Broere, et al., "250-A Linewidths with PMMA Electron Resist", Appl. Phys. Lett., 33, 392-394, (Sep. 1, 1978). |
Chou, S.Y., "Patterned Magnetic Nanostructures and Quantized Magnetic Disks", Proceedings of the IEEE, 85, 652-671, (Apr. 1997). |
Chou, S.Y., "Quantized Magnetic Disks", J. Magn. Soc. Japan, 21, 1023-1032, (1997). |
Fischer, et al., "10 nm Electron Bean Lithography and sub-50 nm Overlay Using a Modified Scanning Electron Microscope", Appl. Phys. Lett., 62, 2989-2991, (Jun. 7, 1993). |
Hara, et al., "An Alignment Technique Using Diffracted Moire Signals", J. Vac. Sci. Technol. B, 7, 1977-1979, (Nov./Dec. 1989). |
Harmening, et al., "Molding of Threedimensional Microstructures by the Liga Process", Proceedings IEEE: Micro Electro Mechanical Systems, Travemunde, Germany, 202-207, (Feb. 4-7, 1992). |
Li, et al., "Molding of Plastic Components Using Micro-EDM Tools", 13th IEEE/CHMT International Electronics Manufacturing Technology Symposium, Baltimore, MD, 145-149, (Sep. 28-30, 1992). |
Nomura, et al., "Moire Alignment Technique for the Mix and Match Lithographic System", J. Vac. Sci. Technol. B, 6, 394-398, (Jan./Feb. 1988). |
Ilesanmi Adesida et al., "The 38th International Symposium on Electron, Ion and Photon Beams", Abstract Book, (1994). |
Stephen Y. Chou, et al., "Single-Domain Magnetic Pillar Array of 35 NM Diameter and 65 GBITS/IN2 Density for Ultra-High Density Magnetic Storage", The 6th Joint MMM-Intermag Conference, Abstracts, 322, (1994). |
Stephen Y. Chou, et al., "Study of Nanoscale magneti structures fabricated using electron-beam lithography and quantum magnetic disk", American Vacuum Society, vol. 12, No. 6, 3695-3698, (1994). |
Dimitris E. Ioannou, et al., "A Fine-Line-Spot-Position (FLSP) sensitive photodetector", IEEE Transactions on Electron Devices, vol. ED-34, No. 4, 778-781, (1987). |
Peter R. Krauss, et al., "Fabrication of Single-domain magnetic pillar array of 35 nm diameter and 65 Gbits/in2 density", American Vacuum Society, vol. 12, No. 6, 3639-3642, (1994). |
Eiichi Sano, "Two-Diemensional Ensemble Monte Carlo Calculation of Pulse Responses of Submicrometer GaAs Metal-Semiconductor-Metal Photodetectors", IEEE Transactions on Electron Devices, vol. 38, No. 9, 2075-2081, (1991). |