Magnetic seed layer used with an unbalanced soft underlayer

Information

  • Patent Grant
  • 9431045
  • Patent Number
    9,431,045
  • Date Filed
    Friday, April 24, 2015
    9 years ago
  • Date Issued
    Tuesday, August 30, 2016
    8 years ago
Abstract
A magnetic media is described including a substrate, an unbalanced soft under layer (SUL), a magnetic seed layer, which may consist of one or more of NiWxCoy, NiWxCoyAlz, NiVaCob, NiVaCobAlc, NiWxVaCob, and NiWxVaFeb, and a magnetic recording layer.
Description
BACKGROUND


FIG. 1 is a schematic illustration of a magnetic recording device, such as an HDD 100, according to one embodiment of the present disclosure. The HDD 100 includes at least one magnetic recording medium, such as a disk 102 that is supported on a spindle 104. A motor causes the spindle 104, and hence the disk 102, to rotate. One or more magnetic heads 106 are mounted on a slider 108 and move over the disks 102 to read and write information from and to the disks 102. The heads 106 ride on an air bearing in close proximity to the disks 102 during read and write operations. The slider 108 is coupled to an actuator 110 by a suspension 112. The suspension 112 provides a slight spring force which biases the slider 108 towards the disk surface. Each actuator 110 is attached to an actuator means 114 that controls the movement of the head 106 relative to the disk 102. A HDD ramp 116 is positioned such that when the actuator 110 rotates the slider 108 and head 106 away from the disk 102, the heads and slider can “park” on the HDD ramp 116.


The disk 102 is formed on either a glass or an aluminum alloy substrate depending on the particular design requirements of the device. The disk 102 (also referred to as the media) is configured to be usable at high recording densities, and in some embodiments, to be used in the Perpendicular Magnetic Recording (PMR). The media thus stores data in which the bits of magnetic moment orient in substantially perpendicular direction to the surface of the disk 102.



FIG. 2 depicts a conventional magnetic recording media with a non-magnetic seed layer. As shown in FIG. 2, the magnetic media 102 may generally include some or all of the constituent layers shown in FIG. 2, including a substrate 202, a bottom soft magnetic underlayer (SUL) 204 and a top SUL 208 separated by an AFC coupling layer 206, a non-magnetic seed layer 210, an intermediate layer 212, a magnetic recording layer 214, a cap layer 216 and an overcoat layer 218.


The top SUL layer 208 and the bottom SUL layer 204 are magnetically coupled through the antiferromagnetic coupling layer (AFC) 206. The bottom SUL 204, AFC coupling layer 206 and top SUL 208 are also referred to as the SUL structure 220. The recording layer 214 and the soft under layers 204 and 208 provide a magnetic circuit that allows magnetic flux to travel from the magnetic recording head 106 through the magnetic recording layer 214 and the soft underlayers 204 and 208, back to the magnetic recording head, thus forming a loop. Additionally, the SUL layers 204 & 208 allow for increasing conductance of magnetic flux through the magnetic media 102 and therefore improve writabilty of the magnetic media 102. However, the writabilty of the magnetic media 102 further improves if the distance between the magnetic recording head 106 and the top SUL 208 is as small as possible.





BRIEF DESCRIPTION OF THE DRAWINGS


FIG. 1 depicts components of a hard disk drive.



FIG. 2 depicts the structure of a conventional magnetic media with an unbalanced SUL and a non-magnetic seed layer.



FIG. 3 depicts the structure of a magnetic media with an unbalanced SUL and a magnetic seed layer according to an exemplary embodiment.



FIG. 4 depicts another view of the magnetic media with an unbalanced SUL and a magnetic seed layer according to an exemplary embodiment.



FIG. 5 illustrates the SNR and Overwrite properties of a magnetic media according to an exemplary embodiment.



FIG. 6 illustrates a method of making a a magnetic media according to an exemplary embodiment.





DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Aspects of the present invention provide magnetic seed layers in a magnetic recording media. Various aspects of the magnetic recording media according to the present invention will now be described.



FIG. 3 depicts the structure of magnetic media with an unbalanced SUL and a magnetic seed layer according an exemplary embodiment. The magnetic media 300 may be used in the disk drive depicted in FIG. 1. For clarity, figures are not to scale. For simplicity not all portions of the disk drive, recording head and the media are shown. In addition, although the disk drive is depicted in the context of particular components other and/or different components may be used. For example, circuitry used to drive and control various portions of the disk drive is not shown. For simplicity, only single components are shown. However, multiples of each component and/or its sub-component might be used.


A magnetic media 300 according to exemplary embodiments may be formed over a substrate made of aluminum alloy or glass 302. The media 300 may include a bottom SUL layer 304 deposited on the substrate. In exemplary embodiments, a top SUL layer 308 located above the bottom SUL layer 304, and separated by an antiferromagnetic coupling (AFC) layer 306 that couples the bottom 304 and top SUL 308 layers, forming the SUL structure 320. In exemplary embodiments, the bottom SUL 304 thickness may be greater than the thickness of the top SUL 308 layer. In these embodiments, the SUL may be unbalanced with respect to the AFC layer 306, meaning there is more magnetic material located below the AFC layer 306 than above the AFC layer. In some embodiments the AFC 306 layer may be Ruthenium. Stated differently, the thicknesses and/or magnetic moments of the bottom SUL 304 and top SUL 308 layers may not be the same.


In exemplary embodiments, the media 300 may include a magnetic seed layer 310 located on the top SUL 308. The magnetic seed layer 310 may have a thickness of at least three nanometers and not more than seven nanometers. The magnetic seed layer 310 may have a crystalline structure configured to facilitate growth and orientation of the magnetic recording layer 314. For example, the magnetic seed layer 310, along with a nonmagnetic seed layer 312 (also referred to as an intermediate layer), may be used to promote the columnar grain growth along the easy axis, promote the grain size, and provide grain segregation in the magnetic recording layer 314. In some embodiments, the intermediate layer 312 has a thickness of at least six and not more than fifteen nanometers. The magnetic seed layer 310 includes Nickel (Ni) alloyed with a nonmagnetic material and at least one other magnetic material, such as Fe and/or Co. For example, in one exemplary embodiment, Ni is alloyed with Tungsten (W) and/or Vanadium (V) in addition to Iron (Fe), Cobalt (Co) or Aluminum (Al). In some embodiments, the magnetic seed layer 310 may include at least one of NiWxFey, NiWxCoy and NiWxCoyAlz, where x is between three to seven atomic percent, y and z may be between fifteen and to forty atomic percent, and the remainder of the composition consists of Nickel. In alternative embodiments, the magnetic seed layer 310 may include at least, NiVaCob, NiWxVaCoy, or NiWxVaFeb alloys, where x and a may be at least three atomic percent but not more than seven atomic percent, y and b may be at least fifteen atomic percent and not more than forty atomic percent, c may be between 0.5 and 2 atomic percent, and the remainder of the composition would consist of Nickel. In alternative embodiments of NiWxVaCoy, or NiWxVaFeb alloys, the media performance may be optimized by having “x” and “a” equal percent, and/or y and b equal.


In some embodiments, the media 300 may include an intermediate layer 312. As previously stated, the intermediate layer acts as a non-magnetic seed layer above the magnetic seed layer 310, and may help promote the easy axis for the columnar grain growth as well as the grain size of the magnetic layer 314.


A magnetic recording layer 314 (or magnetic layer) 314 includes magnetic bits that are used by the magnetic recording head to store data on the magnetic media. The recording layer has high coercivity to provide more magnetic and thermal stability for the recorded bits. In some embodiments, the magnetic recording layer 314 may include FePt alloys or FePtX alloys.


The magnetic media 300 may have improved performance. The magnetic seed layer 310 and nonmagnetic interlayer 312 may provide the desired growth template to control the grain size, variation in grain size, crystal orientation dispersion and easy axis of the magnetic layer 314. Thus, the signal to noise ratio of the media 300 may be improved. Because the magnetic seed layer 310 is magnetic instead of nonmagnetic, coupling between the magnetic layer 314 and the soft underlayer structure 320 may be improved. Stated differently, the space between the magnetic layer 314 and a magnetic layer that is magnetically coupled with the soft underlayer structure 320 may be reduced over a media (102) in which a nonmagnetic seed layer 210 (see FIG. 2) is used in lieu of the magnetic seed layer 310 (see FIG. 3). The magnetic seed layer 310 may, therefore, function magnetically as part of the soft underlayer (bottom SUL 304 & top SUL 308) because the magnetic seed layer 310 is magnetically coupled with the top SUL 308 which is coupled to the bottom SUL 304. Thus, use of the magnetic seed layer 310 may improve writability. Furthermore, the use of a magnetic seed layer above the top SUL 308 allows for a thinner top SUL layer 308. The top SUL 308 may be decreased in thickness because this layer is magnetically coupled with the magnetic seed layer 310. Thus, the effective magnetic thickness of the soft underlayer structure 320 (bottom SUL 304 and top SUL 308) may be maintained or increased while decreasing/without increasing the physical thickness of the soft underlayer 320. In some embodiments, the total (effective) magnetic thickness of the top SUL 308 and magnetic seed layer 312 match the magnetic thickness of the bottom SUL 304. In some embodiments, the moments and/or permeability of the combination of the top SUL 308 and magnetic seed layer 312 match that of the bottom SUL 304. Thus, writability may be improved without significantly sacrificing track width. The distance between the top of the top SUL 308 and the magnetic head 106 used in conjunction with the media 300 may be decreased. In some cases, the decrease may be equal to the thickness of the magnetic seed layer 312. Performance of the magnetic recording media 300 at higher densities may be improved.


In exemplary embodiments the media 300 may include a capping layer 316 and a protective carbon overcoat layer 318. The capping layer 316 may help improve the magnetic performance of the recording layer 314. The carbon overcoat layer 318 is used to provide wear protection for the media 300. In alternative embodiments, an optional lubrication layer 319 may be placed on the COO to help the recording head 106 glide more easily on the media 300.



FIG. 4 depicts another view of the magnetic media with an unbalanced SUL and a magnetic seed layer according to an exemplary embodiment. The media depicted in FIG. 4 may be used in the disk drive of FIG. 1. For simplicity not all portions of the magnetic media 300 are shown. In addition, although the magnetic media 300 is depicted in the context of particular components other and/or different components may be used. A magnetic media 300 according to exemplary embodiments may be formed over a substrate made of aluminum alloy or glass 402. The media 300 may include a bottom SUL layer 404 deposited on the substrate. In exemplary embodiments, a top SUL layer 408 located above the bottom SUL layer 404, and separated by an antiferromagnetic coupling (AFC) layer 406 that couples the bottom 404 and top SUL 408 layers. In exemplary embodiments, the bottom SUL 404 thickness is greater than the thickness of the top SUL 408. In these embodiments, the SUL structure 410 is considered unbalanced because there is more magnetic material (bottom SUL 404) located below the AFC layer 406 than above the AFC layer (top SUL 408). Stated differently, the thicknesses and/or magnetic moments of the bottom SUL 404 and top SUL 408 layers may not be the same. In some embodiments the thickness of the top SUL 408 may be different than the thickness of the bottom SUL 404.


In exemplary embodiments, the media 300 includes a magnetic seed layer 416 located above the top SUL 408. The thickness of the magnetic seed layer 416 may be between 3 and 7 nanometers. The magnetic seed layer 410 has a crystal structure configured to facilitate growth of the magnetic recording layer 428. For example, the magnetic seed layer 416, along with nonmagnetic intermediate layer 422 may be used to promote the easy axis for the columnar grain growth as well as the grain size of the magnetic layer 428. In some embodiments, the intermediate layer 422 has a thickness of at least six and not more than fifteen nanometers. The magnetic seed layer 416 includes Ni alloyed with a nonmagnetic material and with at least one other magnetic material, such as Fe and/or Co. For example, Ni alloyed with W or V and with Fe or Co may be used. In at least some embodiments, the magnetic seed layer 416 includes at least one of NiWxFey, NiWxCoy and NiWxCoyAlz, where x may be at least three atomic percent and not more than seven atomic percent, y, and z may be at least fifteen atomic percent and not more than forty atomic percent. In alternative embodiments, NiVaCob, NiVaCobAlc, NiWxVaCob, or NiWxVaFeb where x may be at least three atomic percent and not more than seven atomic percent, y may be at least fifteen atomic percent and not more than forty atomic percent, a may be between five to fifteen atomic percent, and b may be between fifteen to forty atomic percent, c may be between 0.5 and 2 atomic percent, and the remainder of the composition would consist of Nickel. In exemplary embodiments of NiWxVaCoy, or NiWxVaFeb alloys, when x and a atomic are equal, the media performance is optimized.


In some embodiments, the media 300 may include an intermediate layer 422. As previously stated, the intermediate layer acts as a non-magnetic seed layer above the magnetic seed layer 416, and it helps promote the easy axis for the columnar grain growth as well as the grain size of the magnetic layer 428.


The magnetic recording layer 428 (also referred to as magnetic layer) 428 stores the magnetic bits used to store data on the magnetic media 300. In some embodiments, the magnetic recording layer 428 may include FePt alloys or FePtX alloys.


The magnetic media 300 may have improved performance. As depicted in the FIG. 4, the magnetic seed layer 416 and nonmagnetic interlayer 422 (shown as the seed layer structure 418) may provide the desired growth template to control the grain size (magnetic layer grains 426), variation in grain size, crystal orientation dispersion and easy axis of the magnetic layer 428. Thus, the signal to noise ratio of the media 300 may be improved. Because the magnetic seed layer 416 is magnetic instead of nonmagnetic, coupling between the magnetic layer 428 and the soft underlayer structure 410 may be improved. Stated differently, the space 418 between the magnetic layer 428 and the magnetic seed layer 416 that is magnetically coupled with the soft underlayer structure 410 may be reduced when compared to a conventional magnetic media structure (102) in which a nonmagnetic seed layer 210 (see FIG. 1) may be used in lieu of the magnetic seed layer 416 (see FIG. 4). The magnetic seed layer 410 may, therefore, function magnetically as part of the soft underlayer (bottom SUL 404 & top SUL 408) because the magnetic seed layer 416 is magnetically coupled with the top SUL 408 which is coupled to the bottom SUL 404 through the AFC layer 406. Thus, use of the magnetic seed layer 416 may improve writability. Furthermore, the use of a magnetic seed layer above the top SUL 408 allows for a thinner top SUL layer 408. In some embodiments, the total (effective) magnetic thickness of the top SUL 408 and magnetic seed layer 416 match the magnetic thickness of the bottom SUL 404. In some embodiments, the moments and/or permeability of the combination of the top SUL 408 and magnetic seed layer 416 match that of the bottom SUL 404. The top SUL 408 may be decreased in thickness because this layer is magnetically coupled with the magnetic seed layer 416. Thus, the effective magnetic thickness of the soft underlayer structure 410 may be maintained or increased without increasing or even decreasing the physical thickness of the soft underlayer structure 410. Thus, writability of the magnetic media 300 may be improved without significantly sacrificing track width. The distance between the top of the top SUL 408 and the magnetic head 106 used in conjunction with the media 400 may be decreased. In some cases, the decrease may be equal to the thickness of the magnetic seed layer 416. Performance of the magnetic recording media 300 at higher densities may also be improved. In exemplary embodiments the media 300 may include an optional capping layer (not shown), an optional overcoat layer 430, and an optional lubrication layer 432 that may reside on the overcoat layer.



FIG. 5 illustrates the SNR and Overwrite properties of a magnetic media according to an exemplary embodiment. As depicted in FIG. 5, both the signal to noise ratio (SNR) and the overwrite property of the magnetic media 300 may improve with the use of a magnetic seed layer 416 above the soft underlayer structure 410. This may be partially due to the fact that the use of a magnetic seed layer 416 allows for an underlayer structure 410 that is thinner than a conventional media where a non-magnetic seed layer was used, as shown in FIG. 2. The curve 502 shows the SNR vs. overwrite signal for a recording media with a non-magnetic seed layer as shown in FIG. 2. The curve 504 shows the SNR vs. overwrite signal for one embodiment of a recording media with a magnetic seed layer as depicted in FIG. 3. Other embodiments may have different curves. Additionally, a more uniform and columnar growth of the magnetic grains of the recording layer 428 promoted by the use of the magnetic seed layer 416 and intermediate layer 422 provides for a lower SNR value for the magnetic media 300. Furthermore, the overwrite property of the magnetic media 300 may be improved over the conventional media 102 without a magnetic seed layer 416. Overwrite for the magnetic media is determined by measuring multiple signal read backs from the recording media 300 after multiple writings and rewritings. In some embodiments, hundreds of writing, erasing, rewriting and reading operations are performed to calculate the overwrite value for the magnetic media 300. In some embodiments, an overwrite (OW) of the 300 media is in the range of 25-45 db.



FIG. 6 illustrates a method of making a magnetic media according to an exemplary embodiment. In exemplary embodiments, in operation 602, a media substrate is provided. In some embodiments, the substrate may be glass. In other embodiments the substrate may be made of aluminum alloys.


In operation 604, a first unbalanced SUL is provided on the substrate. As previously described, the unbalanced SUL may comprise of a thicker bottom SUL layer antiferromagnetically coupled to a thinner top SUL layer though an AFC layer.


In operation 606, a magnetic seed layer is provided on the SUL layer. The magnetic seed layer may couple to the unbalanced SUL. In some embodiments, the magnetic seed layer may be designed to magnetically balance the SUL.


In operation 608, an interlayer or a non-magnetic seed layer may be provided. The magnetic seed layer and the non-magnetic interlayer may help promote a desired growth template to control the grain size, variation in grain size, crystal orientation dispersion and easy axis of a magnetic recording layer. Thus, the signal to noise ratio of the media 300 may be improved.


In operation 610, a magnetic recording layer may be provided. The magnetic recording layer may include FePt alloys or FePtX alloys.


In operation 612, an optional capping layer, carbon overcoat protective layer and lubrication layer may also be provided.


In the foregoing specification, the invention is described with reference to specific exemplary embodiments, but those skilled in the art will recognize that the invention is not limited to those. It is contemplated that various features and aspects of the invention may be used individually or jointly and possibly in a different environment or application. The specification and drawings are, accordingly, to be regarded as illustrative and exemplary rather than restrictive. For example, the word “preferably,” and the phrase “preferably but not necessarily,” are used synonymously herein to consistently include the meaning of “not necessarily” or optionally. The drawings are not necessarily to scale. “Comprising,” “including,” and “having,” are intended to be open-ended terms.

Claims
  • 1. A magnetic media comprising: a substrate;an unbalanced soft under layer (SUL) including a top SUL;a magnetic seed layer consisting of a material selected from a first alloy and a second alloy, the first alloy including at least one of NiVaCob, NiVaCobAlc, NiWxVaCob and NiWxVaFeb, the second alloy including at least one of NiWxFey, NiWxCoy and NiWxCoyAlz, where x is between 3 and 7 atomic percent, y and z are between 15 and 40 atomic percent, a is between 5 and 15 atomic percent, b is between 15 to 40 atomic percent, and c is between 0.5 to 2 atomic percent; anda magnetic recording layer.
  • 2. The magnetic media of claim 1 wherein the thickness of the magnetic seed layer is between 3 to 7 nanometers.
  • 3. The magnetic media of claim 2 wherein the spacing between a top of the SUL and a magnetic head is lessened by the thickness of the seed layer.
  • 4. The magnetic media of claim 1 wherein the unbalanced SUL further comprises: a bottom SUL separated from the top SUL by an antiferromagnetic coupling (AFC) layer.
  • 5. The magnetic media of claim 4 wherein the top SUL and the magnetic seed layer are antiferromagnetically coupled with the bottom SUL.
  • 6. The magnetic media of claim 4 wherein the AFC layer is ruthenium or Ru alloy.
  • 7. The magnetic media of claim 4 wherein a magnetic thickness and a first moment of the bottom SUL matches a total magnetic thickness and a second moment of the top SUL and the seed layer.
  • 8. The magnetic media of claim 1 wherein an overwrite (OW) of the magnetic media is in the range of 25-45 db.
  • 9. The magnetic media of claim 1 further comprising: an intermediate layer overlying the seed layer is a Ru or Ru alloy and has a thickness of at least six nanometers and not more than fifteen nanometers;a cap layer overlying the magnetic recording layer;a carbon overcoat layer on the cap layer; anda lubrication layer on the overcoat layer.
  • 10. The magnetic media of claim 9 wherein the thickness of the seed layer is between 3 to 7 nanometer.
  • 11. A disk drive comprising: a slider including a magnetic head for reading and writing to a magnetic media;the magnetic media comprising: a substrate;an unbalanced soft under layer (SUL) including a top SUL;a magnetic seed layer consisting of a material selected from a first alloy and a second alloy, the first alloy including at least one of NiVaCob, NiVaCobAlc, NiWxVaCob and NiWxVaFeb, the second alloy including at least one of NiWxFey, NiWxCoy and NiWxCoyAlz, where x is between 3 and 7 atomic percent, y and z are between 15 and 40 atomic percent, a is between 5 and 15 atomic percent, b is between 15 to 40 atomic percent, and c is between 0.5 to 2 atomic percent; anda magnetic recording layer.
  • 12. The disk drive of claim 11 wherein the unbalanced SUL further comprises: a bottom SUL separated from the top SUL by an antiferromagnetic coupling (AFC) layer.
  • 13. The disk drive of claim 12 wherein a magnetic thickness and a first permeability of the bottom SUL matches a total magnetic thickness and a second permeability of the top SUL and the seed layer.
  • 14. The disk drive of claim 12 wherein a spacing between the top of the top SUL and a magnetic head is lessened by the thickness of the magnetic seed layer.
  • 15. The disk drive of claim 11 wherein an overwrite (OW) of the magnetic media is in the range of 25-45 db.
  • 16. The disk drive of claim 11 further comprising: an intermediate layer overlying the magnetic seed layer;a cap layer overlying the magnetic recording layer;a carbon overcoat layer on the cap layer; anda lubrication layer on the carbon overcoat layer.
  • 17. A method for providing a magnetic media having an unbalanced Soft Under Layer (SUL) comprising: providing a substrate;providing an unbalanced soft under layer (SUL);providing a magnetic seed layer consisting of a material selected from a first alloy and a second alloy, the first alloy including at least one of NiVaCob, NiVaCobAlc, NiWxVaCob and NiWxVaFeb, the second alloy including at least one of NiWxFey, NiWxCoy and NiWxCoyAlz, where x is between 3 and 7 atomic percent, y and z are between 15 and 40 atomic percent, a is between 5 and 15 atomic percent, b is between 15 to 40 atomic percent, and c is between 0.5 to 2 atomic percent; andproviding a magnetic recording layer.
  • 18. The method of claim 17 wherein the unbalanced SUL further comprises: of a bottom SUL separated from a top SUL by an antiferromagnetic coupling (AFC) layer.
  • 19. The method of claim 18 further comprising: matching the magnetic thickness of the bottom SUL to that of the total magnetic thickness of the top SUL and the seed layer by adjusting a physical thickness of the top SUL or the magnetic seed layer.
CROSS-REFERENCE TO RELATED APPLICATION

This application claims the benefit of U.S. Provisional Application Ser. No. 61/984,615, entitled “MAGNETIC SEED LAYER HAVING AN UNBALANCED SOFT UNDERLAYER” and filed on Apr. 25, 2014, which is expressly incorporated by reference herein in its entirety.

US Referenced Citations (335)
Number Name Date Kind
6013161 Chen et al. Jan 2000 A
6063248 Bourez et al. May 2000 A
6068891 O'Dell et al. May 2000 A
6086730 Liu et al. Jul 2000 A
6099981 Nishimori Aug 2000 A
6103404 Ross et al. Aug 2000 A
6117499 Wong et al. Sep 2000 A
6136403 Prabhakara et al. Oct 2000 A
6143375 Ross et al. Nov 2000 A
6145849 Bae et al. Nov 2000 A
6146737 Malhotra et al. Nov 2000 A
6149696 Jia Nov 2000 A
6150015 Bertero et al. Nov 2000 A
6156404 Ross et al. Dec 2000 A
6159076 Sun et al. Dec 2000 A
6164118 Suzuki et al. Dec 2000 A
6200441 Gornicki et al. Mar 2001 B1
6204995 Hokkyo et al. Mar 2001 B1
6206765 Sanders et al. Mar 2001 B1
6210819 Lal et al. Apr 2001 B1
6216709 Fung et al. Apr 2001 B1
6221119 Homola Apr 2001 B1
6248395 Homola et al. Jun 2001 B1
6261681 Suekane et al. Jul 2001 B1
6270885 Hokkyo et al. Aug 2001 B1
6274063 Li et al. Aug 2001 B1
6283838 Blake et al. Sep 2001 B1
6287429 Moroishi et al. Sep 2001 B1
6290573 Suzuki Sep 2001 B1
6299947 Suzuki et al. Oct 2001 B1
6303217 Malhotra et al. Oct 2001 B1
6309765 Suekane et al. Oct 2001 B1
6358636 Yang et al. Mar 2002 B1
6362452 Suzuki et al. Mar 2002 B1
6363599 Bajorek Apr 2002 B1
6365012 Sato et al. Apr 2002 B1
6381090 Suzuki et al. Apr 2002 B1
6381092 Suzuki Apr 2002 B1
6387483 Hokkyo et al. May 2002 B1
6391213 Homola May 2002 B1
6395349 Salamon May 2002 B1
6403919 Salamon Jun 2002 B1
6408677 Suzuki Jun 2002 B1
6426157 Hokkyo et al. Jul 2002 B1
6429984 Alex Aug 2002 B1
6482330 Bajorek Nov 2002 B1
6482505 Bertero et al. Nov 2002 B1
6500567 Bertero et al. Dec 2002 B1
6528124 Nguyen Mar 2003 B1
6548821 Treves et al. Apr 2003 B1
6552871 Suzuki et al. Apr 2003 B2
6565719 Lairson et al. May 2003 B1
6566674 Treves et al. May 2003 B1
6571806 Rosano et al. Jun 2003 B2
6628466 Alex Sep 2003 B2
6664503 Hsieh et al. Dec 2003 B1
6670055 Tomiyasu et al. Dec 2003 B2
6682807 Lairson et al. Jan 2004 B2
6683754 Suzuki et al. Jan 2004 B2
6730420 Bertero et al. May 2004 B1
6743528 Suekane et al. Jun 2004 B2
6759138 Tomiyasu et al. Jul 2004 B2
6778353 Harper Aug 2004 B1
6795274 Hsieh et al. Sep 2004 B1
6855232 Jairson et al. Feb 2005 B2
6857937 Bajorek Feb 2005 B2
6893748 Bertero et al. May 2005 B2
6899959 Bertero et al. May 2005 B2
6916558 Umezawa et al. Jul 2005 B2
6939120 Harper Sep 2005 B1
6946191 Morikawa et al. Sep 2005 B2
6967798 Homola et al. Nov 2005 B2
6972135 Homola Dec 2005 B2
7004827 Suzuki et al. Feb 2006 B1
7006323 Suzuki Feb 2006 B1
7016154 Nishihira Mar 2006 B2
7019924 McNeil et al. Mar 2006 B2
7045215 Shimokawa May 2006 B2
7070870 Bertero et al. Jul 2006 B2
7090934 Hokkyo et al. Aug 2006 B2
7099112 Harper Aug 2006 B1
7105241 Shimokawa et al. Sep 2006 B2
7119990 Bajorek et al. Oct 2006 B2
7147790 Wachenschwanz et al. Dec 2006 B2
7161753 Wachenschwanz et al. Jan 2007 B2
7166319 Ishiyama Jan 2007 B2
7166374 Suekane et al. Jan 2007 B2
7169487 Kawai et al. Jan 2007 B2
7174775 Ishiyama Feb 2007 B2
7179549 Malhotra et al. Feb 2007 B2
7184139 Treves et al. Feb 2007 B2
7196860 Alex Mar 2007 B2
7199977 Suzuki et al. Apr 2007 B2
7208236 Morikawa et al. Apr 2007 B2
7220500 Tomiyasu et al. May 2007 B1
7229266 Harper Jun 2007 B2
7239970 Treves et al. Jul 2007 B2
7252897 Shimokawa et al. Aug 2007 B2
7277254 Shimokawa et al. Oct 2007 B2
7281920 Homola et al. Oct 2007 B2
7292329 Treves et al. Nov 2007 B2
7301726 Suzuki Nov 2007 B1
7302148 Treves et al. Nov 2007 B2
7305119 Treves et al. Dec 2007 B2
7314404 Singh et al. Jan 2008 B2
7320584 Harper et al. Jan 2008 B1
7329114 Harper et al. Feb 2008 B2
7375362 Treves et al. May 2008 B2
7420886 Tomiyasu et al. Sep 2008 B2
7425719 Treves et al. Sep 2008 B2
7471484 Wachenschwanz et al. Dec 2008 B2
7498062 Calcaterra et al. Mar 2009 B2
7531485 Hara et al. May 2009 B2
7537846 Ishiyama et al. May 2009 B2
7549209 Wachenschwanz et al. Jun 2009 B2
7569490 Staud Aug 2009 B2
7597792 Homola et al. Oct 2009 B2
7597973 Ishiyama Oct 2009 B2
7608193 Wachenschwanz et al. Oct 2009 B2
7632087 Homola Dec 2009 B2
7632580 Ikeda et al. Dec 2009 B2
7656615 Wachenschwanz et al. Feb 2010 B2
7682546 Harper Mar 2010 B2
7684152 Suzuki et al. Mar 2010 B2
7686606 Harper et al. Mar 2010 B2
7686991 Harper Mar 2010 B2
7695833 Ishiyama Apr 2010 B2
7722968 Ishiyama May 2010 B2
7733605 Suzuki et al. Jun 2010 B2
7736767 Bian et al. Jun 2010 B2
7736768 Ishiyama Jun 2010 B2
7755861 Li et al. Jul 2010 B1
7758732 Calcaterra et al. Jul 2010 B1
7824785 Inamura et al. Nov 2010 B2
7833639 Sonobe et al. Nov 2010 B2
7833641 Tomiyasu et al. Nov 2010 B2
7910159 Jung Mar 2011 B2
7911736 Bajorek Mar 2011 B2
7924519 Lambert Apr 2011 B2
7944165 O'Dell May 2011 B1
7944643 Jiang et al. May 2011 B1
7955723 Umezawa et al. Jun 2011 B2
7983003 Sonobe et al. Jul 2011 B2
7993497 Moroishi et al. Aug 2011 B2
7993765 Kim et al. Aug 2011 B2
7998912 Chen et al. Aug 2011 B2
8002901 Chen et al. Aug 2011 B1
8003237 Sonobe et al. Aug 2011 B2
8012920 Shimokawa Sep 2011 B2
8038863 Homola Oct 2011 B2
8057926 Ayama et al. Nov 2011 B2
8062778 Suzuki et al. Nov 2011 B2
8064156 Suzuki et al. Nov 2011 B1
8076013 Sonobe et al. Dec 2011 B2
8092931 Ishiyama et al. Jan 2012 B2
8100685 Harper et al. Jan 2012 B1
8101054 Chen et al. Jan 2012 B2
8125723 Nichols et al. Feb 2012 B1
8125724 Nichols et al. Feb 2012 B1
8137517 Bourez Mar 2012 B1
8142916 Umezawa et al. Mar 2012 B2
8163093 Chen et al. Apr 2012 B1
8171949 Lund et al. May 2012 B1
8173282 Sun et al. May 2012 B1
8178480 Hamakubo et al. May 2012 B2
8206789 Suzuki Jun 2012 B2
8218260 Iamratanakul et al. Jul 2012 B2
8247095 Champion et al. Aug 2012 B2
8257783 Suzuki et al. Sep 2012 B2
8298609 Liew et al. Oct 2012 B1
8298689 Sonobe et al. Oct 2012 B2
8309239 Umezawa et al. Nov 2012 B2
8316668 Chan et al. Nov 2012 B1
8331056 O'Dell Dec 2012 B2
8354618 Chen et al. Jan 2013 B1
8367228 Sonobe et al. Feb 2013 B2
8383209 Ayama Feb 2013 B2
8394243 Jung et al. Mar 2013 B1
8397751 Chan et al. Mar 2013 B1
8399809 Bourez Mar 2013 B1
8402638 Treves et al. Mar 2013 B1
8404056 Chen et al. Mar 2013 B1
8404369 Ruffini et al. Mar 2013 B2
8404370 Sato et al. Mar 2013 B2
8406918 Tan et al. Mar 2013 B2
8414966 Yasumori et al. Apr 2013 B2
8425975 Ishiyama Apr 2013 B2
8431257 Kim et al. Apr 2013 B2
8431258 Onoue et al. Apr 2013 B2
8453315 Kajiwara et al. Jun 2013 B2
8488276 Jung et al. Jul 2013 B1
8491800 Dorsey Jul 2013 B1
8492009 Homola et al. Jul 2013 B1
8492011 Itoh et al. Jul 2013 B2
8496466 Treves et al. Jul 2013 B1
8507115 Arai et al. Aug 2013 B2
8517364 Crumley et al. Aug 2013 B1
8517657 Chen et al. Aug 2013 B2
8524052 Tan et al. Sep 2013 B1
8530065 Chernyshov et al. Sep 2013 B1
8546000 Umezawa Oct 2013 B2
8551253 Na'Im et al. Oct 2013 B2
8551627 Shimada et al. Oct 2013 B2
8556566 Suzuki et al. Oct 2013 B1
8559131 Masuda et al. Oct 2013 B2
8562748 Chen et al. Oct 2013 B1
8565050 Bertero et al. Oct 2013 B1
8570844 Yuan et al. Oct 2013 B1
8580410 Onoue Nov 2013 B2
8584687 Chen et al. Nov 2013 B1
8591709 Lim et al. Nov 2013 B1
8592061 Onoue et al. Nov 2013 B2
8596287 Chen et al. Dec 2013 B1
8597723 Jung et al. Dec 2013 B1
8603649 Onoue Dec 2013 B2
8603650 Sonobe et al. Dec 2013 B2
8605388 Yasumori et al. Dec 2013 B2
8605555 Chernyshov et al. Dec 2013 B1
8608147 Yap et al. Dec 2013 B1
8609263 Chernyshov et al. Dec 2013 B1
8619381 Moser et al. Dec 2013 B2
8623528 Umezawa et al. Jan 2014 B2
8623529 Suzuki Jan 2014 B2
8634155 Yasumori et al. Jan 2014 B2
8658003 Bourez Feb 2014 B1
8658292 Mallary et al. Feb 2014 B1
8665541 Saito Mar 2014 B2
8668953 Buechel-Rimmel Mar 2014 B1
8674327 Poon et al. Mar 2014 B1
8685214 Moh et al. Apr 2014 B1
8696404 Sun et al. Apr 2014 B2
8711499 Desai et al. Apr 2014 B1
8743666 Bertero et al. Jun 2014 B1
8758912 Srinivasan et al. Jun 2014 B2
8787124 Chernyshov et al. Jul 2014 B1
8787130 Yuan et al. Jul 2014 B1
8791391 Bourez Jul 2014 B2
8795765 Koike et al. Aug 2014 B2
8795790 Sonobe et al. Aug 2014 B2
8795857 Ayama et al. Aug 2014 B2
8800322 Chan et al. Aug 2014 B1
8811129 Yuan et al. Aug 2014 B1
8817410 Moser et al. Aug 2014 B1
20020060883 Suzuki May 2002 A1
20030022024 Wachenschwanz Jan 2003 A1
20040022387 Weikle Feb 2004 A1
20040132301 Harper et al. Jul 2004 A1
20040202793 Harper et al. Oct 2004 A1
20040202865 Homola et al. Oct 2004 A1
20040209123 Bajorek et al. Oct 2004 A1
20040209470 Bajorek Oct 2004 A1
20050036223 Wachenschwanz et al. Feb 2005 A1
20050142990 Homola Jun 2005 A1
20050150862 Harper et al. Jul 2005 A1
20050151282 Harper et al. Jul 2005 A1
20050151283 Bajorek et al. Jul 2005 A1
20050151300 Harper et al. Jul 2005 A1
20050155554 Saito Jul 2005 A1
20050167867 Bajorek et al. Aug 2005 A1
20050263401 Olsen et al. Dec 2005 A1
20060147758 Jung et al. Jul 2006 A1
20060181697 Treves et al. Aug 2006 A1
20060207890 Staud Sep 2006 A1
20070070549 Suzuki et al. Mar 2007 A1
20070245909 Homola Oct 2007 A1
20080075845 Sonobe et al. Mar 2008 A1
20080093760 Harper et al. Apr 2008 A1
20090117408 Umezawa et al. May 2009 A1
20090136784 Suzuki et al. May 2009 A1
20090169922 Ishiyama Jul 2009 A1
20090191331 Umezawa et al. Jul 2009 A1
20090202866 Kim et al. Aug 2009 A1
20090305080 Li Dec 2009 A1
20090311557 Onoue et al. Dec 2009 A1
20100021766 Inamura Jan 2010 A1
20100143752 Ishibashi et al. Jun 2010 A1
20100190035 Sonobe et al. Jul 2010 A1
20100196619 Ishiyama Aug 2010 A1
20100196740 Ayama et al. Aug 2010 A1
20100209601 Shimokawa et al. Aug 2010 A1
20100215992 Horikawa et al. Aug 2010 A1
20100232065 Suzuki et al. Sep 2010 A1
20100247965 Onoue Sep 2010 A1
20100261039 Itoh et al. Oct 2010 A1
20100279151 Sakamoto et al. Nov 2010 A1
20100300884 Homola et al. Dec 2010 A1
20100304186 Shimokawa Dec 2010 A1
20110043939 Nolan et al. Feb 2011 A1
20110097603 Onoue Apr 2011 A1
20110097604 Onoue Apr 2011 A1
20110171495 Tachibana et al. Jul 2011 A1
20110206947 Tachibana et al. Aug 2011 A1
20110212346 Onoue et al. Sep 2011 A1
20110223446 Onoue et al. Sep 2011 A1
20110244119 Umezawa et al. Oct 2011 A1
20110299194 Aniya et al. Dec 2011 A1
20110311841 Saito et al. Dec 2011 A1
20120069466 Okamoto et al. Mar 2012 A1
20120070692 Sato et al. Mar 2012 A1
20120077060 Ozawa Mar 2012 A1
20120127599 Shimokawa et al. May 2012 A1
20120127601 Suzuki et al. May 2012 A1
20120127609 Chang et al. May 2012 A1
20120129009 Sato et al. May 2012 A1
20120140359 Tachibana Jun 2012 A1
20120141833 Umezawa et al. Jun 2012 A1
20120141835 Sakamoto Jun 2012 A1
20120148875 Hamakubo et al. Jun 2012 A1
20120156523 Seki et al. Jun 2012 A1
20120164488 Shin et al. Jun 2012 A1
20120170152 Sonobe et al. Jul 2012 A1
20120171369 Koike et al. Jul 2012 A1
20120175243 Fukuura et al. Jul 2012 A1
20120189872 Umezawa et al. Jul 2012 A1
20120196049 Azuma et al. Aug 2012 A1
20120207919 Sakamoto et al. Aug 2012 A1
20120225217 Itoh et al. Sep 2012 A1
20120251842 Yuan et al. Oct 2012 A1
20120251846 Desai et al. Oct 2012 A1
20120276417 Shimokawa et al. Nov 2012 A1
20120308722 Suzuki et al. Dec 2012 A1
20130040167 Alagarsamy et al. Feb 2013 A1
20130071694 Srinivasan et al. Mar 2013 A1
20130165029 Sun et al. Jun 2013 A1
20130175252 Bourez Jul 2013 A1
20130216865 Yasumori et al. Aug 2013 A1
20130230647 Onoue et al. Sep 2013 A1
20130293225 Singleton et al. Nov 2013 A1
20130314815 Yuan et al. Nov 2013 A1
20140011054 Suzuki Jan 2014 A1
20140044992 Onoue Feb 2014 A1
20140050843 Yi et al. Feb 2014 A1
20140151360 Gregory et al. Jun 2014 A1
20140234666 Knigge et al. Aug 2014 A1
20150162041 Iwasaki Jun 2015 A1
Foreign Referenced Citations (1)
Number Date Country
5126674 Jan 2013 JP
Provisional Applications (1)
Number Date Country
61984615 Apr 2014 US