied over the magnetic recording medium, causing the magnetic moment of the second anisotropic magnetic layer 206 to switch to a negative polarization state and the overall magnetic moment of the magnetic recording medium to switch to polarization state D. Once at state D, an external magnetic field with a magnitude of about h4 may be applied over the magnetic recording medium, causing the magnetic moment of the first anisotropic magnetic layer 202 to switch to a negative polarization state and the overall magnetic moment of the magnetic recording medium to switch back to negative polarization state A.
The dotted lines in
RKKY interactions involve indirect exchange interactions. As described above, exchange interactions are generally responsible for coupling magnetic layers so that the dipoles in each layer have the same alignment and polarization state. These exchange interactions occur as valence electrons from the magnetic layers interact with each other. It is anticipated that, when magnetic layers of certain compositions and thicknesses are spaced apart by a non-magnetic layer of a certain composition and thickness, an indirect exchange interaction occurs where one of the “conducting” electrons of the magnetic layers functions as an interaction point about which each magnetic layer interacts. In other words, instead of the electrons of the magnetic layers interacting directly with each other across a coupling layer, a conducting electron(s) essentially positions itself in the anti-ferromagnetic intermediate layer between the magnetic layers and functions as an intermediary interaction point. Thus, these RKKY interactions enable anti-ferromagnetic coupling between the magnetic layers.
In such anti-ferromagnetically coupled magnetic layers, there are no magnetostatic interactions and therefore the stability of the polarization states, wherein the constituent magnetic layers have opposing magnetizations, is greatly stabilized. Furthermore, the signal amplitude (information content) arising from said anti-ferromagnetically coupled states is readily tuned by judicious selection of the magnetic moment and thickness of the constituent magnetic layers. Thereby readily permitting not only the signal amplitude corresponding to the magnetic states but also to the applied field required to access or write said anti-ferromagnetically coupled states.
The method also includes applying 604 a conditioning layer over the substrate. The conditioning layer, as described above with reference to
The method further includes applying 606 a first anisotropic magnetic layer over the conditioning layer. The composition and thickness of the first anisotropic magnetic layer, according to one embodiment, are important for achieving the desired anti-ferromagnetic coupling. The method also includes applying 608 an anti-ferromagnetic coupling layer over the first magnetic layer. The composition and thickness of the anti-ferromagnetic coupling layer, according to one embodiment, are important for achieving anti-ferromagnetic coupling.
The method finally includes applying 610 a second anisotropic magnetic layer over the anti-ferromagnetic coupling layer. Once again, the composition and thickness of the first anisotropic magnetic layer, according to one embodiment, are important for achieving the desired anti-ferromagnetic coupling. The multiple magnetic layers, as described above with reference to
The following examples are specific implementations of magnetic recording mediums according to the subject matter and methods generally disclosed herein. All of the following examples include substantially the same substrate 104 and conditioning layer 105. A glass substrate 104 that was coated with a conditioning layer 105. The conditioning layer included a 20 nanometer (“nm”) nickel-tantalum layer on the glass, a 5 nm nickel-tungsten layer coating the nickel-tantalum layer, an 18 nm ruthenium layer coating the nickel-tungsten layer, and a 0.25 nm tantalum-oxide nucleation layer coating the ruthenium layer.
The magnetic recording medium included a first magnetic layer 202 applied over the conditioning layer 105 as described above, wherein the first magnetic layer 202 was an 8 nmCoCr7Pt25 layer. On top of the first magnetic layer 202 was a 1 nm ruthenium-cobalt intermediate layer 204. On top of the intermediate layer 204 was a 3 nm second magnetic layer that comprised CoCr18Pt12. The magnetic layers were magnetically coupled and a hysteresis analysis only showed two magnetic states.
The magnetic recording medium included a first magnetic layer 202 applied over the conditioning layer 105 as described above, wherein the first magnetic layer 202 was an 8 nmCoCr7Pt25 layer. On top of the first magnetic layer 202 was a 4 nm ruthenium-cobalt intermediate layer 204. On top of the intermediate layer 204 was a 3 nm second magnetic layer that comprised CoCr18Pt12. The magnetic layers were magnetically decoupled and the hysteresis analysis showed four magnetic states. The four magnetic states, however, were unstable due to magnetostatic interactions.
The magnetic recording medium included a first magnetic layer 202 applied over the conditioning layer 105 as described above, wherein the first magnetic layer 202 was an 8 nmCoCr7Pt25 layer. On top of the first magnetic layer 202 was a 1.5 nm ruthenium-cobalt intermediate layer 204. On top of the intermediate layer 204 was a 3 nm second magnetic layer that comprised CoCr18Pt12. The magnetic layers were anti-ferromagnetically coupled and the hysteresis loop showed four stable magnetic states.
Reference throughout this specification to “one embodiment,” “an embodiment,” or similar language means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the present disclosure. Thus, appearances of the phrases “in one embodiment,” “in an embodiment,” and similar language throughout this specification may, but do not necessarily, all refer to the same embodiment.
Furthermore, the described features, structures, or characteristics of the disclosure may be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided. One skilled in the relevant art will recognize, however, that the subject matter of the present application may be practiced without one or more of the specific details, or with other methods, components, materials, and so forth. In other instances, well-known structures, materials, or operations are not shown or described in detail to avoid obscuring aspects of the disclosure.
The subject matter of the present disclosure may be embodied in other specific forms without departing from its spirit or essential characteristics. The described embodiments are to be considered in all respects only as illustrative and not restrictive. The scope of the disclosure is, therefore, indicated by the appended claims rather than by the foregoing description. All changes which come within the meaning and range of equivalency of the claims are to be embraced within their scope.